CN102853257A - High-purity and safe special gas cabinet system - Google Patents
High-purity and safe special gas cabinet system Download PDFInfo
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- CN102853257A CN102853257A CN2012103167074A CN201210316707A CN102853257A CN 102853257 A CN102853257 A CN 102853257A CN 2012103167074 A CN2012103167074 A CN 2012103167074A CN 201210316707 A CN201210316707 A CN 201210316707A CN 102853257 A CN102853257 A CN 102853257A
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Abstract
The invention discloses a gas cabinet system, and particularly discloses a high-purity and safe special gas cabinet system which can ensure that a seal connecting part of a pipe joint of a cylinder is clean during the replacing of the cylinder. The high-purity and safe special gas cabinet system comprises a special gas cabinet, a special gas system mounted in the special gas cabinet, a blowing pipeline and a blowing part, wherein the special gas system comprises a cylinder and a pipeline system; the pipeline system comprises a gas supply pipeline, a diluent gas pipeline and a vacuum pumping pipeline; a cylinder pipe joint is arranged on the gas supply pipeline, and the gas supply pipeline is connected with the cylinder through the cylinder pipe joint; the diluent gas pipeline and the vacuum pumping pipeline are connected to the gas supply pipeline; the cylinder pipe joint comprises a gas channel, and a seal joint, a fastening part and an air inlet part which are arranged sequentially; a certain quantity of blowing through holes are formed on the blowing part, and the outlets of the blowing through holes face to the external wall of the seal port; and the blowing pipeline is communicated with the blowing through holes.
Description
Technical field
The present invention relates to a kind of Holder System, especially a kind of high-purity Special safety Holder System.
Background technique
Present pressurized gas nearly all is to adopt steel cylinder to take up, the air outlet of steel cylinder is provided with valve and steel cylinder interface usually, pipeline need utilize the steel cylinder pipe joint just can be sealedly connected on the steel cylinder interface, existing steel cylinder pipe joint all is to connect in the following way, be provided with outside thread on the outer wall on the steel cylinder interface, be provided with the sealing surface that is complementary with steel cylinder pipe seal face on the steel cylinder interface, between two sealing surfaces, install pad, then nut is through on the pipe joint and is connected with the outside thread of pipe joint, nut is pushed down the engagement portion on the steel cylinder pipe joint in fastening process, so that the steel cylinder pipe joint is connected on the steel cylinder interface firmly, thereby realize both sealings.
In the using process of steel cylinder, in case the gas in the steel cylinder is finished using, then must change steel cylinder, the contrast common gases only needs directly the steel cylinder pipe joint to be pulled down, and then changes new steel cylinder connection and gets final product.Yet the gas for inflammable, explosive, poisonous and so on needs to carry out series of process before changing steel cylinder, and the special gas with remaining in the discharge conduit leaks in changing steel cylinder to prevent gas.This operation generally in the following way, before pulling down the steel cylinder pipe joint, at first supply air line is vacuumized, after vacuumizing again in the supply air line stabilizing gas of inflated with nitrogen and so on dilute, and then vacuumize again inflated with nitrogen dilution, so repeatedly several times, then after the supply air line pressurize guarantees that cylinder valve is closed reliably the time, pull down again the steel cylinder pipe joint to change steel cylinder.
Yet when changing steel cylinder, the section that is tightly connected of steel cylinder pipe joint is inevitable leaks in air cruelly, this is just so that the section of being tightly connected is subject to the pollution of dust and microorganism, this is dusty gas from pipeline probably just, this is especially outstanding in electron trade, the gas that uses in the electron trade is generally inflammable, explosive, poisonous gas, and its requirement to dustless degree is very high, seriously influences in case sneak into dust in the gas then can cause the quality of product.
Summary of the invention
Technical problem to be solved by this invention provides a kind of high-purity Special safety Holder System that guarantees the section's of being tightly connected cleaning of steel cylinder pipe joint when changing steel cylinder.
The present invention solves high-purity Special safety Holder System that its technical problem adopts, comprise special gas storage tank, be arranged on the special gas system in the special gas storage tank, described special gas system comprises steel cylinder and pipe-line system, described pipe-line system comprises supply air line, diluent gas pipeline and vacuum-pumping pipeline, be provided with the steel cylinder pipe joint on the described supply air line, described supply air line links to each other with described steel cylinder by the steel cylinder pipe joint, described diluent gas pipeline and vacuum-pumping pipeline all are connected on the described supply air line, also comprise scavenging pipeline, described steel cylinder pipe joint comprises gas channel, the sealed interface section that sets gradually, engagement portion and air input part, also comprise purging section, be provided with the purging through hole in the described purging section, the outlet of described purging through hole is towards the outer wall of described sealed interface section, and described scavenging pipeline is connected with described purging through hole.
Further be, also be provided with air-inlet cavity in the described purging section, described air-inlet cavity is communicated with described scavenging pipeline, and described air-inlet cavity is connected with the import of described purging through hole.
Further be, described purging section also comprises sealed cover, described sealed cover is arranged on the air-inlet cavity top and with described air-inlet cavity sealing, is provided with the air inlet nozzle that is connected with described air-inlet cavity on the described sealed cover, and described air inlet nozzle is communicated with described scavenging pipeline.
Further be that described purging through hole arranges two and be evenly distributed in the described purging section at least.
Further be, described purging section is arranged between described air input part and the described engagement portion, and described purging through hole passes described engagement portion.
Further be that the two ends of described scavenging pipeline are connected with described purging through hole and diluent gas pipeline respectively.
Further be, described special gas system is provided with two groups, and two groups of special gas systems are in parallel.
Further be, be provided with one-way valve on the described diluent gas pipeline, the direction of described one-way valve is that gas enters into supply air line from the diluent gas pipeline.
Further be, be provided with pressometer on the described supply air line, described pressometer is arranged between the tie point and steel cylinder pipe joint of supply air line and diluent gas pipeline.
Further be, be provided with suction port and air outlet on the described special gas storage tank, described air outlet is arranged on the bottom of special gas storage tank, described suction port is arranged on the top of special gas storage tank, connect by the air draft pipeline on the described suction port, described special gas storage tank is integral sealing except suction port and air outlet, is provided with solenoid valve on the described suction port, is provided with shockproof structure on the cabinet seat of described special gas storage tank.
The invention has the beneficial effects as follows: owing to be provided with purging section at the steel cylinder pipe joint, therefore when changing steel cylinder, utilize scavenging pipeline blow gas from purge through hole, so that gas forms air curtain on sealed interface section surface, thereby stop dust or other material to pollute sealed interface section, the power of γ-ray emission also can blow away the existing dust of sealed interface section simultaneously, so just guaranteed the clean degree of sealed interface section, prevent that this processing for precision provides reliable guarantee because change steel cylinder so that pipeline is polluted.In purging section air-inlet cavity can also be set, the gas that air feeder provides at first enters into air-inlet cavity, and buffering sprays from purge through hole after evenly more uniformly in air-inlet cavity, like this so that air curtain is more even, better protects sealed interface section surperficial.Spy's gas system can arrange two groups, thereby forms a preparation and a use, the air feed that this just can continue when maintenance or replacing steel cylinder.
Description of drawings
Fig. 1 is the line arrangement schematic representation;
Exploded perspective view when Fig. 2 is steel cylinder interface and the assembling of steel cylinder pipe joint;
Fig. 3 is the structural representation of steel cylinder pipe joint;
Fig. 4 is the internal structure schematic representation of steel cylinder pipe joint;
Fig. 5 is the plan view of steel cylinder pipe joint;
Fig. 6 is the left view of Fig. 5;
Component, position and numbering among the figure: steel cylinder interface 1, linkage structure 11, the face 12 that is tightly connected, gas outlet 12, steel cylinder pipe joint 2, gas channel 21, sealed interface section 22, engagement portion 23, purging section 24, air input part 25, purging through hole 26, air-inlet cavity 27, sealed cover 28, air inlet nozzle 29, nut 3, pad 4, steel cylinder 5, supply air line 61, diluent gas pipeline 62, vacuum-pumping pipeline 63, scavenging pipeline 64, emptying pipeline 65, one-way valve 66, pressometer 67.
Embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in Figure 1, the present invention includes special gas storage tank, be arranged on the special gas system in the special gas storage tank, described special gas system comprises steel cylinder 5 and pipe-line system, described pipe-line system comprises supply air line 61, diluent gas pipeline 62 and vacuum-pumping pipeline 63, be provided with steel cylinder pipe joint 2 on the described supply air line 61, described supply air line 61 links to each other with described steel cylinder 5 by steel cylinder pipe joint 2, described diluent gas pipeline 62 and vacuum-pumping pipeline 63 all are connected on the described supply air line 61, also comprise scavenging pipeline 64, described steel cylinder pipe joint 2 comprises gas channel 21, the sealed interface section 22 that sets gradually, engagement portion 23 and air input part 25, also comprise purging section 24, be provided with the purging through hole 26 of some in the described purging section 24, the outlet of described purging through hole 26 is towards the outer wall of described sealed interface section 22, and described scavenging pipeline 64 is connected with described purging through hole 26.In this pipe-line system take supply air line 61 as the trunk pipeline, other pipeline equal branch except scavenging pipeline 64 is connected on the supply air line 61, can realize connecting by pipe fittings such as threeways, valve all is set on each pipeline on demand, its valve arrangement can be referring to Fig. 1 setting, filter preferably is set on supply air line 61, and its quantity enters follow-up equipment by the demand setting to prevent impurity.Scavenging pipeline 64 directly is communicated with purging through hole 26, and scavenging pipeline 64 can directly be communicated with purging through hole 26, in 26 connections of purging through hole, just needn't take both apart except keeping in repair after being communicated with well after also can cushioning by other mechanism again.When assembling steel cylinder and supply air line 61, identical with common steel cylinder pipe connecting structure, pad 4 is installed in sealed interface section 22 and is tightly connected between the face 12, then be connected fastening with linkage structure 11 on the steel cylinder interface 1 engagement portion 23 on the steel cylinder pipe joint 2, the fastening nut 3 as shown in Figure 1 that can adopt is fastened on the linkage structure 11, thereby compress the engagement portion 23 on the steel cylinder pipe joint 2, so that steel cylinder pipe joint 2 and steel cylinder interface 1 form end face seal; Equally also can adopt the mode of quick snap fit connector, directly engagement portion 23 and linkage structure 11 are set to the structure of quick snap fit connector, thereby realize fast sealing.In long-term the use, gas in the steel cylinder exhaust or underpressure to use, this just needs to change steel cylinder, for the special gas such as inflammable and explosive, poisonous, at first need to enter cleaning technique, namely close cylinder valve, extraction utilizes vacuum-pumping pipeline 63 to extract remaining special gas in the supply air line 61 out, vacuum-pumping pipeline 63 realizes vacuumizing by vacuum pumping device, special gas is pumped down to the waste gas treatment place, recycling diluent gas pipeline 62 passes into the nitrogen dilution special gas, extract again, with this repeatedly for several times with remaining special gas in the cleaning supply air line 61.After cleaning is complete, unclamp being connected of linkage structure 11 on engagement portion 23 and the steel cylinder interface 1 on the steel cylinder pipe joint 2, then utilize scavenging pipeline 64 for purging through hole 26 air feed, scavenging pipeline 64 links to each other with air feeder, scavenging pipeline 64 provides generally that nitrogen is this stablizes free of contamination gas, and similarly gas also can certainly.Scavenging pipeline 64 can directly purge through hole 26 with each and be communicated with, also can indirectly purge through hole 26 with each by damping device is communicated with, gas is by purging through hole 26 ejections, it is equally distributed purging through hole 26, purging through hole 26 evenly distributes around the outer wall of sealed interface section 22, distribution mode shown in Figure 6 for example, this moment, gas just formed one deck air curtain or brattice at the outer wall of sealed interface section 22, stop extraneous dust to enter into sealed interface section 22, simultaneously, sealed interface section 22 original dusts are such as the finely divided material that drops because connecting friction, under the wind effect that gas forms, also can blow away, thereby guarantee the cleaning of sealed interface section 22.The gas that purges also can stop air to enter into gas channel 21, has reduced the possibility that oxygen mixes with special gas.Keep the purging state until new steel cylinder is changed, like this with regard to so that sealed interface section 22 when naked leakage, also can be protected.
For the gas pressure that makes each purge through hole 26 ejections even, such as Fig. 4, shown in Figure 2, also be provided with air-inlet cavity 27 in the described purging section 24, described air-inlet cavity 27 is communicated with described scavenging pipeline 64, and described air-inlet cavity 27 is connected with the import of described purging through hole 26.Air feeder generally is nitrogen bottle, its nitrogen that provides at first enters scavenging pipeline 64, then enter into air-inlet cavity 27 by scavenging pipeline, air-inlet cavity 27 has played the effect of buffering, so that the pressure at air-inlet cavity 27 places is average, gas through buffering in the air-inlet cavity 27 sprays from purge through hole 26 again, each purges identical in initial pressure and the air-inlet cavity 27 in through hole like this, thereby so that each gas pressure intensity that purges ejection in through hole 26 is even, thereby so that the air curtain that forms or the complete uniform protection of brattice in sealed interface section 22.
Concrete, such as Fig. 2 and shown in Figure 4, described purging section 24 also comprises sealed cover 28, described sealed cover 28 is arranged on air-inlet cavity 27 tops and described air-inlet cavity 27 is sealed, be provided with the air inlet nozzle 29 that is connected with described air-inlet cavity 27 on the described sealed cover 28, described air inlet nozzle 29 is communicated with described scavenging pipeline 64.It is convenient to be communicated with scavenging pipeline 64 by air inlet nozzle 29, and air inlet nozzle 29 can be set according to different scavenging pipeline 64, and this is just more convenient and swift when connecting.
Concrete, as shown in Figure 4, described purging section 24 is arranged between described air input part 25 and the described engagement portion 23, and described purging through hole 26 passes described engagement portion 23.Such structural configuration is so that whole steel cylinder pipe joint 2 is compacter, and the adding of purging section 24 can not increase the distance that is connected of linkage structure 11 on engagement portion 23 and the steel cylinder interface 1, so can not reduce the connection reliability because of the increase that connects distance.
Purge with dilution in the identical gas of normal operation, and two duct portion work simultaneously, therefore for simplified structure, as shown in Figure 1, the two ends of described scavenging pipeline 64 are connected with described purging through hole 26 and diluent gas pipeline 62 respectively.For example in the situation of using nitrogen, utilize nitrogen bottle to provide nitrogen for diluent gas pipeline 62, thereby realization diluting effect, dilution and vacuumize complete after, close being communicated with of diluent gas pipeline 62 and supply air line, open scavenging pipeline 64, so that nitrogen flows to scavenging pipeline 64, thereby realize to purge function, like this air feeder such as nitrogen bottle only one of need get final product, so just simplified total.
As shown in Figure 1, special gas described above system is provided with two groups, and two groups of special gas systems are in parallel.When changing steel cylinder and maintenance for one group, can provide special gas by another group like this, keep the special gas supply that continues.
Flow in the diluent gas pipeline 62 in order to prevent that special gas is counter, as shown in Figure 1, be provided with one-way valve 66 on the described diluent gas pipeline 62, the direction of described one-way valve 66 is that gas enters into supply air line 61 from diluent gas pipeline 62.
Whether close reliably in order in the process of changing steel cylinder 5, to detect steel cylinder 5, as shown in Figure 1, be provided with pressometer 67 on the described supply air line 61, described pressometer 67 is arranged between the tie point and steel cylinder pipe joint 2 of supply air line 61 and diluent gas pipeline 62.After utilizing vacuum-pumping pipeline 63 to vacuumize, supply air line 61 is carried out pressurize, namely utilize unhappiness to close supply air line 61, firm if steel cylinder 5 does not cut out at this moment, then must infiltrate in the supply air line 61, so that the reading of pressometer 67 changes.If pressometer 67 readings do not change, illustrate that then not having gas in the steel cylinder 5 oozes out, it is firm that steel cylinder has cut out.
Concrete, be provided with suction port and air outlet on the described special gas storage tank, described air outlet is arranged on the bottom of special gas storage tank, described suction port is arranged on the top of special gas storage tank, connect by the air draft pipeline on the described suction port, described special gas storage tank is integral sealing except suction port and air outlet, is provided with solenoid valve on the described suction port, is provided with shockproof structure on the cabinet seat of described special gas storage tank.On the exhaust system design, adopt the lower upper row's of advancing mode, add air bells exhauster, making all the time the special gas storage tank internal air pressure is negative pressure, even guarantee occuring in the situation of leaking, special gas is also to indoor diffusion, but drains into the space of appointment by exhaust duct.Except a suction port and relief opening, other parts are carried out Seal Design in space, gas dish place, encrypt the combustion rubber cushion of blockading between door and the cabinet, guarantee to close the sealing of rear special gas storage tank.Mortor operated valve is installed on the suction port, and in the situation that high temperature or flame occur, the suction port mortor operated valve cuts out, and exhaust port keeps exhausting, and oxygen content is more and more come, is unfavorable for burning.Between special gas storage tank cabinet seat and equipment Foundations, add bump protection ring, when reducing earthquake to the vibrations of special gas storage tank, to damage element and connection thereof in the cabinet.
Claims (10)
1. high-purity Special safety Holder System, comprise special gas storage tank, be arranged on the special gas system in the special gas storage tank, described special gas system comprises steel cylinder (5) and pipe-line system, described pipe-line system comprises supply air line (61), diluent gas pipeline (62) and vacuum-pumping pipeline (63), be provided with steel cylinder pipe joint (2) on the described supply air line (61), described supply air line (61) links to each other with described steel cylinder (5) by steel cylinder pipe joint (2), described diluent gas pipeline (62) and vacuum-pumping pipeline (63) all are connected on the described supply air line (61), it is characterized in that: also comprise scavenging pipeline (64), described steel cylinder pipe joint (2) comprises gas channel (21), the sealed interface section (22) that sets gradually, engagement portion (23) and air input part (25), also comprise purging section (24), be provided with in the described purging section (24) and purge through hole (26), the outlet of described purging through hole (26) is towards the outer wall of described sealed interface section (22), and described scavenging pipeline (64) is connected with described purging through hole (26).
2. high-purity Special safety Holder System as claimed in claim 1, it is characterized in that: also be provided with air-inlet cavity (27) in the described purging section (24), described air-inlet cavity (27) is communicated with described scavenging pipeline (64), and described air-inlet cavity (27) is connected with the import of described purging through hole (26).
3. high-purity Special safety Holder System as claimed in claim 2, it is characterized in that: described purging section (24) also comprises sealed cover (28), described sealed cover (28) is arranged on air-inlet cavity (27) top and described air-inlet cavity (27) is sealed, be provided with the air inlet nozzle (29) that is connected with described air-inlet cavity (27) on the described sealed cover (28), described air inlet nozzle (29) is communicated with described scavenging pipeline (64).
4. high-purity Special safety Holder System as claimed in claim 1 is characterized in that: described purging through hole (26) arranges two and be evenly distributed in the described purging section (24) at least.
5. high-purity Special safety Holder System as claimed in claim 1, it is characterized in that: described purging section (24) is arranged between described air input part (25) and described engagement portion (23), and described purging through hole (26) passes described engagement portion (23).
6. high-purity Special safety Holder System as claimed in claim 1, it is characterized in that: the two ends of described scavenging pipeline (64) are connected with described purging through hole (26) and diluent gas pipeline (62) respectively.
7. high-purity Special safety Holder System as claimed in claim 1 is characterized in that: described special gas system is provided with two groups, and two groups of special gas systems are in parallel.
8. high-purity Special safety Holder System as claimed in claim 1, it is characterized in that: be provided with one-way valve (66) on the described diluent gas pipeline (62), the direction of described one-way valve (66) is that gas enters into supply air line (61) from diluent gas pipeline (62).
9. high-purity Special safety Holder System as claimed in claim 1, it is characterized in that: be provided with pressometer (67) on the described supply air line (61), described pressometer (67) is arranged between the tie point and steel cylinder pipe joint (2) of supply air line (61) and diluent gas pipeline (62).
10. such as the described high-purity Special safety Holder System of the arbitrary claim of claim 1 to 9, it is characterized in that: be provided with suction port and air outlet on the described special gas storage tank, described air outlet is arranged on the bottom of special gas storage tank, described suction port is arranged on the top of special gas storage tank, connect by the air draft pipeline on the described suction port, described special gas storage tank is integral sealing except suction port and air outlet, is provided with solenoid valve on the described suction port, is provided with shockproof structure on the cabinet seat of described special gas storage tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103167074A CN102853257A (en) | 2012-08-31 | 2012-08-31 | High-purity and safe special gas cabinet system |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012103167074A CN102853257A (en) | 2012-08-31 | 2012-08-31 | High-purity and safe special gas cabinet system |
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| CN102853257A true CN102853257A (en) | 2013-01-02 |
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| CN2012103167074A Pending CN102853257A (en) | 2012-08-31 | 2012-08-31 | High-purity and safe special gas cabinet system |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111649235A (en) * | 2020-07-13 | 2020-09-11 | 阁壹系统集成设备(滁州)有限公司 | Special gas cabinet system and vacuumizing method thereof |
| CN113432038A (en) * | 2021-06-10 | 2021-09-24 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
| CN114871223A (en) * | 2022-04-02 | 2022-08-09 | 普乐新能源科技(徐州)有限公司 | Reliable cavity purging method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1155267A (en) * | 1994-08-11 | 1997-07-23 | 贝林格尔·英格海姆公司 | Process and device for cleaning outside of containers |
| EP1313978A1 (en) * | 2000-08-30 | 2003-05-28 | Gas Research Institute | Locatable magnetized polyethylene gas pipe distribution system |
| CN101093056A (en) * | 2007-01-18 | 2007-12-26 | 上海至纯洁净系统科技有限公司 | Special gas storage tank |
| CN102374381A (en) * | 2010-08-23 | 2012-03-14 | 无锡华润上华半导体有限公司 | Blowing gas backflow-preventing gas holder device and method for preventing blowing gas backflow |
| CN202812797U (en) * | 2012-08-31 | 2013-03-20 | 成都爱德工程有限公司 | High-purity safe and special gas holder system |
-
2012
- 2012-08-31 CN CN2012103167074A patent/CN102853257A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1155267A (en) * | 1994-08-11 | 1997-07-23 | 贝林格尔·英格海姆公司 | Process and device for cleaning outside of containers |
| EP1313978A1 (en) * | 2000-08-30 | 2003-05-28 | Gas Research Institute | Locatable magnetized polyethylene gas pipe distribution system |
| CN101093056A (en) * | 2007-01-18 | 2007-12-26 | 上海至纯洁净系统科技有限公司 | Special gas storage tank |
| CN102374381A (en) * | 2010-08-23 | 2012-03-14 | 无锡华润上华半导体有限公司 | Blowing gas backflow-preventing gas holder device and method for preventing blowing gas backflow |
| CN202812797U (en) * | 2012-08-31 | 2013-03-20 | 成都爱德工程有限公司 | High-purity safe and special gas holder system |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111649235A (en) * | 2020-07-13 | 2020-09-11 | 阁壹系统集成设备(滁州)有限公司 | Special gas cabinet system and vacuumizing method thereof |
| CN111649235B (en) * | 2020-07-13 | 2022-04-12 | 阁壹系统集成设备(滁州)有限公司 | Special gas cabinet system and vacuumizing method thereof |
| CN113432038A (en) * | 2021-06-10 | 2021-09-24 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
| CN113432038B (en) * | 2021-06-10 | 2023-01-17 | 北京北方华创微电子装备有限公司 | Semiconductor process equipment and gas supply assembly thereof |
| CN114871223A (en) * | 2022-04-02 | 2022-08-09 | 普乐新能源科技(徐州)有限公司 | Reliable cavity purging method |
| CN114871223B (en) * | 2022-04-02 | 2023-08-01 | 普乐新能源科技(泰兴)有限公司 | Reliable cavity purging method |
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Application publication date: 20130102 |