CN113491016B - 用于光学检测的光学传感器和检测器 - Google Patents

用于光学检测的光学传感器和检测器

Info

Publication number
CN113491016B
CN113491016B CN202080017095.1A CN202080017095A CN113491016B CN 113491016 B CN113491016 B CN 113491016B CN 202080017095 A CN202080017095 A CN 202080017095A CN 113491016 B CN113491016 B CN 113491016B
Authority
CN
China
Prior art keywords
layer
electrode layer
electrode
optical sensor
photoconductive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202080017095.1A
Other languages
English (en)
Chinese (zh)
Other versions
CN113491016A (zh
Inventor
W·赫尔梅斯
S·瓦鲁施
S·穆勒
R·赫
H·贝克特尔
T·阿尔腾贝克
F·迪特曼
B·福伊尔施泰因
T·胡普福尔
A·汉德瑞克
R·古斯特
P·P·卡莱塔
D·克尔布莱因
R·森德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TrinamiX GmbH
Original Assignee
TrinamiX GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TrinamiX GmbH filed Critical TrinamiX GmbH
Publication of CN113491016A publication Critical patent/CN113491016A/zh
Application granted granted Critical
Publication of CN113491016B publication Critical patent/CN113491016B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/93Interconnections
    • H10F77/933Interconnections for devices having potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/10Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/10Semiconductor bodies
    • H10F77/12Active materials
    • H10F77/127Active materials comprising only Group IV-VI or only Group II-IV-VI chalcogenide materials, e.g. PbSnTe
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/206Electrodes for devices having potential barriers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/50Encapsulations or containers

Landscapes

  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
CN202080017095.1A 2019-02-27 2020-02-26 用于光学检测的光学传感器和检测器 Active CN113491016B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP19159710.3 2019-02-27
EP19159710 2019-02-27
PCT/EP2020/054995 WO2020173985A1 (en) 2019-02-27 2020-02-26 Optical sensor and detector for an optical detection

Publications (2)

Publication Number Publication Date
CN113491016A CN113491016A (zh) 2021-10-08
CN113491016B true CN113491016B (zh) 2025-10-17

Family

ID=65628668

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080017095.1A Active CN113491016B (zh) 2019-02-27 2020-02-26 用于光学检测的光学传感器和检测器

Country Status (6)

Country Link
US (1) US11908956B2 (https=)
EP (1) EP3931880A1 (https=)
JP (1) JP7528109B2 (https=)
KR (1) KR102714386B1 (https=)
CN (1) CN113491016B (https=)
WO (1) WO2020173985A1 (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109863599B (zh) 2016-11-30 2024-06-18 纽约州州立大学研究基金会 混合有源矩阵平板检测器系统和方法
CN112436062B (zh) * 2020-12-01 2022-12-02 上海大学 用于碲锌镉辐射探测器的复合电极及其制备方法
CN116417535B (zh) * 2023-04-19 2024-11-15 云南师范大学 一种三端并联叠层双面光伏电池及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54154292A (en) * 1978-05-25 1979-12-05 Matsushita Electric Ind Co Ltd Photo detecting semiconductor device
JP2008109110A (ja) * 2006-09-29 2008-05-08 Semiconductor Energy Lab Co Ltd 半導体装置
WO2018019921A1 (en) * 2016-07-29 2018-02-01 Trinamix Gmbh Optical sensor and detector for optical detection

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4037311A (en) * 1976-07-14 1977-07-26 U.S. Philips Corporation Methods of manufacturing infra-red detector elements
JPS56133884A (en) 1980-03-24 1981-10-20 Hitachi Ltd Manufacture of photoelectric transducer
JPS6035830B2 (ja) * 1981-01-26 1985-08-16 松下電子工業株式会社 固体撮像装置
JPS60241260A (ja) * 1984-05-16 1985-11-30 Toshiba Corp 固体撮像装置
JPH0394468A (ja) 1989-09-07 1991-04-19 Toshiba Corp 積層型固体撮像装置及びその製造方法
JPH03241260A (ja) 1990-02-16 1991-10-28 Matsushita Refrig Co Ltd 多室型空気調和機
JPH07169931A (ja) * 1993-12-16 1995-07-04 Hitachi Ltd 半導体装置及びその製造方法
JP2000101105A (ja) 1998-09-18 2000-04-07 Mitsubishi Cable Ind Ltd 光導電素子
JP2007165865A (ja) 2005-11-18 2007-06-28 Semiconductor Energy Lab Co Ltd 光電変換装置
KR101389808B1 (ko) 2005-11-18 2014-04-29 가부시키가이샤 한도오따이 에네루기 켄큐쇼 광전변환장치
US7791012B2 (en) 2006-09-29 2010-09-07 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device comprising photoelectric conversion element and high-potential and low-potential electrodes
JP2009010075A (ja) * 2007-06-27 2009-01-15 Fujifilm Corp 放射線画像検出器
EP3029485B1 (en) 2011-02-15 2019-12-11 Basf Se Detector for optically detecting at least one object
JP6046377B2 (ja) 2011-08-09 2016-12-14 ローム株式会社 光検出素子、光検出装置およびオートライト装置
US9389315B2 (en) 2012-12-19 2016-07-12 Basf Se Detector comprising a transversal optical sensor for detecting a transversal position of a light beam from an object and a longitudinal optical sensor sensing a beam cross-section of the light beam in a sensor region
JP2014241260A (ja) 2013-06-12 2014-12-25 日産自動車株式会社 燃料電池システム
FI20135967A7 (fi) 2013-09-27 2015-03-28 Lumichip Oy Asennustason monitoiminen kapselointikerros ja menetelmä sen valmistamiseksi
JP6841769B2 (ja) 2015-01-30 2021-03-10 トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング 少なくとも1個の物体を光学的に検出する検出器
CN107533126A (zh) * 2015-04-22 2018-01-02 特里纳米克斯股份有限公司 用于至少一个对象的光学检测的检测器
CN109923372B (zh) * 2016-10-25 2021-12-21 特里纳米克斯股份有限公司 采用集成滤波器的红外光学检测器
JP7080059B2 (ja) 2018-01-11 2022-06-03 池上通信機株式会社 放送用モニタのムラ検出装置及び当該装置を用いたムラ補正システム
KR20210115022A (ko) 2019-01-18 2021-09-24 트리나미엑스 게엠베하 광학 센서 및 광학적 검출용 검출기

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54154292A (en) * 1978-05-25 1979-12-05 Matsushita Electric Ind Co Ltd Photo detecting semiconductor device
JP2008109110A (ja) * 2006-09-29 2008-05-08 Semiconductor Energy Lab Co Ltd 半導体装置
WO2018019921A1 (en) * 2016-07-29 2018-02-01 Trinamix Gmbh Optical sensor and detector for optical detection

Also Published As

Publication number Publication date
CN113491016A (zh) 2021-10-08
US20220140155A1 (en) 2022-05-05
JP7528109B2 (ja) 2024-08-05
EP3931880A1 (en) 2022-01-05
KR20210129144A (ko) 2021-10-27
KR102714386B1 (ko) 2024-10-11
US11908956B2 (en) 2024-02-20
WO2020173985A1 (en) 2020-09-03
JP2022522010A (ja) 2022-04-13

Similar Documents

Publication Publication Date Title
US20250098337A1 (en) Optical sensor and detector for an optical detection
CN113632242B (zh) 光学传感器、用于选择光学传感器的方法和用于光学检测的检测器
CN113491016B (zh) 用于光学检测的光学传感器和检测器
EP3612805B1 (en) Optical detector
US11976979B2 (en) Optical detector
CN100433369C (zh) 紫外线传感器及其制造方法
CN100382335C (zh) 基于氮化镓半导体的紫外线光检测器
JP5735490B2 (ja) 半導体素子接点
KR102800365B1 (ko) 결함 상태 제어를 통한 구리-요오드 박막의 제조방법
JP2024131186A (ja) センシングデバイス、及びセンシングデバイスの製造方法

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
TG01 Patent term adjustment
TG01 Patent term adjustment