CN113256552A - 使用多种类型的光进行视觉检查的系统和方法 - Google Patents

使用多种类型的光进行视觉检查的系统和方法 Download PDF

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Publication number
CN113256552A
CN113256552A CN202110112491.9A CN202110112491A CN113256552A CN 113256552 A CN113256552 A CN 113256552A CN 202110112491 A CN202110112491 A CN 202110112491A CN 113256552 A CN113256552 A CN 113256552A
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Chinese (zh)
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T·肯普夫
J·鲁顿
M·哈尔特
L·努恩因克
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Cognex Corp
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Cognex Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G06T7/55—Depth or shape recovery from multiple images
    • G06T7/586—Depth or shape recovery from multiple images from multiple light sources, e.g. photometric stereo
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G01D21/02—Measuring two or more variables by means not covered by a single other subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N21/3151—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths using two sources of radiation of different wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N13/00—Stereoscopic video systems; Multi-view video systems; Details thereof
    • H04N13/20—Image signal generators
    • H04N13/204—Image signal generators using stereoscopic image cameras
    • H04N13/207—Image signal generators using stereoscopic image cameras using a single two-dimensional [2D] image sensor
    • H04N13/218—Image signal generators using stereoscopic image cameras using a single two-dimensional [2D] image sensor using spatial multiplexing
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N13/00—Stereoscopic video systems; Multi-view video systems; Details thereof
    • H04N13/20—Image signal generators
    • H04N13/204—Image signal generators using stereoscopic image cameras
    • H04N13/243—Image signal generators using stereoscopic image cameras using three or more two-dimensional [2D] image sensors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N13/00—Stereoscopic video systems; Multi-view video systems; Details thereof
    • H04N13/20—Image signal generators
    • H04N13/204—Image signal generators using stereoscopic image cameras
    • H04N13/254—Image signal generators using stereoscopic image cameras in combination with electromagnetic radiation sources for illuminating objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1734—Sequential different kinds of measurements; Combining two or more methods
    • G01N2021/1736—Sequential different kinds of measurements; Combining two or more methods with two or more light sources
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G01N2021/8848—Polarisation of light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/062—LED's
    • G01N2201/0626—Use of several LED's for spatial resolution
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10141—Special mode during image acquisition
    • G06T2207/10152—Varying illumination

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • Multimedia (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Quality & Reliability (AREA)
  • Toxicology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN202110112491.9A 2020-01-27 2021-01-27 使用多种类型的光进行视觉检查的系统和方法 Pending CN113256552A (zh)

Applications Claiming Priority (2)

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US202062966323P 2020-01-27 2020-01-27
US62/966,323 2020-01-27

Publications (1)

Publication Number Publication Date
CN113256552A true CN113256552A (zh) 2021-08-13

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Country Link
US (1) US11651505B2 (https=)
EP (1) EP3855170B1 (https=)
JP (1) JP7413293B2 (https=)
KR (2) KR102558937B1 (https=)
CN (1) CN113256552A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115265375A (zh) * 2022-08-02 2022-11-01 芯伏(北京)检测科技有限公司 一种采用单相机同时记录多个位移场光学干涉图像的方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7609075B2 (ja) * 2019-11-15 2025-01-07 ソニーグループ株式会社 情報処理装置および情報処理方法
US12372461B2 (en) * 2020-11-27 2025-07-29 Kabushiki Kaisha N-Tech Imaging device, inspection device, and imaging method
JP7686965B2 (ja) * 2020-12-24 2025-06-03 オムロン株式会社 検査システムおよび検査方法
WO2023039224A1 (en) * 2021-09-13 2023-03-16 Gemological Institute Of America, Inc. (Gia) Laser inscription for gemstones
US20250067660A1 (en) * 2022-03-02 2025-02-27 Cognex Corporation System and method for use of polarized light to image transparent materials applied to objects
JP2023140822A (ja) * 2022-03-23 2023-10-05 株式会社東芝 検査装置、検査方法及びプログラム
US20250046636A1 (en) * 2023-08-04 2025-02-06 Jun-Fu Technology Inc Robotic arm with vibration detection and image recognition
KR102819626B1 (ko) * 2024-03-12 2025-06-12 주식회사 슈텍 2차전지 엔드 플레이트 표면 검사기 및 그 방법

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070090280A1 (en) * 2005-10-24 2007-04-26 General Electric Company Methods and apparatus for inspecting an object
US20090290039A1 (en) * 2007-05-31 2009-11-26 Katsuhiro Kanamori Image processing apparatus
US20130128104A1 (en) * 2011-11-22 2013-05-23 Cognex Corporation Camera system with exchangeable illumination assembly
US20130241835A1 (en) * 2012-03-15 2013-09-19 Wen-Chieh Geoffrey Lee High Resolution and High Sensitivity Optically Activated Motion Detection Device using Multiple Color Light Sources
US20140168382A1 (en) * 2011-06-22 2014-06-19 Dongguk University Gyeongju Campus Industry-Academy Cooperation Foundation Method and system for reliable 3d shape extraction of metal surface
CN109642787A (zh) * 2016-07-20 2019-04-16 穆拉有限公司 3d表面测量的系统与方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE50303239D1 (de) * 2002-09-23 2006-06-08 Tropf Hermann Erfassen und greifen von gegenst nden
JP5365644B2 (ja) 2011-01-13 2013-12-11 オムロン株式会社 はんだ付け検査方法、およびはんだ付け検査機ならびに基板検査システム
WO2013044149A1 (en) * 2011-09-21 2013-03-28 Aptina Imaging Corporation Image sensors with multiple lenses of varying polarizations
JP6403445B2 (ja) 2014-06-09 2018-10-10 株式会社キーエンス 検査装置、検査方法およびプログラム
KR102223279B1 (ko) * 2014-07-08 2021-03-05 엘지전자 주식회사 측정장치 및 이를 구비하는 웨어러블 디바이스
US10951888B2 (en) * 2018-06-04 2021-03-16 Contrast, Inc. Compressed high dynamic range video
JP7238278B2 (ja) 2018-06-22 2023-03-14 カシオ計算機株式会社 診断支援装置
JP7447916B2 (ja) 2019-12-13 2024-03-12 ソニーグループ株式会社 撮像装置、情報処理装置、撮像方法、および情報処理方法

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070090280A1 (en) * 2005-10-24 2007-04-26 General Electric Company Methods and apparatus for inspecting an object
US20090290039A1 (en) * 2007-05-31 2009-11-26 Katsuhiro Kanamori Image processing apparatus
US20140168382A1 (en) * 2011-06-22 2014-06-19 Dongguk University Gyeongju Campus Industry-Academy Cooperation Foundation Method and system for reliable 3d shape extraction of metal surface
US20130128104A1 (en) * 2011-11-22 2013-05-23 Cognex Corporation Camera system with exchangeable illumination assembly
US20130241835A1 (en) * 2012-03-15 2013-09-19 Wen-Chieh Geoffrey Lee High Resolution and High Sensitivity Optically Activated Motion Detection Device using Multiple Color Light Sources
CN109642787A (zh) * 2016-07-20 2019-04-16 穆拉有限公司 3d表面测量的系统与方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115265375A (zh) * 2022-08-02 2022-11-01 芯伏(北京)检测科技有限公司 一种采用单相机同时记录多个位移场光学干涉图像的方法

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KR102558937B1 (ko) 2023-07-21
JP2021117232A (ja) 2021-08-10
US11651505B2 (en) 2023-05-16
EP3855170A1 (en) 2021-07-28
JP7413293B2 (ja) 2024-01-15
EP3855170B1 (en) 2025-12-31
US20210233267A1 (en) 2021-07-29
KR20230128430A (ko) 2023-09-05
KR20210096572A (ko) 2021-08-05

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