CN113432038A - Semiconductor process equipment and gas supply assembly thereof - Google Patents
Semiconductor process equipment and gas supply assembly thereof Download PDFInfo
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- CN113432038A CN113432038A CN202110648426.8A CN202110648426A CN113432038A CN 113432038 A CN113432038 A CN 113432038A CN 202110648426 A CN202110648426 A CN 202110648426A CN 113432038 A CN113432038 A CN 113432038A
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- sealing
- gas
- air inlet
- cabinet
- pipeline
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D1/00—Pipe-line systems
- F17D1/02—Pipe-line systems for gases or vapours
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/005—Protection or supervision of installations of gas pipelines, e.g. alarm
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F17—STORING OR DISTRIBUTING GASES OR LIQUIDS
- F17D—PIPE-LINE SYSTEMS; PIPE-LINES
- F17D5/00—Protection or supervision of installations
- F17D5/02—Preventing, monitoring, or locating loss
- F17D5/06—Preventing, monitoring, or locating loss using electric or acoustic means
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/34—Hydrogen distribution
Abstract
The invention provides semiconductor process equipment and a gas supply assembly thereof, wherein the gas supply assembly is used for supplying process gas to a plurality of gas cabinets of the semiconductor process equipment, each gas cabinet comprises a cabinet body and a gas distribution plate arranged in the cabinet body, the gas supply assembly comprises a gas inlet pipeline, the gas inlet pipeline is provided with a gas inlet end and a plurality of gas outlet ends, the plurality of gas outlet ends are used for penetrating through gas inlets of the plurality of cabinet bodies in a one-to-one correspondence manner to be connected with the corresponding gas distribution plates, the gas supply assembly further comprises a sealing pipeline, the gas inlet pipeline is positioned in the sealing pipeline, the sealing pipeline is provided with a plurality of gas outlet sealing ends, and the plurality of gas outlet sealing ends are used for being in sealing connection with the gas inlets of the plurality of cabinet bodies in a one-to-one correspondence manner so that the sealing pipeline is communicated with the interiors of the plurality of cabinet bodies. In the invention, the dangerous gas leaked from the air inlet pipeline is limited by the sealing pipeline and cannot leak to the environment, and the dangerous gas in the sealing pipeline can be sucked into the gas holder and then detected, so that the leakage detection of the air inlet pipeline is realized, and the safety of semiconductor process equipment is improved.
Description
Technical Field
The invention relates to the field of semiconductor process equipment, in particular to semiconductor process equipment and a gas supply assembly thereof.
Background
In semiconductor processing, components of process gases such as hydrogen (H2), diborane (B) are often used2H6) Etc. flammable and explosive gas (explosive volume of H2 in air)Fraction of 4% > E
75% of diborane (B)2H6) The explosion volume fraction in the air is 0.8% -88%, and the gas belongs to extremely flammable and explosive gas), and the safe design and leakage detection of the process gas pipeline are extremely important.
As shown in fig. 1, a conventional semiconductor processing tool structure includes 1 Front End Module (EFEM, which generally includes a plurality of devices such as a robot, a pre-alignment Mechanism, a load port assembly, a fan/filter unit, etc.), 1 Transfer Mechanism (TM), 4 Process chambers (PM), 4 gas cabinets (Gasbox) corresponding to the 4 Process chambers (PM1 to PM4), and the Front End Module is connected to the Transfer Mechanism through two Load Locks (LL) LLA and LLB for temporarily storing Process gases to be reacted and delivering the Process gases to the corresponding Process chambers when a semiconductor Process is performed in the Process chambers. Before the process chamber starts a semiconductor process, 1 total gas inlet box can be used for conveying process gases to be reacted to 4 gas cabinets (Gasbox _1 to Gasbox _4) through a gas inlet pipeline.
However, the conventional semiconductor process equipment can only detect whether flammable and explosive gas leaks inside the gas holder, cannot detect the leakage of the gas inlet pipeline, and has a safety risk that flammable and explosive gas leaks to the environment from the gas inlet pipeline exposed outside the gas holder.
Disclosure of Invention
The invention aims to provide semiconductor process equipment and a gas supply assembly thereof, which can eliminate the risk of leakage of dangerous gas from a pipeline outside a gas cabinet to the environment, realize leakage detection of the pipeline outside the gas cabinet and improve the safety of the semiconductor process equipment.
To achieve the above objects, as one aspect of the present invention, there is provided a gas supply assembly for supplying process gases to a plurality of gas boxes of a semiconductor processing apparatus, the gas cabinet comprises a cabinet body and a gas distribution plate arranged in the cabinet body, the gas supply assembly comprises an air inlet pipeline, the air inlet pipeline is provided with an air inlet end and a plurality of air outlet ends, the cabinet body is provided with air inlets, the air outlet ends are used for correspondingly penetrating through the air inlets of the cabinet bodies one by one and being connected with the corresponding air distribution discs, the gas supply assembly also comprises a sealing pipeline, the gas inlet pipeline is positioned inside the sealing pipeline, the sealed pipeline has a plurality of sealed ends of giving vent to anger, and is a plurality of sealed end of giving vent to anger be used for one-to-one ground with a plurality of the cabinet body the air inlet sealing connection, so that sealed pipeline with a plurality of the inside intercommunication of the cabinet body.
Optionally, the air inlet pipeline comprises an air inlet main pipe and a plurality of air inlet branch pipes, the air inlet end is formed on the air inlet main pipe, one ends of the plurality of air inlet branch pipes form a plurality of air outlet ends respectively, the other ends of the plurality of air inlet branch pipes are communicated with the air inlet main pipe respectively, the sealing pipeline comprises a plurality of sealing main pipes, a plurality of sealing branch pipes and a plurality of sealing connecting pieces, the plurality of sealing main pipes are sequentially sleeved on the air inlet main pipe along the extending direction of the air inlet main pipe, and the plurality of sealing branch pipes are sleeved on the plurality of air inlet branch pipes in a one-to-one correspondence manner;
the sealing connecting pieces are arranged at the connecting positions of the air inlet branch pipes and the air inlet main pipe in a one-to-one correspondence manner, each sealing connecting piece comprises a sealing cavity and a plurality of cavity openings formed in the sealing cavity, and the air inlet main pipe and the corresponding air inlet branch pipes are respectively communicated with the cavity openings; two adjacent sealed main pipes are communicated through the sealing connecting pieces, one ends of the plurality of sealed branch pipes are respectively formed into a plurality of air outlet sealing ends, and the other ends of the plurality of sealed branch pipes are respectively communicated with the sealed main pipes through the plurality of sealing connecting pieces.
Optionally, the sealing connector further comprises a plurality of first connecting cylinders formed on the outer surface of the sealing cavity, the first connecting cylinders are communicated with the cavity openings in a one-to-one correspondence manner, and the sealing main pipe and the pipe orifices of the sealing branch pipes are respectively sleeved on the first connecting cylinders communicated with the cavity openings in a corresponding manner.
Optionally, the sealing connector comprises a first connecting body and a second connecting body, the first connecting body comprises a first connecting part and a plurality of first half-cylinder parts fixedly connected with the first connecting part, the second connecting body comprises a second connecting part and a plurality of second half-cylinder parts fixedly connected with the second connecting part, the first connecting body has a first connecting surface, and the second connecting body has a second connecting surface; the first connecting surface is attached to the second connecting surface, and the plurality of first half-cylinder parts and the plurality of second half-cylinder parts form a plurality of first connecting cylinders;
the first connecting surface is provided with a sealing bulge extending along the edge of the first connecting surface, the second connecting surface is provided with a sealing groove corresponding to the shape of the sealing bulge, and the sealing bulge is positioned in the sealing groove.
Optionally, the air supply assembly further comprises a plurality of cabinet body sealing seats, each cabinet body sealing seat comprises a cabinet body connecting plate and a second connecting cylinder which are connected with each other, a connecting hole penetrating through the cabinet body connecting plate along the thickness direction is formed in the cabinet body connecting plate, the second connecting cylinders are communicated with the connecting holes, and the cabinet body connecting plates of the plurality of cabinet body sealing seats are fixedly arranged on the cabinet bodies of the plurality of air cabinets in a one-to-one correspondence manner so that the connecting holes are communicated with the air inlets of the corresponding cabinet bodies; and the pipe orifice of the air outlet sealing end of the sealing branch pipe is sleeved on the second connecting cylinder communicated with the corresponding air inlet.
Optionally, the cabinet body connecting plate be used for through a plurality of fasteners with correspond cabinet body fixed connection, the air feed subassembly still includes a plurality of sealed pad, and is a plurality of sealed pad is used for the one-to-one setting to be in a plurality of the cabinet body connecting plate of cabinet body seal receptacle and corresponding between the cabinet body, be formed with the through-hole on the seal pad, the connecting hole passes through the through-hole with correspond the air inlet intercommunication.
Optionally, the air feed subassembly still includes a plurality of annular clamps, and is a plurality of annular clamps cover many with the one-to-one ground sealed being responsible for and many on a plurality of mouths of pipe of sealed branch pipe, and will the mouth of pipe compresses tightly on the connecting cylinder that corresponds.
Optionally, the pipe orifice and the corresponding connecting cylinder are in interference fit.
Optionally, the material of the seal main pipe and the seal branch pipe is meltable polytetrafluoroethylene.
As a second aspect of the invention, there is provided a semiconductor processing apparatus comprising a plurality of gas cabinets and a gas supply assembly as described above.
In the gas supply assembly and the semiconductor process equipment provided by the invention, the sealing pipeline is sleeved outside the gas inlet pipeline and is provided with a plurality of gas outlet sealing ends which are hermetically connected with the gas inlets of the cabinet bodies, so that when the gas inlet pipeline outside the cabinet bodies leaks, leaked dangerous gas can only diffuse into the cabinet bodies of the gas cabinet through the sealing pipeline, the risk that the dangerous gas leaks into the environment from the gas inlet pipeline is eliminated, and the safety of the semiconductor process equipment is improved. And under the condition that the gas cabinet body is provided with the exhaust holes, gas in the sealed pipeline can form negative pressure under the air pumping action of the air pump connected with the exhaust holes, and the gas leaked by the gas inlet pipeline can certainly pass through the exhaust holes in the negative pressure air pumping state and is detected by the corresponding sensor to trigger gas leakage alarm, so that the gas inlet pipeline is subjected to leakage detection, and the safety of semiconductor process equipment is further improved.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic diagram of a semiconductor processing apparatus of the prior art;
FIG. 2 is a schematic diagram illustrating a connection relationship between an air inlet pipeline and a gas holder in an air supply assembly according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of an air intake circuit in an air supply assembly according to an embodiment of the present invention;
FIG. 4 is a schematic diagram of the connection between the gas supply assembly and the gas cabinet according to the embodiment of the present invention;
FIG. 5 is a schematic diagram of an air intake circuit in an air supply assembly according to another embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a gas supply assembly according to an embodiment of the present invention;
FIG. 7 is an exploded schematic view of the connection between the structures of the sealed conduits in the gas supply assembly provided by an embodiment of the present invention;
FIG. 8 is a cross-sectional view taken along line A-A of the gas supply assembly of FIG. 6;
FIG. 9 is a schematic view showing a connection relationship between partial structures of the gas supply assembly according to the embodiment of the present invention;
FIG. 10 is an exploded view of a sealed connection between a sealed conduit and a gas cabinet in a gas supply assembly provided by an embodiment of the present invention;
FIG. 11 is a schematic diagram illustrating the connection between the seal line and the gas holder in the gas supply assembly according to the embodiment of the present invention;
FIG. 12 is a schematic diagram of a gas cabinet frame in semiconductor processing equipment according to an embodiment of the present invention;
FIG. 13 is a schematic view showing a connection relationship between a cabinet frame and a sealing pipe in semiconductor processing equipment according to an embodiment of the present invention;
FIG. 14 is a schematic diagram of the internal structure of a gas cabinet in a semiconductor processing apparatus according to an embodiment of the present invention;
FIG. 15 is a schematic illustration of a disassembled sealed connection in semiconductor processing equipment according to an embodiment of the present invention;
FIG. 16 is an assembled schematic view of the sealing joint of FIG. 15;
FIG. 17 is a schematic illustration of a disassembled sealed connection in semiconductor processing equipment according to another embodiment of the present invention;
fig. 18 is an assembled schematic view of the sealing joint of fig. 17.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
In order to solve the above technical problems, according to an aspect of the present invention, a gas supply assembly is provided for supplying process gas to a plurality of gas cabinets (Gasbox) of semiconductor process equipment, the gas cabinets including a cabinet body and a gas distribution plate (Gaspanel)710 disposed inside the cabinet body, as shown in fig. 2, 3, and 14, the gas supply assembly includes a gas inlet pipeline 100, the gas inlet pipeline 100 having a gas inlet end and a plurality of gas outlet ends, the cabinet body of the gas cabinet having gas inlets formed thereon, the plurality of gas outlet ends being configured to be connected to the corresponding gas distribution plate 710 through the gas inlets of the plurality of cabinet bodies in a one-to-one correspondence manner. As shown in fig. 4, the air supply assembly further includes a sealing pipeline, the air inlet pipeline 100 is located inside the sealing pipeline, the sealing pipeline has a plurality of air outlet sealing ends, and the plurality of air outlet sealing ends are used for being in sealing connection with the air inlets of the plurality of cabinets in a one-to-one correspondence manner, so that the sealing pipeline is communicated with the interiors of the plurality of cabinets.
It should be noted that, a gas holder of the semiconductor processing equipment can detect whether there is dangerous gas inside the body of the gas holder by way of air extraction, specifically, as shown in fig. 14, an air supply pipe 711 for supplying process gas to a process chamber, an air exhaust pipe 712 for connecting an air pump to exhaust air, and an air intake pipeline 100 are connected to the gas holder 710, and these pipelines are all hermetically connected to the gas holder 710, and under normal conditions, there should be no dangerous gas between the inner wall of the body and the gas holder 710, and in order to detect gas components in the space region, an air exhaust hole 720 and an air intake hole 740 may be provided on the body, and whether the gas holder 710 leaks air can be determined by extracting air from the air exhaust hole 720 and detecting the components of the extracted gas.
In the invention, the outside of the air inlet pipeline 100 is sleeved with a sealing pipeline, and the sealing pipeline is provided with a plurality of air outlet sealing ends which are hermetically connected with the air inlets of the cabinets, so that when the air inlet pipeline 100 outside the cabinet leaks, leaked dangerous gas can only diffuse into the cabinets of the air cabinet through the sealing pipeline, the risk that the dangerous gas leaks into the environment from the air inlet pipeline 100 is eliminated, and the safety of semiconductor process equipment is improved.
Moreover, under the condition that the gas cabinet body is provided with the exhaust holes 720, the gas in the sealed pipeline can form negative pressure under the air pumping action of the air pump connected with the exhaust holes 720, the gas leaked by the gas inlet pipeline 100 can certainly pass through the exhaust holes 720 under the negative pressure air pumping state and is detected by the corresponding sensor, and the gas leakage alarm is triggered, so that the gas inlet pipeline 100 is subjected to leakage detection, and the safety of semiconductor process equipment is further improved.
In order to improve the leak detection efficiency, it is preferable that a gas detector 730 is provided in each gas holder, as shown in fig. 14, for detecting the gas flowing through the gas vent 720 on the body of the gas holder.
The structure of the intake pipe 100 is not particularly limited in the embodiments of the present invention, for example, optionally, as shown in fig. 3, the intake pipe 100 may include a main intake pipe 110 and a plurality of branch intake pipes 120, an intake end is formed on the main intake pipe 110, one end of each of the plurality of branch intake pipes 120 forms a plurality of outlet ends, and the other end of each of the plurality of branch intake pipes 120 communicates with the main intake pipe 110.
That is, in the embodiment of the present invention, the process gas is introduced into the gas inlet end of the main gas inlet pipe 110, and the process gas can be simultaneously supplied to the gas distribution plates 710 in the plurality of gas cabinets through the gas inlet branch pipes 120 sequentially branched from the main gas inlet pipe 110. For example, as shown in fig. 3 and 5, the main intake pipe 110 may be disconnected at a position where the main intake pipe 120 is connected, and connected to the main intake pipe 120 through a three-way connection block 140, that is, two ports of the disconnected position of the main intake pipe 110 and one end of the main intake pipe 120 are respectively connected to the three-way connection block 140 (to reduce the pipe diameter of the sealed pipeline, the main intake pipe 110 and the main intake pipe 120 are preferably made of a metal material (e.g., stainless steel), and are connected to the three-way connection block 140 by welding).
In order to reduce the total volume of the pipeline, preferably, the structure of the sealing pipeline corresponds to the air inlet pipeline 100, and specifically, as shown in fig. 4 and fig. 6, the sealing pipeline may include a plurality of main sealing pipes 210, a plurality of branch sealing pipes 220, and a plurality of sealing connectors 300, wherein the plurality of main sealing pipes 210 are sequentially sleeved on the main air inlet pipe 110 along the extending direction of the main air inlet pipe 110, and the plurality of branch sealing pipes 220 are sleeved on the plurality of branch air inlet pipes 120 in a one-to-one correspondence manner.
The plurality of sealing connectors 300 are arranged at the connecting positions of the plurality of air inlet branch pipes 120 and the air inlet main pipe 110 in a one-to-one correspondence manner, each sealing connector 300 comprises a sealing cavity 310 and a plurality of cavity openings formed on the sealing cavity 310, and the air inlet main pipe 110 and the corresponding air inlet branch pipes 120 are respectively communicated with the plurality of cavity openings; two adjacent main sealing pipes 210 are communicated through a sealing connector 300, a plurality of air outlet sealing ends are formed at one ends of the plurality of branch sealing pipes 220, and the other ends of the plurality of branch sealing pipes 220 are communicated with the main sealing pipes 210 through the plurality of sealing connectors 300.
In the embodiment of the present invention, the sealing pipeline includes a main sealing pipe 210 having a structure corresponding to the main intake pipe 110, a branch sealing pipe 220 having a structure corresponding to the branch intake pipe 120, and a sealing connector 300 having a position corresponding to a connection between the main intake pipe 110 and the branch intake pipe 120, and the three-way connection (where the three-way connection block 140 is located) is enclosed and sealed by the sealing connector 300, so that the structural compactness of the double-layer pipeline formed by the sealing pipeline and the intake pipeline 100 is improved.
The embodiment of the present invention does not specifically limit how the sealing tube (the main sealing tube 210, the branch sealing tube 220) is connected to the sealing connector 300, and for example, the end of the sealing tube may be adhered to the cavity opening of the sealing connector 300 by an adhesive means, or the end of the sealing tube may be fitted to the sealing connector 300 by a fastening member such as a flange structure.
In order to improve the air tightness of the sealed pipeline, as shown in fig. 8, 9, 16 and 18, as a preferred embodiment of the present invention, the sealing connector 300 further includes a plurality of first connecting cylinders 320 formed on the outer surface of the sealed cavity 310, the plurality of first connecting cylinders 320 are in one-to-one correspondence with the plurality of cavity openings, and the pipe mouths of the main sealing pipe 210 and the branch sealing pipes 220 are respectively sleeved on the first connecting cylinders 320 in correspondence with the cavity openings.
In the embodiment of the present invention, the first connecting cylinder 320 for passing through the air inlet pipeline is formed on the sealing connector 300, so that the pipe orifices of the main sealing pipe 210 and the branch sealing pipes 220 can be sleeved on the corresponding first connecting cylinders 320, and sealing is realized through the cylindrical surface fit between the pipe orifices and the first connecting cylinders 320, so that the air tightness of the sealing pipeline is improved, the convenience of disassembling and assembling the sealing pipes is also improved, and the maintenance performance of the sealing pipeline is improved.
How each of the inlet manifolds 120 is connected to the gas panel 710 in a sealing manner is not specifically limited in the embodiments of the present invention, for example, optionally, as shown in fig. 5 and 11, a connection joint 130 is installed at an end of each of the inlet manifolds 120, and a corresponding connection joint is also arranged on the gas panel 710, and the types of the connection joints 130 are not specifically limited in the embodiments of the present invention, for example, the connection joint 130 may be a VCR (Vacuum Coupling radial Seal) joint.
As shown in fig. 1 and 12, the gas holder and the process chamber PM are disposed around the transfer platform TM, the gas inlet main pipe 110 is correspondingly shaped like a loop, and the sealing main pipe 210 is preferably a corrugated pipe in order to fit the sealing main pipe 210 on the curved gas inlet main pipe 110.
Since the plurality of branch inlet pipes 120 are connected to the main inlet pipe 110, in order to facilitate the main seal pipe 210 to be sleeved on the main inlet pipe 110, preferably, as shown in fig. 5, a portion of the main inlet pipe 110 between every two branch inlet pipes 120 is broken into two branch pipes, and the two branch pipes are connected to each other by a connection joint 130 installed at respective ends thereof, the connection joint 130 is preferably located close to the branch inlet pipes 120, and when the main seal pipe 210 is installed, the main seal pipe 210 may be sleeved on the longer branch pipe, and the main seal pipe 210 may be axially compressed to leak out of the connection joint 130, so as to assemble the main inlet pipe 110.
It should be noted that the double-layer pipeline structure provided by the present invention has low requirement for the limit precision of the intersection of the three-way, the sealing connector 300 itself forms the radial limit for the main intake pipe 110 and the branch intake pipe 120, meanwhile, the external dimension of the VCR joint (the connection joint 130) is larger, and the pipe diameter of the sealing pipeline is close to the pipe diameter of the intake pipeline 100, which further forms the radial displacement limit for the intake pipeline 100, and the structure has satisfied the actual use requirement.
In order to improve the convenience of detaching and attaching the sealing joint 300 in the case of the welded connection relationship between the main intake pipe 110 and the branch intake pipe 120, as a preferred embodiment of the present invention, as shown in fig. 7 and 15 to 18, the sealing joint 300 includes a first joint body including a first connection portion 311 and a plurality of first half cylinder portions 321 fixedly connected to the first connection portion 311, and a second joint body including a second connection portion 312 and a plurality of second half cylinder portions 322 fixedly connected to the second connection portion 312, the first joint body having a first connection surface a, the second joint body having a second connection surface B; the first connecting surface a is attached to the second connecting surface B, and the plurality of first half cylindrical portions 321 and the plurality of second half cylindrical portions 322 constitute a plurality of first connecting cylinders 320.
In the embodiment of the invention, the sealing connector 300 is designed in a split mode, and the sealing connector 300 can be directly installed on the welded air inlet pipeline 100 when the sealing pipeline is assembled, so that the convenience of assembling the sealing pipeline is improved, and the maintenance efficiency of a machine table is further improved.
In order to improve the airtightness of the sealed pipeline, it is preferable that, as shown in fig. 17 and 18, a sealing protrusion 323 extending along an edge of the first connecting surface is formed on the first connecting surface a, a sealing groove 324 corresponding to the shape of the sealing protrusion is formed on the second connecting surface B, and the sealing protrusion 323 is located in the sealing groove 324.
In the embodiment of the present invention, an embedded split seal structure is formed between the two separated contact surfaces of the sealing connector 300 by the sealing protrusion 323 and the sealing groove 324, so that the overall airtightness of the sealing pipeline is further improved, and the safety of the semiconductor processing equipment is further improved.
In the embodiment of the present invention, how to connect the sealed pipeline to the cabinet in a sealed manner is not specifically limited, for example, preferably, as shown in fig. 10 and 11, the air supply assembly further includes a plurality of cabinet sealing seats, each cabinet sealing seat includes a cabinet connecting plate 510 and a second connecting cylinder 520 connected to each other, a connecting hole penetrating through the cabinet connecting plate 510 along the thickness direction is formed on the cabinet connecting plate 510, one end of the second connecting cylinder 520 is communicated with the connecting hole, and the cabinet connecting plates 510 of the plurality of cabinet sealing seats are used to be fixedly disposed on the cabinets of the plurality of air cabinets in a one-to-one correspondence manner, so that the connecting holes are communicated with the air inlets of the corresponding cabinets; the pipe orifice of the air outlet sealing end of the sealing branch pipe 220 is sleeved on the second connecting cylinder 520 communicated with the corresponding air inlet.
In the embodiment of the invention, the cabinet body sealing seat comprises the second connecting cylinders 520 communicated with the interior of the cabinet body, so that the pipe orifices of the sealing branch pipes 220 can be sleeved on the corresponding second connecting cylinders 520, and sealing is realized through the cylindrical surface matching between the pipe orifices and the second connecting cylinders 520, so that the air tightness of the sealing pipeline is improved, the convenience of dismounting the sealing pipes is improved, and the maintenance performance of the sealing pipeline is improved.
In some embodiments of the present invention, the air intake assembly may further include a main air intake box 140, as shown in fig. 2, the air intake end of the air intake pipeline 100 receives the process gas through the main air intake box 140, and the main air intake box 140 is used for filtering the process gas, controlling the flow rate of the process gas, and the like. In this case, the end of the main seal pipe 210 corresponding to the air inlet end of the air inlet pipeline 100 can also be connected with the cabinet of the main air inlet box 140 in a sealing way through the cabinet seal seat.
In the embodiment of the present invention, a connection manner between the cabinet connecting plate 510 and the cabinet is not particularly limited, for example, to improve air tightness between the cabinet connecting plate 510 and the cabinet, as shown in fig. 10 and 11, preferably, the cabinet connecting plate 510 is used to be fixedly connected with the corresponding cabinet through a plurality of fasteners, the air supply assembly further includes a plurality of sealing gaskets 530, the plurality of sealing gaskets 530 are used to be disposed between the cabinet connecting plate 510 of the plurality of cabinet sealing seats and the corresponding cabinet in a one-to-one correspondence manner, through holes are formed in the sealing gaskets 530, and the through holes are communicated with the corresponding air inlets through the through holes.
In the embodiment of the invention, the connecting plate 510 is assembled and connected with the cabinet body through the fastener, and the sealing gasket 530 is arranged between the connecting plate 510 and the cabinet body, so that the sealing gasket 530 is tightly pressed on the cabinet body by the connecting plate 510 through the pretightening force of the fastener assembly, the air tightness between the connecting plate 510 of the cabinet body and the cabinet body is improved, and the air tightness of the sealed pipeline is further improved.
In order to further improve the air tightness of the connection between the pipe orifices (the pipe orifices of the main sealing pipe 210 and the branch sealing pipe 220) and the corresponding connecting cylinders (the first connecting cylinder 320 and the second connecting cylinder 520), preferably, the pipe orifices and the corresponding connecting cylinders are in interference fit, that is, the outer diameters of the connecting cylinders are slightly larger than the inner diameter of the pipe orifices, so that the outer walls of the connecting cylinders are ensured to be attached to the inner walls of the pipe orifices of the main sealing pipe 210 or the branch sealing pipe 220 through interference fit, and the gas in the sealing pipeline is prevented from leaking out through the gap between the outer walls and the inner walls.
The embodiment of the present invention does not specifically limit how to implement the interference fit connection, for example, optionally, the main sealing pipe 210 and the branch sealing pipe 220 are made of plastic, and the pipe orifice is installed on the corresponding connecting cylinder in a thermal assembly manner. Specifically, when the pipe orifice is installed on the corresponding connecting cylinder, the pipe orifice can be heated by a hot air gun to be softened and expanded, the pipe orifice after the pipe orifice is flared is sleeved on the connecting cylinder, and then the pipe orifice is cooled and shrunk to realize interference fit connection.
The material of the main seal pipe 210 and the branch seal pipe 220 is not particularly limited in the embodiments of the present invention, and for example, as an alternative embodiment of the present invention, the material of the main seal pipe 210 and the branch seal pipe 220 may be fusible Polytetrafluoroethylene (PFA).
In order to further improve the air tightness of the connection between the pipe orifices and the connecting cylinders, preferably, the air supply assembly further comprises a plurality of annular clamps 400, wherein the plurality of annular clamps 400 are sleeved on the plurality of pipe orifices of the plurality of main sealing pipes 210 and the plurality of branch sealing pipes 220 in a one-to-one correspondence manner, and press the pipe orifices on the corresponding connecting cylinders.
When the sealing pipeline is connected to the sealing connector 300, the annular clamp 400 may be sleeved on the corresponding main sealing pipe 210 or branch sealing pipe 220, the pipe orifice of the main sealing pipe 210 or branch sealing pipe 220 is thermally assembled on the outer wall of the first connecting cylinder 320, and finally the annular clamp 400 is locked at the pipe orifice after the pipe orifice is cooled and forms an interference fit.
Similarly, when connecting the air supply assembly to the gas holder or the main air inlet box, the connection plate 510 may be fixed to the body of the gas holder or the main air inlet box by a fastener, the connection joint 130 at the air outlet end of the air inlet pipeline 100 sequentially passes through the second connection cylinder 520 and the air inlet of the body and extends into the body, and finally the pipe orifice of the air outlet sealing end of the sealing branch pipe 220 sleeved on the air inlet branch pipe 120 is thermally assembled on the outer wall of the second connection cylinder 520, and the annular clamp 400 sleeved on the second connection cylinder 520 is locked at the pipe orifice position after forming interference fit.
The number of gas cabinets and the number of gas inlet branch pipes 120 in the semiconductor process equipment are not particularly limited in the embodiments of the present invention, for example, as an alternative embodiment of the present invention, the gas inlet pipeline 100 may include 4 gas inlet branch pipes 120, and accordingly, the sealing pipeline includes 3 main sealing pipes 210, 4 branch sealing pipes 220, and 3 sealing connectors 300.
Specifically, as shown in fig. 2 to 6, the air intake pipe 100 includes 4 air intake branch pipes 120, and the seal pipe includes a first seal main pipe 210a, a second seal main pipe 210b, a third seal main pipe 210c, a first seal branch pipe 220a, a second seal branch pipe 220b, a third seal branch pipe 220c, a fourth seal branch pipe 220d, a first seal connector 300a, a second seal connector 300b, and a third seal connector 300 c;
the first end of the first main seal pipe 210a corresponds to the air inlet end of the main inlet pipe 110, the second end of the first main seal pipe 210a communicates with the first end of the second main seal pipe 210b and the first branch seal pipe 220a via the first seal connector 300a, the second end of the second main seal pipe 210b communicates with the first end of the third main seal pipe 210c and the second branch seal pipe 220b via the second seal connector 300b, and the second end of the third main seal pipe 210c communicates with the third branch seal pipe 220c and the fourth branch seal pipe 220d via the third seal connector 300 c.
As a second aspect of the present invention, a semiconductor processing apparatus is provided, which includes a gas supply assembly, a plurality of process chambers, and a plurality of gas cabinets connected to the plurality of process chambers in a one-to-one correspondence manner, wherein the gas supply assembly is configured to supply a process gas to the plurality of gas cabinets of the semiconductor processing apparatus, and the gas supply assembly is provided in an embodiment of the present invention.
Other structures in the semiconductor processing apparatus are not particularly limited in the embodiments of the present invention, for example, the semiconductor processing apparatus may further include a transfer platform (TM), and a plurality of process chambers and gas cabinets may be disposed around the transfer platform. Optionally, as shown in FIG. 12, the semiconductor processing apparatus may further include a gas cabinet support 600 for holding a plurality of gas cabinets.
The embodiment of the present invention does not specifically limit how to fix the air supply assembly, for example, optionally, in the case that the sealing pipeline of the air supply assembly includes a plurality of sealing connectors 300, as shown in fig. 12 and 13, the gas holder bracket 600 includes a plurality of columns extending in the height direction, and the columns are fixedly provided with connector support frames 610 for fixing the sealing connectors 300 in the air supply assembly.
In the semiconductor process equipment provided by the invention, the sealing pipeline is sleeved outside the air inlet pipeline 100 and is provided with a plurality of air outlet sealing ends which are hermetically connected with the air inlets of the cabinets, so that when the air inlet pipeline 100 outside the cabinets leaks, leaked dangerous gas can only diffuse into the cabinets of the gas cabinets through the sealing pipeline, the risk that the dangerous gas leaks into the environment from the air inlet pipeline 100 is eliminated, and the safety of the semiconductor process equipment is improved.
Moreover, under the condition that the gas cabinet body is provided with the exhaust holes 720, the gas in the sealed pipeline can form negative pressure under the air pumping action of the air pump connected with the exhaust holes 720, the gas leaked by the gas inlet pipeline 100 can certainly pass through the exhaust holes 720 under the negative pressure air pumping state and is detected by the corresponding sensor, and the gas leakage alarm is triggered, so that the gas inlet pipeline 100 is subjected to leakage detection, and the safety of semiconductor process equipment is further improved.
As a second aspect of the present invention, there is provided a semiconductor processing apparatus comprising a plurality of gas cabinets and a gas supply assembly according to an embodiment of the present invention.
In the semiconductor process equipment provided by the invention, the sealing pipeline is sleeved outside the air inlet pipeline 100 and is provided with a plurality of air outlet sealing ends which are hermetically connected with the air inlets of the cabinets, so that when the air inlet pipeline 100 outside the cabinets leaks, leaked dangerous gas can only diffuse into the cabinets of the gas cabinets through the sealing pipeline, the risk that the dangerous gas leaks into the environment from the air inlet pipeline 100 is eliminated, and the safety of the semiconductor process equipment is improved.
Moreover, under the condition that the gas cabinet body is provided with the exhaust holes 720, the gas in the sealed pipeline can form negative pressure under the air pumping action of the air pump connected with the exhaust holes 720, the gas leaked by the gas inlet pipeline 100 can certainly pass through the exhaust holes 720 under the negative pressure air pumping state and is detected by the corresponding sensor, and the gas leakage alarm is triggered, so that the gas inlet pipeline 100 is subjected to leakage detection, and the safety of semiconductor process equipment is further improved.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. The utility model provides an air feed subassembly for a plurality of gas holders to semiconductor process equipment provide process gas, the gas holder includes the cabinet body and sets up the gas distribution dish of the internal portion of cabinet, the air feed subassembly includes the air inlet pipeline, the air inlet pipeline has the end of giving vent to anger and a plurality of, be formed with the air inlet on the cabinet body, it is a plurality of give vent to anger the end be used for passing a plurality ofly one-to-one the cabinet body the air inlet with correspond the gas distribution dish is connected, its characterized in that, the air feed subassembly still includes sealed pipeline, the air inlet pipeline is located inside the sealed pipeline, sealed pipeline has a plurality of sealed ends of giving vent to anger, and is a plurality of sealed end of giving vent to anger be used for one-to-one with a plurality of the cabinet body air inlet sealing connection, so that sealed pipeline with a plurality of the inside intercommunication of the cabinet body.
2. The air supply assembly according to claim 1, wherein the air inlet pipeline comprises an air inlet main pipe and a plurality of air inlet branch pipes, the air inlet end is formed on the air inlet main pipe, one ends of the plurality of air inlet branch pipes form a plurality of air outlet ends respectively, the other ends of the plurality of air inlet branch pipes are communicated with the air inlet main pipe respectively, the sealing pipeline comprises a plurality of sealing main pipes, a plurality of sealing branch pipes and a plurality of sealing connecting pieces, the plurality of sealing main pipes are sequentially sleeved on the air inlet main pipe along the extending direction of the air inlet main pipe, and the plurality of sealing branch pipes are sleeved on the plurality of air inlet branch pipes in a one-to-one correspondence manner;
the sealing connecting pieces are arranged at the connecting positions of the air inlet branch pipes and the air inlet main pipe in a one-to-one correspondence manner, each sealing connecting piece comprises a sealing cavity and a plurality of cavity openings formed in the sealing cavity, and the air inlet main pipe and the corresponding air inlet branch pipes are respectively communicated with the cavity openings; two adjacent sealed main pipes are communicated through the sealing connecting pieces, one ends of the plurality of sealed branch pipes are respectively formed into a plurality of air outlet sealing ends, and the other ends of the plurality of sealed branch pipes are respectively communicated with the sealed main pipes through the plurality of sealing connecting pieces.
3. The gas supply assembly of claim 2, wherein the sealing connector further comprises a plurality of first connecting tubes formed on the outer surface of the sealing cavity, the plurality of first connecting tubes are communicated with the plurality of cavity openings in a one-to-one correspondence manner, and the sealing main tube and the sealing branch tube are respectively sleeved on the corresponding first connecting tubes communicated with the cavity openings.
4. The gas supply assembly of claim 3, wherein the sealing connection includes a first connection body including a first connection portion and a plurality of first half-cylinders fixedly connected to the first connection portion, and a second connection body including a second connection portion and a plurality of second half-cylinders fixedly connected to the second connection portion, the first connection body having a first connection surface, the second connection body having a second connection surface; the first connecting surface is attached to the second connecting surface, and the plurality of first half-cylinder parts and the plurality of second half-cylinder parts form a plurality of first connecting cylinders;
the first connecting surface is provided with a sealing bulge extending along the edge of the first connecting surface, the second connecting surface is provided with a sealing groove corresponding to the shape of the sealing bulge, and the sealing bulge is positioned in the sealing groove.
5. The air supply assembly according to claim 2, further comprising a plurality of cabinet sealing seats, wherein each cabinet sealing seat comprises a cabinet connecting plate and a second connecting cylinder which are connected with each other, a connecting hole penetrating through the cabinet connecting plate along the thickness direction is formed in the cabinet connecting plate, the second connecting cylinder is communicated with the connecting hole, and the cabinet connecting plates of the cabinet sealing seats are fixedly arranged on the cabinets of the air cabinets in a one-to-one correspondence manner, so that the connecting holes are communicated with the air inlets of the corresponding cabinets; and the pipe orifice of the air outlet sealing end of the sealing branch pipe is sleeved on the second connecting cylinder communicated with the corresponding air inlet.
6. The air supply assembly according to claim 5, wherein the cabinet connecting plate is fixedly connected with the corresponding cabinet through a plurality of fasteners, the air supply assembly further comprises a plurality of sealing gaskets, the sealing gaskets are arranged between the cabinet connecting plates of the cabinet sealing seats and the corresponding cabinets in a one-to-one correspondence manner, through holes are formed in the sealing gaskets, and the connecting holes are communicated with the corresponding air inlets through the through holes.
7. The gas supply assembly of any one of claims 3 to 6, further comprising a plurality of annular clamps, wherein the plurality of annular clamps are sleeved on the plurality of main sealing pipes and the plurality of branch sealing pipes in a one-to-one correspondence manner and compress the plurality of pipe orifices on the corresponding connecting cylinders.
8. The gas supply assembly of any one of claims 3 to 6, wherein the nozzles are in interference fit with the corresponding connecting cylinders.
9. The gas supply assembly of claim 8, wherein the seal header and the seal leg are constructed of meltable polytetrafluoroethylene.
10. A semiconductor processing apparatus comprising a plurality of gas cabinets and a gas supply assembly according to any one of claims 1 to 9.
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| Publication number | Publication date |
|---|---|
| CN113432038B (en) | 2023-01-17 |
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