CN109211524A - Parameter integrated synchronous testing device for high-power optical fiber laser - Google Patents
Parameter integrated synchronous testing device for high-power optical fiber laser Download PDFInfo
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- CN109211524A CN109211524A CN201811500576.9A CN201811500576A CN109211524A CN 109211524 A CN109211524 A CN 109211524A CN 201811500576 A CN201811500576 A CN 201811500576A CN 109211524 A CN109211524 A CN 109211524A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/30—Testing of optical devices, constituted by fibre optics or optical waveguides
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Abstract
The invention provides a parameter integrated synchronous testing device for a high-power optical fiber laser, which comprises a collimator, a high-power spectroscope, a power meter, a beam shrinking mirror, a first 45-degree spectroscope, an integrating sphere, a photoelectric detector, an oscilloscope, a spectrometer, an attenuation sheet, an optical filter, a second 45-degree spectroscope, a light beam quality measuring instrument, a third 45-degree spectroscope, a convergent lens, a far-field measuring CCD camera, a near-field measuring CCD camera, a router, a control computer and the like. The optical components and instruments are utilized to reasonably split the output light beam of the high-power optical fiber laser according to a set light path structure, main parameter synchronous testing software (registration number: 2018SR 425558) of the optical fiber laser is operated on a control computer, and instruments such as a power meter, a light beam quality measuring instrument, an integrating sphere, a spectrometer, a photoelectric detector, a CCD camera and the like are synchronously controlled to realize the synchronous measurement of the output power, the light beam quality, the output spectrum, the power time domain stability, the near-field intensity distribution and the far-field intensity distribution.
Description
Technical field
The present invention provides a kind of high power fiber laser Parameters Integrated Survey Method synchronous testing device, being capable of Integral synchronous survey
The multiple parameters for measuring high power fiber laser (mean power is between 0.5 ~ 30kW), belong to the field of test technology, can answer extensively
Test for high power fiber laser.
Background technique
Optical fiber laser have high conversion efficiency, good beam quality, heat management it is convenient, it is compact-sized, can flexible operation etc.
Advantage is widely used in industrial processes and national defence.Using, assessment optical fiber laser need accurately measurement optical fiber laser
Performance parameter.When the parameter of high power CW glistening light of waves fibre laser includes: output power, beam quality, output spectrum, power
Domain stability etc..
Currently, occurring a plurality of surveys in the market for the measuring device comparative maturity of above-mentioned optical fiber laser parameter
Test instrument.However, test above-mentioned parameters one by one using single instrument and equipment, not only heavy workload, cumbersome, Er Qiewu
Method obtains parameters of the optical fiber laser under synchronization, same state.In recent years, there is researcher to propose light splitting to survey
The scheme (CN201610305698.7) of amount: the output beam of high power fiber laser is divided using beam splitter first
Then the light splitting road Hou Ge light beam is incident in each measuring instrument respectively, realizes the synchro measure to multiple parameters by light.But
This spectroscopic measurements scheme still has the problem of two aspects.One side is that the various optical elements in optical path (especially divide
Optical element) accuracy that will affect measurement result, to reduce this influence must to each of optical link optical element,
The many indexes of each instrument make very careful requirement.And the close phase of power level of these requirements and measured laser device
It closes, cannot treat different things as the same.Currently, not yet seeing optical element specific in detail, the index system of measuring instrument can satisfy greatly
The requirement of power fibre lasers (mean power is between 0.5 ~ 30kW) parameter testing.On the other hand, in this spectroscopic measurements side
In case, although being incident in more measuring instruments simultaneously after tested light beam light splitting, these measuring instruments are still by artificial
The synchronism of operation, parameter measurement, data acquisition and data storage is limited to the operation synchronism of each tester, generally all
In second-time, higher synchronization accuracy cannot achieve.
In spectroscopic measurements scheme, if carrying out parameter survey simultaneously using all measuring instruments of control computer synchronous control
Amount, data acquisition, data storage, then can greatly improve the synchronism of measurement.However, these measuring instruments are all by difference
What manufacturer produced according to different standards, their control interface, data format, transport protocol, sampling duration are different, letter
Single control computer that is connected to these measuring instruments can not achieve Collaborative Control.Not yet seeing at present being capable of Collaborative Control
The control program of the measuring instruments such as power meter, spectrometer, oscillograph, beam quality measuring instrument, near-field/far-field measurement camera.
Summary of the invention
For defect existing for existing measuring technology, it is same that the present invention provides a kind of high power fiber laser Parameters Integrated Survey Method
Walk test device.
The present invention utilizes several optical components, according to certain criterion, to the output beam of high power fiber laser
It is divided, power meter, beam quality measuring instrument, integrating sphere, spectrometer, photoelectric detector, oscilloscope, far field survey is respectively adopted
CCD camera, near field measurement CCD camera are measured, output power, beam quality, output spectrum, the power of tested optical fiber laser are measured
The parameters such as time-domain stability, near-field intensity distribution, far-field intensity distribution.And above-mentioned optical element and measuring instrument are done in detail
Specific Index Constraints, to guarantee measurement accuracy.Further, the present invention, will using suitable route according to certain layout
Above-mentioned a variety of measuring instruments and control computer composition control network, and specific TT&C software is run on control computer,
The many kinds of parameters that high power fiber laser can be measured simultaneously guarantees the synchronism of parameter testing better than 1ms.
Specifically, the technical scheme is that
A kind of high power fiber laser Parameters Integrated Survey Method synchronous testing device, including collimator, high power spectroscope, power
Meter, beam-shrinked mirror, the one 45 ° of spectroscope, integrating sphere, photoelectric detector, oscilloscope, spectrometer, attenuator, optical filter, the 2nd 45 °
Spectroscope, beam quality measuring instrument, the 3rd 45 ° of spectroscope, convergent lens, far-field measurement CCD camera, near field measurement CCD camera；
The output end of tested optical fiber laser is connect with collimator, the light beam collimator collimation of tested optical fiber laser output
Afterwards, it is incident on high power spectroscope, the light beam reflected through high power spectroscope is incident on the target surface center of power meter, through Gao Gong
The light beam of rate spectroscope transmission is incident on beam-shrinked mirror, the one 45 ° of spectroscope is incident on after beam-shrinked mirror shrink beam, through the one 45 °
The light beam of spectroscope reflection is incident in integrating sphere.Photodetector is installed on integrating sphere, the photodetector with show
The signal wire of wave device connects, and collected optical signal is converted to electric signal and is output to oscillograph by photodetector.Spectrometer
It is connect by single-mode fiber jumper with integrating sphere.It is incident after attenuator, optical filter through the light beam of the one 45 ° of spectroscope transmission
Onto the 2nd 45 ° of spectroscope；The light beam reflected through the 2nd 45 ° of spectroscope is incident in beam quality measuring instrument；Through the 2nd 45 ° point
The light beam of light microscopic transmission is incident on the 3rd 45 ° of spectroscope, is gathered after convergent lens through the light beam of the 3rd 45 ° of spectroscope reflection
In far-field measurement CCD camera, the light beam transmitted through the 3rd 45 ° of spectroscope is incident near field measurement CCD camera coke.
Further, the invention also includes routers and control computer.The oscillograph and spectrometer passes through cable
It is connected with router, the power meter, beam quality measuring instrument, far-field measurement CCD camera, near field measurement CCD camera are logical
It crosses USB3.0 data line to connect with control computer respectively, the router is connect by cable with control computer.It will control
Computer, router and power meter processed, beam quality measuring instrument, far field/near field measurement CCD camera, photodetector, oscillography
Device, spectrometer composition control network.
High power fiber laser parameter synchronization test software is pre-loaded in the control computer, control calculates
Machine runs high power fiber laser parameter synchronization test software, synchronously control power meter, oscillograph, spectrometer, beam quality
Measuring instrument, far-field measurement CCD camera and near field measurement CCD camera realize that tested optical fiber laser output power, power time domain are steady
Qualitative, output spectrum, beam quality, far-field intensity distribution, the synchro measure of near-field intensity distribution, the synchronous acquisition of data and same
Step storage.
The tested optical fiber laser is continuous wave optical fiber laser, and output power need to be between 0.5 ~ 30kW,
The laser wavelength lambda of output is between 1060 ~ 1090nm, and the output end of tested optical fiber laser is QBH interface.
The aberration of the collimator be less than λ/20, input terminal be QBH interface, output end clear aperture > 2.5cm,
Tested optical fiber laser output is connect by QBH interface with collimator.
The high power spectroscope clear aperture > 2.5cm, reflectivity > 99.95%, spectrum in 900 ~ 1200nm wave band
Transmissivity, which rises and falls, is less than 50ppm less than 2%, absorptivity, and aberration is less than λ/20.
The power is calculated as the wide range power meter of the model OPHIR-30KW of OPHIR company production.
The shrink beam ratio of the beam-shrinked mirror is 5:1, and entrance pupil bore > 2.5cm, emergent pupil bore > 0.5cm, aberration is less than λ/20.
The one 45 ° of spectroscope is 99:1 to the splitting ratio of transmitted light and reflected light, and spectral reflectivity fluctuating is less than
2%, aberration is less than λ/20.
The integrating sphere is the IS200 type integrating sphere of Thorlabs Inc company production.The photodetector is
The SM05PD4A type InGaAs detector of Thorlabs Inc company production, is mounted on integral by screw thread adapter SM05L05
On ball ball wall.The oscillograph is the MDO4000 type oscillograph of Tektronix company production, the letter carried by oscillograph
Number line is connected with photodetector.The spectrometer is the near infrared light of the model AQ6370D of YOKOGAWA company production
Spectrometer, the SM05FC type single-mode fiber jumper adapter produced by Thorlabs Inc company, P1-980A-FC-1 type single mode
Optical patchcord is connect with integrating sphere.
The decaying multiplying power of the attenuator is 50, and for the heterogeneity that decays less than 2%, aberration is less than λ/20.
The optical filter 1050 ~ 1200nm wave band transmissivity>95%, 900 ~ 1030nm wave band transmissivity<
5%, aberration is less than λ/20.
The 2nd 45 ° of spectroscope and the 3rd 45 ° of spectroscope are 5:5 to the splitting ratio of transmitted light and reflected light, as
Difference is respectively less than λ/20.
The beam quality measuring instrument is the M2-200S type beam quality measurement of OPHIR-SPIRICON company production
Instrument.
The convergent lens focal length is between 15 ~ 30cm, clear aperture > 0.5cm, and aberration is less than λ/20.
Resolution ratio > 640 × 480 of the far-field measurement CCD camera, dynamic range > 8bit, far-field measurement CCD
Camera is placed on the focal plane of convergent lens.
Near field measurement CCD camera resolution ratio > 640 × 480, dynamic range > 8bit.
The router is the TL-WR886N type router of TP-LINK company production.The oscillograph, spectrometer
It is connected by cable (such as T568A twisted pair) with router.
The control computer is PC machine, it is more than CPU Intel Core i3, dominant frequency 1.8GHz or more, memory 1GB, more than, hard disk
Space 10GB or more.High power fiber laser parameter synchronization test software is pre-loaded in the control computer (such as
High power fiber laser parameter synchronization test software V1.0, the registration number of the software: 2018SR425558).The power
Meter, beam quality measuring instrument, far-field measurement CCD camera, near field measurement CCD camera pass through USB3.0 data line respectively and control is counted
The connection of calculation machine, the router are connect by cable (such as T568A twisted pair) with control computer.
Compared with prior art, the present invention can generate following technical effect:
1. the present invention is by the way of spectroscopic measurements, so that measuring high power fiber laser simultaneously on a light path layout
The multinomial ginseng such as output power, beam quality, output spectrum, power time-domain stability, near-field intensity distribution, far-field intensity distribution
Number obtains many index of the high power fiber laser under synchronization, same state, avoids and swash for large-power optical fiber
The different parameters of light device separately build different light paths, are not only unable to synchro measure, but also test process is cumbersome, heavy workload, survey
Test result is affected by human factors very big defect.
2. the present invention overcomes the instrument and equipments for using manual operation discrete in the prior art to test above-mentioned multinomial finger respectively
Mark, not only heavy workload, cumbersome, and not can guarantee synchronized sampling, it is difficult to obtain optical fiber laser in synchronization, same
The defect of multiple parameters under one state.The present invention according to certain layout, using suitable route by a variety of measuring instruments with
Computer composition control network is controlled, and " large-power optical fiber swashs parameter synchronization test software for operation on control computer
V1.0 " realizes the automation synchro measure of high power fiber laser multiple parameters, can measure simultaneously optical fiber laser and exist
Multiple parameters under synchronization, same state, measurement synchronism are very high (being better than 1ms).In addition, the present invention is calculated using control
More measuring instruments of machine Collaborative Control carry out parameter measurement, data acquisition and data storage automatically, easy to operate, greatly reduce
Test job amount, improves the normalization of test, alleviates influence of the human factor to test result.
3. the present invention is connect using the QBH interface of standard with high power fiber laser, every time when test, optical-fiber laser
Device output beam is substantially stationary, only need to finely tune optical path, greatly reduces the workload of adjustment optical path.
4. the scope of application of the present invention is very wide, for jointed fiber laser of the average output power between 0.5 ~ 30kW
Device and pulse optical fiber can measure.
High power fiber laser Parameters Integrated Survey Method synchronous testing device provided by the invention can be in synchronization, same
It is the output power of synchro measure high power fiber laser under state, beam quality, output spectrum, power time-domain stability, close
The parameters such as field intensity distribution, far-field intensity distribution, the performance for evaluating high power fiber laser comprehensively, accurate, scientific.This hair
It is bright have the characteristics that it is compact-sized, simple and reliable, easy to operate.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
In Fig. 1: 1- tested optical fiber laser, 2- collimator, 3- high power spectroscope, 4- power meter, 5- beam-shrinked mirror, 6-
One 45 ° of spectroscope, 7- integrating sphere, 8- photodetector, 9- oscillograph, 10- spectrometer, 11- attenuator, 12- optical filter,
The 2nd 45 ° of spectroscope of 13-, 14- beam quality measuring instrument, 15- the 3rd 45 ° of spectroscope, 16- convergent lens, 17- far-field measurement
CCD camera, 18- near field measurement CCD camera, 19- router, 20- control computer.
Fig. 2 is power measurement obtained in specific example provided by the invention.
Fig. 3 is power time-domain stability measurement result obtained in specific example provided by the invention.
Fig. 4 is output spectrum measurement result obtained in specific example provided by the invention.
Fig. 5 is beam quality measurement result obtained in specific example provided by the invention.
Fig. 6 is far-field intensity distribution measurement result obtained in specific example provided by the invention.
Fig. 7 is near-field intensity distribution measurement result obtained in specific example provided by the invention.
Specific embodiment
With reference to the accompanying drawing, embodiments of the present invention are described in further detail.
Referring to Fig.1, structural schematic diagram of the invention, including tested optical fiber laser 1, collimator 2, high power spectroscope
3, power meter 4, beam-shrinked mirror 5, the 1st ° of spectroscopes 6, integrating sphere 7, photodetector 8, oscillograph 9, spectrometers 10, attenuator
11,12, the 2nd 45 ° of spectroscopes 13 of optical filter, beam quality measuring instrument 14, the 3rd 45 ° of spectroscopes 15, convergent lens 16, far field
Measure CCD camera 17, near field measurement CCD camera 18, router 19, control computer 20.
Below using high power fiber laser Parameters Integrated Survey Method synchronous testing device provided by the invention to science and techniques of defence
Major parameter (the i.e. output power of optical fiber laser, light for the 3kW optical fiber laser (model: HPFL 3000C) that university builds
Beam quality, output spectrum, power time-domain stability, near-field intensity distribution, far-field intensity distribution) it is measured.
In the present embodiment:
Tested optical fiber laser 1 is continuous wave optical fiber laser, and rated output power 3kW, laser wavelength lambda 1080nm are defeated
Outlet is QBH interface.
The aberration of collimator 2 is λ/25, and input terminal is QBH interface, output end clear aperture 3.5cm, tested optical fiber laser
The output end of device 1 is connect by QBH interface with collimator 2.
The clear aperture of high power spectroscope 3 is 3.5cm, is 99.96%, spectrum in the reflectivity of 900 ~ 1200nm wave band
It is 1.5%, absorptivity 35ppm that transmissivity, which rises and falls, and aberration is λ/30.
Power meter 4 is the wide range power meter of the model OPHIR-30KW of OPHIR company production.
The shrink beam ratio of beam-shrinked mirror 5 is 5:1, entrance pupil bore 3.5cm, emergent pupil bore 1cm, and aberration is λ/25.
One 45 ° of spectroscope 6 is 99:1 to the splitting ratio of transmitted light and reflected light, and it is 1.5% that spectral reflectivity, which rises and falls, as
Difference is λ/25.
Integrating sphere 7 is the IS200 type integrating sphere of Thorlabs Inc company production.
Photodetector 8 is the SM05PD4A type InGaAs detector of Thorlabs Inc company production, is turned by screw thread
Connector SM05L05 is mounted on integrating sphere ball wall.
The oscillograph 9 is the MDO4000 type oscillograph of Tektronix company production, the letter carried by oscillograph
Number line is connected with photodetector.
Spectrometer 10 is the near infrared spectrometer of the model AQ6370D of YOKOGAWA company production, passes through Thorlabs
SM05FC type single-mode fiber jumper adapter, P1-980A-FC-1 type single-mode fiber jumper and the integrating sphere of Inc company production connect
It connects.
The decaying multiplying power of attenuator 11 is 50, and decaying heterogeneity is 1.5%, and aberration is λ/25.
Optical filter 12 is 98% in the transmissivity of 1050 ~ 1200nm wave band, is 2% in the transmissivity of 900 ~ 1030nm wave band,
Aberration is λ/25.
2nd 45 ° of spectroscope 13 is 5:5 to the splitting ratio of transmitted light and reflected light, and aberration is λ/25.
Beam quality measuring instrument 14 is the M2-200S type beam quality measuring instrument of OPHIR-SPIRICON company production.
3rd 45 ° of spectroscope 15 is 5:5 to the splitting ratio of transmitted light and reflected light, and aberration is λ/25.
The focal length of convergent lens 16 is 25cm, and clear aperture 1.5cm, aberration is λ/25.
The resolution ratio of far-field measurement CCD camera 17 is 800 × 600, and dynamic range 16bit is placed in the coke of convergent lens
In plane.
The resolution ratio of near field measurement CCD camera 18 is 800 × 600, dynamic range 16bit.
Router 19 is the TL-WR886N type router of TP-LINK company production.Oscillograph, spectrometer pass through cable
(T568A twisted pair) is connected with router.
Controlling computer 20 is association's ThinkPad T430 type PC machine, and CPU is Intel Core i5, dominant frequency 2.6GHz, memory
4GB, hard drive space 500GB.
Power meter 4, beam quality measuring instrument 14, far-field measurement CCD camera 17, near field measurement CCD camera 18 pass through respectively
USB3.0 data line is connect with control computer 20, and router 19 is connected by cable (T568A twisted pair) and control computer 20
It connects.
The output end of tested optical fiber laser 1 is connect with collimator 2.It is tested after tested optical fiber laser 1 is run
The light beam that 1 Output of laser wavelength of optical fiber laser is λ is incident on high power spectroscope 3 after the collimation of collimator 2.Pass through
The angle of high power spectroscope 3 is adjusted, so that the light beam reflected through high power spectroscope 3 is incident on the target surface center of power meter 4,
Power meter measures the output power of tested optical fiber laser.The light beam transmitted through high power spectroscope 3 is incident on beam-shrinked mirror 5,
Light beam is incident on the one 45 ° of spectroscope 6 after 5 shrink beam of beam-shrinked mirror.It is divided by the optical axis and the one 45 ° that adjust beam-shrinked mirror
The angle of mirror is equipped with photoelectricity spy so that the light beam reflected through the one 45 ° of spectroscope 6 is incident in integrating sphere 7 on integrating sphere 7
Device 8 is surveyed, the photodetector 8 is connect with the signal wire of oscillograph 9, and photodetector 8 converts collected optical signal
For electric signal and it is output to oscillograph 9.It is realized by photoelectric detector, oscilloscope to tested optical fiber laser power time-domain stability
The measurement of property.The spectrometer 10 is connect by single-mode fiber jumper with integrating sphere 7.It is realized by spectrometer to tested optical fiber
The measurement of laser output light spectrum.And it is incident after attenuator 11, optical filter 12 through the light beam of the one 45 ° of spectroscope 6 transmission
Onto the 2nd 45 ° of spectroscope 13.By adjusting the angle of the 2nd 45 ° of spectroscope 13, so that reflected through the 2nd 45 ° of spectroscope 13
Light beam is incident in beam quality measuring instrument 14, and beam quality measuring instrument 14 realizes the survey to tested optical fiber laser beam quality
Amount.The light beam transmitted through the 2nd 45 ° of spectroscope 13 is incident on the 3rd 45 ° of spectroscope 15.By adjusting the 3rd 45 ° of spectroscope 15
Angle and convergent lens 16 optical axis so that through the 3rd 45 ° of spectroscope 15 reflection light beam focused after convergent lens 16
In far-field measurement CCD camera 17, realized by far-field measurement CCD camera to tested optical fiber Laser Output Beam far field intensity
The measurement of distribution.The light beam transmitted through the 3rd 45 ° of spectroscope 15 is incident near field measurement CCD camera 18, passes through near field measurement
CCD camera realizes the measurement to tested optical fiber Laser Output Beam near-field intensity distribution.
Control computer 20 on run " high power fiber laser parameter synchronization test software V1.0 " (registration number:
2018SR425558), synchronously control power meter 4, oscillograph 9, spectrometer 10, beam quality measuring instrument 14, far-field measurement CCD phase
Machine 17 and near field measurement CCD camera 18 realize tested optical fiber laser output power, power time-domain stability, output spectrum, light
The synchro measure of the parameters such as beam quality, far-field intensity distribution, near-field intensity distribution, measurement result is respectively such as Fig. 2, Fig. 3, Fig. 4, figure
5, shown in Fig. 6, Fig. 7.Wherein: Fig. 2 is power measurement obtained in specific example provided by the invention, tested optical fiber laser
After device Operation at full power, measuring its output power is 3.081kW, hereafter in 10 hours operational process, tested optical fiber laser
The output power of device remains within 3.081kW.Fig. 3 is power time-domain stability obtained in specific example provided by the invention
Property measurement result, when tested optical fiber laser output power be 1410W when, measure its power swing be 1.5%, work as tested optical fiber
When laser output power is 2351W, measuring its power swing is 2.1%, when tested optical fiber laser output power is 3081W
When, measuring its power swing is 2.4%.Fig. 4 is output spectrum measurement result obtained in specific example provided by the invention, when
When the output power of tested optical fiber laser is respectively 1410W, 1868W, 2351W, 2615W, 2820W, 3081W, output is measured
The central wavelength of spectrum is 1080nm, and spectrum 3dB width is 4nm, and SRS inhibits ratio to be all larger than 24dB.Fig. 5 is the present invention
Beam quality measurement result obtained in the specific example of offer is measured when tested optical fiber laser output power is 3081W
The beam quality M of X-direction2The factor is 1.639, the beam quality M of Y-direction2The factor is 1.627.Fig. 6 is tool provided by the invention
In body example, the far-field intensity distribution that measures when tested optical fiber laser output power is 3081W.Fig. 7 is offer of the present invention
Specific example in, when tested optical fiber laser output power is 3081W, the near-field intensity distribution that measures.
The foregoing is merely a preferred embodiment of the present invention, are not intended to restrict the invention, for this field
For technical staff, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any
Modification, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of high power fiber laser Parameters Integrated Survey Method synchronous testing device, it is characterised in that: including collimator, high power
Spectroscope, power meter, beam-shrinked mirror, the one 45 ° of spectroscope, integrating sphere, photoelectric detector, oscilloscope, spectrometer, attenuator, filter
Mating plate, the 2nd 45 ° of spectroscope, beam quality measuring instrument, the 3rd 45 ° of spectroscope, convergent lens, far-field measurement CCD camera, near field
Measure CCD camera；
The output end of tested optical fiber laser is connect with collimator, and tested optical fiber laser output wavelength is that the light beam of λ is collimated
After device collimation, it is incident on high power spectroscope, the light beam reflected through high power spectroscope is incident on the target surface center of power meter,
The light beam transmitted through high power spectroscope is incident on beam-shrinked mirror, and the one 45 ° of spectroscope is incident on after beam-shrinked mirror shrink beam through
The light beam of one 45 ° of spectroscopes reflection is incident in integrating sphere, and photodetector, the photodetector are equipped on integrating sphere
It is connect with the signal wire of oscillograph, collected optical signal is converted to electric signal and is output to oscillograph by photodetector, light
Spectrometer is connect by single-mode fiber jumper with integrating sphere；Through the light beam of the one 45 ° of spectroscope transmission after attenuator, optical filter
It is incident on the 2nd 45 ° of spectroscope, the light beam reflected through the 2nd 45 ° of spectroscope is incident in beam quality measuring instrument；Through second
The light beam of 45 ° of spectroscopes transmission is incident on the 3rd 45 ° of spectroscope, and the light beam reflected through the 3rd 45 ° of spectroscope is saturating through overconvergence
It is focused on after mirror in far-field measurement CCD camera, the light beam transmitted through the 3rd 45 ° of spectroscope is incident near field measurement CCD camera.
2. high power fiber laser Parameters Integrated Survey Method synchronous testing device according to claim 1, it is characterised in that: also
Including router and control computer；The oscillograph is connected by cable with router with spectrometer, the power
Meter, beam quality measuring instrument, far-field measurement CCD camera, near field measurement CCD camera are counted with control respectively by USB3.0 data line
The connection of calculation machine, the router are connect by cable with control computer；Computer, router and power meter, light will be controlled
Beam quality measuring instrument, far field/near field measurement CCD camera, photoelectric detector, oscilloscope, spectrometer composition control network；
Optical fiber laser parameter synchronization test software is pre-loaded in the control computer, control computer runs optical fiber
Laser parameter synchronism detection software, synchronously control power meter, oscillograph, spectrometer, beam quality measuring instrument, far-field measurement
CCD camera and near field measurement CCD camera, realize tested optical fiber laser output power, power time-domain stability, output spectrum,
Beam quality, far-field intensity distribution, near-field intensity distribution synchro measure.
3. high power fiber laser Parameters Integrated Survey Method synchronous testing device according to claim 1 or 2, feature exist
In: the tested optical fiber laser is continuous wave optical fiber laser, and output power need to be between 0.5 ~ 30kW, output
Laser wavelength lambda is between 1060 ~ 1090nm, and the output end of tested optical fiber laser is QBH interface；
The aberration of the collimator is less than λ/20, and input terminal is QBH interface, and output end clear aperture > 2.5cm is tested
Optical fiber laser output end is connect by QBH interface with collimator.
4. high power fiber laser Parameters Integrated Survey Method synchronous testing device according to claim 3, it is characterised in that: institute
The high power spectroscope clear aperture > 2.5cm stated rises and falls in reflectivity > 99.95% of 900 ~ 1200nm wave band, spectral-transmission favtor
It is less than 50ppm less than 2%, absorptivity, aberration is less than λ/20.
5. high power fiber laser Parameters Integrated Survey Method synchronous testing device according to claim 3, it is characterised in that: institute
The power stated is calculated as the wide range power meter of the model OPHIR-30KW of OPHIR company production.
6. high power fiber laser Parameters Integrated Survey Method synchronous testing device according to claim 3, it is characterised in that: institute
The shrink beam ratio for the beam-shrinked mirror stated is 5:1, and entrance pupil bore > 2.5cm, emergent pupil bore > 0.5cm, aberration is less than λ/20.
7. high power fiber laser Parameters Integrated Survey Method synchronous testing device according to claim 3, it is characterised in that: institute
The one 45 ° of spectroscope stated is 99:1 to the splitting ratio of transmitted light and reflected light, and spectral reflectivity rises and falls less than 2%, and aberration is less than
λ/20；
The 2nd 45 ° of spectroscope and the 3rd 45 ° of spectroscope are 5:5 to the splitting ratio of transmitted light and reflected light, and aberration is equal
Less than λ/20.
8. high power fiber laser Parameters Integrated Survey Method synchronous testing device according to claim 3, it is characterised in that: institute
The integrating sphere stated is the IS200 type integrating sphere of Thorlabs Inc company production；
The photodetector is the SM05PD4A type InGaAs detector of Thorlabs Inc company production, is turned by screw thread
Connector SM05L05 is mounted on integrating sphere ball wall；
The oscillograph be Tektronix company production MDO4000 type oscillograph, by oscillograph carry signal wire with
Photodetector is connected；
The spectrometer is the near infrared spectrometer of the model AQ6370D of YOKOGAWA company production, passes through Thorlabs
SM05FC type single-mode fiber jumper adapter, P1-980A-FC-1 type single-mode fiber jumper and the integrating sphere of Inc company production connect
It connects.
9. high power fiber laser Parameters Integrated Survey Method synchronous testing device according to claim 1, it is characterised in that: institute
The decaying multiplying power for the attenuator stated is 50, and for the heterogeneity that decays less than 2%, aberration is less than λ/20；
The optical filter 1050 ~ 1200nm wave band transmissivity>95%, in transmissivity<5% of 900 ~ 1030nm wave band, as
Difference is less than λ/20；
The beam quality measuring instrument is the M2-200S type beam quality measuring instrument of OPHIR-SPIRICON company production；
The convergent lens focal length is between 15 ~ 30cm, clear aperture > 0.5cm, and aberration is less than λ/20；
Resolution ratio > 640 × 480 of the far-field measurement CCD camera, dynamic range > 8bit, far-field measurement CCD camera
It is placed on the focal plane of convergent lens；
Near field measurement CCD camera resolution ratio > 640 × 480, dynamic range > 8bit.
10. high power fiber laser Parameters Integrated Survey Method synchronous testing device according to claim 2, it is characterised in that:
The router is the TL-WR886N type router of TP-LINK company production；
The control computer is PC machine, it is more than CPU Intel Core i3, dominant frequency 1.8GHz or more, memory 1GB or more, and hard drive space
10GB or more；
High power fiber laser parameter synchronization test software, the registration of the software are pre-loaded in the control computer
Number: 2018SR425558.
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