CN212963883U - Gas holder leakage detection device for semiconductor equipment - Google Patents
Gas holder leakage detection device for semiconductor equipment Download PDFInfo
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- CN212963883U CN212963883U CN202022199111.3U CN202022199111U CN212963883U CN 212963883 U CN212963883 U CN 212963883U CN 202022199111 U CN202022199111 U CN 202022199111U CN 212963883 U CN212963883 U CN 212963883U
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- gas holder
- semiconductor equipment
- bearing part
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Abstract
The utility model discloses a semiconductor equipment gas holder leak detection device, include: the fixing part is arranged at the side of the inner side wall of the exhaust pipe of the gas holder of the semiconductor equipment and is used for fixing the bearing part; the bearing part is used for bearing detection particles and is positioned above the gas holder of the semiconductor equipment; a plurality of detection particles, which are acidic detection indicators, which change color when subjected to acidity. The utility model discloses the acid indicator discolours and can in time be discover by security personnel, can compensate the detection blank region outside the detector warning lower limit scope, avoids because environmental hazard and equipment damage that chlorine leaked the cause a little.
Description
Technical Field
The utility model relates to an integrated circuit makes the field, especially relates to a chlorine supplies leakage detection device of semiconductor equipment gas holder among integrated circuit chip manufacturing process.
Background
In the integrated circuit chip manufacturing process, chlorine gas is supplied to a gas holder of the equipment from a plant service end, flows to a cavity through a gas flowmeter and a valve inside the gas holder, is subjected to a process reaction, is discharged from the cavity to a harm removal barrel through a molecular pump and a dry pump, and finally enters a waste gas pipeline, and the process is shown in figure 1.
Chlorine gas is corrosive and toxic, and daily detection of leakage of chlorine gas is required in daily production. In the daily detection of production, the equipment side: performing cavity leakage detection and gas flowmeter deviation test, wherein the cavity leakage rate standard is lower than 1.5 mTorr per minute, and the gas flowmeter deviation standard is within +/-3%; a service end: referring to fig. 2, it can be known from the structure of the gas holder that the negative pressure exhaust duct is arranged on the gas holder frame by the factory, so that the internal pressure of the gas holder is slightly lower than the external atmospheric pressure, and the gas sampling point is arranged in the exhaust duct, when the gas concentration exceeds the alarm line of the detector, the gas supply is automatically cut off, and the sound and light alarm is sent out, and the alarm lower limit of the gas detector is set to be 0.5 ppm.
However, in actual production, when the chlorine pipeline or the valve inside the gas holder leaks slightly: the method is smaller than the deviation range of +/-3% of the flowmeter, and when the leakage concentration is lower than 0.5ppm, the method cannot be reflected in cavity leakage rate monitoring, and the daily detection methods of the equipment end and the plant end cannot be found in time. The chlorine gas with trace leakage can cause harm to production equipment and environment after being accumulated for a long time, and the trace leakage needs to be found and maintained in time.
SUMMERY OF THE UTILITY MODEL
In the summary section, a series of simplified form concepts are introduced, which are simplifications of the prior art in this field, and which will be further detailed in the detailed description section. The inventive content does not imply any attempt to define the essential features and essential features of the claimed solution, nor is it implied to be intended to define the scope of the claimed solution.
The to-be-solved technical problem of the utility model is to provide a detection device that can in time accurately discover that the interior chlorine trace of semiconductor equipment gas holder (the concentration of leaking is less than 0.5ppm) leaks.
In order to solve the technical problem, the utility model provides a semiconductor device gas holder leak testing device, include:
the fixing part is arranged on the inner side wall of the exhaust pipe of the gas holder of the semiconductor equipment and is used for fixing the bearing part;
the bearing part is used for bearing detection particles and is positioned above the gas holder of the semiconductor equipment;
a plurality of detection particles, which are acidic detection indicators, which change color when subjected to acidity.
Optionally, the leakage detection device for the gas holder of the semiconductor device is further improved, and the fixing part is a bracket with one end fixed on the inner side wall of the exhaust pipe of the gas holder of the semiconductor device.
Optionally, the leakage detection device for the gas holder of the semiconductor equipment is further improved, and the bearing part is formed into a transparent tubular structure, and the top and the bottom of the bearing part are formed with a ventilating top cover and a ventilating bottom plate.
Optionally, the gas holder leakage detection device of the semiconductor equipment is further improved, and the top cover and the bottom plate are filter screens.
Optionally, the leakage detection device for the gas holder of the semiconductor equipment is further improved, and the diameter of the bearing part ranges from 10mm to 30mm, and the length ranges from 50mm to 150 mm.
Optionally, the gas holder leakage detection device for the semiconductor equipment is further improved, and the bearing part and the filter screen are made of quartz, tetrafluoroethylene or a phenolic vinyl resin.
Optionally, the leakage detection device for the semiconductor equipment gas holder is further improved, wherein the height range of the bearing part from the top wall of the semiconductor equipment gas holder is 10mm-300mm, and the distance from the bearing part to the exhaust duct is 10mm-50 mm.
Optionally, the gas holder leakage detection device for the semiconductor equipment is further improved, the detection particles are spherical, the inside of the detection particles is Al2O3 adsorbent, and the outer surface of the detection particles is provided with a bromophenol blue PH indicator coating.
Optionally, the gas holder leakage detection device for the semiconductor equipment is further improved, and the number of the detected particles ranges from 1 particle to 20 particles.
According to the chemical principle, the chlorine gas has the characteristics that Cl2+ H2O is approximately equal to HCl + HClO, namely, the chlorine gas is mixed with water vapor in the air to form hydrochloric acid and hypochlorous acid which is acidic. When a trace amount (lower than the alarm lower limit of the detector, for example, the leakage concentration is lower than 0.5ppm) of chlorine gas leaks in the gas holder, the detection alarm does not alarm and is easy to ignore. The utility model discloses a position that is close to the exhaust pipe at the air exit side of gas holder sets up the acid indicator, adsorbs the chlorine reactant (hydrochloric acid and hypochlorous acid) of leakage, and the colour change of periodic observation indicator can learn whether there is the chlorine trace to leak. Even if trace chlorine leaks, the color change of the acid indicator can be found by security personnel in time under the accumulation of a certain time (such as 5 days to 15 days). The utility model discloses can compensate the detection blank region outside the detector warning lower limit scope, avoid because environmental hazard and the equipment damage that chlorine leaked the cause a little.
Drawings
The drawings of the present application are intended to illustrate the general nature of methods, structures and/or materials used in accordance with certain exemplary embodiments of the present application, and to supplement the description presented in the specification. The drawings of the present invention, however, are not to scale and may not accurately reflect the precise structural or performance characteristics of any given embodiment, and should not be construed as limiting or restricting the scope of numerical values or attributes encompassed by exemplary embodiments in accordance with the present invention. The present invention will be described in further detail with reference to the following detailed description and accompanying drawings:
FIG. 1 is a schematic diagram of gas flow during an integrated circuit fabrication process.
FIG. 2 is a schematic diagram of the gas exhausting and sampling structure of the gas holder of the conventional semiconductor device
Fig. 3 is a schematic view of the overall structure of the present invention.
Fig. 4 is a partial enlarged view of the present invention.
Description of the reference numerals
The arrows being the direction of air flow
A is a gas holder of semiconductor equipment
B is a semiconductor device chamber
C is a dry pump
D is a barrel for removing harmful substances
a is a manufacturer detector
b is a leakage detection device for gas holder of semiconductor equipment
1 is a fixed part
2 is a gas tank exhaust pipe of semiconductor equipment
3 is a bearing part
3.1 is a roof
3.2 is a base plate
And 4 is a detection particle.
Detailed Description
The following description of the embodiments of the present invention is provided by way of specific examples, and other advantages and technical effects of the present invention will be fully apparent to those skilled in the art from the disclosure of the present invention. The utility model discloses can also implement or use through different embodiment, each item detail in this specification can also be used based on different viewpoints, carries out various decorations or changes under the general design thought that does not deviate from the utility model. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict. The following exemplary embodiments of the present invention may be embodied in many different forms and should not be construed as limited to the specific embodiments set forth herein. It is to be understood that these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of these exemplary embodiments to those skilled in the art.
It will be understood that when an element is referred to as being "connected" or "coupled" to another element, it can be directly connected or coupled to the other element or intervening elements may be present. In contrast, when an element is referred to as being "directly connected" or "directly coupled" to another element, there are no intervening elements present. Like reference numerals refer to like elements throughout the drawings.
In a first embodiment, as shown in fig. 3 and 4, a gas holder leakage detecting apparatus b for a semiconductor device includes:
the fixing part 1 is arranged at the side of the inner side wall of the exhaust pipe 2 of the gas holder of the semiconductor equipment and is used for fixing the bearing part 3;
a carrier 3 for carrying detection particles 4, which is located above the gas holder of the semiconductor device;
a plurality of detection particles 4, which are acidic detection indicators, which change color when subjected to acidity.
Second embodiment, continuing from fig. 3 with fig. 4, a gas holder leakage detecting apparatus b for a semiconductor device includes:
the fixing part 1 is arranged at the side of the inner side wall of the exhaust pipe 2 of the semiconductor equipment gas holder, one end of the fixing part 1 is a bracket fixed at the inner side wall of the exhaust pipe 2 of the semiconductor equipment gas holder, and the other end of the fixing part is used for fixing the bearing part 3;
a carrier 3 for carrying detection particles 4, the carrier 3 being formed in a transparent tubular structure, the top and bottom of which are formed with a gas-permeable top cover and a bottom plate; the transparent tubular structure is designed to facilitate the observation of the color change condition of the detected particles by a detector, and is positioned above the gas holder of the semiconductor equipment;
a plurality of detection particles 4, which are acidic detection indicators, which change color when subjected to acidity.
Third embodiment, continuing from fig. 3 with fig. 4, a gas holder leakage detecting apparatus b for a semiconductor device includes:
the fixing part 1 is arranged at the side of the inner side wall of the exhaust pipe 2 of the semiconductor equipment gas holder, one end of the fixing part 1 is a bracket fixed at the inner side wall of the exhaust pipe 2 of the semiconductor equipment gas holder, and the other end of the fixing part is used for fixing the bearing part 3;
a carrier 3 for carrying detection particles 4, the carrier 3 being formed in a transparent tubular structure, the top and bottom of which are formed with a gas-permeable top cover and a bottom plate; the transparent tubular structure is designed to facilitate the observation of the color change condition of the detected particles by a detector, and is positioned above a gas holder of the semiconductor equipment, and the top cover 3.1 and the bottom plate are filter screens 3.2; the diameter of the bearing part is 10mm-30mm, the preferred diameter is 15mm, 20mm or 25mm, the length is 50mm-150mm, the length is preferably 50mm, 60mm, 70mm, 80mm, 90mm, 100mm, 110mm, 120mm, 130mm or 140 mm; the height of the bearing part from the top wall of the gas holder of the semiconductor equipment is 1CM-30CM, the height is preferably 5CM, 10CM, 15CM, 20CM or 25CM, the distance from the exhaust pipe is 1CM-5CM, the distance is preferably 2CM, 3CM or 4CM, and the bearing part 3 and the filter screens 3.1 and 3.2 are made of quartz, tetrafluoroethylene or phenolic resin;
1-25 detection particles 4, which are acidic detection indicators, change color when exposed to acidity. Among them, the number of the detection particles is preferably 5, 10, 15 or 20.
Optionally, the detection particles are spherical, have an Al2O3 adsorbent therein, and have a bromophenol blue pH indicator coating formed on the outer surface thereof.
Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.
The present invention has been described in detail with reference to the specific embodiments and examples, but these should not be construed as limitations of the present invention. Numerous variations and modifications can be made by those skilled in the art without departing from the principles of the invention, which should also be considered as within the scope of the invention.
Claims (9)
1. A gas holder leakage detection device for semiconductor equipment, comprising:
the fixing part is arranged beside the inner side wall of the exhaust pipe of the gas holder of the semiconductor equipment and is used for fixing the bearing part;
the bearing part is used for bearing detection particles and is positioned on the inner side of the exhaust pipe above the gas holder of the semiconductor equipment;
a plurality of detection particles, which are acidic detection indicators, which change color when subjected to acidity.
2. The semiconductor equipment gas holder leak detection apparatus according to claim 1, characterized in that: the fixed part is a bracket with one end fixed on the inner side wall of the exhaust pipe of the gas holder of the semiconductor equipment.
3. The semiconductor equipment gas holder leak detection apparatus according to claim 1, characterized in that: the bearing part is formed into a transparent tubular structure, and the top and the bottom of the bearing part are formed with a ventilating top cover and a ventilating bottom plate.
4. The semiconductor equipment gas holder leak detection apparatus according to claim 3, characterized in that: the top cover and the bottom plate are filter screens.
5. The semiconductor equipment gas holder leak detection apparatus according to claim 3, characterized in that: the diameter of the bearing part ranges from 10mm to 30mm, and the length ranges from 50mm to 150 mm.
6. The semiconductor equipment gas holder leak detection apparatus according to claim 4, characterized in that: the bearing part and the filter screen are made of quartz, tetrafluoroethylene or phenolic resin.
7. The semiconductor equipment gas holder leak detection apparatus according to claim 1, characterized in that: the height range of the bearing part from the top wall of the gas cabinet of the semiconductor equipment is 10mm-300mm, and the distance from the bearing part to the exhaust pipe is 10mm-50 mm.
8. The semiconductor equipment gas holder leak detection apparatus according to claim 1, characterized in that: the detection particles are spherical, the inside of the detection particles is Al2O3 adsorbent, and the outer surfaces of the detection particles are provided with bromophenol blue PH indicator coatings.
9. The semiconductor equipment gas holder leak detection apparatus according to claim 1, characterized in that: the number of the detection particles ranges from 1 to 20.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022199111.3U CN212963883U (en) | 2020-09-30 | 2020-09-30 | Gas holder leakage detection device for semiconductor equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202022199111.3U CN212963883U (en) | 2020-09-30 | 2020-09-30 | Gas holder leakage detection device for semiconductor equipment |
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| Publication Number | Publication Date |
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| CN212963883U true CN212963883U (en) | 2021-04-13 |
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| CN202022199111.3U Active CN212963883U (en) | 2020-09-30 | 2020-09-30 | Gas holder leakage detection device for semiconductor equipment |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113432038A (en) * | 2021-06-10 | 2021-09-24 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
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2020
- 2020-09-30 CN CN202022199111.3U patent/CN212963883U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113432038A (en) * | 2021-06-10 | 2021-09-24 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
| CN113432038B (en) * | 2021-06-10 | 2023-01-17 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
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