CN112912926A - 半导体工艺中的智能图像跟踪系统 - Google Patents

半导体工艺中的智能图像跟踪系统 Download PDF

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Publication number
CN112912926A
CN112912926A CN201980069006.5A CN201980069006A CN112912926A CN 112912926 A CN112912926 A CN 112912926A CN 201980069006 A CN201980069006 A CN 201980069006A CN 112912926 A CN112912926 A CN 112912926A
Authority
CN
China
Prior art keywords
information
image
semiconductor
tracking
tracking system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980069006.5A
Other languages
English (en)
Chinese (zh)
Inventor
裵允晟
裵坰洙
洪光珍
李秀昌
金珉成
李昌雨
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Aisi Co.,Ltd.
Green information and Communication Co., Ltd
Original Assignee
Green Information And Communications Ltd
Mujin Electronics Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Green Information And Communications Ltd, Mujin Electronics Co ltd filed Critical Green Information And Communications Ltd
Publication of CN112912926A publication Critical patent/CN112912926A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/20—Analysis of motion
    • G06T7/246—Analysis of motion using feature-based methods, e.g. the tracking of corners or segments
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N7/00—Television systems
    • H04N7/18—Closed-circuit television [CCTV] systems, i.e. systems in which the video signal is not broadcast
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10016—Video; Image sequence
    • G—PHYSICS
    • G06—COMPUTING; CALCULATING OR COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Multimedia (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Signal Processing (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Theoretical Computer Science (AREA)
  • General Factory Administration (AREA)
  • Studio Devices (AREA)
CN201980069006.5A 2018-10-19 2019-08-23 半导体工艺中的智能图像跟踪系统 Pending CN112912926A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR1020180125323A KR102110498B1 (ko) 2018-10-19 2018-10-19 반도체 공정에서의 지능형 영상 추적 시스템
KR10-2018-0125323 2018-10-19
PCT/KR2019/010767 WO2020080666A1 (ko) 2018-10-19 2019-08-23 반도체 공정에서의 지능형 영상 추적 시스템

Publications (1)

Publication Number Publication Date
CN112912926A true CN112912926A (zh) 2021-06-04

Family

ID=70284025

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980069006.5A Pending CN112912926A (zh) 2018-10-19 2019-08-23 半导体工艺中的智能图像跟踪系统

Country Status (3)

Country Link
KR (1) KR102110498B1 (ko)
CN (1) CN112912926A (ko)
WO (1) WO2020080666A1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102308082B1 (ko) * 2020-11-06 2021-10-05 (주)에프피에이 다단조색 제어를 이용하는 펠릿 불량 검사 시스템 및 그의 제어 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20050048121A (ko) 2003-11-19 2005-05-24 삼성전자주식회사 식각장치의 모니터링 시스템 및 그의 모니터링 방법
JP2007121768A (ja) * 2005-10-28 2007-05-17 Mitsubishi Electric Corp 画面表示方法およびこれを用いた設備監視装置
JP2010055334A (ja) * 2008-08-28 2010-03-11 Olympus Corp 生産システムの制御方法および生産システム
KR101416873B1 (ko) * 2008-08-29 2014-07-08 현대중공업 주식회사 감시제어시스템에서 중요 알람의 표시와 공정 화면의 전환을 위한 사용자 인터페이스 방법
JP5502424B2 (ja) * 2009-10-26 2014-05-28 株式会社東芝 製造履歴記録システムおよび製造履歴記録方法
KR101619097B1 (ko) 2015-08-17 2016-05-18 주식회사 엠에스비전 반도체 제조 공정에서의 공정 모니터링 시스템
KR101909836B1 (ko) * 2017-12-04 2018-10-18 김정석 산업 공정 자동화 제어를 위한 ｈｍｉ 시스템, 이를 기반으로 한 공정 자동화 모니터링 방법

Also Published As

Publication number Publication date
KR102110498B1 (ko) 2020-05-13
KR20200044491A (ko) 2020-04-29
WO2020080666A1 (ko) 2020-04-23

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Effective date of registration: 20220601

Address after: Gyeonggi Do, South Korea

Applicant after: Aisi Co.,Ltd.

Applicant after: Green information and Communication Co., Ltd

Address before: Gyeonggi Do, South Korea

Applicant before: MUJIN ELECTRONICS Co.,Ltd.

Applicant before: Green information and Communication Co., Ltd

TA01 Transfer of patent application right