CN113595439B - Circular patch type bipedal linear ultrasonic motor and stator thereof - Google Patents
Circular patch type bipedal linear ultrasonic motor and stator thereof Download PDFInfo
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- CN113595439B CN113595439B CN202010368070.8A CN202010368070A CN113595439B CN 113595439 B CN113595439 B CN 113595439B CN 202010368070 A CN202010368070 A CN 202010368070A CN 113595439 B CN113595439 B CN 113595439B
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- 239000000919 ceramic Substances 0.000 claims abstract description 62
- 230000010287 polarization Effects 0.000 claims abstract description 15
- 230000002093 peripheral effect Effects 0.000 claims abstract description 8
- 230000000149 penetrating effect Effects 0.000 claims description 13
- 230000033001 locomotion Effects 0.000 claims description 8
- 239000007769 metal material Substances 0.000 claims description 5
- 239000002245 particle Substances 0.000 claims description 3
- 230000005284 excitation Effects 0.000 description 7
- 230000000694 effects Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- 230000003245 working effect Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
- H02N2/001—Driving devices, e.g. vibrators
- H02N2/002—Driving devices, e.g. vibrators using only longitudinal or radial modes
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/06—Drive circuits; Control arrangements or methods
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a circular patch type bipedal linear ultrasonic motor and a stator thereof, wherein the stator comprises a symmetrical rod and a piezoelectric ceramic piece; the symmetrical rod comprises a middle seat, wherein the middle seat is provided with a cylindrical seat, the cylindrical seat is provided with two reference surfaces, a central cylindrical hole is arranged at the axis of the cylindrical seat, and driving feet are arranged at the upper side line and the lower side line of the peripheral wall of the cylindrical seat; root parts are fixedly arranged on two sides of the cylindrical seat respectively, end parts rods are fixedly arranged at the tail ends of the root parts, and end part cylindrical holes are formed in the root parts; the two pairs of piezoelectric ceramic plates are respectively connected with the two end rods, the two piezoelectric ceramic plates of each pair are respectively attached to the two side walls of the end rods, which are respectively positioned at the two sides of the second reference surface, each pair of piezoelectric ceramic plates polarize along the thickness direction, and the polarization directions of the two piezoelectric ceramic plates of each pair of piezoelectric ceramic plates are opposite; the stator is axially symmetrically arranged relative to the first datum plane and the second datum plane. It has the following advantages: high output efficiency, stable working mode, large driving force, simple structure, good control performance and low cost.
Description
Technical Field
The invention relates to the technical field of ultrasonic motors, in particular to a circular double longitudinal vibration collinear patch type excitation bipedal linear ultrasonic motor and a stator thereof.
Background
The linear ultrasonic motor excites the micro vibration of the elastic body by using the inverse piezoelectric effect of the piezoelectric material, and transmits kinetic energy to the rotor through the friction between the stator and the rotor so as to output motion. The linear ultrasonic motor has the advantages of good control performance, stepping and servo operation, simple structure, low speed, large torque, quick response and the like, and has wide application prospect.
In the existing linear ultrasonic motor, a stator structure is provided with a patch structure and a sandwich structure according to the assembly mode of piezoelectric ceramics and an elastomer, wherein the patch structure stator has the characteristics of simplicity in processing and assembly and easiness in realization of microminiaturization. The existing patch-type structure stator, such as the publication number CN103746598A, creates a patch-type longitudinal vibration composite biped piezoelectric ultrasonic motor vibrator, and realizes biped linear actuation by utilizing longitudinal vibration composite of one horizontal beam and two vertical beams.
Disclosure of Invention
The invention provides a circular patch type bipedal linear ultrasonic motor and a stator thereof, which overcome the defects of the linear ultrasonic motor in the background technology.
One of the adopted technical schemes for solving the technical problems is as follows: the circular patch type bipedal linear ultrasonic motor comprises a stator and a clamping device connected with the stator; the stator comprises a symmetrical rod and two pairs of piezoelectric ceramic plates; the symmetrical rod comprises a middle seat and two end rods, wherein the middle seat is provided with a cylindrical seat, the cylindrical seat is provided with a first reference surface and a second reference surface, the first reference surface and the second reference surface are perpendicular to each other through the axis of the cylindrical seat, a central cylindrical hole penetrating through the axis is formed in the axis of the cylindrical seat, and driving feet are arranged at the upper side line and the lower side line of the peripheral wall of the cylindrical seat, which are positioned on the first reference surface; the two sides of the cylindrical seat are fixedly provided with root parts respectively, the two root parts are respectively positioned at the two sides of the first datum plane, the end parts of the root parts are fixedly provided with the end part rods, and the two root parts are provided with end part cylindrical holes which are parallel to the central cylindrical hole and are arranged in a penetrating way; the two pairs of piezoelectric ceramic plates are respectively connected with the two end rods, the two piezoelectric ceramic plates of each pair are respectively attached to the two side walls of the end rods, which are respectively positioned at the two sides of the second reference surface, each pair of piezoelectric ceramic plates polarize along the thickness direction, and the polarization directions of the two piezoelectric ceramic plates of each pair of piezoelectric ceramic plates are opposite; the stator is axially symmetrically arranged relative to the first datum plane and the second datum plane.
In one embodiment: the symmetrical bars and the driving feet of the stator are manufactured by adopting a whole piece of metal material.
In one embodiment: the first reference surface is arranged along the up-down direction, the second reference surface is arranged along the left-right direction, and the central cylindrical hole and the end cylindrical holes are all arranged in a front-back penetrating way; the two root parts are axially symmetrically arranged relative to the first datum plane, the two end part rods are axially symmetrically arranged relative to the first datum plane, and the root parts and the end part rods are axially symmetrically arranged relative to the second datum plane.
In one embodiment: the end cylindrical bore axis is located on a second datum plane.
In one embodiment: the cross section of the driving foot is a circular or rectangular shape with unchanged size.
In one embodiment: the ratio of the diameter of the central cylindrical hole to the diameter of the end cylindrical holes is 1 (1.5-2.5).
In one embodiment: the piezoelectric ceramic piece is attached to the greatest strain of the symmetrical rod.
In one embodiment: the two end rods are a first end rod and a second end rod respectively;
a pair of piezoelectric ceramic plates on the first end rod apply sinusoidal voltage, and the polarization direction of one side of the piezoelectric ceramic plates far away from the symmetrical rod is "+", and the polarization direction of one side close to the symmetrical rod is "-";
A pair of piezoelectric ceramic plates on the second end rod apply cosine voltage with the same-frequency phase difference of pi/2, and the polarization direction of each piezoelectric ceramic plate is the same as that of each piezoelectric ceramic plate of the first end rod;
The two longitudinal vibration modes excited by the stator are overlapped, so that the particles at the contact surface of the stator and the mover do elliptical motion, thereby pushing the mover to move.
The second technical scheme adopted for solving the technical problems is as follows: the circular patch type bipedal linear ultrasonic motor stator comprises a symmetrical rod and two pairs of piezoelectric ceramic plates; the symmetrical rod comprises a middle seat and two end rods, wherein the middle seat is provided with a cylindrical seat, the cylindrical seat is provided with a first reference surface and a second reference surface, the first reference surface and the second reference surface are perpendicular to each other through the axis of the cylindrical seat, a central cylindrical hole penetrating through the axis is formed in the axis of the cylindrical seat, and driving feet are arranged at the upper side line and the lower side line of the peripheral wall of the cylindrical seat, which are positioned on the first reference surface; the two sides of the cylindrical seat are fixedly provided with root parts respectively, the two root parts are respectively positioned at the two sides of the first datum plane, the end parts of the root parts are fixedly provided with the end part rods, and the two root parts are provided with end part cylindrical holes which are parallel to the central cylindrical hole and are arranged in a penetrating way; the two pairs of piezoelectric ceramic plates are respectively connected with the two end rods, the two piezoelectric ceramic plates of each pair are respectively attached to the two side walls of the end rods, which are respectively positioned at the two sides of the second reference surface, each pair of piezoelectric ceramic plates polarize along the thickness direction, and the polarization directions of the two piezoelectric ceramic plates of each pair of piezoelectric ceramic plates are opposite; the stator is axially symmetrically arranged relative to the first datum plane and the second datum plane.
Compared with the background technology, the technical proposal has the following advantages:
through the design of exciting the double-drive foot simultaneously after connecting two longitudinal vibration ultrasonic vibrators, vibration energy is fully utilized, and the strictly symmetrical structure of the symmetrical rod avoids working mode distortion caused by asymmetrical clamping. The middle seat is provided with a cylindrical seat, a central cylindrical hole penetrating through the cylindrical seat along the axis is arranged at the axis of the cylindrical seat, and the middle seat is matched with a symmetrical structure, so that the following technical effects can be achieved: 1. the vibration amplitude and the vibration speed of the driving foot part can be improved, and the modal frequency difference is further reduced by the end cylindrical hole structures at the two ends of the driving foot part, so that the ultrasonic motor has the advantages of high output efficiency, stable working mode, large driving force, simple structure, good control performance and low cost; 2. the linear ultrasonic motor is simple in assembly structure and small in longitudinal size, can be designed to be short, small, light and thin in size by adopting a patch mode, is suitable for microminiaturization development of the linear ultrasonic motor, and is particularly suitable for small-sized motors; the excitation frequency is lower, and the working condition can be better achieved; 3. the base is a cylindrical base, driving feet are arranged at the upper side line and the lower side line of the peripheral wall of the cylindrical base, the circular symmetrical structure is better, the work is more stable, the driving feet smoothly transition, and the damage to the driven rotor is smaller; the circular working effect is more gentle, and the damage to the rotor is slightly smaller.
Drawings
The invention is further described below with reference to the drawings and the detailed description.
Fig. 1 is a schematic structural view of a stator of the present embodiment.
Fig. 2 is a graph of a modal analysis of the stator of this embodiment at a frequency of 30.608 kHz.
Fig. 3 is a graph of a modal analysis of the stator of this embodiment at a frequency of 30.83 kHz.
Detailed Description
Referring to fig. 1, a circular double longitudinal vibration collinear patch-type excitation double-foot linear ultrasonic motor comprises a stator and a clamping device connected with the stator, wherein the clamping device can refer to the prior art.
The stator comprises a symmetrical rod made of metal material comprising a middle seat 1 and two end rods 2, and two pairs of piezoceramic plates 31 and 32.
The middle seat 1 is provided with a cylindrical seat, the cylindrical seat is provided with a first reference surface and a second reference surface, the first reference surface and the second reference surface are all perpendicular to each other through the axis of the cylindrical seat, wherein the first reference surface is arranged along the vertical direction, the second reference surface is arranged along the left and right direction, the left and right sides of the cylindrical seat are respectively fixedly provided with a root part, and the tail ends of the root parts are fixedly provided with the end part rods 2. The center of the cylindrical seat is provided with a central cylindrical hole 11 which is arranged in a front-back penetrating way, the two root parts are provided with end cylindrical holes 12 which are arranged in a front-back penetrating way, and the axis of each end cylindrical hole 12 is positioned on a second datum plane. The two root and end rods are axially symmetrically arranged relative to the first datum plane, and the root and end rods are axially symmetrically arranged relative to the second datum plane. The diameter of the central cylindrical hole 11 is half that of the central cylindrical hole 11, and the structure can further reduce the modal frequency difference. The outer peripheral wall of the cylindrical seat is provided with an upper side line and a lower side line which are positioned on a first reference plane, the upper side line and the lower side line are respectively provided with a driving foot 13, the driving feet 13 are of a long and narrow matrix structure, and the section of each driving foot 13 is rectangular or circular, so that the driving feet 11 are fully contacted with the guide rail plane of the clamping device, and the working stability of the linear ultrasonic motor is improved. The stator is axially symmetrically arranged relative to the first datum plane and the second datum plane.
Each pair of piezoelectric ceramic plates 31 and 32 comprises two piezoelectric ceramic plates, the two pairs of piezoelectric ceramic plates 31 and 32 are respectively connected with the two end rods 2, the two piezoelectric ceramic plates of each pair are respectively attached to the upper surface and the lower surface of the end rod 2, wherein each pair of piezoelectric ceramic plates 31 and 32 are polarized along the thickness direction, as shown by arrows in fig. 1, and the polarization directions of the two piezoelectric ceramic plates of each pair of piezoelectric ceramic plates 31 and 32 are opposite, such as the upper ceramic plate is positive and the lower ceramic plate is negative, and the lower ceramic plate is positive and negative. The attaching position of the pair of piezoelectric ceramic plates is the position with the largest strain of the symmetrical rod. Wherein, the piezoelectric ceramic plate can be directly adhered on the surface of the end rod 2 through glue.
In the specific embodiment, the symmetrical rods and the driving feet of the stator are made of a whole piece of metal material, so that energy loss is reduced, and the stator is simple in structure and easy to process.
In this embodiment, as shown in fig. 2 and 3, the mode analysis performed by ANSYS (ANSYS is a large-scale general finite element analysis software developed by ANSYS corporation in usa) can observe the up-down and left-right movement of the motor stator from fig. 2 and 3, and the stator can move left and right by changing the phase difference between two working modes of the stator to-pi/2. According to the frequency 30.608kHz of the modal analysis, the up-and-down movement distance of the stator driving foot is the largest, as shown in figure 2; the frequency was 30.83kHz and the stator driven foot moved the greatest distance left and right, as shown in figure 3. According to the frequencies of the two working modes shown in fig. 2 and 3, the working frequencies of the driving foot at the maximum positions of the up-down and left-right motions are close, so that the two longitudinal vibration states can be overlapped, and the driving foot can generate elliptical motions.
In this embodiment, as shown in fig. 1, the excitation mode of the circular dual longitudinal vibration collinear patch type circular patch type bipedal linear ultrasonic motor applies sinusoidal voltage to the left two piezoelectric ceramic plates 2 to excite the longitudinal vibration mode of the left end rod 2, and the polarization direction of the ceramic plates at the side far away from the symmetrical rod is "+", and the polarization direction at the side close to the symmetrical rod is "-"; the two piezoelectric ceramic plates 2 on the right side apply cosine voltage with the same-frequency phase difference of pi/2, so that the longitudinal vibration mode of the right end rod 2 is excited, and the polarization direction of each pair of piezoelectric ceramic plates is the same as that of each pair of piezoelectric ceramic plates on the left side. The two longitudinal vibration modes excited by the stator are overlapped, so that the particles at the contact surface of the stator and the mover do elliptical motion, and the mover is pushed to move. By adjusting the phase difference of the two-phase excitation signals to-90 deg., back driving can be achieved. The symmetrical rod adopts a structure of a cylindrical seat and a hollow central cylindrical hole, so that the amplitude and the vibration speed of the driving foot part can be improved, the end cylindrical hole structures at the two ends of the symmetrical rod further reduce the modal frequency difference, and the performance of the motor is greatly improved.
The circular double longitudinal vibration collinear patch-type excitation bipedal linear ultrasonic motor of the specific embodiment can have the following technical effects: 1. the patch type and the circular hollow structure are matched, 1, the patch type is adopted, on one hand, the assembly structure of the linear ultrasonic motor is simple, the longitudinal dimension is small, the linear ultrasonic motor can be designed to be short, small, light and thin, and the linear ultrasonic motor is suitable for microminiaturization development of the linear ultrasonic motor, and is particularly suitable for small motors; on the other hand, the excitation frequency is lower, and the working condition can be better achieved; 2. the base is a cylindrical base, and the upper side line and the lower side line of the peripheral wall of the cylindrical base are provided with driving feet, so that on one hand, the circular symmetrical structure is better, the work is more stable, the driving feet smoothly transition, and the damage to a driven rotor is smaller; on the other hand, the circular working effect is more gentle, and the damage to the rotor is slightly smaller; 2. the piezoelectric ceramic plate has a longitudinal vibration mode and a bending vibration mode for exciting the elastic body, and the linear ultrasonic motor utilizes the longitudinal vibration mode of the structure, so that the piezoelectric ceramic plate has higher thrust and efficiency. 3. Through the design of exciting the double-drive foot simultaneously after connecting two longitudinal vibration ultrasonic vibrators, vibration energy is fully utilized, and the strictly symmetrical structure of the symmetrical rod avoids working mode distortion caused by asymmetrical clamping.
The foregoing description is only illustrative of the preferred embodiments of the present invention, and therefore should not be taken as limiting the scope of the invention, for all changes and modifications that come within the meaning and range of equivalency of the claims and specification are therefore intended to be embraced therein.
Claims (7)
1. Circular paster formula biped linear ultrasonic motor, including stator and the clamping device who connects the stator, its characterized in that: the stator comprises a symmetrical rod and two pairs of piezoelectric ceramic plates; the symmetrical rod comprises a middle seat and two end rods, wherein the middle seat is provided with a cylindrical seat, the cylindrical seat is provided with a first reference surface and a second reference surface, the first reference surface and the second reference surface are perpendicular to each other through the axis of the cylindrical seat, a central cylindrical hole penetrating through the axis is formed in the axis of the cylindrical seat, and driving feet are arranged at the upper side line and the lower side line of the peripheral wall of the cylindrical seat, which are positioned on the first reference surface; the two sides of the cylindrical seat are fixedly provided with root parts respectively, the two root parts are respectively positioned at the two sides of the first datum plane, the end parts of the root parts are fixedly provided with the end part rods, and the two root parts are provided with end part cylindrical holes which are parallel to the central cylindrical hole and are arranged in a penetrating way; the two pairs of piezoelectric ceramic plates are respectively connected with the two end rods, the two piezoelectric ceramic plates of each pair are respectively attached to the two side walls of the end rods, which are respectively positioned at the two sides of the second reference surface, each pair of piezoelectric ceramic plates polarize along the thickness direction, and the polarization directions of the two piezoelectric ceramic plates of each pair of piezoelectric ceramic plates are opposite; the stator is axially symmetrically arranged relative to the first reference surface and the second reference surface; the symmetrical rod and the driving foot of the stator are manufactured by adopting a whole piece of metal material; the first reference surface is arranged along the up-down direction, the second reference surface is arranged along the left-right direction, and the central cylindrical hole and the end cylindrical holes are all arranged in a front-back penetrating way; the two root parts are axially symmetrically arranged relative to the first datum plane, the two end part rods are axially symmetrically arranged relative to the first datum plane, and the root parts and the end part rods are axially symmetrically arranged relative to the second datum plane.
2. The circular patch-type bipedal linear ultrasonic motor of claim 1, wherein: the end cylindrical bore axis is located on a second datum plane.
3. The circular patch-type bipedal linear ultrasonic motor of claim 1, wherein: the cross section of the driving foot is a circular or rectangular shape with unchanged size.
4. The circular patch-type bipedal linear ultrasonic motor of claim 1, wherein: the ratio of the diameter of the central cylindrical hole to the diameter of the end cylindrical holes is 1 (1.5-2.5).
5. The circular patch-type bipedal linear ultrasonic motor of claim 1, wherein: the piezoelectric ceramic piece is attached to the greatest strain of the symmetrical rod.
6. The circular patch-type bipedal linear ultrasonic motor of claim 1, wherein: the two end rods are a first end rod and a second end rod respectively;
a pair of piezoelectric ceramic plates on the first end rod apply sinusoidal voltage, and the polarization direction of one side of the piezoelectric ceramic plates far away from the symmetrical rod is "+", and the polarization direction of one side close to the symmetrical rod is "-";
A pair of piezoelectric ceramic plates on the second end rod apply cosine voltage with the same-frequency phase difference of pi/2, and the polarization direction of each piezoelectric ceramic plate is the same as that of each piezoelectric ceramic plate of the first end rod;
The two longitudinal vibration modes excited by the stator are overlapped, so that the particles at the contact surface of the stator and the mover do elliptical motion, thereby pushing the mover to move.
7. Circular paster formula biped linear ultrasonic motor stator, its characterized in that: comprises a symmetrical rod and two pairs of piezoelectric ceramic plates; the symmetrical rod comprises a middle seat and two end rods, wherein the middle seat is provided with a cylindrical seat, the cylindrical seat is provided with a first reference surface and a second reference surface, the first reference surface and the second reference surface are perpendicular to each other through the axis of the cylindrical seat, a central cylindrical hole penetrating through the axis is formed in the axis of the cylindrical seat, and driving feet are arranged at the upper side line and the lower side line of the peripheral wall of the cylindrical seat, which are positioned on the first reference surface; the two sides of the cylindrical seat are fixedly provided with root parts respectively, the two root parts are respectively positioned at the two sides of the first datum plane, the end parts of the root parts are fixedly provided with the end part rods, and the two root parts are provided with end part cylindrical holes which are parallel to the central cylindrical hole and are arranged in a penetrating way; the two pairs of piezoelectric ceramic plates are respectively connected with the two end rods, the two piezoelectric ceramic plates of each pair are respectively attached to the two side walls of the end rods, which are respectively positioned at the two sides of the second reference surface, each pair of piezoelectric ceramic plates polarize along the thickness direction, and the polarization directions of the two piezoelectric ceramic plates of each pair of piezoelectric ceramic plates are opposite; the stator is axially symmetrically arranged relative to the first reference surface and the second reference surface; the symmetrical bars and the driving feet of the stator are manufactured by adopting a whole piece of metal material.
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CN103746597A (en) * | 2014-01-27 | 2014-04-23 | 哈尔滨工业大学 | Paster T-shaped dual-feet linear piezoelectric supersonic motor vibrator |
CN211859981U (en) * | 2020-04-30 | 2020-11-03 | 华侨大学 | Circular patch type double-foot linear ultrasonic motor and stator thereof |
Family Cites Families (1)
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WO2007091376A1 (en) * | 2006-02-08 | 2007-08-16 | Murata Manufacturing Co., Ltd. | Piezoelectric oscillator |
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JP2006340424A (en) * | 2005-05-31 | 2006-12-14 | Ngk Insulators Ltd | Piezoelectric stator element and micro ultrasonic motor employing it |
CN101626206A (en) * | 2009-08-19 | 2010-01-13 | 哈尔滨工业大学 | Longitudinal and flexural composite transducer type double cylinder-shaped traveling wave ultrasonic motor vibrator |
CN101626203A (en) * | 2009-08-19 | 2010-01-13 | 哈尔滨工业大学 | Vibrator of beam type linear ultrasonic motor using bending vibration modes |
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