CN112997321A - 糊料组合物 - Google Patents
糊料组合物 Download PDFInfo
- Publication number
- CN112997321A CN112997321A CN201980074653.5A CN201980074653A CN112997321A CN 112997321 A CN112997321 A CN 112997321A CN 201980074653 A CN201980074653 A CN 201980074653A CN 112997321 A CN112997321 A CN 112997321A
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- China
- Prior art keywords
- paste composition
- inorganic
- silicon
- oxide
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000203 mixture Substances 0.000 title claims abstract description 70
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 37
- 239000011521 glass Substances 0.000 claims abstract description 32
- 229910052806 inorganic carbonate Inorganic materials 0.000 claims abstract description 9
- 150000004703 alkoxides Chemical class 0.000 claims abstract description 8
- 229910001959 inorganic nitrate Inorganic materials 0.000 claims abstract description 8
- 229910052809 inorganic oxide Inorganic materials 0.000 claims abstract description 8
- 229910052920 inorganic sulfate Inorganic materials 0.000 claims abstract description 8
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 8
- 150000004767 nitrides Chemical class 0.000 claims abstract description 8
- 229910052782 aluminium Inorganic materials 0.000 claims description 22
- 238000010304 firing Methods 0.000 claims description 14
- 239000000843 powder Substances 0.000 claims description 5
- 150000001247 metal acetylides Chemical class 0.000 claims description 3
- 150000002823 nitrates Chemical class 0.000 claims description 2
- 238000002161 passivation Methods 0.000 abstract description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 30
- 229910052710 silicon Inorganic materials 0.000 description 29
- 239000010703 silicon Substances 0.000 description 29
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 19
- 239000000758 substrate Substances 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 11
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 description 9
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 description 9
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 description 9
- 239000000377 silicon dioxide Substances 0.000 description 9
- -1 tackifiers Substances 0.000 description 9
- 229920005989 resin Polymers 0.000 description 7
- 239000011347 resin Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 150000001875 compounds Chemical class 0.000 description 5
- VTYYLEPIZMXCLO-UHFFFAOYSA-L Calcium carbonate Chemical compound [Ca+2].[O-]C([O-])=O VTYYLEPIZMXCLO-UHFFFAOYSA-L 0.000 description 4
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 4
- 150000001768 cations Chemical class 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 238000007561 laser diffraction method Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910000838 Al alloy Inorganic materials 0.000 description 2
- 229910021364 Al-Si alloy Inorganic materials 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- CSNNHWWHGAXBCP-UHFFFAOYSA-L Magnesium sulfate Chemical compound [Mg+2].[O-][S+2]([O-])([O-])[O-] CSNNHWWHGAXBCP-UHFFFAOYSA-L 0.000 description 2
- 239000002202 Polyethylene glycol Substances 0.000 description 2
- 229910000676 Si alloy Inorganic materials 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 2
- CSDREXVUYHZDNP-UHFFFAOYSA-N alumanylidynesilicon Chemical compound [Al].[Si] CSDREXVUYHZDNP-UHFFFAOYSA-N 0.000 description 2
- IWOUKMZUPDVPGQ-UHFFFAOYSA-N barium nitrate Chemical compound [Ba+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O IWOUKMZUPDVPGQ-UHFFFAOYSA-N 0.000 description 2
- QVQLCTNNEUAWMS-UHFFFAOYSA-N barium oxide Chemical compound [Ba]=O QVQLCTNNEUAWMS-UHFFFAOYSA-N 0.000 description 2
- TZCXTZWJZNENPQ-UHFFFAOYSA-L barium sulfate Chemical compound [Ba+2].[O-]S([O-])(=O)=O TZCXTZWJZNENPQ-UHFFFAOYSA-L 0.000 description 2
- 229910052797 bismuth Inorganic materials 0.000 description 2
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 2
- 229910052796 boron Inorganic materials 0.000 description 2
- NLSCHDZTHVNDCP-UHFFFAOYSA-N caesium nitrate Chemical compound [Cs+].[O-][N+]([O-])=O NLSCHDZTHVNDCP-UHFFFAOYSA-N 0.000 description 2
- 229910000019 calcium carbonate Inorganic materials 0.000 description 2
- ZCCIPPOKBCJFDN-UHFFFAOYSA-N calcium nitrate Chemical compound [Ca+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ZCCIPPOKBCJFDN-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- PPQREHKVAOVYBT-UHFFFAOYSA-H dialuminum;tricarbonate Chemical compound [Al+3].[Al+3].[O-]C([O-])=O.[O-]C([O-])=O.[O-]C([O-])=O PPQREHKVAOVYBT-UHFFFAOYSA-H 0.000 description 2
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- AMWRITDGCCNYAT-UHFFFAOYSA-L hydroxy(oxo)manganese;manganese Chemical compound [Mn].O[Mn]=O.O[Mn]=O AMWRITDGCCNYAT-UHFFFAOYSA-L 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum(3+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 2
- YIXJRHPUWRPCBB-UHFFFAOYSA-N magnesium nitrate Chemical compound [Mg+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O YIXJRHPUWRPCBB-UHFFFAOYSA-N 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 2
- XHXFXVLFKHQFAL-UHFFFAOYSA-N phosphoryl trichloride Chemical compound ClP(Cl)(Cl)=O XHXFXVLFKHQFAL-UHFFFAOYSA-N 0.000 description 2
- 229920001223 polyethylene glycol Polymers 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- BWHMMNNQKKPAPP-UHFFFAOYSA-L potassium carbonate Chemical compound [K+].[K+].[O-]C([O-])=O BWHMMNNQKKPAPP-UHFFFAOYSA-L 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- NDVLTYZPCACLMA-UHFFFAOYSA-N silver oxide Chemical compound [O-2].[Ag+].[Ag+] NDVLTYZPCACLMA-UHFFFAOYSA-N 0.000 description 2
- 229910000029 sodium carbonate Inorganic materials 0.000 description 2
- 235000017550 sodium carbonate Nutrition 0.000 description 2
- VWDWKYIASSYTQR-UHFFFAOYSA-N sodium nitrate Chemical compound [Na+].[O-][N+]([O-])=O VWDWKYIASSYTQR-UHFFFAOYSA-N 0.000 description 2
- DHEQXMRUPNDRPG-UHFFFAOYSA-N strontium nitrate Chemical compound [Sr+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O DHEQXMRUPNDRPG-UHFFFAOYSA-N 0.000 description 2
- IATRAKWUXMZMIY-UHFFFAOYSA-N strontium oxide Chemical compound [O-2].[Sr+2] IATRAKWUXMZMIY-UHFFFAOYSA-N 0.000 description 2
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 description 2
- ONDPHDOFVYQSGI-UHFFFAOYSA-N zinc nitrate Chemical compound [Zn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ONDPHDOFVYQSGI-UHFFFAOYSA-N 0.000 description 2
- BNGXYYYYKUGPPF-UHFFFAOYSA-M (3-methylphenyl)methyl-triphenylphosphanium;chloride Chemical compound [Cl-].CC1=CC=CC(C[P+](C=2C=CC=CC=2)(C=2C=CC=CC=2)C=2C=CC=CC=2)=C1 BNGXYYYYKUGPPF-UHFFFAOYSA-M 0.000 description 1
- MFEVGQHCNVXMER-UHFFFAOYSA-L 1,3,2$l^{2}-dioxaplumbetan-4-one Chemical compound [Pb+2].[O-]C([O-])=O MFEVGQHCNVXMER-UHFFFAOYSA-L 0.000 description 1
- ZXSQEZNORDWBGZ-UHFFFAOYSA-N 1,3-dihydropyrrolo[2,3-b]pyridin-2-one Chemical compound C1=CN=C2NC(=O)CC2=C1 ZXSQEZNORDWBGZ-UHFFFAOYSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 1
- RVDLHGSZWAELAU-UHFFFAOYSA-N 5-tert-butylthiophene-2-carbonyl chloride Chemical compound CC(C)(C)C1=CC=C(C(Cl)=O)S1 RVDLHGSZWAELAU-UHFFFAOYSA-N 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229910000521 B alloy Inorganic materials 0.000 description 1
- 229910052580 B4C Inorganic materials 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 1
- 239000005751 Copper oxide Substances 0.000 description 1
- 239000004277 Ferrous carbonate Substances 0.000 description 1
- 229910002601 GaN Inorganic materials 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- 229910000003 Lead carbonate Inorganic materials 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000000020 Nitrocellulose Substances 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229920003171 Poly (ethylene oxide) Chemical class 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 229930182556 Polyacetal Natural products 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229920001328 Polyvinylidene chloride Polymers 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- WGLPBDUCMAPZCE-UHFFFAOYSA-N Trioxochromium Chemical compound O=[Cr](=O)=O WGLPBDUCMAPZCE-UHFFFAOYSA-N 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- FMRLDPWIRHBCCC-UHFFFAOYSA-L Zinc carbonate Chemical compound [Zn+2].[O-]C([O-])=O FMRLDPWIRHBCCC-UHFFFAOYSA-L 0.000 description 1
- FJWGYAHXMCUOOM-QHOUIDNNSA-N [(2s,3r,4s,5r,6r)-2-[(2r,3r,4s,5r,6s)-4,5-dinitrooxy-2-(nitrooxymethyl)-6-[(2r,3r,4s,5r,6s)-4,5,6-trinitrooxy-2-(nitrooxymethyl)oxan-3-yl]oxyoxan-3-yl]oxy-3,5-dinitrooxy-6-(nitrooxymethyl)oxan-4-yl] nitrate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O)O[C@H]1[C@@H]([C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@@H](CO[N+]([O-])=O)O1)O[N+]([O-])=O)CO[N+](=O)[O-])[C@@H]1[C@@H](CO[N+]([O-])=O)O[C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O FJWGYAHXMCUOOM-QHOUIDNNSA-N 0.000 description 1
- XHCLAFWTIXFWPH-UHFFFAOYSA-N [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[V+5].[V+5] XHCLAFWTIXFWPH-UHFFFAOYSA-N 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 229920000122 acrylonitrile butadiene styrene Polymers 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000004931 aggregating effect Effects 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 150000001341 alkaline earth metal compounds Chemical class 0.000 description 1
- 229920000180 alkyd Polymers 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- DJPURDPSZFLWGC-UHFFFAOYSA-N alumanylidyneborane Chemical compound [Al]#B DJPURDPSZFLWGC-UHFFFAOYSA-N 0.000 description 1
- CAVCGVPGBKGDTG-UHFFFAOYSA-N alumanylidynemethyl(alumanylidynemethylalumanylidenemethylidene)alumane Chemical compound [Al]#C[Al]=C=[Al]C#[Al] CAVCGVPGBKGDTG-UHFFFAOYSA-N 0.000 description 1
- SMZOGRDCAXLAAR-UHFFFAOYSA-N aluminium isopropoxide Chemical compound [Al+3].CC(C)[O-].CC(C)[O-].CC(C)[O-] SMZOGRDCAXLAAR-UHFFFAOYSA-N 0.000 description 1
- DIZPMCHEQGEION-UHFFFAOYSA-H aluminium sulfate (anhydrous) Chemical compound [Al+3].[Al+3].[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O.[O-]S([O-])(=O)=O DIZPMCHEQGEION-UHFFFAOYSA-H 0.000 description 1
- JPUHCPXFQIXLMW-UHFFFAOYSA-N aluminium triethoxide Chemical compound CCO[Al](OCC)OCC JPUHCPXFQIXLMW-UHFFFAOYSA-N 0.000 description 1
- 229940118662 aluminum carbonate Drugs 0.000 description 1
- 239000002518 antifoaming agent Substances 0.000 description 1
- 229910000410 antimony oxide Inorganic materials 0.000 description 1
- ADCOVFLJGNWWNZ-UHFFFAOYSA-N antimony trioxide Inorganic materials O=[Sb]O[Sb]=O ADCOVFLJGNWWNZ-UHFFFAOYSA-N 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- GYIWFHXWLCXGQO-UHFFFAOYSA-N barium(2+);ethanolate Chemical compound [Ba+2].CC[O-].CC[O-] GYIWFHXWLCXGQO-UHFFFAOYSA-N 0.000 description 1
- AYJRCSIUFZENHW-DEQYMQKBSA-L barium(2+);oxomethanediolate Chemical compound [Ba+2].[O-][14C]([O-])=O AYJRCSIUFZENHW-DEQYMQKBSA-L 0.000 description 1
- ZBUQRSWEONVBES-UHFFFAOYSA-L beryllium carbonate Chemical compound [Be+2].[O-]C([O-])=O ZBUQRSWEONVBES-UHFFFAOYSA-L 0.000 description 1
- 229910000023 beryllium carbonate Inorganic materials 0.000 description 1
- 229910000416 bismuth oxide Inorganic materials 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 description 1
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 description 1
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 description 1
- FJDQFPXHSGXQBY-UHFFFAOYSA-L caesium carbonate Chemical compound [Cs+].[Cs+].[O-]C([O-])=O FJDQFPXHSGXQBY-UHFFFAOYSA-L 0.000 description 1
- 229910000024 caesium carbonate Inorganic materials 0.000 description 1
- KOPBYBDAPCDYFK-UHFFFAOYSA-N caesium oxide Chemical compound [O-2].[Cs+].[Cs+] KOPBYBDAPCDYFK-UHFFFAOYSA-N 0.000 description 1
- 229910001942 caesium oxide Inorganic materials 0.000 description 1
- NKWPZUCBCARRDP-UHFFFAOYSA-L calcium bicarbonate Chemical compound [Ca+2].OC([O-])=O.OC([O-])=O NKWPZUCBCARRDP-UHFFFAOYSA-L 0.000 description 1
- 229910000020 calcium bicarbonate Inorganic materials 0.000 description 1
- BRPQOXSCLDDYGP-UHFFFAOYSA-N calcium oxide Chemical compound [O-2].[Ca+2] BRPQOXSCLDDYGP-UHFFFAOYSA-N 0.000 description 1
- 239000000292 calcium oxide Substances 0.000 description 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N calcium oxide Inorganic materials [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 1
- JHLCADGWXYCDQA-UHFFFAOYSA-N calcium;ethanolate Chemical compound [Ca+2].CC[O-].CC[O-] JHLCADGWXYCDQA-UHFFFAOYSA-N 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 229910000423 chromium oxide Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910000428 cobalt oxide Inorganic materials 0.000 description 1
- IVMYJDGYRUAWML-UHFFFAOYSA-N cobalt(ii) oxide Chemical compound [Co]=O IVMYJDGYRUAWML-UHFFFAOYSA-N 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229910000431 copper oxide Inorganic materials 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 229910000009 copper(II) carbonate Inorganic materials 0.000 description 1
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 1
- GEZOTWYUIKXWOA-UHFFFAOYSA-L copper;carbonate Chemical compound [Cu+2].[O-]C([O-])=O GEZOTWYUIKXWOA-UHFFFAOYSA-L 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 239000011646 cupric carbonate Substances 0.000 description 1
- 235000019854 cupric carbonate Nutrition 0.000 description 1
- 239000004643 cyanate ester Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- TYIXMATWDRGMPF-UHFFFAOYSA-N dibismuth;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Bi+3].[Bi+3] TYIXMATWDRGMPF-UHFFFAOYSA-N 0.000 description 1
- 235000014113 dietary fatty acids Nutrition 0.000 description 1
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical class OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 1
- AJNVQOSZGJRYEI-UHFFFAOYSA-N digallium;oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[Ga+3].[Ga+3] AJNVQOSZGJRYEI-UHFFFAOYSA-N 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000194 fatty acid Substances 0.000 description 1
- 229930195729 fatty acid Natural products 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- RAQDACVRFCEPDA-UHFFFAOYSA-L ferrous carbonate Chemical compound [Fe+2].[O-]C([O-])=O RAQDACVRFCEPDA-UHFFFAOYSA-L 0.000 description 1
- 235000019268 ferrous carbonate Nutrition 0.000 description 1
- 239000007849 furan resin Substances 0.000 description 1
- 229910001195 gallium oxide Inorganic materials 0.000 description 1
- 238000009689 gas atomisation Methods 0.000 description 1
- YBMRDBCBODYGJE-UHFFFAOYSA-N germanium oxide Inorganic materials O=[Ge]=O YBMRDBCBODYGJE-UHFFFAOYSA-N 0.000 description 1
- RXPAJWPEYBDXOG-UHFFFAOYSA-N hydron;methyl 4-methoxypyridine-2-carboxylate;chloride Chemical compound Cl.COC(=O)C1=CC(OC)=CC=N1 RXPAJWPEYBDXOG-UHFFFAOYSA-N 0.000 description 1
- BDAGIHXWWSANSR-NJFSPNSNSA-N hydroxyformaldehyde Chemical compound O[14CH]=O BDAGIHXWWSANSR-NJFSPNSNSA-N 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 229910000015 iron(II) carbonate Inorganic materials 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 238000004898 kneading Methods 0.000 description 1
- RLJMLMKIBZAXJO-UHFFFAOYSA-N lead nitrate Chemical compound [O-][N+](=O)O[Pb]O[N+]([O-])=O RLJMLMKIBZAXJO-UHFFFAOYSA-N 0.000 description 1
- 229910000464 lead oxide Inorganic materials 0.000 description 1
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 description 1
- 229910052808 lithium carbonate Inorganic materials 0.000 description 1
- ZLNQQNXFFQJAID-UHFFFAOYSA-L magnesium carbonate Chemical compound [Mg+2].[O-]C([O-])=O ZLNQQNXFFQJAID-UHFFFAOYSA-L 0.000 description 1
- 239000001095 magnesium carbonate Substances 0.000 description 1
- 229910000021 magnesium carbonate Inorganic materials 0.000 description 1
- 239000000395 magnesium oxide Substances 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 229910052943 magnesium sulfate Inorganic materials 0.000 description 1
- 235000019341 magnesium sulphate Nutrition 0.000 description 1
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 description 1
- 239000011656 manganese carbonate Substances 0.000 description 1
- 235000006748 manganese carbonate Nutrition 0.000 description 1
- 229910000016 manganese(II) carbonate Inorganic materials 0.000 description 1
- XMWCXZJXESXBBY-UHFFFAOYSA-L manganese(ii) carbonate Chemical compound [Mn+2].[O-]C([O-])=O XMWCXZJXESXBBY-UHFFFAOYSA-L 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910000476 molybdenum oxide Inorganic materials 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- CMWTZPSULFXXJA-VIFPVBQESA-N naproxen Chemical compound C1=C([C@H](C)C(O)=O)C=CC2=CC(OC)=CC=C21 CMWTZPSULFXXJA-VIFPVBQESA-N 0.000 description 1
- 229910000480 nickel oxide Inorganic materials 0.000 description 1
- 229910000008 nickel(II) carbonate Inorganic materials 0.000 description 1
- ZULUUIKRFGGGTL-UHFFFAOYSA-L nickel(ii) carbonate Chemical compound [Ni+2].[O-]C([O-])=O ZULUUIKRFGGGTL-UHFFFAOYSA-L 0.000 description 1
- 229910000484 niobium oxide Inorganic materials 0.000 description 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 description 1
- 229920001220 nitrocellulos Polymers 0.000 description 1
- QGLKJKCYBOYXKC-UHFFFAOYSA-N nonaoxidotritungsten Chemical compound O=[W]1(=O)O[W](=O)(=O)O[W](=O)(=O)O1 QGLKJKCYBOYXKC-UHFFFAOYSA-N 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 1
- VTRUBDSFZJNXHI-UHFFFAOYSA-N oxoantimony Chemical compound [Sb]=O VTRUBDSFZJNXHI-UHFFFAOYSA-N 0.000 description 1
- PVADDRMAFCOOPC-UHFFFAOYSA-N oxogermanium Chemical compound [Ge]=O PVADDRMAFCOOPC-UHFFFAOYSA-N 0.000 description 1
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 1
- PQQKPALAQIIWST-UHFFFAOYSA-N oxomolybdenum Chemical compound [Mo]=O PQQKPALAQIIWST-UHFFFAOYSA-N 0.000 description 1
- GNRSAWUEBMWBQH-UHFFFAOYSA-N oxonickel Chemical compound [Ni]=O GNRSAWUEBMWBQH-UHFFFAOYSA-N 0.000 description 1
- SJLOMQIUPFZJAN-UHFFFAOYSA-N oxorhodium Chemical compound [Rh]=O SJLOMQIUPFZJAN-UHFFFAOYSA-N 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910003445 palladium oxide Inorganic materials 0.000 description 1
- JQPTYAILLJKUCY-UHFFFAOYSA-N palladium(ii) oxide Chemical compound [O-2].[Pd+2] JQPTYAILLJKUCY-UHFFFAOYSA-N 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- BSPSZRDIBCCYNN-UHFFFAOYSA-N phosphanylidynetin Chemical compound [Sn]#P BSPSZRDIBCCYNN-UHFFFAOYSA-N 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 1
- 229920001230 polyarylate Polymers 0.000 description 1
- 229920001707 polybutylene terephthalate Polymers 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 239000004926 polymethyl methacrylate Substances 0.000 description 1
- 229920006324 polyoxymethylene Polymers 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920000136 polysorbate Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 229920005749 polyurethane resin Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 239000005033 polyvinylidene chloride Substances 0.000 description 1
- 235000015497 potassium bicarbonate Nutrition 0.000 description 1
- 229910000028 potassium bicarbonate Inorganic materials 0.000 description 1
- 239000011736 potassium bicarbonate Substances 0.000 description 1
- 229910000027 potassium carbonate Inorganic materials 0.000 description 1
- 235000011181 potassium carbonates Nutrition 0.000 description 1
- TYJJADVDDVDEDZ-UHFFFAOYSA-M potassium hydrogencarbonate Chemical compound [K+].OC([O-])=O TYJJADVDDVDEDZ-UHFFFAOYSA-M 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- CHWRSCGUEQEHOH-UHFFFAOYSA-N potassium oxide Chemical compound [O-2].[K+].[K+] CHWRSCGUEQEHOH-UHFFFAOYSA-N 0.000 description 1
- 229910001950 potassium oxide Inorganic materials 0.000 description 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 description 1
- 229910003450 rhodium oxide Inorganic materials 0.000 description 1
- WPFGFHJALYCVMO-UHFFFAOYSA-L rubidium carbonate Chemical compound [Rb+].[Rb+].[O-]C([O-])=O WPFGFHJALYCVMO-UHFFFAOYSA-L 0.000 description 1
- 229910000026 rubidium carbonate Inorganic materials 0.000 description 1
- 229910001952 rubidium oxide Inorganic materials 0.000 description 1
- CWBWCLMMHLCMAM-UHFFFAOYSA-M rubidium(1+);hydroxide Chemical compound [OH-].[Rb+].[Rb+] CWBWCLMMHLCMAM-UHFFFAOYSA-M 0.000 description 1
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 1
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- HYXGAEYDKFCVMU-UHFFFAOYSA-N scandium oxide Chemical compound O=[Sc]O[Sc]=O HYXGAEYDKFCVMU-UHFFFAOYSA-N 0.000 description 1
- NYMLCLICEBTBKR-UHFFFAOYSA-H scandium(3+);tricarbonate Chemical compound [Sc+3].[Sc+3].[O-]C([O-])=O.[O-]C([O-])=O.[O-]C([O-])=O NYMLCLICEBTBKR-UHFFFAOYSA-H 0.000 description 1
- DFCYEXJMCFQPPA-UHFFFAOYSA-N scandium(3+);trinitrate Chemical compound [Sc+3].[O-][N+]([O-])=O.[O-][N+]([O-])=O.[O-][N+]([O-])=O DFCYEXJMCFQPPA-UHFFFAOYSA-N 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- LKZMBDSASOBTPN-UHFFFAOYSA-L silver carbonate Substances [Ag].[O-]C([O-])=O LKZMBDSASOBTPN-UHFFFAOYSA-L 0.000 description 1
- 229910001958 silver carbonate Inorganic materials 0.000 description 1
- 229910001923 silver oxide Inorganic materials 0.000 description 1
- 239000004317 sodium nitrate Substances 0.000 description 1
- 235000010344 sodium nitrate Nutrition 0.000 description 1
- KKCBUQHMOMHUOY-UHFFFAOYSA-N sodium oxide Chemical compound [O-2].[Na+].[Na+] KKCBUQHMOMHUOY-UHFFFAOYSA-N 0.000 description 1
- 229910001948 sodium oxide Inorganic materials 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 229910000018 strontium carbonate Inorganic materials 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- JBQYATWDVHIOAR-UHFFFAOYSA-N tellanylidenegermanium Chemical compound [Te]=[Ge] JBQYATWDVHIOAR-UHFFFAOYSA-N 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 description 1
- GXMNGLIMQIPFEB-UHFFFAOYSA-N tetraethoxygermane Chemical compound CCO[Ge](OCC)(OCC)OCC GXMNGLIMQIPFEB-UHFFFAOYSA-N 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 239000002562 thickening agent Substances 0.000 description 1
- 239000013008 thixotropic agent Substances 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- JMXKSZRRTHPKDL-UHFFFAOYSA-N titanium ethoxide Chemical compound [Ti+4].CC[O-].CC[O-].CC[O-].CC[O-] JMXKSZRRTHPKDL-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- WOZZOSDBXABUFO-UHFFFAOYSA-N tri(butan-2-yloxy)alumane Chemical compound [Al+3].CCC(C)[O-].CCC(C)[O-].CCC(C)[O-] WOZZOSDBXABUFO-UHFFFAOYSA-N 0.000 description 1
- 229910001930 tungsten oxide Inorganic materials 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 229910001935 vanadium oxide Inorganic materials 0.000 description 1
- 239000001993 wax Substances 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
- 239000011667 zinc carbonate Substances 0.000 description 1
- 235000004416 zinc carbonate Nutrition 0.000 description 1
- 229910000010 zinc carbonate Inorganic materials 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910001928 zirconium oxide Inorganic materials 0.000 description 1
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Abstract
本发明提供一种糊料组合物，其为用于背面钝化型太阳能电池的糊料组合物，其特征在于，所述糊料组合物含有不含硅的玻璃粉、有机载体及铝粉，所述糊料组合物100质量％中的所述铝粉的含量为65～75质量％，所述糊料组合物除所述不含硅的玻璃粉以外，不含有无机碳酸盐、无机氧化物、无机碳化物、无机氮化物、无机硝酸盐、无机硫酸盐及有机金属醇盐中的任意一种。
Description
技术领域
本发明涉及一种糊料组合物(paste composition)。
背景技术
一直以来，为了提高结晶类太阳能电池单元的转换效率及生产效率等，进行了各种开发。尤其是作为符合该目标的太阳能电池，提出了一种背面钝化(Passivated Emitterand Rear Cell；以下，也仅称为PERC)型太阳能电池。
制造PERC型太阳能电池时，通常在太阳能电池单元的背面涂布包含铝的糊料组合物，并对该糊料组合物进行烧成从而形成电极。
作为上述糊料组合物，专利文献1中公开了一种使用了玻璃料(glass frit)的糊料组合物，所述玻璃料包含30～70阳离子摩尔％的铅(Pb2+)、1～40阳离子摩尔％的硅(Si4 +)、10～65阳离子摩尔％的硼(B3+)、及1～25阳离子摩尔％的铝(Al3+)。
专利文献2中公开了一种包含铝粉、铝-硅合金粉末、硅粉末、玻璃粉及有机载体(organic vehicle)的糊料组合物。
此外，近年来，随着作为太阳能电池单元的主原料的硅价格的高涨及太阳能电池的市场价格的下降，硅晶圆的薄型化的趋势不断加速。最近，正在研究使用厚度为140～170μm的硅晶圆。
另一方面，随着如上所述的硅晶圆的薄型化的进展，为了构成电极而对糊料组合物进行烧成时，因铝(～23×10-6/K)与硅(～3×10-6/K)的热膨胀差而产生的单元的翘曲变大，其结果，组装太阳能电池模块时成品率随着单元的裂纹或缺口而降低成为问题。
因此，专利文献3中提出了一种通过使用含有碱土金属的化合物的糊料组合物来抑制单元的翘曲的方法，专利文献4中提出了一种通过使用含有二氧化硅的糊料组合物来抑制单元的翘曲的方法。
然而，专利文献3及4中记载的糊料组合物虽可抑制烧成后的单元的翘曲，但另一方面，电极的电阻变高，其结果导致太阳能电池本身的转换效率变差。另外，在本说明书中，太阳能电池的转换效率被定义为：太阳能电池将光能转换为电能的效率。
现有技术文献
专利文献
专利文献1：日本特开2013-145865号公报
专利文献2：日本特开2013-143499号公报
专利文献3：美国专利申请公开第2012/0325307号说明书
专利文献4：美国专利申请公开第2007/0079868号说明书
发明内容
本发明要解决的技术问题
鉴于如上所述的情况，本发明的目的在于提供一种烧成后的翘曲小且电阻值低的、用于PERC型太阳能电池的糊料组合物。
解决技术问题的技术手段
本申请的发明人为了达成上述目的而反复进行深入研究，结果发现，通过使糊料组合物所包含的铝粉的比例在规定的数值范围内、且使糊料组合物不包含无机碳酸盐及二氧化硅，可提供一种对糊料组合物进行烧成后的翘曲小且电阻值低的、用于PERC型太阳能电池的糊料组合物。本申请的发明人基于上述见解进一步反复进行研究，从而完成了本发明。
即，本发明提供一种以下的用于PERC型太阳能电池的糊料组合物。
项1.
一种糊料组合物，其为用于背面钝化型太阳能电池的糊料组合物，其特征在于，
所述糊料组合物含有不含硅的玻璃粉、有机载体及铝粉，
所述糊料组合物100质量％中的所述铝粉的含量为65～75质量％，
所述糊料组合物除所述不含硅的玻璃粉以外，不含有无机氧化物、无机碳化物、无机氮化物、无机硝酸盐、无机硫酸盐及有机金属醇盐中的任意一种。
项2.
一种背面钝化型太阳能电池，其具有对项1所述的糊料组合物进行烧成而得到的电极。
发明效果
本发明的用于PERC型太阳能电池的糊料组合物在对该糊料组合物进行烧成后的翘曲小，且电阻值低。
附图说明
图1为PERC型太阳能电池单元的模式图。
具体实施方式
1.PERC型太阳能电池单元
如图1的(A)所示，PERC型太阳能电池单元例如通过使用厚度为140～170μm的硅半导体基板1而构成。并且，如图1的(B)所示，优选在硅半导体基板1的受光面侧依次层叠有n型杂质层2与防反射膜3。
并且，如图1的(B)所示，优选在硅半导体基板1的与受光面为相反侧的背面上设置有钝化膜4。如此后的图1的(C)所示，钝化膜4中例如利用激光照射等方法设置有接触孔5。
接着，如图1的(D)所示，以覆盖钝化膜4及接触孔5的方式，利用涂布等方法设置由糊料组合物6形成的层。通过将所述糊料组合物在高温、例如700～1000℃下进行烧成，形成背面电极9。如图1的(E)所示，进行烧成时，糊料组合物6所包含的铝扩散至硅半导体基板1的内部，由此在背面电极9与硅半导体基板1之间形成Al-Si的合金层7。同时，作为因铝原子的扩散而产生的杂质层，形成p+层(BSF层：Back Surface Field层)8。
2.糊料组合物
本发明的糊料组合物为用于背面钝化型太阳能电池的糊料组合物，其特征在于，所述糊料组合物含有不含硅的玻璃粉、有机载体及铝粉，所述糊料组合物100质量％中的所述铝粉的含量为65～75质量％，所述糊料组合物除所述不含硅的玻璃粉以外，不含有无机氧化物、无机碳化物、无机氮化物、无机硝酸盐、无机硫酸盐及有机金属醇盐中的任意一种。
(不含硅的玻璃粉)
本发明的糊料组合物包含不含硅的玻璃粉。在本说明书中，不含硅的玻璃粉被定义为：完全不含二氧化硅(SiO2)成分的玻璃粉、或者基本上不含二氧化硅(SiO2)成分的玻璃粉。
不含硅的玻璃粉只要为完全不含二氧化硅(SiO2)成分的玻璃粉、或者基本上不含二氧化硅(SiO2)成分的玻璃粉，则没有特别限定。例如，可以为含有选自由铅(Pb)、铋(Bi)、钒(V)、硼(B)、锡(Sn)、磷(P)及锌(Zn)等组成的组中的一种以上的氧化物的玻璃粉。
此外，作为不含硅的玻璃粉，能够使用含铅玻璃粉或铋类、钒类、锡-磷类等无铅的玻璃粉。特别是若考虑到对人体的影响，则优选使用无铅的玻璃粉。
为了降低丝网印刷时堵塞掩模(mask)的风险，糊料组合物中的不含硅的玻璃粉的利用激光衍射法算出的平均粒径优选为1～10μm，更优选为1～3μm。
为了确保烧成后的电极与硅晶圆的密合性，在糊料组合物100质量％中，糊料组合物所包含的不含硅的玻璃粉的含量优选为0.1质量％以上，更优选为0.5质量％以上。另一方面，为了不使烧成后的电极电阻值变得过高，在糊料组合物100质量％中，不含硅的玻璃粉的含量优选为10质量％以下，更优选为5质量％以上。
(有机载体)
作为有机载体，可以使用根据需要在溶剂中溶解有各种添加剂及树脂的有机载体。
作为溶剂，可使用公知的溶剂，具体而言，可列举出二乙二醇单丁醚、二乙二醇单丁醚乙酸酯、二丙二醇单甲醚等。
作为各种添加剂，例如能够使用抗氧化剂、缓蚀剂、消泡剂、增稠剂、增粘剂(tackifier)、偶联剂、静电赋予剂、阻聚剂、触变剂、防沉降剂等。具体而言，能够使用聚乙二醇酯化合物、聚乙二醇醚化合物、聚氧乙烯山梨醇酐酯化合物、山梨醇酐烷基酯化合物、脂肪族多元羧酸化合物、磷酸酯化合物、聚酯酸的酰胺胺(amido amine)盐、氧化聚乙烯类化合物、脂肪酸酰胺蜡等。然而，在本发明中，所述添加剂不包括无机碳酸盐及二氧化硅。
作为树脂，可使用公知的树脂，能够使用选自由乙基纤维素、硝酸纤维素、聚乙烯醇缩丁醛、酚醛树脂、三聚氰胺树脂、脲醛树脂、二甲苯树脂、醇酸树脂、不饱和聚酯树脂、丙烯酸树脂、聚酰亚胺树脂、呋喃树脂、聚氨酯树脂、异氰酸酯化合物、氰酸酯化合物等热固性树脂、聚乙烯、聚丙烯、聚苯乙烯、ABS树脂、聚甲基丙烯酸甲酯、聚氯乙烯、聚偏氯乙烯、聚乙酸乙烯酯、聚乙烯醇、聚缩醛、聚碳酸酯、聚对苯二甲酸乙二醇酯、聚对苯二甲酸丁二醇酯、聚苯醚、聚砜、聚酰亚胺、聚醚砜、聚芳酯、聚醚醚酮、聚四氟乙烯及硅树脂组成的组中的一种以上。作为本发明的糊料组合物所包含的有机载体，可以以不使树脂溶解于溶剂的方式使用树脂。
本发明的糊料组合物所包含的有机载体的含有比率没有特别限定，但相对于后述的铝粉100质量份，优选为30质量份以上60质量份以下。通过使有机载体的含有比率在所述数值范围内，将糊料组合物涂布于钝化膜时，可获得良好的附着性。
(铝粉)
构成铝粉的铝颗粒的形状没有特别限定，例如可以为球形、椭圆形、无定形、鳞片状及纤维状中的任意一种。其中，只要具有球形的形状，则可提高所形成的电极中的铝的填充性，降低电极的电阻，其结果，可提高太阳能电池的转换效率。
对于构成铝粉的铝颗粒的平均粒径，为了防止铝粉彼此凝集，并使糊料组合物中的铝粉的分散性变得良好，优选将利用激光衍射法测定的平均粒径设为0.1μm以上，更优选设为1μm以上。另一方面，为了降低丝网印刷时堵塞掩模的风险，优选将利用激光衍射法测定的铝粉颗粒的平均粒径设为20μm以下，更优选设为15μm以下。
铝粉可以仅由铝(优选高纯度的铝)构成，也可以包含铝合金。例如，作为铝合金，可例示出铝-硅合金、铝-硼合金等。
糊料组合物100质量％中，糊料组合物所包含的铝粉的含量为65～75质量％，优选为71～74质量％。若铝粉的含量小于65质量％，则转换效率降低。另一方面，若铝粉的含量大于75质量％，则为了形成电极而对糊料组合物进行烧成时，太阳能电池单元的翘曲变大。
(无机碳酸盐及二氧化硅)
如上所述，本发明的糊料组合物的特征在于，包含不含硅的玻璃粉、有机载体及铝粉，另一方面，除所述不含硅的玻璃粉以外，不含有无机碳酸盐、无机氧化物、无机碳化物、无机氮化物、无机硝酸盐、无机硫酸盐及有机金属醇盐中的任意一种。
此处的无机碳酸盐是指所有公知的无机碳酸盐。具体而言，可例示出碳酸钙、碳酸钠、碳酸镁、碳酸钡、碳酸铝、碳酸钾、碳酸钪、碳酸锌、碳酸银(I)、碳酸氢钾、碳酸氢钙、碳酸锶、碳酸铯、碳酸铁(II)、碳酸铜(II)、碳酸钠、碳酸铅(II)、碳酸镍(II)、碳酸铍、碳酸锰(II)、碳酸锂及碳酸铷。
此处的无机氧化物也是指所有公知的无机氧化物。具体而言，可例示出氧化钠、氧化镁、氧化铝、氧化硅、氧化钾、氧化钙、氧化钪、氧化钛、氧化钒、氧化铬、氧化锰、氧化铁、氧化钴、氧化镍、氧化铜、氧化锌、氧化镓、氧化锗、氧化铷、氧化锶、氧化钇、氧化锆、氧化铌、氧化钼、氧化钌、氧化铑、氧化钯、氧化银、氧化镉、氧化铟、氧化锡、氧化锑、氧化碲、氧化铯、氧化钡、氧化钽、氧化钨、氧化铅、氧化铋、氧化镧及氧化铈等稀土氧化物。
同样地，无机碳化物也是指所有公知的无机碳化物，具体而言，可例示出碳化硅、碳化硼、碳化铝。
无机氮化物也是指所有公知的无机氮化物，具体而言，可例示出氮化铝、氮化硅、氮化镓及氮化硼。
无机硝酸盐也是指公知的无机硝酸盐，具体而言，可例示出硝酸钠、硝酸镁、硝酸铝、硝酸钾、硝酸钙、硝酸钪、硝酸铜、硝酸锌、硝酸锶、硝酸铯、硝酸钡、硝酸铅、硝酸铋。
无机硫酸盐也是指所有公知的无机硫酸盐，具体而言，可例示出硫酸铝、硫酸钡及硫酸镁。
有机金属醇盐也是指所有公知的有机金属醇盐，具体而言，可例示出异丙醇铝、丁醇铝、乙醇铝、乙醇钡、乙醇钙、乙醇镁、乙醇锗及乙醇钛。
由于本发明的糊料组合物采用了除不含硅的玻璃粉以外，不含有无机碳酸盐、无机氧化物、无机碳化物、无机氮化物、无机硝酸盐、无机硫酸盐及有机金属醇盐中的任意一种的构成，因此可使对糊料组合物进行烧成后的烧成物的翘曲小、且使电阻值低。
此外，本发明的糊料组合物可利用常规方法制造，可利用对上述不含硅的玻璃粉、有机载体及铝粉进行捏合等的适当方法来制造。
以上，对本发明的实施方案进行了说明，但本发明并不受这些实例的任何限定，可在不脱离本发明的主旨的范围内以各种方案实施。
实施例
以下，基于实施例，对本发明的实施方案进行更具体的说明，但本发明并不限定于此。
(实施例及比较例)
将利用气体雾化法生成的铝粉、B2O3-Bi2O3-SrO-BaO-Sb2O3＝40/40/10/5/5(mol％)的玻璃粉、及乙基纤维素溶解于二乙二醇丁醚而得到载体，将该载体以下述表1所示的比例掺合至糊料组合物100质量％中，使用已知的分散装置(分散机)将其糊料化，得到糊料组合物。另外，如表1所示，关于比较例5，除上述3个成分以外还添加碳酸钙而得到糊料组合物，关于比较例6，除上述3个成分以外还添加二氧化硅而得到糊料组合物。
(太阳能电池单元的制作)
使用得到的各实施例及比较例的糊料组合物，以如下所述的方式制作作为评价用太阳能电池单元的烧成基板。
首先，准备图1的(A)所示的、由p型的单晶硅构成的半导体基板(基板：6英寸、厚度160μm、电阻率2Ω·cm)。
接着，如图1的(B)所示，利用气层热扩散法且在其中使用已制成气体状的POCl3(三氯氧磷)，以0.3～1μm的厚度并以具有40～200Ω/□的表面电阻(sheet resistance)的方式形成n+层2。
接着，利用等离子体CVD法，形成以氮化硅为主成分的防反射膜3，并在相反侧的面上形成由氧化铝与氮化硅构成的钝化膜4。接着，如图1的(C)所示，使用波长为1064nm的IR激光作为激光振荡器，在硅半导体基板1的表面(铝糊料印刷部分)上形成宽度D为30μm、深度为1μm的接触孔5。
接着，如图1的(D)所示，以覆盖整个背面(形成有接触孔9的一侧的面)的方式，使用丝网印刷机，将上述各实施例及比较例中得到的各糊料组合物6以成为0.8-0.9g/pc的方式印刷至硅半导体基板1的表面上。
然后，使用设定为800℃的红外带炉(赤外ベルト炉)进行烧成。通过该烧成，如图1的(E)所示，形成电极层9，此外，在进行该烧成时，铝扩散至硅半导体基板1的内部，由此在电极层9与硅半导体基板1之间形成Al-Si的合金层7，同时作为因铝原子的扩散而产生的杂质层，形成p+层(BSF层)8。
(电阻及翘曲量的评价)
使用表面电阻测量仪(NAPSON CORPORATION制造，型号RT-70V)，对得到的太阳能电池单元中的电极的电阻进行测定。翘曲量的测定使用激光位移计来实施。
此外，关于作为铝电极的主要功能的BSF层的性能评价，将得到的单元浸渍于已加热至50℃的盐酸中，对铝电极进行蚀刻(参照图1的(F))，使用Sinton Instruments制造的少子寿命测试仪(WCT-120)，实施潜在开路电压(Implied Voc)测定。
如下述表1所示，与使用各比较例的糊料组合物而制作的太阳能电池单元的电极相比，使用各实施例的糊料组合物而制作的太阳能电池单元的电极可得到更高的潜在开路电压及足够低的电阻值，且翘曲量也被抑制为2.0mm以下、为较低值。
[表1]
附图标记说明
1：硅半导体基板；2：n型杂质层；3：防反射膜；4：钝化膜；5：接触孔；6：糊料组合物；7：合金层；8：p+层；9：背面电极。
Claims (2)
1.一种糊料组合物，其为用于背面钝化型太阳能电池的糊料组合物，其特征在于，
所述糊料组合物含有不含硅的玻璃粉、有机载体及铝粉，
所述糊料组合物100质量％中的所述铝粉的含量为65～75质量％，
所述糊料组合物除所述不含硅的玻璃粉以外，不含有无机碳酸盐、无机氧化物、无机碳化物、无机氮化物、无机硝酸盐、无机硫酸盐及有机金属醇盐中的任意一种。
2.一种背面钝化型太阳能电池，其具有对权利要求1所述的糊料组合物进行烧成而得到的电极。
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| CN107673623A (zh) * | 2017-08-28 | 2018-02-09 | 广州市儒兴科技开发有限公司 | 一种双面perc铝浆用玻璃粉及其制备方法 |
| JP2018074078A (ja) * | 2016-11-02 | 2018-05-10 | 東洋アルミニウム株式会社 | ペースト組成物 |
| WO2018135430A1 (ja) * | 2017-01-23 | 2018-07-26 | 東洋アルミニウム株式会社 | 太陽電池用ペースト組成物 |
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| CN107673623A (zh) * | 2017-08-28 | 2018-02-09 | 广州市儒兴科技开发有限公司 | 一种双面perc铝浆用玻璃粉及其制备方法 |
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