CN113204066B - 光学滤波器 - Google Patents

光学滤波器 Download PDF

Info

Publication number
CN113204066B
CN113204066B CN202110496730.5A CN202110496730A CN113204066B CN 113204066 B CN113204066 B CN 113204066B CN 202110496730 A CN202110496730 A CN 202110496730A CN 113204066 B CN113204066 B CN 113204066B
Authority
CN
China
Prior art keywords
layers
optical filter
refractive index
spectral range
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202110496730.5A
Other languages
English (en)
Chinese (zh)
Other versions
CN113204066A (zh
Inventor
詹姆斯·斯维泽三世
乔治·J·欧肯法斯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Viavi Solutions Inc
Original Assignee
Viavi Solutions Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Viavi Solutions Inc filed Critical Viavi Solutions Inc
Priority to CN202110496730.5A priority Critical patent/CN113204066B/zh
Publication of CN113204066A publication Critical patent/CN113204066A/zh
Application granted granted Critical
Publication of CN113204066B publication Critical patent/CN113204066B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/22—Absorbing filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/281—Interference filters designed for the infrared light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/113—Anti-reflection coatings using inorganic layer materials only
    • G02B1/115—Multilayers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/003—Light absorbing elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
    • G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/02395—Glass optical fibre with a protective coating, e.g. two layer polymer coating deposited directly on a silica cladding surface during fibre manufacture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/44—Mechanical structures for providing tensile strength and external protection for fibres, e.g. optical transmission cables
    • G02B6/4479—Manufacturing methods of optical cables
    • G02B6/4483—Injection or filling devices
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G02B6/036—Optical fibres with cladding with or without a coating core or cladding comprising multiple layers
    • G02B6/03616—Optical fibres characterised both by the number of different refractive index layers around the central core segment, i.e. around the innermost high index core layer, and their relative refractive index difference
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
    • G02F1/0151—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the refractive index

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Glass Compositions (AREA)
  • Laser Surgery Devices (AREA)
CN202110496730.5A 2017-07-24 2018-07-16 光学滤波器 Active CN113204066B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202110496730.5A CN113204066B (zh) 2017-07-24 2018-07-16 光学滤波器

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US15/657,515 US10247865B2 (en) 2017-07-24 2017-07-24 Optical filter
US15/657,515 2017-07-24
CN201810776179.8A CN109298477B (zh) 2017-07-24 2018-07-16 光学滤波器
CN202110496730.5A CN113204066B (zh) 2017-07-24 2018-07-16 光学滤波器

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201810776179.8A Division CN109298477B (zh) 2017-07-24 2018-07-16 光学滤波器

Publications (2)

Publication Number Publication Date
CN113204066A CN113204066A (zh) 2021-08-03
CN113204066B true CN113204066B (zh) 2024-02-13

Family

ID=63014369

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202110496730.5A Active CN113204066B (zh) 2017-07-24 2018-07-16 光学滤波器
CN201810776179.8A Active CN109298477B (zh) 2017-07-24 2018-07-16 光学滤波器

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN201810776179.8A Active CN109298477B (zh) 2017-07-24 2018-07-16 光学滤波器

Country Status (8)

Country Link
US (3) US10247865B2 (enExample)
EP (2) EP3435123B1 (enExample)
JP (2) JP6985991B2 (enExample)
KR (2) KR102352790B1 (enExample)
CN (2) CN113204066B (enExample)
AU (2) AU2018204910B2 (enExample)
CA (2) CA3010507C (enExample)
TW (2) TWI786846B (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11066186B2 (en) 2014-01-02 2021-07-20 Valqari Holdings, Llc Receiving appliance for automated deliveries
US10247865B2 (en) 2017-07-24 2019-04-02 Viavi Solutions Inc. Optical filter
US11009636B2 (en) * 2018-03-13 2021-05-18 Viavi Solutions Inc. Sensor window to provide different opacity and transmissivity at different spectral ranges
US10948640B2 (en) 2018-03-13 2021-03-16 Viavi Solutions Inc. Sensor window with a set of layers configured to a particular color and associated with a threshold opacity in a visible spectral range wherein the color is a color-matched to a surface adjacent to the sensor window
US11562053B2 (en) * 2018-05-30 2023-01-24 Viavi Solutions Inc. User device incorporating multi-sensing sensor device
US11366011B2 (en) * 2019-02-13 2022-06-21 Viavi Solutions Inc. Optical device
CN110109209A (zh) * 2019-06-05 2019-08-09 信阳舜宇光学有限公司 滤光片以及制造滤光片的方法
CN112114394B (zh) * 2019-06-21 2023-03-31 福州高意光学有限公司 具有温度补偿效应的滤光片和传感器系统
CN112578580A (zh) * 2019-09-27 2021-03-30 福州高意通讯有限公司 一种温度可调标准具
CN110837145B (zh) * 2019-11-21 2022-03-29 天津津航技术物理研究所 一种窄带滤光片光谱的调控方法
CA3179624A1 (en) * 2020-06-07 2021-12-16 Valqari, Llc Security and guidance systems and methods for parcel-receiving devices
US11867935B2 (en) * 2021-09-28 2024-01-09 Viavi Solutions Inc. Optical interference filter
JP7456563B2 (ja) 2022-03-30 2024-03-27 Ａｇｃ株式会社 光学フィルタ用ガラス及び光学フィルタ

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4740442A (en) * 1985-05-11 1988-04-26 Barr & Stroud Limited Optical coating
CN1668961A (zh) * 2001-08-02 2005-09-14 伊吉斯半导体公司 可调谐光学仪器
CN101368267A (zh) * 2007-08-17 2009-02-18 株式会社半导体能源研究所 等离子体cvd装置、微晶半导体层、薄膜晶体管的制造
TW200910425A (en) * 2007-08-16 2009-03-01 Nat Applied Res Laboratories Method for growing germanium film by pattern definition and high temperature cycle annealing process
CN101678507A (zh) * 2007-06-18 2010-03-24 应用材料公司 兼容无定形碳光学吸收层的用于激光退火系统的高温计
CN101919057A (zh) * 2008-01-22 2010-12-15 株式会社半导体能源研究所 半导体器件和制造半导体器件的方法
US7901870B1 (en) * 2004-05-12 2011-03-08 Cirrex Systems Llc Adjusting optical properties of optical thin films
TW201301399A (zh) * 2011-06-03 2013-01-01 Applied Materials Inc 在矽基材上形成高生長速率低電阻率的鍺膜之方法〈一〉
CN102933496A (zh) * 2010-06-08 2013-02-13 住友金属矿山株式会社 金属氧化物膜的制造方法及金属氧化物膜、使用该金属氧化物膜的元件、带有金属氧化物膜的基板以及使用该基板的器件
CN104471449A (zh) * 2012-07-16 2015-03-25 Jds尤尼弗思公司 滤光器和传感器系统
CN106199801A (zh) * 2016-08-31 2016-12-07 奥普镀膜技术（广州）有限公司 一种40g100g 滤光片薄膜镀制方法
EP3187909A1 (en) * 2015-12-29 2017-07-05 Viavi Solutions Inc. Metal mirror based multispectral filter array

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4684565A (en) * 1984-11-20 1987-08-04 Exxon Research And Engineering Company X-ray mirrors made from multi-layered material
JP2602034B2 (ja) * 1987-10-21 1997-04-23 株式会社堀場製作所 帯域透過光学フィルター
JPH07116605B2 (ja) * 1988-03-25 1995-12-13 三洋電機株式会社 水素化アモルファスゲルマニウム膜、その膜の製造方法及びその膜を使用した電子デバイス又は電子装置
EP0642050B1 (en) * 1993-09-02 2002-01-30 Matsushita Electric Industrial Co., Ltd. Spatial light modulator, method of production thereof and projection type display
JP3043956B2 (ja) * 1993-09-02 2000-05-22 松下電器産業株式会社 空間光変調素子、その製造方法及び投射型ディスプレイ
US20030087121A1 (en) * 2001-06-18 2003-05-08 Lawrence Domash Index tunable thin film interference coatings
JP4382317B2 (ja) * 2001-12-06 2009-12-09 シチズンホールディングス株式会社 液晶可変波長フィルタ装置
JP2004317701A (ja) * 2003-04-15 2004-11-11 Alps Electric Co Ltd 多層膜光フィルタ及び光学部品
WO2004113887A2 (en) 2003-06-20 2004-12-29 Aegis Semiconductor, Inc. Thermo-optic filter and infrared sensor using said filter.
TWI282434B (en) * 2005-06-15 2007-06-11 Asia Optical Co Inc Film layer structure of optical lens
US7801406B2 (en) 2005-08-01 2010-09-21 Massachusetts Institute Of Technology Method of fabricating Ge or SiGe/Si waveguide or photonic crystal structures by selective growth
US8039341B2 (en) * 2006-07-06 2011-10-18 Freescale Semiconductor, Inc. Selective uniaxial stress modification for use with strained silicon on insulator integrated circuit
US8441710B2 (en) * 2010-01-08 2013-05-14 Semrock, Inc. Tunable thin-film filter
JP5741283B2 (ja) * 2010-12-10 2015-07-01 旭硝子株式会社 赤外光透過フィルタ及びこれを用いた撮像装置
US10074814B2 (en) * 2013-04-22 2018-09-11 Ohio State Innovation Foundation Germanane analogs and optoelectronic devices using the same
CN112748488A (zh) 2015-01-23 2021-05-04 美题隆公司 具有改进的透射率的近红外光学干涉滤波器
KR102844020B1 (ko) * 2015-11-30 2025-08-11 제이에스알 가부시키가이샤 광학 필터, 환경 광 센서 및 센서 모듈
US9960199B2 (en) * 2015-12-29 2018-05-01 Viavi Solutions Inc. Dielectric mirror based multispectral filter array
US10247865B2 (en) 2017-07-24 2019-04-02 Viavi Solutions Inc. Optical filter

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4740442A (en) * 1985-05-11 1988-04-26 Barr & Stroud Limited Optical coating
CN1668961A (zh) * 2001-08-02 2005-09-14 伊吉斯半导体公司 可调谐光学仪器
US7901870B1 (en) * 2004-05-12 2011-03-08 Cirrex Systems Llc Adjusting optical properties of optical thin films
CN101678507A (zh) * 2007-06-18 2010-03-24 应用材料公司 兼容无定形碳光学吸收层的用于激光退火系统的高温计
TW200910425A (en) * 2007-08-16 2009-03-01 Nat Applied Res Laboratories Method for growing germanium film by pattern definition and high temperature cycle annealing process
CN101368267A (zh) * 2007-08-17 2009-02-18 株式会社半导体能源研究所 等离子体cvd装置、微晶半导体层、薄膜晶体管的制造
CN101919057A (zh) * 2008-01-22 2010-12-15 株式会社半导体能源研究所 半导体器件和制造半导体器件的方法
CN102933496A (zh) * 2010-06-08 2013-02-13 住友金属矿山株式会社 金属氧化物膜的制造方法及金属氧化物膜、使用该金属氧化物膜的元件、带有金属氧化物膜的基板以及使用该基板的器件
TW201301399A (zh) * 2011-06-03 2013-01-01 Applied Materials Inc 在矽基材上形成高生長速率低電阻率的鍺膜之方法〈一〉
CN104471449A (zh) * 2012-07-16 2015-03-25 Jds尤尼弗思公司 滤光器和传感器系统
EP3187909A1 (en) * 2015-12-29 2017-07-05 Viavi Solutions Inc. Metal mirror based multispectral filter array
CN106199801A (zh) * 2016-08-31 2016-12-07 奥普镀膜技术（广州）有限公司 一种40g100g 滤光片薄膜镀制方法

Also Published As

Publication number Publication date
KR20190011218A (ko) 2019-02-01
KR102352790B1 (ko) 2022-01-18
US20210124102A1 (en) 2021-04-29
EP3435123A1 (en) 2019-01-30
KR102569093B1 (ko) 2023-08-21
US20190227210A1 (en) 2019-07-25
CA3195431A1 (en) 2019-01-24
TWI786846B (zh) 2022-12-11
US10901127B2 (en) 2021-01-26
CN113204066A (zh) 2021-08-03
US20190025483A1 (en) 2019-01-24
TW201908778A (zh) 2019-03-01
AU2022202741A1 (en) 2022-05-19
CA3010507A1 (en) 2019-01-24
US10247865B2 (en) 2019-04-02
JP6985991B2 (ja) 2021-12-22
CN109298477B (zh) 2021-05-25
AU2022202741B2 (en) 2024-05-30
EP3872536B1 (en) 2025-09-03
EP3872536A1 (en) 2021-09-01
EP3435123B1 (en) 2021-09-08
US11733442B2 (en) 2023-08-22
AU2018204910B2 (en) 2022-02-03
KR20220014891A (ko) 2022-02-07
TW202204935A (zh) 2022-02-01
JP2022009149A (ja) 2022-01-14
CA3010507C (en) 2023-06-13
JP2019023722A (ja) 2019-02-14
TWI743378B (zh) 2021-10-21
JP7315635B2 (ja) 2023-07-26
AU2018204910A1 (en) 2019-02-07
CN109298477A (zh) 2019-02-01

Similar Documents

Publication Publication Date Title
CN113204066B (zh) 光学滤波器
JP7729867B2 (ja) 光学フィルタ
US12078830B2 (en) Optical interference filter with aluminum nitride layers
US20230095480A1 (en) Optical interference filter
HK40049852A (en) Optical filter
HK40049852B (zh) 光学滤波器
HK1261530B (zh) 光学滤波器
HK1261530A1 (en) Optical filter
US11867935B2 (en) Optical interference filter
HK1259463B (en) Optical filter
HK1259463A1 (en) Optical filter
HK40084187A (en) Optical interference filter
HK40083867A (en) Optical interference filter

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
REG Reference to a national code

Ref country code: HK

Ref legal event code: DE

Ref document number: 40049852

Country of ref document: HK

CB02 Change of applicant information
CB02 Change of applicant information

Address after: Arizona

Applicant after: VIAVI SOLUTIONS Inc.

Address before: California, USA

Applicant before: VIAVI SOLUTIONS Inc.

GR01 Patent grant
GR01 Patent grant