CN205877729U - Pipeline equipment - Google Patents
Pipeline equipment Download PDFInfo
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- CN205877729U CN205877729U CN201620786615.6U CN201620786615U CN205877729U CN 205877729 U CN205877729 U CN 205877729U CN 201620786615 U CN201620786615 U CN 201620786615U CN 205877729 U CN205877729 U CN 205877729U
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- housing
- sealing strip
- inclusion enclave
- groove
- line segments
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Abstract
The utility model discloses a pipeline equipment, the device include by detecting tube highway section (100) cladding and form inclusion enclave (1) of annular seal, follow by detecting tube highway section (100) axis extend inclusion enclave (1), the internal face of inclusion enclave (1) and left holding gaseous space (2) between the outer wall in detecting tube highway section (100), inclusion enclave (1) both ends all are equipped with the holding by through -hole (3) in detecting tube highway section (100), be equipped with whether the monitoring was produced the leakage by detecting tube highway section (100) gas leakage induction system (4) on inclusion enclave (1), gas leakage induction system (4) are connected with external controller electricity. After adopting this kind of structure, provide one kind and can carry out gas leak detection and warning, can realize again arriving appointed place with the gas outgoing who leaks, realize the pipeline equipment of the whole control of pipeline joint, welding seam and pipeline itself simultaneously.
Description
Technical field
This utility model relates to pipeline detection technique field, is specifically related to a kind of pipeline leakage detection device.
Background technology
Common pipeline or system airtight test are usually the most in a non-operative state to pipeline or the welding of system or connect
Head position carries out airtight test, it is achieved method includes bubble method, soap lye method, pressurize method, helium mass spectrum leak detection method, differential pressure method, true
Empty method etc..But, the pressure duct of duty is constantly in QI invigorating state, and a small amount of leakage can not be by the small change of pressure
Change and embody.So, said method is not all suitable for duty pressure duct leakage monitoring.
The leakage of monitoring state gas pipeline can use gas leakage sensor to realize for gaseous species, such as passes
The pipeline of oxygen transfer can arrange a number of oxygen concentration sensor producing near the pipeline of leakage, leaks
Time environment in oxygen concentration raise reach oxygen concentration sensor set warning concentration after, alarm sound can be sent.But
This method there is also some drawbacks.First, it is impossible to the gas that main line leaks is discharged to given place, if gas is for having
Poison or environment and personnel are had injury, that can not use this kind of method；It addition, if environment space is relatively big, and leakage
Measuring less, Sensor monitoring has serious delayed, even cannot detect leakage phenomenon；If pipeline is longer, pipeline connects
Head and weld seam are too much, then need to arrange substantial amounts of sensor, system complex and can not being accurately positioned on the intensive pipeline of joint
Leakage point.
Pipeline leakage monitoring also can use soundwave leakage detection method.Soundwave leakage detection method can produce based on dielectric leakage and make an uproar
The principle work of sound.Owing to tube wall fetters, leaks sound spreads in the duct, thus any point all can produce pressure on pipeline
Fluctuation or vibration, can detect this phenomenon by sonic sensor.But need also exist for substantial amounts of sensor, be used for buried gas
Pipeline.Safeguarding inconvenience after sensor is buried, the acquisition of signal is more complicated with process.
Should carry out Leakage inspection and warning, the gas realizing will leak out again is discharged to the requirement of given place,
Realize the own complete monitoring of pipe joint, weld seam and pipeline simultaneously.This is that those skilled in the art are badly in need of solving the technical problem that.
Utility model content
Technical problem to be solved in the utility model is to provide one can carry out Leakage inspection and warning, again
The gas that can realize will leak out is discharged to given place, realizes the pipe of the complete monitoring of pipe joint, weld seam and pipeline own simultaneously
Road leak detecting device.
For solving above-mentioned technical problem, detected line segments is coated with and forms annular seal of the present utility model including
Inclusion enclave；Described inclusion enclave extends along detected line segments axis, outside the internal face of described inclusion enclave is with detected line segments
The space of accommodating gas is left between wall；Inclusion enclave two ends are equipped with the through hole of accommodating detected line segments；Inclusion enclave is with tested
Test tube section in through hole for being tightly connected；Inclusion enclave is provided with whether the detected line segments of monitoring produces the gas leakage of leakage
Induction installation；Gas leakage induction installation electrically connects with external controller.
After using above structure, this utility model has the advantage that inclusion enclave can realize gases at high pressure conveying pipe
Road seals, segmentation on the basis of weld seam or joint, forms independent sealing cavity.Every section of cavity is respectively provided with gas leakage sense
Answer device, it is ensured that arbitrary pipeline section is once revealed, warning system can be started as early as possible, the line segments that accurately prompting is revealed, carry
Show that staff overhauls.
Described inclusion enclave includes the first housing, the second housing and sealing strip；First housing and the second housing central section are equipped with
Two ends of cavity, the first housing and the second housing are equipped with recess, and the first housing and the docking of the second housing, two housings docks
After, cavity forms space, and described recess forms perforation；First housing and the second housing are on the end face of docking and the wall of recess
Being provided with the groove accommodating sealing strip, the groove on end face and the groove on the wall of recess form a circle；Sealing strip is connected to recessed
In groove, the first housing and the second housing be provided with cooperate so that the first housing and the second housing docking closing component structure.This
Sample, inclusion enclave is formed by the first housing, the second housing docking, in that context it may be convenient to inclusion enclave is arranged on detected line segments, or
Person is convenient after finding to reveal to be disassembled from detected line segments.
Described sealing strip includes the flat segments being contained in the groove of the end face of the first housing and is contained in the recessed of indent
Circle section on the wall of groove；Circle section is provided with fracture；Flat segments and circle section are connected as a single entity；The inner side of circle section is with tested
Test tube road surfaces is fitted, and the outside of circle section forms hermetic seal with the groove laminating of indent and is connected.So, circle section is from disconnected
Mouth opens rear enclosure in detected line segments, and flat segments in the grooves, both can realize hermetic seal function, and facilitate again inclusion enclave
Installation.
The structure of sealing strip can also be: described sealing strip includes the first sealing strip being contained in the groove of the first housing
With the second sealing strip in the groove of the indent being located at the second housing；The two ends of the second sealing strip and the surface of the first sealing strip
Laminating；First sealing strip is positioned at one section of the groove of the indent of the first housing and is formed detected pipeline with the second sealing strip
The sealing ring that section seals with inclusion enclave.So, when mounted, the first sealing strip is first fixed on the first housing, the second sealing strip
If on the second housing, the first housing and the docking of the second housing i.e. form hermetic seal and connect, and improve installation effectiveness.
The side of the groove laminating on the end face of described sealing strip and the first housing is plane, and the opposite side of sealing strip is
Arcwall face；Described arcwall face is provided with multiple projection.So, projection can increase deflection when being squeezed, and makes sealing effectiveness
More preferably.
Described closing component structure includes the snap hook being located on the first housing, sets tension seat on the second housing, U-shaped pulling buckle
And nut；U-shaped pulling buckle two is respectively provided with screw thread, and tension seat is provided with pulling buckle perforation；U-shaped pulling buckle and snap hook clamping and U
Two of type pulling buckle is through pulling buckle perforation and nut screwing clamping.So, the common work of snap hook, tension seat, U-shaped pulling buckle and nut
With making the first housing and the second housing Guan Bi and sealing.
It is additionally provided with the gas that will leak out on described inclusion enclave and drains into the exhaust structure of appointed place.
Described exhaust structure includes the trachea being located on inclusion enclave, and trachea connects with space, and trachea is provided with air discharge cook.
So, the gas that trachea can just be revealed is discharged to given place, it is to avoid the gas of leakage flows in working environment, prevents
The gas revealed is to environment and the injury of personnel.
Certainly, exhaust structure is it may also is that described exhaust structure includes the trachea being located on inclusion enclave, and trachea is with space even
Logical, trachea is provided with electromagnetic valve, and electromagnetic valve is electrically connected with the controller.In this manner it is achieved that remotely operate.
Another object of the present utility model is to provide a kind of pipeline leakage detection method, and it comprises the following steps:
1) by gas transfer pipeline segmentation on the basis of weld seam or joint of whole equipment；Every section of pipeline comprise weld seam and/
Or joint；Every section of pipeline is detected line segments；
2) detected line segments all it is coated with inclusion enclave and fastens；
3) each inclusion enclave and gas therein are leaked induction installation reference numeral；
4) the high alarm setting value of each gas leakage induction installation is set；
5) start controller, make each gas leakage induction installation be in detection state；
6) when the detected value of gas leakage induction installation exceedes high alarm setting value, prompting is revealed and is reported to the police；
7) hear when leakage is reported to the police, close the fluid in gas transfer pipeline；
8) open air discharge cook, the gas of leakage is drained into specified point；
9) open a parcel body, the pipeline revealed is repaired.
Accompanying drawing explanation
Fig. 1 is the structural representation of this utility model pipeline leakage detection device.
Fig. 2 is the exploded perspective view of this utility model pipeline leakage detection device.
Fig. 3 is the structural representation of the first housing in this utility model pipeline leakage detection device.
Fig. 4 is the structural representation of sealing strip in this utility model pipeline leakage detection device.
Fig. 5 is another structural representation of the sealing strip in this utility model pipeline leakage detection device.
Fig. 6 is the cross sectional representation of the sealing strip in this utility model pipeline leakage detection device.
Fig. 7 is this utility model pipeline leakage detection device structural representation when being applied to tee T junction.
Fig. 8 is this utility model pipeline leakage detection device structural representation when being applied to bend pipe junction.
Wherein:
100, detected line segments；1, inclusion enclave；1.1, the first housing；1.2, the second housing；1.3, sealing strip；1.31、
Flat segments；1.32, circle section；1.33, the first sealing strip；1.34, the second sealing strip；1.4, cavity；1.5, recess；1.6, end
Face；1.7, groove；2, space；3, perforation；4, gas leakage induction installation；5, snap hook；6, tension seat；7, U-shaped pulling buckle；8, spiral shell
Female；9, protruding；10, trachea；11, air discharge cook.
Detailed description of the invention
With detailed description of the invention, utility model is described in more detail below in conjunction with the accompanying drawings.
See shown in accompanying drawing 1 to accompanying drawing 8, a kind of pipeline leakage detection device, it is coated with also including by detected line segments 100
Form the inclusion enclave 1 of annular seal；Described inclusion enclave 1 extends along detected line segments 100 axis, the inwall of described inclusion enclave 1
The space 2 of accommodating gas is left between the outer wall of face and detected line segments 100；Inclusion enclave 1 two ends are equipped with accommodating detected
The through hole 3 of line segments 100；Inclusion enclave 1 and detected line segments 100 at through hole 3 for being tightly connected；Inclusion enclave 1 is provided with prison
Survey whether detected line segments 100 produces the gas leakage induction installation 4 of leakage；Gas leakage induction installation 4 and external control
Device processed electrically connects.In the present embodiment, gas leakage induction installation 4 is the micro-pressure sensor of air pressure change in monitoring space 2, works as sky
Between in 2 air pressure change exceed the setting value of micro-pressure sensor, then report to the police.Certainly, gas leakage induction installation 4 can also is that pressure
Switch or the gas concentration sensor etc. matched with the fluid in detected line segments 100.
Detected line segments 100 is defined as: the gas transfer pipeline of the equipment of supply will be needed with weld seam or joint as base
Quasi-segmentation；Comprising weld seam and/or joint in every section of pipeline, every section of pipeline is detected line segments 100.Due to weld seam or joint
At the place's easy leakage for equipment, so the line segments with weld seam and/or joint is coated with as benchmark section inclusion enclave 1.
Described inclusion enclave 1 includes the first housing the 1.1, second housing 1.2 and sealing strip 1.3；First housing 1.1 and the second shell
Being equipped with cavity 1.4 in the middle part of body 1.2, two ends of the first housing 1.1 and the second housing 1.2 are equipped with recess 1.5, the first shell
Body 1.1 and the second housing 1.2 dock, and after two housings docking, cavity 1.4 forms space 2, and described recess 1.5 forms through hole 3；The
One housing 1.1 and the second housing 1.2 are provided with the groove accommodating sealing strip 1.3 on the end face 1.6 of docking and the wall of recess 1.5
1.7, the groove 1.7 on end face 1.6 and the groove 1.7 on the wall of recess 1.5 form a circle；Sealing strip 1.3 is connected to groove
In 1.7, the first housing 1.1 and the second housing 1.2 are provided with and cooperate so that the first housing 1.1 and the second housing 1.2 dock
Closing component structure.
Such as Fig. 4, described sealing strip 1.3 includes the flat segments being contained in the groove 1.7 of the end face 1.6 of the first housing 1.1
1.31 and the circle section 1.32 that is contained on the wall of the groove 1.7 at recess 1.5；Circle section 1.32 is provided with fracture；Straight
Section 1.31 and circle section 1.32 are connected as a single entity；Fit with detected line segments 100 surface in the inner side of circle section 1.32, circle section
The outside of 1.32 forms hermetic seal with groove 1.7 laminating at recess 1.5 and is connected.
Such as Fig. 5, sealing strip 1.3 can also is that following structure: described sealing strip 1.3 includes being contained in the first housing 1.1
The first sealing strip 1.33 in groove 1.7 and the second sealing strip being located in the groove 1.7 at the recess 1.5 of the second housing 1.2
1.34；The surface laminating of the two ends of the second sealing strip 1.34 and the first sealing strip 1.33；First sealing strip 1.33 is positioned at the first shell
At the recess 1.5 of body 1.1 one section in groove 1.7 and the second sealing strip 1.34 are formed detected line segments 100 and parcel
The sealing ring that body 1 seals.
The side that described sealing strip 1.3 is fitted with the groove 1.7 on the end face 1.6 of the first housing 1.1 is plane, seals
The opposite side of bar 1.3 is arcwall face 12；Described arcwall face 12 is provided with multiple protruding 9.
Described closing component structure includes the snap hook 5 being located on the first housing 1.1, the tension seat being located on the second housing 1.2
6, U-shaped pulling buckle 7 and nut 8；U-shaped pulling buckle 7 two is respectively provided with screw thread, and tension seat 6 is provided with pulling buckle perforation 6.1；U-shaped pulling buckle 7
Tighten with nut 8 through pulling buckle perforation 6.1 with two of snap hook 5 clamping and U-shaped pulling buckle 7.
It is additionally provided with, on described inclusion enclave 1, the gas that will leak out and drains into the exhaust structure of appointed place.
Described exhaust structure includes the trachea 10 being located on inclusion enclave 1, and trachea 10 connects with space 2, and trachea 10 is provided with
Air discharge cook 11.
Certainly, exhaust structure it may also is that described exhaust structure includes the trachea 10 being located on inclusion enclave 1, trachea 10 with
Space 2 connects, and trachea 10 is provided with electromagnetic valve, and electromagnetic valve is electrically connected with the controller.In this manner it is achieved that remotely operate.
Trachea 10 connects with gas collector.Gas collector is a gas container.So, the gas of leakage passes through gas
Pipe 10 is discharged in gas collector.Or trachea 10 leads to unmanned place.
Such as Fig. 7, when needing the gas transfer pipeline of equipment of supply to have tee T line segments, composition inclusion enclave 1
The structure of the first housing 1.1 and the second housing 1.2 matches with tee T line segments, and now inclusion enclave 1 has three perforation 3.
So, this utility model can meet the use requirement of tee T line segments.
Such as Fig. 8, when needing the gas transfer pipeline of equipment of supply to have bend pipe line segments, the of composition inclusion enclave 1
The structure of one housing 1.1 and the second housing 1.2 matches with bend pipe line segments, and so, this utility model can meet bend pipe pipe
The use requirement in section.
A kind of pipeline leakage detection method, it comprises the following steps:
1) by gas transfer pipeline segmentation on the basis of weld seam or joint of whole equipment；Every section of pipeline comprise weld seam and/
Or joint；Every section of pipeline is detected line segments 100；
2) detected line segments 100 is all coated with inclusion enclave 1 and fastens；
3) each inclusion enclave 1 and gas therein are leaked induction installation 4 reference numeral；
4) the high alarm setting value of each gas leakage induction installation 4 is set；
5) start controller, make each gas leakage induction installation 4 be in detection state；
6) when the detected value of gas leakage induction installation 4 exceedes high alarm setting value, prompting is revealed and is reported to the police；
7) hear when leakage is reported to the police, close the fluid in gas transfer pipeline；
8) open air discharge cook 11, the gas of leakage is drained into specified point；
9) open a parcel body 1, the pipeline revealed is repaired.
Concrete, step 2) it is that sealing strip 1.3 is placed on the first housing 1.1 and the second housing 1.2, by the first housing 1.1
Docking with the second housing 1.2, detected line segments 100 is sealed by the first housing 1.1 and the second housing 1.2.
Using above-mentioned pipeline leakage detection method, inclusion enclave 1 can realize sealing means for high-pressure gas pipeline, with
Segmentation on the basis of weld seam or joint, forms independent sealing cavity.Every section of cavity is respectively provided with gas leakage induction installation, it is ensured that appoint
One pipeline section is once revealed, and can start warning system as early as possible, the line segments that accurately prompting is revealed, prompting staff's inspection
Repair.
Detected line segments 100 all have employed inclusion enclave cladding, and inclusion enclave 1 is additionally provided with exhaust structure.So, when tested
When revealing occurs in test tube section, can the gas of leakage be concentrated in inclusion enclave 1, then be discharged to the gas of leakage specify
Local, it is to avoid the gas of leakage flows in working environment, prevent the gas revealed to environment and the injury of personnel.
The above, be only the most feasible enforcement example of this utility model, it is impossible to the most i.e. limit to of the present utility model
Interest field, for those skilled in the art, all utilization the technical solution of the utility model and technology design are made
Other various corresponding changes all should belong within this utility model scope of the claims.
Claims (8)
1. a pipeline leakage detection device, it is characterised in that: include being coated with and formed ring-type close by detected line segments (100)
The inclusion enclave (1) of envelope；Described inclusion enclave (1) extends along detected line segments (100) axis, the internal face of described inclusion enclave (1)
And leave the space (2) of accommodating gas between the outer wall of detected line segments (100)；Inclusion enclave (1) two ends are equipped with accommodating quilt
The through hole (3) of signal piping section (100)；Inclusion enclave (1) with detected line segments (100) at through hole (3) place for being tightly connected；Bag
Wrap up in body (1) and be provided with whether the detected line segments (100) of monitoring produces gas leakage induction installation (4) of leakage；Gas leaks
Induction installation (4) electrically connects with external controller.
2. detect device according to the pipeline leakage described in claim 1, it is characterised in that: described inclusion enclave (1) includes the first shell
Body (1.1), the second housing (1.2) and sealing strip (1.3)；First housing (1.1) and the second housing (1.2) middle part are equipped with cavity
(1.4), two ends of the first housing (1.1) and the second housing (1.2) are equipped with recess (1.5), the first housing (1.1) and
Two housings (1.2) dock, and after two housings docking, cavity (1.4) forms space (2), and described recess (1.5) forms through hole (3)；The
One housing (1.1) and the second housing (1.2) are provided with receiving sealing strip on the end face (1.6) of docking and the wall of recess (1.5)
(1.3) groove (1.7), the groove (1.7) on end face (1.6) and the groove (1.7) on the wall of recess (1.5) surround one
Circle；In sealing strip (1.3) is connected to groove (1.7), the first housing (1.1) and the second housing (1.2) be provided with cooperate with
Make the closing component structure that the first housing (1.1) and the second housing (1.2) dock.
3. detect device according to the pipeline leakage described in claim 2, it is characterised in that: described sealing strip (1.3) includes accommodating
Flat segments (1.31) in the groove (1.7) of the end face (1.6) of the first housing (1.1) and be contained in the recessed of recess (1.5) place
Circle section (1.32) on the wall of groove (1.7)；Circle section (1.32) is provided with fracture；Flat segments (1.31) and circle section
(1.32) it is connected as a single entity；Fit with detected line segments (100) surface in the inner side of circle section (1.32), outside circle section (1.32)
Side forms hermetic seal with groove (1.7) laminating at recess (1.5) place and is connected.
4. detect device according to the pipeline leakage described in claim 2, it is characterised in that: described sealing strip (1.3) includes accommodating
The first sealing strip (1.33) in the groove (1.7) of the first housing (1.1) and be located at the recess (1.5) of the second housing (1.2)
The second sealing strip (1.34) in the groove (1.7) at place；The two ends of the second sealing strip (1.34) and the first sealing strip (1.33)
Fit in surface；First sealing strip (1.33) be positioned at one section of the groove (1.7) at recess (1.5) place of the first housing (1.1) with
Second sealing strip (1.34) forms the sealing ring detected line segments (100) and inclusion enclave (1) sealed.
5. detect device according to the pipeline leakage described in claim 2, it is characterised in that: described sealing strip (1.3) and the first shell
The side that groove (1.7) on the end face (1.6) of body (1.1) is fitted is plane, and the opposite side of sealing strip (1.3) is arcwall face
(12)；Described arcwall face (12) is provided with multiple projection (9).
6. detect device according to the pipeline leakage described in claim 2, it is characterised in that: described closing component structure includes being located at first
Snap hook (5) on housing (1.1), the tension seat (6) being located on the second housing (1.2), U-shaped pulling buckle (7) and nut (8)；
U-shaped pulling buckle (7) two is respectively provided with screw thread, and tension seat (6) is provided with pulling buckle perforation (6.1)；U-shaped pulling buckle (7) is blocked with snap hook (5)
Connect and two of U-shaped pulling buckle (7) is tightened with nut (8) through pulling buckle perforation (6.1).
7. according to described in claim 1 pipeline leakage detect device, it is characterised in that: be additionally provided with on described inclusion enclave (1) by
The gas of leakage drains into the exhaust structure of appointed place.
8. detect device according to the pipeline leakage described in claim 7, it is characterised in that: described exhaust structure includes being located at parcel
Trachea (10) on body (1), trachea (10) connects with space (2), and trachea (10) is provided with air discharge cook (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620786615.6U CN205877729U (en) | 2016-07-22 | 2016-07-22 | Pipeline equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620786615.6U CN205877729U (en) | 2016-07-22 | 2016-07-22 | Pipeline equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205877729U true CN205877729U (en) | 2017-01-11 |
Family
ID=57698583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620786615.6U Active CN205877729U (en) | 2016-07-22 | 2016-07-22 | Pipeline equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205877729U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106051469A (en) * | 2016-07-22 | 2016-10-26 | 宁波星箭航天机械有限公司 | Pipeline leakage detection device and detection method |
| CN108458198A (en) * | 2018-01-31 | 2018-08-28 | 海宁汉钟机械设备有限公司 | A kind of automobile oil pipe junction protective cover |
| CN110657347A (en) * | 2019-10-11 | 2020-01-07 | 云南电网有限责任公司电力科学研究院 | Hydrogen conveying pipeline |
| CN111720754A (en) * | 2020-07-02 | 2020-09-29 | 中国地震局工程力学研究所 | Gas pipeline leak source detection device |
| CN113432038A (en) * | 2021-06-10 | 2021-09-24 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
-
2016
- 2016-07-22 CN CN201620786615.6U patent/CN205877729U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106051469A (en) * | 2016-07-22 | 2016-10-26 | 宁波星箭航天机械有限公司 | Pipeline leakage detection device and detection method |
| CN108458198A (en) * | 2018-01-31 | 2018-08-28 | 海宁汉钟机械设备有限公司 | A kind of automobile oil pipe junction protective cover |
| CN110657347A (en) * | 2019-10-11 | 2020-01-07 | 云南电网有限责任公司电力科学研究院 | Hydrogen conveying pipeline |
| CN111720754A (en) * | 2020-07-02 | 2020-09-29 | 中国地震局工程力学研究所 | Gas pipeline leak source detection device |
| CN111720754B (en) * | 2020-07-02 | 2022-02-11 | 中国地震局工程力学研究所 | Gas pipeline leak source detection device |
| CN113432038A (en) * | 2021-06-10 | 2021-09-24 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
| CN113432038B (en) * | 2021-06-10 | 2023-01-17 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
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| CP02 | Change in the address of a patent holder |
Address after: Xiyang village, Shiqi street, Haishu District, Ningbo City, Zhejiang Province Patentee after: NINGBO XINGJIAN SPACE MACHINERY Co.,Ltd. Patentee after: Zhu Xudong Address before: No. 369, Wanxing Road, Shiqi street, Yinzhou District, Ningbo City, Zhejiang Province Patentee before: NINGBO XINGJIAN SPACE MACHINERY Co.,Ltd. Patentee before: Zhu Xudong |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20230825 Address after: 315000 Xiyang village, Shiqi street, Haishu District, Ningbo City, Zhejiang Province Patentee after: Star Arrow Technology Co.,Ltd. Address before: Xiyang village, Shiqi street, Haishu District, Ningbo City, Zhejiang Province Patentee before: NINGBO XINGJIAN SPACE MACHINERY Co.,Ltd. Patentee before: Zhu Xudong |