JP6985991B2 - 光学フィルタ - Google Patents
光学フィルタ Download PDFInfo
- Publication number
- JP6985991B2 JP6985991B2 JP2018129246A JP2018129246A JP6985991B2 JP 6985991 B2 JP6985991 B2 JP 6985991B2 JP 2018129246 A JP2018129246 A JP 2018129246A JP 2018129246 A JP2018129246 A JP 2018129246A JP 6985991 B2 JP6985991 B2 JP 6985991B2
- Authority
- JP
- Japan
- Prior art keywords
- layers
- optical
- spectral range
- filter
- optical filter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims description 169
- 230000003595 spectral effect Effects 0.000 claims description 66
- QUZPNFFHZPRKJD-UHFFFAOYSA-N germane Chemical compound [GeH4] QUZPNFFHZPRKJD-UHFFFAOYSA-N 0.000 claims description 41
- 229910052986 germanium hydride Inorganic materials 0.000 claims description 41
- 239000000463 material Substances 0.000 claims description 38
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 20
- 230000008033 biological extinction Effects 0.000 claims description 17
- 239000000758 substrate Substances 0.000 claims description 13
- 235000012239 silicon dioxide Nutrition 0.000 claims description 10
- 239000000377 silicon dioxide Substances 0.000 claims description 10
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 7
- 230000008859 change Effects 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 6
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims description 3
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 3
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Inorganic materials O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims description 3
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 claims description 3
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 claims description 3
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims description 2
- 239000004408 titanium dioxide Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 86
- 239000010408 film Substances 0.000 description 32
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 17
- 150000002290 germanium Chemical class 0.000 description 17
- 239000001257 hydrogen Substances 0.000 description 16
- 229910052739 hydrogen Inorganic materials 0.000 description 16
- 229910052732 germanium Inorganic materials 0.000 description 13
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 13
- 239000012528 membrane Substances 0.000 description 10
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 7
- 229910052990 silicon hydride Inorganic materials 0.000 description 7
- 238000002834 transmittance Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 101000863856 Homo sapiens Shiftless antiviral inhibitor of ribosomal frameshifting protein Proteins 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008021 deposition Effects 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 238000001994 activation Methods 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 230000001419 dependent effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 2
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 2
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001914 filtration Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000000678 plasma activation Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/281—Interference filters designed for the infrared light
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
- G02B1/113—Anti-reflection coatings using inorganic layer materials only
- G02B1/115—Multilayers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/003—Light absorbing elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
- G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
- G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
- G02B5/285—Interference filters comprising deposited thin solid films
- G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/02395—Glass optical fibre with a protective coating, e.g. two layer polymer coating deposited directly on a silica cladding surface during fibre manufacture
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/44—Mechanical structures for providing tensile strength and external protection for fibres, e.g. optical transmission cables
- G02B6/4479—Manufacturing methods of optical cables
- G02B6/4483—Injection or filling devices
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
- G02B6/036—Optical fibres with cladding with or without a coating core or cladding comprising multiple layers
- G02B6/03616—Optical fibres characterised both by the number of different refractive index layers around the central core segment, i.e. around the innermost high index core layer, and their relative refractive index difference
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/015—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction
- G02F1/0151—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on semiconductor elements having potential barriers, e.g. having a PN or PIN junction modulating the refractive index
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Optical Filters (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Glass Compositions (AREA)
- Laser Surgery Devices (AREA)
Description
層の第2サブセットは、第2屈折率を有する材料を含むことができる。前記第2屈折率は前記第1屈折率よりも小さいものとし得る。
100′ 例示的実施形態
100″ 例示的実施形態
110 センサシステム
120 光学フィルタ構体
130 光学フィルタ
140 光センサ
150 入力光信号
160 光信号の第1スペクトル範囲を有する第1部分
170 光信号の第2スペクトル範囲を有する第2部分
180 出力電気信号
200 光学フィルタ
210 (光学フィルタの)コーティング部分
220 基板
230 層
240 層
300 実施例
310 真空チャンバ
320 基板
330 カソード
331 標的
340 カソード電源
350 アノード
360 プラズマ活性化源(PAS)
370 PAS電源
400 グラフ
410-1 非水素化ゲルマニウム膜
410-2 水素化ゲルマニウム膜
410-3 水素化ゲルマニウム膜
410-5 水素化ゲルマニウム膜
410-6 水素化ケイ素膜
420 グラフ
430 グラフ
440 グラフ
500 グラフ
510 水素化ゲルマニウム光学フィルタ
520 グラフ
530 水素化ケイ素に基づく光学フィルタ
540 グラフ
Claims (16)
- 帯域通過フィルタにおいて、
1組の層のセットを備え、
前記1組の層のセットは、
第1屈折率を有する水素化ゲルマニウム(Ge:H)を含む層の第1サブセットと、及び
前記第1屈折率よりも小さい第2屈折率を有する材料を含む層の第2サブセットと、
を含み、
前記材料は、
二酸化ケイ素(SiO2)材料、
酸化アルミニウム(Al2O3)材料、
二酸化チタン(TiO2)材料、
五酸化ニオブ(Nb2O5)材料、
五酸化タンタル(Ta2O5)材料、又は
フッ化マグネシウム(MgF2)材料
のうちの少なくとも1つを含み、
前記第1屈折率は約1550ナノメートルの波長で約4.2よりも大きい、帯域通過フィルタ。 - 請求項1記載の帯域通過フィルタにおいて、
前記層の第1サブセットは高屈折率層(H)であり、及び前記層の第2サブセットは低屈折率層(L)であり、また、
前記1組の層のセットは、
(H-L)mの順序、
(H-L)m-Hの順序、
(L-H)mの順序、又は
L-(H-L)mの順序
のうち少なくとも1つの順序で配列し、mは交互配置するH及びLの層数である、帯域通過フィルタ。 - 請求項1記載の帯域通過フィルタにおいて、前記1組の層のセットは、約1100ナノメートル(nm)〜2000nmの間におけるスペクトル範囲に関連する光の閾値部分を通過させるよう構成されている、帯域通過フィルタ。
- 請求項1記載の帯域通過フィルタにおいて、前記1組の層のセットは、約1400ナノメートル(nm)〜2000nmの間におけるスペクトル範囲に関連する光の閾値部分を通過させるよう構成されている、帯域通過フィルタ。
- 請求項1記載の帯域通過フィルタにおいて、前記1組の層のセットは、約1550ナノメートルの中心波長を有するスペクトル範囲に関連する光の閾値部分を通過させるよう構成されている、帯域通過フィルタ。
- 請求項1記載の帯域通過フィルタにおいて、前記層の第1サブセットは、中心波長が約1550ナノメートルのスペクトル範囲で約0.01未満の吸光係数を有する、帯域通過フィルタ。
- 請求項1記載の帯域通過フィルタにおいて、前記第2屈折率は、約1100ナノメートル(nm)〜2000nmのスペクトル範囲で3未満である、帯域通過フィルタ。
- 請求項1記載の帯域通過フィルタにおいて、スペクトル範囲の中心波長に対する変化は、0゜〜40゜の入射角に関して40ナノメートル未満である、帯域通過フィルタ。
- 請求項1記載の帯域通過フィルタにおいて、スペクトル範囲の中心波長に対する変化は、0゜〜40゜の入射角に関して30ナノメートル未満である、帯域通過フィルタ。
- 請求項1記載の帯域通過フィルタにおいて、スペクトル範囲の中心波長に対する変化は、0゜〜30゜の入射角に関して20ナノメートル未満である、帯域通過フィルタ。
- 請求項1記載の帯域通過フィルタにおいて、スペクトル範囲の中心波長に対する変化は、0゜〜20゜の入射角に関して10ナノメートル未満である、帯域通過フィルタ。
- 基板と、
入射光をフィルタ処理するよう前記基板上に交互配置する高屈折率層及び低屈折率層のセットと、
を備える、光学フィルタであって、
該光学フィルタは、約1550ナノメートル(nm)の中心波長を有するスペクトル範囲内における入射光の第1部分を通過させ、また該スペクトル範囲内ではない入射光の第2部分を反射するよう構成されており、
前記高屈折率層は水素化ゲルマニウム(Ge:H)であり、
前記低屈折率層は二酸化ケイ素(SiO2)であり、
前記水素化ゲルマニウム(Ge:H)の屈折率は約1550ナノメートルの波長で約4.2よりも大きい、光学フィルタ。 - 光学系において、
入力光信号をフィルタ処理し、フィルタ処理済み入力光信号を供給するよう構成された光学フィルタであって、
前記入力光信号は第1光源からの光及び第2光源からの光を含み、
前記光学フィルタは誘電体薄膜層の1組のセットを含み、
前記誘電体薄膜層の1組のセットは、
第1屈折率を有する水素化ゲルマニウム(Ge:H)の層の第1サブセット、及び
前記第1屈折率よりも小さい第2屈折率を有する材料の層の第2サブセット
を含み、
前記第1屈折率は約1550ナノメートルの波長で約4.2よりも大きく、
前記材料は、
二酸化ケイ素(SiO2)材料、
酸化アルミニウム(Al2O3)材料、
二酸化チタン(TiO2)材料、
五酸化ニオブ(Nb2O5)材料、
五酸化タンタル(Ta2O5)材料、又は
フッ化マグネシウム(MgF2)材料
のうちの少なくとも1つを含み、
前記フィルタ処理済み入力光信号は、前記入力光信号に比べて前記第2光源からの減少した強度の光を含むようにした、
該光学フィルタと、
前記フィルタ処理済み入力光信号を受光し、かつ出力電気信号を供給するよう構成されている光センサと、
を備える、光学系。 - 請求項13記載の光学系において、前記光学フィルタは前記光センサのセンサ素子アレイ上に配置されている、光学系。
- 請求項13記載の光学系において、前記光学フィルタはセンサ素子から自由空間によって離されている、光学系。
- 請求項13記載の光学系において、前記光学フィルタは約5.6μmの厚みを有する、光学系。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2021168899A JP7315635B2 (ja) | 2017-07-24 | 2021-10-14 | 光学フィルタ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/657,515 | 2017-07-24 | ||
US15/657,515 US10247865B2 (en) | 2017-07-24 | 2017-07-24 | Optical filter |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021168899A Division JP7315635B2 (ja) | 2017-07-24 | 2021-10-14 | 光学フィルタ |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2019023722A JP2019023722A (ja) | 2019-02-14 |
JP2019023722A5 JP2019023722A5 (ja) | 2021-03-11 |
JP6985991B2 true JP6985991B2 (ja) | 2021-12-22 |
Family
ID=63014369
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018129246A Active JP6985991B2 (ja) | 2017-07-24 | 2018-07-06 | 光学フィルタ |
JP2021168899A Active JP7315635B2 (ja) | 2017-07-24 | 2021-10-14 | 光学フィルタ |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021168899A Active JP7315635B2 (ja) | 2017-07-24 | 2021-10-14 | 光学フィルタ |
Country Status (8)
Country | Link |
---|---|
US (3) | US10247865B2 (ja) |
EP (2) | EP3872536A1 (ja) |
JP (2) | JP6985991B2 (ja) |
KR (2) | KR102352790B1 (ja) |
CN (2) | CN109298477B (ja) |
AU (2) | AU2018204910B2 (ja) |
CA (2) | CA3010507C (ja) |
TW (2) | TWI743378B (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11066186B2 (en) | 2014-01-02 | 2021-07-20 | Valqari Holdings, Llc | Receiving appliance for automated deliveries |
US10247865B2 (en) | 2017-07-24 | 2019-04-02 | Viavi Solutions Inc. | Optical filter |
US10948640B2 (en) | 2018-03-13 | 2021-03-16 | Viavi Solutions Inc. | Sensor window with a set of layers configured to a particular color and associated with a threshold opacity in a visible spectral range wherein the color is a color-matched to a surface adjacent to the sensor window |
US11009636B2 (en) * | 2018-03-13 | 2021-05-18 | Viavi Solutions Inc. | Sensor window to provide different opacity and transmissivity at different spectral ranges |
US11562053B2 (en) | 2018-05-30 | 2023-01-24 | Viavi Solutions Inc. | User device incorporating multi-sensing sensor device |
US11366011B2 (en) * | 2019-02-13 | 2022-06-21 | Viavi Solutions Inc. | Optical device |
CN110109209A (zh) * | 2019-06-05 | 2019-08-09 | 信阳舜宇光学有限公司 | 滤光片以及制造滤光片的方法 |
CN112114394B (zh) * | 2019-06-21 | 2023-03-31 | 福州高意光学有限公司 | 具有温度补偿效应的滤光片和传感器系统 |
CN112578580A (zh) * | 2019-09-27 | 2021-03-30 | 福州高意通讯有限公司 | 一种温度可调标准具 |
CN110837145B (zh) * | 2019-11-21 | 2022-03-29 | 天津津航技术物理研究所 | 一种窄带滤光片光谱的调控方法 |
AU2021287816A1 (en) * | 2020-06-07 | 2023-01-05 | Valqari Holdings, Llc | Security and guidance systems and methods for parcel-receiving devices |
Family Cites Families (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4684565A (en) * | 1984-11-20 | 1987-08-04 | Exxon Research And Engineering Company | X-ray mirrors made from multi-layered material |
GB2175016B (en) * | 1985-05-11 | 1990-01-24 | Barr & Stroud Ltd | Optical coating |
JP2602034B2 (ja) * | 1987-10-21 | 1997-04-23 | 株式会社堀場製作所 | 帯域透過光学フィルター |
JPH07116605B2 (ja) * | 1988-03-25 | 1995-12-13 | 三洋電機株式会社 | 水素化アモルファスゲルマニウム膜、その膜の製造方法及びその膜を使用した電子デバイス又は電子装置 |
EP0642050B1 (en) * | 1993-09-02 | 2002-01-30 | Matsushita Electric Industrial Co., Ltd. | Spatial light modulator, method of production thereof and projection type display |
JP3043956B2 (ja) * | 1993-09-02 | 2000-05-22 | 松下電器産業株式会社 | 空間光変調素子、その製造方法及び投射型ディスプレイ |
US20030087121A1 (en) * | 2001-06-18 | 2003-05-08 | Lawrence Domash | Index tunable thin film interference coatings |
CA2456234A1 (en) | 2001-08-02 | 2003-02-13 | Lawrence Domash | Tunable optical instruments |
JP4382317B2 (ja) * | 2001-12-06 | 2009-12-09 | シチズンホールディングス株式会社 | 液晶可変波長フィルタ装置 |
JP2004317701A (ja) * | 2003-04-15 | 2004-11-11 | Alps Electric Co Ltd | 多層膜光フィルタ及び光学部品 |
JP2007524828A (ja) | 2003-06-20 | 2007-08-30 | アイギス セミコンダクター インコーポレイテッド | 熱光学フィルタ及びそれを用いた赤外線センサ |
US7901870B1 (en) * | 2004-05-12 | 2011-03-08 | Cirrex Systems Llc | Adjusting optical properties of optical thin films |
TWI282434B (en) * | 2005-06-15 | 2007-06-11 | Asia Optical Co Inc | Film layer structure of optical lens |
US7801406B2 (en) | 2005-08-01 | 2010-09-21 | Massachusetts Institute Of Technology | Method of fabricating Ge or SiGe/Si waveguide or photonic crystal structures by selective growth |
US8039341B2 (en) * | 2006-07-06 | 2011-10-18 | Freescale Semiconductor, Inc. | Selective uniaxial stress modification for use with strained silicon on insulator integrated circuit |
US7804042B2 (en) * | 2007-06-18 | 2010-09-28 | Applied Materials, Inc. | Pryometer for laser annealing system compatible with amorphous carbon optical absorber layer |
TW200910425A (en) * | 2007-08-16 | 2009-03-01 | Nat Applied Res Laboratories | Method for growing germanium film by pattern definition and high temperature cycle annealing process |
JP5058909B2 (ja) * | 2007-08-17 | 2012-10-24 | 株式会社半導体エネルギー研究所 | プラズマcvd装置及び薄膜トランジスタの作製方法 |
JP5317712B2 (ja) * | 2008-01-22 | 2013-10-16 | 株式会社半導体エネルギー研究所 | 半導体装置及び半導体装置の作製方法 |
US8441710B2 (en) * | 2010-01-08 | 2013-05-14 | Semrock, Inc. | Tunable thin-film filter |
CN102933496B (zh) * | 2010-06-08 | 2014-10-22 | 住友金属矿山株式会社 | 金属氧化物膜的制造方法及金属氧化物膜、使用该金属氧化物膜的元件、带有金属氧化物膜的基板以及使用该基板的器件 |
JP5741283B2 (ja) * | 2010-12-10 | 2015-07-01 | 旭硝子株式会社 | 赤外光透過フィルタ及びこれを用いた撮像装置 |
TWI521600B (zh) * | 2011-06-03 | 2016-02-11 | 應用材料股份有限公司 | 在矽基材上形成高生長速率低電阻率的鍺膜之方法〈一〉 |
TWI648561B (zh) * | 2012-07-16 | 2019-01-21 | 美商唯亞威方案公司 | 光學濾波器及感測器系統 |
US10074814B2 (en) * | 2013-04-22 | 2018-09-11 | Ohio State Innovation Foundation | Germanane analogs and optoelectronic devices using the same |
EP3828604A1 (en) | 2015-01-23 | 2021-06-02 | Materion Corporation | Near infrared optical interference filters with improved transmission |
JPWO2017094672A1 (ja) * | 2015-11-30 | 2018-09-13 | Jsr株式会社 | 光学フィルター、環境光センサーおよびセンサーモジュール |
US9960199B2 (en) | 2015-12-29 | 2018-05-01 | Viavi Solutions Inc. | Dielectric mirror based multispectral filter array |
US9923007B2 (en) | 2015-12-29 | 2018-03-20 | Viavi Solutions Inc. | Metal mirror based multispectral filter array |
CN106199801B (zh) * | 2016-08-31 | 2018-04-03 | 奥普镀膜技术(广州)有限公司 | 一种40g100g滤光片薄膜镀制方法 |
US10247865B2 (en) | 2017-07-24 | 2019-04-02 | Viavi Solutions Inc. | Optical filter |
-
2017
- 2017-07-24 US US15/657,515 patent/US10247865B2/en active Active
-
2018
- 2018-07-05 CA CA3010507A patent/CA3010507C/en active Active
- 2018-07-05 AU AU2018204910A patent/AU2018204910B2/en active Active
- 2018-07-05 CA CA3195431A patent/CA3195431A1/en active Pending
- 2018-07-06 JP JP2018129246A patent/JP6985991B2/ja active Active
- 2018-07-10 TW TW107123881A patent/TWI743378B/zh active
- 2018-07-10 TW TW110135567A patent/TWI786846B/zh active
- 2018-07-16 CN CN201810776179.8A patent/CN109298477B/zh active Active
- 2018-07-16 CN CN202110496730.5A patent/CN113204066B/zh active Active
- 2018-07-20 EP EP21160006.9A patent/EP3872536A1/en active Pending
- 2018-07-20 EP EP18184658.5A patent/EP3435123B1/en active Active
- 2018-07-23 KR KR1020180085498A patent/KR102352790B1/ko active IP Right Grant
-
2019
- 2019-04-01 US US16/371,692 patent/US10901127B2/en active Active
-
2021
- 2021-01-07 US US17/248,061 patent/US11733442B2/en active Active
- 2021-10-14 JP JP2021168899A patent/JP7315635B2/ja active Active
-
2022
- 2022-01-13 KR KR1020220005323A patent/KR102569093B1/ko active IP Right Grant
- 2022-04-26 AU AU2022202741A patent/AU2022202741B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
EP3872536A1 (en) | 2021-09-01 |
US10247865B2 (en) | 2019-04-02 |
KR20220014891A (ko) | 2022-02-07 |
CA3010507A1 (en) | 2019-01-24 |
CN109298477A (zh) | 2019-02-01 |
KR102352790B1 (ko) | 2022-01-18 |
CA3010507C (en) | 2023-06-13 |
KR20190011218A (ko) | 2019-02-01 |
US20190227210A1 (en) | 2019-07-25 |
AU2022202741B2 (en) | 2024-05-30 |
TW201908778A (zh) | 2019-03-01 |
AU2022202741A1 (en) | 2022-05-19 |
CN113204066A (zh) | 2021-08-03 |
CA3195431A1 (en) | 2019-01-24 |
CN109298477B (zh) | 2021-05-25 |
TWI743378B (zh) | 2021-10-21 |
US20210124102A1 (en) | 2021-04-29 |
EP3435123B1 (en) | 2021-09-08 |
US10901127B2 (en) | 2021-01-26 |
EP3435123A1 (en) | 2019-01-30 |
US11733442B2 (en) | 2023-08-22 |
JP2019023722A (ja) | 2019-02-14 |
US20190025483A1 (en) | 2019-01-24 |
JP2022009149A (ja) | 2022-01-14 |
AU2018204910B2 (en) | 2022-02-03 |
JP7315635B2 (ja) | 2023-07-26 |
KR102569093B1 (ko) | 2023-08-21 |
CN113204066B (zh) | 2024-02-13 |
TWI786846B (zh) | 2022-12-11 |
TW202204935A (zh) | 2022-02-01 |
AU2018204910A1 (en) | 2019-02-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6985991B2 (ja) | 光学フィルタ | |
US11131794B2 (en) | Optical filter and sensor system | |
JP7404367B2 (ja) | 光学フィルタ | |
TW201841002A (zh) | 光學偏振濾光器 | |
JP2019133137A (ja) | 光学フィルタ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210125 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210125 |
|
A871 | Explanation of circumstances concerning accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A871 Effective date: 20210125 |
|
A975 | Report on accelerated examination |
Free format text: JAPANESE INTERMEDIATE CODE: A971005 Effective date: 20210216 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20210309 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210531 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20210615 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20211014 |
|
C60 | Trial request (containing other claim documents, opposition documents) |
Free format text: JAPANESE INTERMEDIATE CODE: C60 Effective date: 20211014 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20211022 |
|
C21 | Notice of transfer of a case for reconsideration by examiners before appeal proceedings |
Free format text: JAPANESE INTERMEDIATE CODE: C21 Effective date: 20211026 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20211102 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20211126 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6985991 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |