KR102558937B1 - 다수의 유형들의 광을 이용한 비전 검사를 위한 시스템들 및 방법들 - Google Patents

다수의 유형들의 광을 이용한 비전 검사를 위한 시스템들 및 방법들 Download PDF

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KR102558937B1
KR102558937B1 KR1020210010875A KR20210010875A KR102558937B1 KR 102558937 B1 KR102558937 B1 KR 102558937B1 KR 1020210010875 A KR1020210010875 A KR 1020210010875A KR 20210010875 A KR20210010875 A KR 20210010875A KR 102558937 B1 KR102558937 B1 KR 102558937B1
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토르스텐 켐페
옌스 뤼텐
미하엘 하르트
로렌스 누닌크
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코그넥스코오포레이션
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21Polarisation-affecting properties
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00Measuring or testing not otherwise provided for
    • G01D21/02Measuring two or more variables by means not covered by a single other subclass
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G01N21/3151Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths using two sources of radiation of different wavelengths
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8851Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/0002Inspection of images, e.g. flaw detection
    • G06T7/0004Industrial image inspection
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00Image analysis
    • G06T7/50Depth or shape recovery
    • G06T7/55Depth or shape recovery from multiple images
    • G06T7/586Depth or shape recovery from multiple images from multiple light sources, e.g. photometric stereo
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N13/00Stereoscopic video systems; Multi-view video systems; Details thereof
    • H04N13/20Image signal generators
    • H04N13/204Image signal generators using stereoscopic image cameras
    • H04N13/207Image signal generators using stereoscopic image cameras using a single two-dimensional [2D] image sensor
    • H04N13/218Image signal generators using stereoscopic image cameras using a single two-dimensional [2D] image sensor using spatial multiplexing
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N13/00Stereoscopic video systems; Multi-view video systems; Details thereof
    • H04N13/20Image signal generators
    • H04N13/204Image signal generators using stereoscopic image cameras
    • H04N13/243Image signal generators using stereoscopic image cameras using three or more two-dimensional [2D] image sensors
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04NPICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N13/00Stereoscopic video systems; Multi-view video systems; Details thereof
    • H04N13/20Image signal generators
    • H04N13/204Image signal generators using stereoscopic image cameras
    • H04N13/254Image signal generators using stereoscopic image cameras in combination with electromagnetic radiation sources for illuminating objects
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N2021/1734Sequential different kinds of measurements; Combining two or more methods
    • G01N2021/1736Sequential different kinds of measurements; Combining two or more methods with two or more light sources
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8848Polarisation of light
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00Features of devices classified in G01N21/00
    • G01N2201/06Illumination; Optics
    • G01N2201/062LED's
    • G01N2201/0626Use of several LED's for spatial resolution
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06TIMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00Indexing scheme for image analysis or image enhancement
    • G06T2207/10Image acquisition modality
    • G06T2207/10141Special mode during image acquisition
    • G06T2207/10152Varying illumination

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Signal Processing (AREA)
  • Health & Medical Sciences (AREA)
  • Multimedia (AREA)
  • Pathology (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Quality & Reliability (AREA)
  • Toxicology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
KR1020210010875A 2020-01-27 2021-01-26 다수의 유형들의 광을 이용한 비전 검사를 위한 시스템들 및 방법들 Active KR102558937B1 (ko)

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Application Number Priority Date Filing Date Title
KR1020230093555A KR20230128430A (ko) 2020-01-27 2023-07-19 다수의 유형들의 광을 이용한 비전 검사를 위한 시스템들및 방법들

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US202062966323P 2020-01-27 2020-01-27
US62/966,323 2020-01-27

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KR102558937B1 true KR102558937B1 (ko) 2023-07-21

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KR1020210010875A Active KR102558937B1 (ko) 2020-01-27 2021-01-26 다수의 유형들의 광을 이용한 비전 검사를 위한 시스템들 및 방법들
KR1020230093555A Withdrawn KR20230128430A (ko) 2020-01-27 2023-07-19 다수의 유형들의 광을 이용한 비전 검사를 위한 시스템들및 방법들

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US (1) US11651505B2 (https=)
EP (1) EP3855170B1 (https=)
JP (1) JP7413293B2 (https=)
KR (2) KR102558937B1 (https=)
CN (1) CN113256552A (https=)

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JP7609075B2 (ja) * 2019-11-15 2025-01-07 ソニーグループ株式会社 情報処理装置および情報処理方法
US12372461B2 (en) * 2020-11-27 2025-07-29 Kabushiki Kaisha N-Tech Imaging device, inspection device, and imaging method
JP7686965B2 (ja) * 2020-12-24 2025-06-03 オムロン株式会社 検査システムおよび検査方法
WO2023039224A1 (en) * 2021-09-13 2023-03-16 Gemological Institute Of America, Inc. (Gia) Laser inscription for gemstones
US20250067660A1 (en) * 2022-03-02 2025-02-27 Cognex Corporation System and method for use of polarized light to image transparent materials applied to objects
JP2023140822A (ja) * 2022-03-23 2023-10-05 株式会社東芝 検査装置、検査方法及びプログラム
CN115265375A (zh) * 2022-08-02 2022-11-01 芯伏(北京)检测科技有限公司 一种采用单相机同时记录多个位移场光学干涉图像的方法
US20250046636A1 (en) * 2023-08-04 2025-02-06 Jun-Fu Technology Inc Robotic arm with vibration detection and image recognition
KR102819626B1 (ko) * 2024-03-12 2025-06-12 주식회사 슈텍 2차전지 엔드 플레이트 표면 검사기 및 그 방법

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US20070090280A1 (en) 2005-10-24 2007-04-26 General Electric Company Methods and apparatus for inspecting an object
US20140168382A1 (en) 2011-06-22 2014-06-19 Dongguk University Gyeongju Campus Industry-Academy Cooperation Foundation Method and system for reliable 3d shape extraction of metal surface
US20170135586A1 (en) 2014-07-08 2017-05-18 Lg Electronics Inc. Measuring apparatus and werable device comprising same
US20180143700A1 (en) 2012-03-15 2018-05-24 Wen-Chieh Geoffrey Lee High Resolution and High Sensitivity Optically Activated Motion Detection Device Using Multiple Color Light Sources

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DE50303239D1 (de) * 2002-09-23 2006-06-08 Tropf Hermann Erfassen und greifen von gegenst nden
US7760256B2 (en) 2007-05-31 2010-07-20 Panasonic Corporation Image processing apparatus that obtains color and polarization information
JP5365644B2 (ja) 2011-01-13 2013-12-11 オムロン株式会社 はんだ付け検査方法、およびはんだ付け検査機ならびに基板検査システム
WO2013044149A1 (en) * 2011-09-21 2013-03-28 Aptina Imaging Corporation Image sensors with multiple lenses of varying polarizations
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JP6403445B2 (ja) 2014-06-09 2018-10-10 株式会社キーエンス 検査装置、検査方法およびプログラム
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US20140168382A1 (en) 2011-06-22 2014-06-19 Dongguk University Gyeongju Campus Industry-Academy Cooperation Foundation Method and system for reliable 3d shape extraction of metal surface
US20180143700A1 (en) 2012-03-15 2018-05-24 Wen-Chieh Geoffrey Lee High Resolution and High Sensitivity Optically Activated Motion Detection Device Using Multiple Color Light Sources
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Publication number Publication date
JP2021117232A (ja) 2021-08-10
US11651505B2 (en) 2023-05-16
EP3855170A1 (en) 2021-07-28
CN113256552A (zh) 2021-08-13
JP7413293B2 (ja) 2024-01-15
EP3855170B1 (en) 2025-12-31
US20210233267A1 (en) 2021-07-29
KR20230128430A (ko) 2023-09-05
KR20210096572A (ko) 2021-08-05

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