CN210567514U - Hand control device and special gas cabinet - Google Patents
Hand control device and special gas cabinet Download PDFInfo
- Publication number
- CN210567514U CN210567514U CN201921022570.5U CN201921022570U CN210567514U CN 210567514 U CN210567514 U CN 210567514U CN 201921022570 U CN201921022570 U CN 201921022570U CN 210567514 U CN210567514 U CN 210567514U
- Authority
- CN
- China
- Prior art keywords
- valve
- hand control
- manual
- special gas
- air inlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Valve Housings (AREA)
Abstract
The utility model discloses a hand control unit and applied this kind of hand control unit's special gas holder, hand control unit includes the casing, sets up at the manual valve and the pressure indicator of casing lateral surface and sets up the logic valve in the casing, the air inlet of manual valve is connected with the intake pipe that is used for linking to each other with the air supply, and the gas outlet of manual valve is connected with the air inlet of the first air inlet of logic valve and pressure indicator respectively through the control trachea, the gas outlet of logic valve is connected with the outlet duct. The utility model has the advantages of being simple in structure and convenient in operation, can avoid manual valve too much and the maloperation that produces to cause the pilot lamp to instruct the mistake, also can simplify manual control device's connecting line simultaneously, make things convenient for work such as later maintenance, maintenance.
Description
Technical Field
The utility model relates to a safety control technique of special gas supply especially relates to a hand control unit and special gas cabinet.
Background
With the rapid development of the semiconductor industry in China and the strong support of national policies, various high and new technology industries, such as chip and the like, enter the period of rapid development, a large number of automatically controlled special gas cabinets are used, but when an automatic control system of the special gas cabinet cannot normally work due to uncontrollable factors (such as control element faults and the like), manual control becomes a preferred method for ensuring normal supply of gas. Along with the development of the industry, the requirements of customers on functions, humanization, volume and the like of the special gas cabinet are continuously improved, but the manual control system of the special gas cabinet still adopts the old design scheme, and the requirements of factory production cannot be met in the aspects of functions, operation, volume and the like, and the following defects are mainly existed:
1. the volume is too large. The traditional manual control system shell is too large, and the total volume of the special gas cabinet is continuously reduced to meet the production requirement, so that under the condition that the internal disc surface and the volume of the gas steel cylinder are not changed, the space for installing the manual control system is less and less. To date, conventional manual systems have been difficult to meet installation requirements.
2. The manual system is complicated. The traditional manual control system needs three manual control valves and three indicator lamps, the distance between the manual control valves and the indicator lamps is small, and misjudgment of indication results of the indicator lamps is easily caused. Secondly, the more pipeline and the complicated circuit that cause the connection of part are unfavorable for later maintenance and repair.
3. When the manual valves are installed originally, the valve handles of the three manual valves are all arranged outside the shell, and when operating personnel operate other components in the special gas cabinet, the manual valve handles are easily touched by mistake to cause abnormity of a control system, so that unnecessary production loss is generated.
4. It is expensive. Because of structural design problem, the casing processing material is more, and the processing cost is more, and automatically controlled device is more, so the device price is expensive, and the user often pays great cost.
Disclosure of Invention
In view of the above, the present invention provides a hand control device and a special gas cabinet, which are used to solve the problems in the background art.
A hand control device comprises
A housing;
the manual valve and the pressure indicator are arranged on the outer side surface of the shell;
and a logic valve disposed within the housing;
the air inlet of the manual valve is connected with an air inlet pipe used for being connected with an air source, the air outlet of the manual valve is respectively connected with the first air inlet of the logic valve and the air inlet of the pressure indicator through a control air pipe, and the air outlet of the logic valve is connected with an air outlet pipe.
Preferably, the casing includes preceding shell and back lid, preceding shell is the interior cavity box of rear end face open-ended, and the back lid is installed on the rear end face of preceding shell, and a side of preceding shell is equipped with inside sunken depressed part, manual valve and pressure indicator card are in the depressed part.
Preferably, the recess depth of the recess portion is not less than the vertical height of the manual valve.
Preferably, the rear cover is provided with a plurality of round holes for the air inlet pipe and the air outlet pipe to pass through.
Preferably, the round holes are provided with 4, and the 4 round holes are respectively distributed on four corners of the rear cover.
Preferably, the logic valve is an OR gate logic valve.
A special gas cabinet comprises a manual control device, wherein the free end of an air inlet pipe of the manual control device is connected with an air source, the free end of an air outlet pipe is connected with a pneumatic valve in the special gas cabinet, a second air inlet of a logic valve is connected with an air outlet of an electromagnetic valve, and an air inlet of the electromagnetic valve is connected with the air source.
Preferably, the hand control is mounted on opposite inner side walls of the special gas cabinet.
The utility model has the advantages that:
1. the manual control device only sets up a manual valve and a pressure indicator, can avoid the manual valve too much and the maloperation that produces to cause pilot lamp instruction mistake, also can simplify manual control device's connecting line simultaneously, work such as convenient later maintenance, maintenance.
2. Through set up the depressed part in the casing side, with manual valve and pressure indicator card in the depressed part, when other parts in the special gas cabinet of operation, can avoid the mistake to touch the manual valve and disturb the normal control of special gas cabinet, avoid producing unnecessary production loss.
3. The volume of the hand control device is only one fifth of the original volume, so that the occupied space for installation is greatly reduced, the consumption of production materials is reduced, and the production cost is greatly reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is a schematic perspective view of a hand control.
Fig. 2 is a side view of the hand control.
Fig. 3 is a pneumatic connection diagram of the hand control.
The reference numerals in the figures have the meaning:
the air-pressure-regulating valve comprises a shell 1, a manual control valve 2, a pressure indicator 3, a logic valve 4, an air inlet pipe 5, a control air pipe 6, an air outlet pipe 7, a front shell 8, a rear cover 9, a concave part 10, a circular hole 11, a pneumatic valve 12, an electromagnetic valve 13 and an air source 14.
Detailed Description
For better understanding of the technical solutions of the present invention, the following detailed descriptions of the embodiments of the present invention are provided with reference to the accompanying drawings.
It should be clear that the described embodiments are only some, but not all embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
The present application is described in further detail below with reference to specific embodiments and with reference to the attached drawings.
In the description of the present application, unless explicitly stated or limited otherwise, the terms "first", "second", and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; the term "plurality" means two or more unless specified or indicated otherwise; the terms "connected" and "fixed" are used broadly, and for example, "connected" may be a fixed connection or a detachable connection; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
The embodiment of the utility model provides a hand control unit, including casing 1, manual valve 2, pressure indicator 3 and logic valve 4.
Specifically, the housing 1 includes a front shell 8 and a rear cover 9, the front shell 8 is an inner hollow box with an opening on a rear end face, the rear cover 9 is installed on the rear end face of the front shell 8, and a side face of the front shell 8 is provided with an inward recessed portion 10.
The manual valve 2 and the pressure indicator 3 are arranged on the outer side surface of the shell 1, specifically, the manual valve 2 and the pressure indicator 3 are clamped in the concave part 10, and the concave depth of the concave part 10 is not less than the vertical height of the manual valve 2.
The logic valve 4 is disposed within the housing 1. In the present embodiment, the logic valve 4 is an OR gate logic valve, and the pressure indicator 3 is an OH-22 type indicator of FEST0, Germany.
An air inlet pipe 5 connected with an air source 14 is connected with an air inlet of the manual control valve 2, an air outlet of the manual control valve 2 is respectively connected with a first air inlet of the logic valve 4 and an air inlet of the pressure indicator 3 through a control air pipe 6, and an air outlet pipe 7 is connected with an air outlet of the logic valve 4. A plurality of round holes 11 for the air inlet pipe 5 and the air outlet pipe 7 to pass through are arranged on the rear cover 9 of the shell 1.
In this embodiment, the rear cover 9 is provided with 4 circular holes, and the 4 circular holes are respectively distributed on four corners of the rear cover 9.
The special gas cabinet comprises the manual control device, the free end of the gas inlet pipe 5 of the manual control device is connected with the gas source 14, the free end of the gas outlet pipe is connected with the pneumatic valve 12 in the special gas cabinet, the second gas inlet of the logic valve 4 is connected with the gas outlet of the electromagnetic valve 13 in the special gas cabinet, and the gas inlet of the electromagnetic valve 13 is connected with the gas source 14.
Preferably, the hand control devices are arranged on opposite inner side walls of the special gas cabinet, and each inner side wall is provided with one hand control device.
In use, the controller of the special gas cabinet energizes the solenoid valve 13, the solenoid valve 13 opens, and special gas is transmitted to the pneumatic valve 12 through the solenoid valve 13 and the logic gate 4. When the operator manually pulls the manual valve 2 to open the manual valve 2, the special air respectively enters the logic valve 4 and the pressure indicator 3 through the pipeline, and the logic valve 4 transmits the special air to the pneumatic valve 12.
The hand control device of the application is only provided with the hand control valve 2 and the pressure indicator 3, and misoperation caused by too many hand control valves 2 can be avoided, so that the indicating lamp is mistakenly indicated, meanwhile, the connecting pipeline of the hand control device can be simplified, and the work of later maintenance, overhaul and the like is facilitated.
The side surface of the shell 1 is provided with the concave part 10, the manual control valve 2 and the pressure indicator 3 are clamped in the concave part 10, when other parts in the special gas cabinet are operated, the manual control valve 2 can be prevented from being touched by mistake to interfere the normal control of the special gas cabinet, and unnecessary production loss is avoided.
The above description is only a preferred embodiment of the present invention, and should not be taken as limiting the invention, and any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (8)
1. A hand control device is characterized by comprising
A housing (1);
a manual valve (2) and a pressure indicator (3) which are arranged on the outer side surface of the shell (1);
and a logic valve (4) disposed within the housing (1);
the air inlet of the manual valve (2) is connected with an air inlet pipe (5) connected with an air source, the air outlet of the manual valve (2) is connected with a first air inlet of the logic valve (4) and the air inlet of the pressure indicator (3) through a control air pipe (6), and the air outlet of the logic valve (4) is connected with an air outlet pipe (7).
2. The hand control according to claim 1, characterized in that the housing (1) comprises a front shell (8) and a rear cover (9), the front shell (8) being an inner hollow box with an open rear end face, the rear cover (9) being mounted on the rear end face of the front shell (8), one side of the front shell (8) being provided with an inwardly recessed recess (10), the hand control valve (2) and the pressure indicator (3) being snapped into the recess (10).
3. A handset according to claim 2, characterized in that the recess depth of the recess (10) is not less than the vertical height of the manual valve (2).
4. The hand control according to claim 2, characterised in that the back cover (9) is provided with a plurality of circular holes (11) through which the inlet and outlet pipes can pass.
5. A handset according to claim 4, characterized in that the circular holes (11) are provided with 4, 4 circular holes distributed in each case at the four corners of the back cover (9).
6. A hand control according to claim 1, characterised in that the logic valve (4) is an or gate logic valve.
7. A special gas cabinet, characterized in that, comprising a hand control device according to any one of claims 1-6, the free end of the inlet pipe (5) of the hand control device is connected with a gas source, the free end of the outlet pipe (7) is connected with a pneumatic valve (12) in the special gas cabinet, the second inlet of the logic valve (4) is connected with the outlet of a solenoid valve (13), and the inlet of the solenoid valve (13) is connected with a gas source (14).
8. A special gas cabinet according to claim 7, characterized in that the hand control is mounted on opposite inner side walls of the special gas cabinet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921022570.5U CN210567514U (en) | 2019-07-03 | 2019-07-03 | Hand control device and special gas cabinet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921022570.5U CN210567514U (en) | 2019-07-03 | 2019-07-03 | Hand control device and special gas cabinet |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210567514U true CN210567514U (en) | 2020-05-19 |
Family
ID=70641886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921022570.5U Active CN210567514U (en) | 2019-07-03 | 2019-07-03 | Hand control device and special gas cabinet |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN210567514U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113432038A (en) * | 2021-06-10 | 2021-09-24 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
-
2019
- 2019-07-03 CN CN201921022570.5U patent/CN210567514U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113432038A (en) * | 2021-06-10 | 2021-09-24 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
| CN113432038B (en) * | 2021-06-10 | 2023-01-17 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN210567514U (en) | Hand control device and special gas cabinet | |
| CN218970136U (en) | Adjustable stainless steel automatic water supply tank | |
| CN217403722U (en) | Automatic inspection device for process area of natural gas station | |
| CN210800028U (en) | High-efficiency energy-saving high-pressure-resistant pressure container | |
| CN212476091U (en) | Automatic coolant replacing device | |
| CN100577254C (en) | Intelligent testing and warning system for obstruction of air filtering case of large-scale air cooling generator | |
| CN209014545U (en) | A kind of gas-detecting device with cleaning function | |
| CN211599677U (en) | Intelligent control valve | |
| CN112067571A (en) | Gas concentration calibration testing machine | |
| CN216041491U (en) | Water supply system with intelligent monitoring | |
| CN214538405U (en) | Vacuum test equipment | |
| CN212226715U (en) | High-precision filtering device for pressure regulating pry and pressure regulating pry | |
| CN220061449U (en) | Inlet pipeline system of gas tank | |
| CN215777248U (en) | Full-automatic intelligent water inlet electric steam box | |
| CN219352106U (en) | Electric cabinet in fire-fighting box | |
| CN221593172U (en) | Pressure detection mechanism for expansion water tank of wall-mounted furnace | |
| CN220228032U (en) | Self-closing pressure-adjustable gas self-closing valve | |
| CN220379472U (en) | Combustible gas alarm cutting device | |
| CN211205675U (en) | Differential pressure leakage detection device for heat transfer pipe of nuclear power plant | |
| CN220870212U (en) | Touch type tap | |
| CN217708890U (en) | Air pressure oil pumping device | |
| CN217567980U (en) | Filter core pulse blowback filter core solenoid valve device | |
| CN213542078U (en) | Intelligent fluid chemical supply system | |
| CN219779483U (en) | Electric control cabinet of vacuum coating equipment and vacuum coating system | |
| CN215529206U (en) | Automatic abnormal water supply monitoring device for building |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | "change of name, title or address" | ||
| CP03 | "change of name, title or address" |
Address after: 200000 floor 3 and 4, building 2, 170 Zihai Road, Minhang District, Shanghai Patentee after: Shanghai Zhichun system integration Co.,Ltd. Patentee after: PURE & CLEAN PROCESS SYSTEMS Co.,Ltd. Address before: 200241 floor 3 and 4, building 2, 170 Zihai Road, Minhang District, Shanghai Patentee before: ZHILI ELECTROMECHANICAL EQUIPMENT (SHANGHAI) Co.,Ltd. Patentee before: PURE & CLEAN PROCESS SYSTEMS Co.,Ltd. |