CN113523596A - Device and method for processing patterned photoinduced deformation cross-linked liquid crystal high polymer component by femtosecond laser - Google Patents
Device and method for processing patterned photoinduced deformation cross-linked liquid crystal high polymer component by femtosecond laser Download PDFInfo
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- CN113523596A CN113523596A CN202110772813.2A CN202110772813A CN113523596A CN 113523596 A CN113523596 A CN 113523596A CN 202110772813 A CN202110772813 A CN 202110772813A CN 113523596 A CN113523596 A CN 113523596A
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
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Abstract
The invention discloses a device and a method for processing a patterned photo-deformation cross-linked liquid crystal polymer component by femtosecond laser, comprising the following steps: the device comprises a femtosecond laser, a clamping device for horizontally fixing a cross-linked liquid crystal polymer film to be processed and a three-dimensional positioning mechanism for realizing laser patterning path scanning; the device also comprises a shutter element, a light beam adjusting element, a power adjusting element, a beam splitting element, a beam expanding element, a light path guiding adjusting system, a diffraction optical element and a focusing element which are sequentially arranged between the femtosecond laser and the cross-linked liquid crystal polymer film to be processed along the light path direction. The method has the characteristics of non-invasiveness, high processing flexibility and the like, and the prepared photoinduced deformation cross-linked liquid crystal polymer member has good uniformity, high precision and small heat affected zone, and has wide application prospect in the fields of micro-nano robot driving, micro-actuator, micro-channel valve control and the like.
Description
Technical Field
The invention relates to a device and a method for processing a patterned photo-deformation cross-linked liquid crystal high polymer component by femtosecond laser, belonging to the technical field of femtosecond laser application.
Background
In a completely new intelligent material age, the development of artificial actuation materials capable of generating mechanical deformation to external stimuli is a research hotspot in recent years. Based on the mechanical deformation of the material generated under external stimulation, the material can be applied to the fields of bionic devices, micro-nano robots, artificial muscles, micro-fluid control and the like. As an intelligent stimulus response material, the liquid crystal polymer has the characteristics of light polymer weight, high specific strength, fatigue resistance and the like, and the ordered structure of the liquid crystal also endows the material with the synergistic effect and anisotropy among molecules, thereby greatly improving the response speed and the strain of the material. Liquid crystal polymers can form a Liquid crystal polymer network by crosslinking with each other, and are called Crosslinked Liquid Crystal Polymers (CLCP). The crosslinked liquid crystal polymer combines the anisotropy of liquid crystal and the rubber elasticity of a polymer network, and has excellent molecular synergy. Under external stimuli (light, heat, electricity, magnetism, and the like), the crosslinked liquid crystal polymer can generate rapid and reversible shape change by changing the ordered arrangement of liquid crystal elements. Compared with external stimulation such as heat, electricity, magnetism and the like, the light stimulation can realize remote accurate control, is pollution-free and wide in source, and can regulate and control the response speed and direction of the cross-linked liquid crystal polymer through wavelength, illumination intensity, polarization direction and the like, so that the photoinduced deformation response becomes the key research point of the cross-linked liquid crystal polymer.
The response mechanism of the current photo-deformation cross-linked liquid crystal polymer can be generally divided into two types: photochemical or photothermal effects. The crosslinked liquid crystal polymer deformation induced by photochemical effect is generally realized by doping a photosensitive group into a liquid crystal polymer, azobenzene is the most common photosensitive group, and the cis-trans isomerization generated under the irradiation of ultraviolet light and blue light can cause the change of liquid crystal element arrangement, so as to trigger the crosslinked liquid crystal polymer to generate macroscopic deformation. The deformation of the crosslinked liquid crystal polymer induced by the photothermal effect is mainly based on the thermal phase change of the material generated by the photothermal effect. The crosslinked liquid crystal polymers with the two response mechanisms generally need to be formed in a liquid crystal box, and the size of the traditional liquid crystal box is generally more than centimeter, which brings difficulties to the batch and controllable preparation of the small-size crosslinked liquid crystal polymer components.
The existing photoinduced deformation liquid crystal polymer materials are mostly cross-linked liquid crystal polymers, and due to the existence of a chemical cross-linking network, the materials are insoluble and infusible, cannot be compatible with the traditional polymer processing method, and seriously restrict the practical application thereof. In addition, because the cross-linked liquid crystal polymer film is thin and large in brittleness, the traditional mechanical cutting technology is difficult to meet the requirement, and methods such as FIB cutting and electron beam mask processing have the problems of low efficiency, high cost, long period and the like. The femtosecond laser processing has the advantages of non-invasiveness, high processing flexibility, ultrahigh peak power, small heat affected zone and the like, and provides a good solution for the mass preparation of the patterned photoinduced deformation cross-linked liquid crystal polymer member.
Disclosure of Invention
The invention provides a device and a method for processing a patterned photoinduced deformation crosslinking liquid crystal high polymer component by femtosecond laser, which can quickly and directly write the patterned photoinduced deformation crosslinking liquid crystal high polymer component by using the femtosecond laser through the programmed control of a moving path of a two-dimensional electric displacement table, and solve the problems of low efficiency, high cost, single processing shape and the like in the aspect of preparing a micro-size crosslinking liquid crystal high polymer component in the prior processing technology.
An apparatus for femtosecond laser processing of a patterned photo-deformable cross-linked liquid crystal polymer member, comprising: the device comprises a femtosecond laser, a clamping device for horizontally fixing a cross-linked liquid crystal polymer film to be processed and a three-dimensional positioning mechanism for realizing laser patterning path scanning; the device also comprises a shutter element, a light beam adjusting element, a power adjusting element, a beam splitting element, a beam expanding element, a light path guiding adjusting system, a diffraction optical element and a focusing element which are sequentially arranged between the femtosecond laser and the cross-linked liquid crystal polymer film to be processed along the light path direction; after passing through the light path guiding and adjusting system, the expanded laser is subjected to climbing and falling, and finally is subjected to shaping and focusing operations through the diffractive optical element and the focusing element and then vertically irradiates to the top surface of the cross-linked liquid crystal polymer film to be processed.
In the invention, the emergent laser energy of the femtosecond laser realizes primary adjustment by adjusting the pulse repetition frequency of the laser, so that the emergent laser energy is higher than the ablation threshold of a sample to be processed.
Preferably, the shutter element is selected from a mechanical shutter or an electrical shutter. Further preferably, the on/off of the femtosecond laser beam is controlled by a shutter element (mechanical shutter).
Preferably, the beam adjusting element is a diaphragm, and the beam waist diameter of the adjusted laser is 2-3 mm. As a further preference, the diaphragm is used to adjust the laser beam waist diameter to 2.5 mm.
Preferably, the power conditioning element is selected from a neutral density attenuator plate or a combination of an optical half-wave plate and a polarizer plate. As a further preference, the femtosecond laser power is continuously adjusted by a power adjusting element (neutral density attenuation sheet) to be slightly higher than the ablation threshold of the thin film of the sample to be processed.
Preferably, the beam splitting element is transparent glass, a part of the split laser (a reflection part) enters the power measurement element, the rest laser (a transmission part) enters the beam expanding element for beam expanding, and finally the cut laser spot is formed through shaping and focusing. As a further preference, the power measuring element is selected from a combination of a photodetector and an oscilloscope.
Preferably, the beam expanding element consists of two convex lenses which are placed in a confocal mode, and focal lengths of the two convex lenses are 40-60 mm and 80-120 mm respectively. As a further preference, the focal lengths of the two convex lenses are 50mm and 100mm, respectively.
Preferably, the optical path guiding and adjusting system is composed of three total reflection mirrors arranged at 45 degrees, the two total reflection mirrors arranged at 45 degrees are used for realizing longitudinal climbing and horizontal propagation of the height of the optical path, and the other total reflection mirror arranged at 45 degrees is used for changing the direction of the optical path by 90 degrees and vertically enabling the optical path to enter the surface of the sample to be processed.
Preferably, the diffractive optical element is a flat-top light spot shaper, and the shaped light beam is a flat-top light spot; the focusing element is a focusing lens, and the focal length of the focusing lens is 20-40 mm. More preferably, the focal length of the focusing lens is 20mm, and the focal spot size after laser focusing is about 10 μm.
Optionally, the method further comprises one or more of the following elements in combination:
one or more optical path directing elements;
an illumination source for illuminating the sample;
industrial cameras and liquid crystal displays for assisting in adjusting sample position, optical focusing and monitoring the process in real time;
and the computer is used for controlling the parameters of the emergent laser of the femtosecond laser.
On one hand, the light path direction can be adjusted by the light path guiding element to meet the light path requirement; meanwhile, the laser incidence angle (pitching or left and right) can be adjusted, and the requirements of subsequent elements are met.
As a specific option, the optical path directing element may select a combination of one or more total reflection mirrors. For example, one total reflector is adopted to change the direction of the emergent laser by 90 degrees, and two parallel total reflectors are adopted to further adjust the pitching and the left and right of the light path, so that the light path vertically enters the central positions of the two beam expanding lenses.
As a specific option, the illumination light source is a gooseneck lamp, and is used for polishing the cross-linked liquid crystal polymer film, so that the CCD camera can clearly observe the processing process.
Preferably, the three-dimensional positioning mechanism comprises a one-dimensional manual displacement table for longitudinally (Z-axis) adjusting the distance from the sample to be processed to the focusing element, and a two-dimensional (XY) electric displacement table for realizing the patterning movement path of the sample to be processed, wherein the one-dimensional manual displacement table is mounted on the two-dimensional electric displacement table, and the two tables are combined to realize the light beam focusing adjustment and the patterning movement path scanning processing.
Preferably, the apparatus further comprises a displacement table controller for controlling the two-dimensional motorized displacement table.
Preferably, the one-dimensional manual displacement table is provided with a clamping device, the clamping device is composed of two aluminum sheets with holes in the centers, the cross-linked liquid crystal polymer film is clamped between the two aluminum sheets by double-faced adhesive tape or screws, and the part of the sample to be processed is exposed in the hole-opening area.
Preferably, the photoresponse mechanism of the crosslinked liquid crystal polymer film is based on a photochemical effect or a photothermal effect. The crosslinked liquid crystal polymer based on the photochemical effect takes azobenzene as a photosensitive group, can generate bending deformation under the irradiation of ultraviolet light, and can recover to a flat state under the irradiation of blue light; the cross-linked liquid crystal polymer film based on the photo-thermal effect generates bending deformation under the irradiation of blue light, and the light source is removed to recover to a flat state.
As a preferred embodiment, the present invention comprises: the femtosecond laser is sequentially provided with a first holophote, a mechanical shutter, a diaphragm, a neutral density attenuation sheet, two parallel holophotes (a second holophote and a third holophote) and transparent glass along an output light path of the femtosecond laser, a photoelectric detector is arranged along a reflection light path of the transparent glass and is connected with an oscilloscope through a signal line, a beam expanding lens system (namely the beam expanding element), a light path guiding and adjusting system, a flat-top light spot shaper, a focusing lens and a three-dimensional positioning mechanism fixed with a clamping device are arranged along a transmission light path of the transparent glass, and the clamping device is fixedly clamped with the processing object. The processing object, namely the cross-linked liquid crystal polymer film is fixed on the three-dimensional positioning mechanism through the clamping device, the electric displacement table controller controls the two-dimensional electric displacement table to move along an appointed path to complete laser ablation cutting, and the focusing and processing processes of laser on a sample are monitored by the CCD camera in real time. The CCD camera is connected with the liquid crystal display through a signal line; the two-dimensional electric displacement table is connected with a displacement table controller through a signal wire and is controlled by the controller; the femtosecond laser is connected with a computer through a signal wire and is controlled by the computer.
A method of performing femtosecond laser processing of a patterned photo-deformable cross-linked liquid crystal polymer member, comprising: the femtosecond laser irradiates a sample to be processed with a formed light spot vertically through a shutter element, light beam size adjustment, power adjustment, beam expansion, climbing, falling, shaping and focusing, the sample moves along a specified path relative to a laser focus, a cutting gap is formed in a corresponding path area under the laser irradiation, and a closed-loop track is formed in the cutting path to obtain the patterned photoinduced deformation cross-linked liquid crystal high polymer component.
Further, the processing process of the patterned photo-deformable cross-linked liquid crystal polymer member comprises the following steps:
s1: the programmed programming of the moving path of the two-dimensional electric displacement table is completed on the computer, and the program is written into the displacement table controller through the SD memory card;
s2: fixing the cross-linked liquid crystal polymer film on a three-dimensional positioning mechanism through a clamping device;
s3: the method comprises the following steps that a computer controls a femtosecond laser to emit pulse laser, a femtosecond processing light path is built, and emergent laser is vertically incident to the surface of a sample to be processed after passing through a mechanical shutter, a beam waist (beam size adjustment), attenuation (power adjustment), beam expansion, climbing, falling, shaping and focusing;
s4: turning on a gooseneck lamp to illuminate the cross-linked liquid crystal polymer film to be processed, and manually adjusting a one-dimensional manual displacement table under a CCD camera to enable the focus of laser to be positioned on the surface of the sample to be processed;
s5: and the displacement table controller is programmed to control the two-dimensional electric displacement table to move along a specified path, so that the scanning cutting processing of the patterned cross-linked liquid crystal polymer component is completed.
In the invention, before processing, a two-dimensional electric displacement table moving path can be determined according to a target processing shape of a cross-linked liquid crystal polymer film to be processed, path drawing can be carried out by using three-dimensional drawing software, then a three-dimensional graph is converted into a code which can be identified by a computer by using conversion software, and a computer readable program is obtained by programming.
Preferably, the center wavelength of the femtosecond laser is 800-1100 nm, the optical field is Gaussian distribution, the pulse width is 120-140 fs, the pulse repetition frequency is 0.8-2 kHz, the power is 15-30mW, and the sample feeding speed is 0.10-0.25 mm/s. Further preferably, during the processing, the femtosecond laser has a center wavelength of 1030nm, a pulse repetition frequency of 1kHz, a pulse width of 130fs, a laser processing power of 20mW, and a sample feed speed of 0.15 mm/s.
In the invention, the thickness of the cross-linked liquid crystal polymer film is about 5-30 μm. The minimum effective size of the photo-deformable cross-linked liquid crystal polymer member is about 25 μm, and the heat affected zone of the cut edge of the material is about 5 μm.
In the invention, the cross-linked liquid crystal polymer component based on the photochemical effect can generate bending deformation under the irradiation of ultraviolet light and recover to a flat state under the irradiation of blue light; the cross-linked liquid crystal polymer component based on the photo-thermal effect can deform under the irradiation of blue light, and the light source is removed to recover to a flat state.
The device and the method for processing the patterned photoinduced deformation crosslinking liquid crystal high molecular component by the femtosecond laser have the advantages that:
(1) the invention utilizes femtosecond laser to directly write and process the surface of the cross-linked liquid crystal polymer film, realizes the programmed control of the movement track of the sample through the two-dimensional electric displacement platform, and can rapidly prepare the photoinduced deformation cross-linked liquid crystal polymer components with various shapes in large batch.
(2) According to the invention, the flat-top light spot shaper is utilized to shape the Gaussian light spot of the femtosecond laser into the flat-top light spot, so that the heat affected zone of the cutting edge of the sample is effectively reduced, the processing precision of the material is improved, the minimum effective size of the prepared photoinduced deformation cross-linked liquid crystal high polymer component reaches 25 mu m, and the heat affected zone is as low as 5 mu m;
(3) compared with the prior art, the invention has the advantages of high operation flexibility, low cost, high efficiency, good processing uniformity, small heat affected zone and the like, and is suitable for the precision processing of most thin film materials.
Drawings
Fig. 1 is a schematic structural diagram of a device for patterning a photo-deformable cross-linked liquid crystal polymer member based on femtosecond laser processing according to the present invention.
Wherein: the device comprises a femtosecond laser 1, a holophote 2, a mechanical shutter 3, a diaphragm 4, a neutral density attenuation sheet 5, a holophote 6, a holophote 7, a transparent glass 8, a photoelectric detector 9, an oscilloscope 10, a convex lens 11, a convex lens 12, a holophote 13, a holophote 14, a holophote 15, a flat spot shaper 16, a focusing lens 17, a CCD camera 18, a cross-linked liquid crystal polymer film 19, a clamping device 20, a one-dimensional manual displacement table 21, a two-dimensional electric displacement table 22, a two-dimensional electric displacement table controller 23, a gooseneck lamp 24, a liquid crystal display 25 and a computer 26.
Fig. 2 is a schematic structural diagram of the clamping device for clamping a sample according to the present invention, wherein: 19 is a crosslinked liquid crystal polymer film, 20a is an upper part of a holding device, and 20b is a lower part of the holding device.
FIG. 3 is a schematic diagram of a cross-linked liquid crystal polymer member (a) based on photothermal effect and a cross-linked liquid crystal polymer member (b) based on photochemical effect.
FIG. 4 is a diagram of a cross-linked liquid crystal polymer member with different shapes based on photochemical effect, which is processed by the present invention, and comprises: triangular, quadrangular, pentagonal, hexagonal, round, wavy, pentagonal, comb tooth and the like.
FIG. 5 is a partial view of a cross-linked liquid crystal polymer member based on photochemical effect processed under (a) a flat-top-free spot shaper and (b) a flat-top spot shaper according to the present invention.
FIG. 6 is a graph showing the bending and recovery of the cross-linked liquid crystal polymer member based on the photochemical effect under the irradiation of UV light and blue light.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail with reference to the following detailed description and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
The invention provides a device and a method for processing a patterned photoinduced deformation cross-linked liquid crystal polymer component by femtosecond laser.A patterned component in any shape is directly written on a cross-linked liquid crystal polymer film by the femtosecond laser through the programmed control of a two-dimensional electric displacement table on the moving path of the cross-linked liquid crystal polymer film in a processing mode; on the performance of the device, the Gaussian beam is shaped by adopting the flat-top light spot shaper, so that the micron-sized patterned photoinduced deformation crosslinked liquid crystal high polymer component with high precision, good uniformity and small heat affected zone is obtained, and the prepared crosslinked liquid crystal high polymer component has good photoinduced deformation characteristics.
The invention provides a device and a method for processing a patterned photo-deformation cross-linked liquid crystal polymer component by femtosecond laser, wherein a processing light path structure is shown as figure 1, and the device comprises the following components: the device comprises a femtosecond laser 1, a holophote 2, a mechanical shutter 3, a diaphragm 4, a neutral density attenuation sheet 5, a holophote 6, a holophote 7, transparent glass 8, a photoelectric detector 9, an oscilloscope 10, a convex lens 11, a convex lens 12, a holophote 13, a holophote 14, a holophote 15, a flat-top light spot shaper 16, a focusing lens 17, a CCD camera 18, a cross-linked liquid crystal polymer 19, a clamping device 20, a one-dimensional manual displacement table 21, a two-dimensional electric displacement table 22, an electric displacement table controller 23, a gooseneck lamp 24, a liquid crystal display 25 and a computer 26.
The total reflection mirror 2, the total reflection mirror 6 and the total reflection mirror 7 mainly play a role in guiding a light path, the total reflection mirror 2 horizontally changes the propagation direction of emergent laser light by 90 degrees, the total reflection mirror 6 and the total reflection mirror 7 are placed in parallel, and the pitching and the left and right of the laser light path are mainly adjusted to enable the laser light path to vertically enter the central position of a beam expanding convex lens (a convex lens 11 and a convex lens 12), the total reflection mirror 2, the total reflection mirror 6 and the total reflection mirror 7 can be increased or decreased according to actual needs, and the set positions can be adjusted according to the actual needs.
The mechanical shutter 3 is mainly used for controlling the on-off of the laser beam, and the set position can be adjusted according to actual needs.
The diaphragm 4 is mainly used for adjusting the beam waist diameter of the laser, and the set position can be adjusted according to actual needs before the laser beam is expanded.
The neutral density attenuator 5 is mainly used for adjusting the laser power, and can be replaced by other power adjusting elements, such as an element formed by combining a half-wave plate and a polarizing plate.
The transparent glass 8 mainly plays a role in beam splitting, laser is incident on the transparent glass 8, about 4% of the laser is reflected and incident on the photoelectric detector 9, the photoelectric detector 9 is connected with the oscilloscope 10 through a signal line, the oscilloscope 10 measures the power of the reflected laser, and the laser penetrating through the transparent glass 8 is vertically incident on the central position of the beam expanding convex lens and used for femtosecond laser processing. The laser power can be detected in real time by arranging the photoelectric detector 9 and the oscilloscope 10, and meanwhile, feedback guidance can be carried out on the early laser power adjustment.
The convex lens 11 and the convex lens 12 are arranged in a confocal manner and mainly play a role in expanding light beams.
The total reflection mirror 13, the total reflection mirror 14 and the total reflection mirror 15 mainly play guiding roles of lifting and falling of a light path and the like, the total reflection mirror 13 changes the direction of a laser light path by 90 degrees and changes horizontal propagation into vertical climbing, the total reflection mirror 14 changes the direction of the laser light path which vertically climbs by 90 degrees into horizontal propagation, the total reflection mirror 13 and the total reflection mirror 14 jointly play a role of longitudinally lifting the height of the laser light path, and the total reflection mirror 15 changes the direction of the laser light path which is reflected by the total reflection mirror 14 by 90 degrees and vertically irradiates the surface of a sample to be processed;
the flat-top light spot shaper 16 mainly plays a role in shaping light beams, shapes the Gaussian light spots of the femtosecond laser into flat-top light spots, and vertically irradiates the surface of the cross-linked liquid crystal polymer film 19 to be processed after being focused by the focusing lens 17.
The cross-linked liquid crystal polymer film 19 is clamped and fixed by a clamping device 20, the clamping device 20 is of a structure with a hole in the middle, and the part to be processed is exposed to the hole area of the clamping device 20.
The clamping device 20 is fixed on a one-dimensional manual displacement table 21 through a screw or a double-sided adhesive tape, the one-dimensional manual displacement table 21 is fixed on a two-dimensional electric displacement table 22, and the two-dimensional electric displacement table 22 is connected with a displacement table controller 23 through a signal line and is controlled by the controller 23. The one-dimensional manual displacement table 21 is mainly used for adjusting the initial position of the cross-linked liquid crystal polymer film 19 to be processed (even if the laser focus is at the surface of the cross-linked liquid crystal polymer film 19). The two-dimensional electric displacement table 22 is mainly used for realizing the two-dimensional direction movement of the cross-linked liquid crystal polymer film 19 to be processed in the processing process.
Fig. 2 is a schematic structural diagram of the holding device 20 of the present invention for holding a sample, wherein the holding device comprises an upper holding device portion 20a and a lower holding device portion 20 b. The upper part 20a and the lower part 20b of the clamping device are both plate-shaped structures with holes in the middle, the size of the holes corresponds to the size of the area to be processed of the cross-linked liquid crystal polymer film 19 to be processed, and is slightly smaller than the outer edge size of the cross-linked liquid crystal polymer film 19 to be processed, so that the cross-linked liquid crystal polymer film 19 to be processed can be clamped and fixed. In the clamping process, firstly, the cross-linked liquid crystal polymer film 19 is flatly placed on the opening area of the lower part 20b of the clamping device, and then the upper part 20a of the clamping device is bonded with the lower part 20b of the clamping device through a double-sided adhesive tape or a screw, so that a sample (the cross-linked liquid crystal polymer film 19) is kept in a flat state between the two parts, the periphery of the sample is fixed, and meanwhile, the part of the sample to be processed is kept exposed to the opening area.
In the processing process, a femtosecond laser 1 generates femtosecond laser, the propagation direction of a beam of the femtosecond laser is changed by 90 degrees after the femtosecond laser passes through a holophote 2, the reflected laser firstly passes through a mechanical shutter 3, then the beam waist diameter is adjusted through a diaphragm 4 and then is incident on a neutral density attenuation sheet 5, the emergent laser is adjusted to proper power through the neutral density attenuation sheet 5, the light path pitch and the left and right of the emergent laser are adjusted through a holophote 6 and a holophote 7 and then is incident on a transparent glass 8, the emergent laser is split through the transparent glass 8 (one part is reflected and the other part is transmitted), the reflected laser is incident on a photoelectric detector 9 through the transparent glass 8, the photoelectric detector 9 is connected with an oscilloscope 10, the reflected laser power is measured by the oscilloscope 10, the transmitted laser through the transparent glass 8 is vertically incident on the center of a beam expanding system consisting of a convex lens 11 and a convex lens 12 along the central axis, after beam expansion, the femtosecond laser vertically climbs through the holophote 13, then horizontally propagating through a total reflector 14, finally vertically downwards irradiating onto a flat-top light spot shaper 16 through a total reflector 15, shaping through the flat-top light spot shaper 16, focusing femtosecond laser through a focusing lens 17 and then vertically irradiating onto the surface of a cross-linked liquid crystal polymer film 19, adjusting the distance from the cross-linked liquid crystal polymer film 19 on a one-dimensional manual displacement table 21 to the focusing lens 17 to enable the laser focus to be positioned at the surface of the cross-linked liquid crystal polymer film 19, and controlling a two-dimensional electric displacement table 22 by an electric displacement table controller 23 to drive the cross-linked liquid crystal polymer film 19 thereon to move along a specified path to complete cutting, thereby obtaining the patterned photo-induced deformation cross-linked liquid crystal polymer component.
The gooseneck lamp 24 is used for illuminating the cross-linked liquid crystal polymer film 19 so as to observe the focusing of the focusing lens 17 on the cross-linked liquid crystal polymer film 19 under the CCD camera 18 and monitor the whole processing process in real time.
The CCD camera 18 is connected with a liquid crystal display 25 through a signal line, and the liquid crystal display 25 images the processing process in real time.
The femtosecond laser 1 is connected with a computer 26 through a signal wire and is controlled by the computer 26.
Example (b): femtosecond laser processes a cross-shaped photoinduced deformation cross-linked liquid crystal high polymer component.
In the embodiment of the invention, the adopted femtosecond laser is an ytterbium-doped femtosecond fiber laser (Tangerine HP) of Amplified company, the center wavelength of the femtosecond laser is 1030nm, the pulse width is 130fs, the highest repetition frequency is 35MHz, the single-pulse energy is more than 200 muJ, and the light field distribution is Gaussian distribution; the cross-linked liquid crystal polymer film takes azobenzene as a photosensitive group, can be bent under the irradiation of ultraviolet light and can be restored to a flat state under the irradiation of blue light, the thickness of the film is about 30 mu m, and the size of the film is 2cm multiplied by 2 cm.
The specific processing steps of this example are as follows:
s1: the computer 26 completes the programming of the cross-shaped moving path and writes the program into the two-dimensional electric displacement table controller 23 through the SD memory card;
s2: fixing the cross-linked liquid crystal polymer film 19 on a three-dimensional positioning mechanism consisting of a one-dimensional manual displacement table 21 and a two-dimensional electric displacement table 22 through a clamping device 20;
s3: the computer 26 controls the femtosecond laser 1 to emit pulse laser, and each light path element is sequentially arranged in an optical platform according to the sequence of figure 1, the light path is debugged to enable the femtosecond laser to vertically enter the surface of the cross-linked liquid crystal polymer film 19 after passing through the total reflector 2, the mechanical shutter 3, the diaphragm 4, the neutral density attenuation sheet 5, the total reflector 6, the total reflector 7, the transparent glass 8, the convex lens 11, the convex lens 12, the total reflector 13, the total reflector 14, the total reflector 15, the flat-top light spot shaper 16 and the focusing lens 17, the pulse repetition frequency of the femtosecond laser is set to be 1kHz, the diaphragm 4 is adjusted to enable the waist diameter of the laser beam to be 2.5mm, and the neutral density attenuation sheet 5 is rotated to enable the average power of the laser to be 20 mW.
S4: and turning on a gooseneck lamp 24 to illuminate the cross-linked liquid crystal polymer film 19, adjusting the longitudinal feeding of the one-dimensional manual displacement table 21 under the CCD camera 18 to enable the focus of the femtosecond laser focused by the focusing lens 17 to be positioned on the surface of the cross-linked liquid crystal polymer film 19, and simultaneously monitoring the whole processing process in real time by means of the CCD camera 18 and the liquid crystal display screen 25.
S5: the feeding speed of the two-dimensional electric displacement table is set to be 0.15mm/S, the program of the step S1 is loaded by the two-dimensional electric displacement table controller 23, the two-dimensional electric displacement table is moved along a specified path, and the laser ablation cutting of the cross-shaped cross-linked liquid crystal polymer member is completed.
FIG. 3 is a schematic diagram of a cross-linked liquid crystal polymer member (a) based on photothermal effect and a cross-linked liquid crystal polymer member (b) based on photochemical effect. Wherein the width of the cross-shaped cross-linked liquid crystal polymer member is 120 μm, the height thereof is 1200 μm, and the diameter of the circular cross-linked liquid crystal polymer member is about 1000. mu.m.
FIG. 4 is a schematic diagram of a cross-linked liquid crystal polymer member with different shapes based on photochemical effect according to the present invention, which comprises: triangular, quadrangular, pentagonal, hexagonal, round, wavy, pentagonal, comb tooth and the like. In the processing process, the center wavelength of the femtosecond laser is 1030nm, the pulse width is 130fs, the pulse repetition frequency is 1kHz, the average laser power is 20mW, and the feeding speed of the electric displacement table is 0.15 mm/s.
FIG. 5 is a partial view of a cross-linked liquid crystal polymer member based on photochemical effect processed under (a) a flat-top-free spot shaper and (b) a flat-top spot shaper according to the present invention. When the flat-top light spot shaper is not arranged, the light field distribution of the femtosecond laser is Gaussian distribution, the edge heat affected zone of the processed cross-linked liquid crystal polymer member is 10-15 mu m, after the flat-top light spot shaper shapes the laser beam, the femtosecond laser is changed from the Gaussian light spot into a flat-top light spot, and the edge heat affected zone of the processed cross-linked liquid crystal polymer member is about 5 mu m.
FIG. 6 shows the bending and recovery behavior of the cross-linked LC polymer member based on photochemical effect under the action of UV light and blue light, wherein the white arrow direction represents the orientation direction of the LC unit.
The foregoing is a more detailed description of the present invention that is presented in conjunction with specific embodiments, and the practice of the invention is not to be considered limited to those descriptions. For those skilled in the art to which the invention pertains, several simple deductions or substitutions can be made without departing from the spirit of the invention, and all shall be considered as belonging to the protection scope of the invention.
Claims (10)
1. A femtosecond laser processing device for patterning photoinduced deformation cross-linking liquid crystal polymer members is characterized by comprising a femtosecond laser, a clamping device for horizontally fixing a cross-linking liquid crystal polymer film to be processed and a three-dimensional positioning mechanism for realizing laser patterning path scanning; the device also comprises a shutter element, a light beam adjusting element, a power adjusting element, a beam expanding element, a light path guiding adjusting system, a diffraction optical element and a focusing element which are sequentially arranged between the femtosecond laser and the cross-linked liquid crystal polymer film to be processed along the light path direction; after passing through the light path guiding and adjusting system, the expanded laser is subjected to climbing and falling, and finally is subjected to shaping and focusing operations through the diffractive optical element and the focusing element and then vertically irradiates to the top surface of the cross-linked liquid crystal polymer film to be processed.
2. The femtosecond laser processing device for patterning a photodeformation cross-linked liquid crystal polymer component according to claim 1, wherein the light path guiding adjustment system comprises three combinations of 45-degree-arranged total reflection mirrors, two 45-degree-arranged total reflection mirrors are used for realizing longitudinal climbing and horizontal direction propagation of the light path height, and another 45-degree-arranged total reflection mirror is used for changing the light path direction by 90 degrees and vertically irradiating the light path onto a horizontally-arranged cross-linked liquid crystal polymer film to be processed.
3. The apparatus for femtosecond laser processing patterning photo-deformable cross-linked liquid crystal polymer member as claimed in claim 1, further comprising a beam splitting element and a power measuring element disposed behind the power adjusting element; and a part of laser split by the beam splitting element is collected by the power measuring element, and the other part of laser enters the beam expanding element to be expanded.
4. The apparatus for femtosecond laser processing of a patterned photo-deformable cross-linked liquid crystal polymer member according to claim 3, wherein the beam splitting element is transparent glass; the power measuring element is selected from a combination of a photoelectric detector and an oscilloscope or a power meter.
5. The apparatus for femtosecond laser processing of patterned photo-deformable cross-linked liquid crystal polymer members according to claim 1, wherein the shutter element is selected from a mechanical shutter or an electric shutter for controlling the on/off of a laser beam; the beam adjusting element is a diaphragm, and the beam waist diameter of the adjusted laser is 2-3 mm; the power adjusting element is selected from a neutral density attenuation plate or a combination of an optical half-wave plate and a polaroid, and is adjusted to enable the femtosecond laser power to reach a value above a sample ablation threshold value; the beam expanding element consists of two convex lenses which are arranged in a confocal manner, and the focal lengths of the two convex lenses are 40-60 mm and 80-120 mm respectively; the diffraction optical element is a flat-top light spot shaper, and the flat-top light spot shaper is utilized to shape the Gaussian light spot of the emergent laser into a flat-top light spot.
6. The apparatus for femtosecond laser processing of a patterned photo-deformable cross-linked liquid crystal polymer member as claimed in claim 1, wherein the clamping means is composed of two aluminum sheets with a hole at the center, the cross-linked liquid crystal polymer film to be processed is clamped between the two aluminum sheets, the part to be processed is exposed to the hole area, and the clamping means is fixed on the three-dimensional positioning mechanism by a double-sided tape or a screw.
7. The apparatus for femtosecond laser processing of patterned photo-deformable cross-linked liquid crystal polymer elements according to claim 1, wherein the three-dimensional positioning mechanism comprises:
a two-dimensional electric displacement table for realizing the horizontal two-dimensional movement of the cross-linked liquid crystal polymer film to be processed in the processing process;
and a one-dimensional manual displacement table fixed on the two-dimensional electric displacement table and used for laser focusing.
8. The apparatus for femtosecond laser processing patterning of a photo-deformable cross-linked liquid crystal polymer member according to claim 1, further comprising one or more of the following elements in combination:
one or more optical path directing elements;
an illumination source for illuminating the sample;
the industrial camera and the liquid crystal display are used for assisting in adjusting the position of a sample, optically focusing and monitoring the processing process in real time;
and the computer is used for controlling the parameters of the emergent laser of the femtosecond laser.
9. A method for processing a patterned photo-deformable cross-linked liquid crystal polymer member by using the femtosecond laser as claimed in any one of claims 1 to 8, wherein the femtosecond laser passes through a shutter element, the beam size is adjusted, the power is adjusted, the beam is expanded, the beam climbs, falls, is shaped and is focused, a formed focused light spot is vertically incident on the surface of a cross-linked liquid crystal polymer film to be processed, a sample moves along a set path relative to the laser, and a cutting gap is formed in a corresponding path region under the irradiation of the laser, so that the patterned cross-linked liquid crystal polymer member is obtained.
10. The method of claim 9, wherein the thickness of the cross-linked liquid crystal polymer film is about 5-30 μm; the deformation mechanism of the cross-linked liquid crystal polymer film is based on a photochemical effect or a photothermal effect; the center wavelength of the femtosecond laser is 800-1100 nm, the light field is Gaussian distribution, the pulse width is 120-140 fs, the pulse repetition frequency is 0.8-2 kHz, the processing power is 15-30mW, and the moving speed of the electric displacement table is 0.10-0.25 mm/s.
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