CN112580997B - 数据收集方法及系统、spc系统及计算机存储介质 - Google Patents
数据收集方法及系统、spc系统及计算机存储介质 Download PDFInfo
- Publication number
- CN112580997B CN112580997B CN202011549799.1A CN202011549799A CN112580997B CN 112580997 B CN112580997 B CN 112580997B CN 202011549799 A CN202011549799 A CN 202011549799A CN 112580997 B CN112580997 B CN 112580997B
- Authority
- CN
- China
- Prior art keywords
- key information
- data collection
- mes system
- spc
- collection plan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000013480 data collection Methods 0.000 title claims abstract description 145
- 238000000034 method Methods 0.000 title claims abstract description 66
- 238000012216 screening Methods 0.000 claims abstract description 30
- 230000000007 visual effect Effects 0.000 claims description 17
- 238000004590 computer program Methods 0.000 claims description 5
- 239000000126 substance Substances 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 38
- 238000003070 Statistical process control Methods 0.000 description 96
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
- G06Q10/063—Operations research, analysis or management
- G06Q10/0631—Resource planning, allocation, distributing or scheduling for enterprises or organisations
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q10/00—Administration; Management
- G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
- G06Q10/063—Operations research, analysis or management
- G06Q10/0639—Performance analysis of employees; Performance analysis of enterprise or organisation operations
- G06Q10/06395—Quality analysis or management
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
- G06Q50/00—Information and communication technology [ICT] specially adapted for implementation of business processes of specific business sectors, e.g. utilities or tourism
- G06Q50/04—Manufacturing
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/30—Computing systems specially adapted for manufacturing
Landscapes
- Business, Economics & Management (AREA)
- Human Resources & Organizations (AREA)
- Engineering & Computer Science (AREA)
- Strategic Management (AREA)
- Economics (AREA)
- Entrepreneurship & Innovation (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Educational Administration (AREA)
- Marketing (AREA)
- Development Economics (AREA)
- General Business, Economics & Management (AREA)
- Tourism & Hospitality (AREA)
- Physics & Mathematics (AREA)
- Quality & Reliability (AREA)
- Operations Research (AREA)
- Game Theory and Decision Science (AREA)
- Manufacturing & Machinery (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Primary Health Care (AREA)
- Management, Administration, Business Operations System, And Electronic Commerce (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011549799.1A CN112580997B (zh) | 2020-12-24 | 2020-12-24 | 数据收集方法及系统、spc系统及计算机存储介质 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011549799.1A CN112580997B (zh) | 2020-12-24 | 2020-12-24 | 数据收集方法及系统、spc系统及计算机存储介质 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN112580997A CN112580997A (zh) | 2021-03-30 |
CN112580997B true CN112580997B (zh) | 2021-07-27 |
Family
ID=75140460
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202011549799.1A Active CN112580997B (zh) | 2020-12-24 | 2020-12-24 | 数据收集方法及系统、spc系统及计算机存储介质 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN112580997B (zh) |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW493116B (en) * | 1999-06-01 | 2002-07-01 | Applied Materials Inc | Semiconductor processing techniques |
US6970758B1 (en) * | 2001-07-12 | 2005-11-29 | Advanced Micro Devices, Inc. | System and software for data collection and process control in semiconductor manufacturing and method thereof |
KR20060100489A (ko) * | 2005-03-17 | 2006-09-21 | (주)미래로시스템 | 웨이퍼 맵과 통계분석 기능을 제공해주는 베어 웨이퍼 수율관리 시스템 |
CN1985221A (zh) * | 2004-07-14 | 2007-06-20 | 东京毅力科创株式会社 | 基于公式的制程间控制 |
CN101006398A (zh) * | 2004-08-27 | 2007-07-25 | 东京毅力科创株式会社 | 使用虚拟模块的半导体处理方法 |
TW200811745A (en) * | 2006-08-29 | 2008-03-01 | Powerchip Semiconductor Corp | Statistical process control method and system |
CN101258499A (zh) * | 2005-02-16 | 2008-09-03 | 东京毅力科创株式会社 | 使用运行到运行控制器的故障检测与分类(fdc) |
CN103345235A (zh) * | 2013-07-18 | 2013-10-09 | 上海华力微电子有限公司 | 建立统计过程控制系统数据采集规则的方法及模块 |
CN103869795A (zh) * | 2014-03-31 | 2014-06-18 | 上海华力微电子有限公司 | Spc策略建立方法 |
CN107728591A (zh) * | 2017-09-30 | 2018-02-23 | 中航锂电(江苏)有限公司 | 一种智能质量在线测厚判定方法及系统 |
CN107844102A (zh) * | 2017-09-29 | 2018-03-27 | 深圳春沐源控股有限公司 | 一种生产计划管理的方法及系统 |
CN110442092A (zh) * | 2019-07-05 | 2019-11-12 | 柳州钢铁股份有限公司 | 一种基于热连轧生产的自动统计和分析方法 |
CN112116364A (zh) * | 2020-09-29 | 2020-12-22 | 陕西科技大学 | 一种生产制造追溯系统及平台 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7069101B1 (en) * | 1999-07-29 | 2006-06-27 | Applied Materials, Inc. | Computer integrated manufacturing techniques |
US7275016B2 (en) * | 2003-08-08 | 2007-09-25 | Siemens Aktiengesellschaft | Method and system for providing problem identification and trouble-shooting services |
-
2020
- 2020-12-24 CN CN202011549799.1A patent/CN112580997B/zh active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW493116B (en) * | 1999-06-01 | 2002-07-01 | Applied Materials Inc | Semiconductor processing techniques |
US6970758B1 (en) * | 2001-07-12 | 2005-11-29 | Advanced Micro Devices, Inc. | System and software for data collection and process control in semiconductor manufacturing and method thereof |
CN1985221A (zh) * | 2004-07-14 | 2007-06-20 | 东京毅力科创株式会社 | 基于公式的制程间控制 |
CN101006398A (zh) * | 2004-08-27 | 2007-07-25 | 东京毅力科创株式会社 | 使用虚拟模块的半导体处理方法 |
CN101258499A (zh) * | 2005-02-16 | 2008-09-03 | 东京毅力科创株式会社 | 使用运行到运行控制器的故障检测与分类(fdc) |
KR20060100489A (ko) * | 2005-03-17 | 2006-09-21 | (주)미래로시스템 | 웨이퍼 맵과 통계분석 기능을 제공해주는 베어 웨이퍼 수율관리 시스템 |
TW200811745A (en) * | 2006-08-29 | 2008-03-01 | Powerchip Semiconductor Corp | Statistical process control method and system |
CN103345235A (zh) * | 2013-07-18 | 2013-10-09 | 上海华力微电子有限公司 | 建立统计过程控制系统数据采集规则的方法及模块 |
CN103869795A (zh) * | 2014-03-31 | 2014-06-18 | 上海华力微电子有限公司 | Spc策略建立方法 |
CN107844102A (zh) * | 2017-09-29 | 2018-03-27 | 深圳春沐源控股有限公司 | 一种生产计划管理的方法及系统 |
CN107728591A (zh) * | 2017-09-30 | 2018-02-23 | 中航锂电(江苏)有限公司 | 一种智能质量在线测厚判定方法及系统 |
CN110442092A (zh) * | 2019-07-05 | 2019-11-12 | 柳州钢铁股份有限公司 | 一种基于热连轧生产的自动统计和分析方法 |
CN112116364A (zh) * | 2020-09-29 | 2020-12-22 | 陕西科技大学 | 一种生产制造追溯系统及平台 |
Non-Patent Citations (1)
Title |
---|
"大数据技术及其在智能制造中的应用模式专利分析";张超然 等;《中国发明与专利》;20201031;第17卷(第10期);全文 * |
Also Published As
Publication number | Publication date |
---|---|
CN112580997A (zh) | 2021-03-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN108667725A (zh) | 一种基于多种接入及边缘计算的工业软网关以及实现方法 | |
JP2006343952A (ja) | 製造管理装置、製造管理方法および製造管理プログラム | |
CN102622247A (zh) | 服务器的bios信息配置系统及方法 | |
CN106598992A (zh) | 数据库的操作方法及装置 | |
CN105245582A (zh) | 数据中心的监控方法和监控装置 | |
CN101438275A (zh) | 工作项事件处理 | |
CN111338869B (zh) | 配置参数管理方法、装置、设备及存储介质 | |
CN113094087A (zh) | 软件配置方法、电子设备及存储介质 | |
CN112860308A (zh) | 接口定义的配置方法、业务处理方法、服务器及存储介质 | |
CN110083536B (zh) | 测试资源分配方法及装置、电子设备及存储介质 | |
CN112580997B (zh) | 数据收集方法及系统、spc系统及计算机存储介质 | |
JP6915475B2 (ja) | 遠隔検針システム | |
CN111371593B (zh) | 一种业务部署方法、装置、电子设备及存储介质 | |
CN112596488B (zh) | 数据采集方法、装置、电子设备、存储介质 | |
CN112235358A (zh) | 数据的采集方法、装置、电子设备及计算机可读存储介质 | |
EP4184343A1 (en) | Information processing system, information processing method and information processing program | |
CN113688116A (zh) | 数据展示系统、方法、设备及计算机可读存储介质 | |
CN115587579A (zh) | 数字处理系统、生产系统和生产方法 | |
CN112541657B (zh) | 硅片产品转换方法及系统、电子设备及存储介质 | |
CN112612255B (zh) | 数据采集方法、装置、电子设备、存储介质 | |
CN112734404B (zh) | 研发过程迭代的工时统计方法、装置、计算机设备 | |
CN112540995B (zh) | 数据更新方法、电子设备及存储介质 | |
CN110099440B (zh) | 定位延时校准方法及装置 | |
CN112084076A (zh) | 测试方法、电子设备及存储介质 | |
EP0874322A1 (en) | FA information managing method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB02 | Change of applicant information |
Address after: 201103 room 872, building 1, 1199 Wuzhong Road, Minhang District, Shanghai Applicant after: Shanghai saimeite Software Technology Co.,Ltd. Address before: 201103 room 872, building 1, 1199 Wuzhong Road, Minhang District, Shanghai Applicant before: Temex software technology (Shanghai) Co.,Ltd. |
|
CB02 | Change of applicant information | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CP03 | Change of name, title or address |
Address after: 200100, Room 101, 1st Floor, Building 7, No. 7001 Zhongchun Road, Minhang District, Shanghai Patentee after: Saimet Information Group Co.,Ltd. Country or region after: China Address before: 200100, Room 101, 1st Floor, Building 7, No. 7001 Zhongchun Road, Minhang District, Shanghai Patentee before: SEMI-TECH (Shanghai) Co.,Ltd. Country or region before: China Address after: 200100, Room 101, 1st Floor, Building 7, No. 7001 Zhongchun Road, Minhang District, Shanghai Patentee after: SEMI-TECH (Shanghai) Co.,Ltd. Country or region after: China Address before: 201103 room 872, building 1, 1199 Wuzhong Road, Minhang District, Shanghai Patentee before: Shanghai saimeite Software Technology Co.,Ltd. Country or region before: China |