CN112864274B - Passivation equipment and passivation method - Google Patents
Passivation equipment and passivation method Download PDFInfo
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- CN112864274B CN112864274B CN202011626771.3A CN202011626771A CN112864274B CN 112864274 B CN112864274 B CN 112864274B CN 202011626771 A CN202011626771 A CN 202011626771A CN 112864274 B CN112864274 B CN 112864274B
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- 238000002161 passivation Methods 0.000 title claims abstract description 145
- 238000000034 method Methods 0.000 title claims abstract description 47
- 239000007789 gas Substances 0.000 claims abstract description 149
- 238000002955 isolation Methods 0.000 claims abstract description 104
- 238000010438 heat treatment Methods 0.000 claims abstract description 95
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims abstract description 73
- 238000005507 spraying Methods 0.000 claims abstract description 73
- 239000007921 spray Substances 0.000 claims abstract description 24
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000001301 oxygen Substances 0.000 claims abstract description 18
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 18
- 238000011068 loading method Methods 0.000 claims description 76
- 230000001681 protective effect Effects 0.000 claims description 66
- 238000007789 sealing Methods 0.000 claims description 32
- 238000006243 chemical reaction Methods 0.000 claims description 24
- 239000006185 dispersion Substances 0.000 claims description 17
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 16
- 238000005192 partition Methods 0.000 claims description 15
- 238000009792 diffusion process Methods 0.000 claims description 12
- 238000010926 purge Methods 0.000 claims description 9
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 238000009826 distribution Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 11
- 238000011161 development Methods 0.000 abstract description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 230000008569 process Effects 0.000 description 13
- 238000009434 installation Methods 0.000 description 9
- 238000000137 annealing Methods 0.000 description 8
- 238000003825 pressing Methods 0.000 description 8
- 235000012239 silicon dioxide Nutrition 0.000 description 8
- 239000000377 silicon dioxide Substances 0.000 description 8
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- 230000008859 change Effects 0.000 description 6
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- 238000000576 coating method Methods 0.000 description 5
- 239000000306 component Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 238000010248 power generation Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
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- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/186—Particular post-treatment for the devices, e.g. annealing, impurity gettering, short-circuit elimination, recrystallisation
- H01L31/1868—Passivation
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses passivation equipment, which comprises an isolation box, a passivation box positioned in the isolation box, a carrier device positioned in the passivation box and a heating device, wherein the carrier device bears sliced batteries, the heating device controls the temperature in the passivation box, a spraying device is arranged between the carrier device and the heating device and sprays oxygen or sprays passivation gas on the cross sections of the sliced batteries, the passivation method is also provided, the passivation equipment is used for passivating the cross sections of the sliced batteries, the passivation treatment comprises the step of contacting the passivation gas with the cross sections of the sliced batteries, the technical scheme that the spraying device sprays ozone on the cross sections of the sliced batteries for passivation treatment is adopted, the operation is simple, the industrialized and large-scale development can be formed, the spraying pipe of the spraying device is adopted for spraying the passivation gas on the cross sections of the sliced batteries to ensure that the passivation gas is uniformly sprayed, the passivation effect is ensured.
Description
Technical Field
The invention belongs to the field of semiconductor manufacturing and solar photovoltaic cell manufacturing, and particularly relates to a photovoltaic cell piece cutting post-treatment process.
Background
In recent years, the photovoltaic technology is developed rapidly and has a wide application range, the market changes from the original condition that only high power is emphasized into the comprehensive requirement of high power, high power generation amount under any installation condition, low attenuation and low cost, so that the electricity consumption cost is further reduced, how to reduce the electricity consumption cost becomes the most core problem of the current industry, a photovoltaic module serving as a core component of photovoltaic system end power generation is important, the high power of the module is the most direct and favorable technical channel for promoting 'flat price internet surfing', and the power of the module is improved mainly by the technologies of double sides, half cutting, multiple main grids, tile overlapping and the like.
To date, half-cell batteries have proven to be compatible with a variety of boost assembly power technologies and have achieved good performance, with the advantages of half-cell batteries: the current loss of the whole assembly is reduced to 1/4, and the output power is about 5-10W higher than that of the whole battery assembly of the same type; the hot spot effect of the assembly can be effectively reduced; the temperature of the half-piece assembly is lower than that of the conventional whole-piece assembly; the half battery pack meets the design requirement of 1500V system voltage, and the cost of the system end can be reduced by about 10 percent; the power generation loss caused by shielding is effectively reduced; reducing light induced degradation, and the like.
However, the half-wafer assembly has the small defect that after a cell is cut into halves, the filling factor FF and the short-circuit current Isc of the cell are reduced due to damage and pollution of the cross section of a silicon wafer, so that the efficiency of the cell is reduced, the assembly efficiency is reduced, the improvement effect of the half-wafer assembly is reduced, and the problem is effectively solved.
Disclosure of Invention
The invention provides passivation equipment and a passivation method in order to overcome the defects of the prior art.
In order to achieve the purpose, the invention adopts the following technical scheme: a passivation apparatus, characterized by: the device comprises an isolation box, a passivation box positioned in the isolation box, a carrier device and a heating device, wherein the carrier device and the heating device are positioned in the passivation box, the carrier device bears a sliced battery, the heating device controls the temperature in the passivation box, a spraying device is arranged between the carrier device and the heating device, the spraying device sprays oxygen or sprays passivation gas on the section of the sliced battery, the device also comprises an ultraviolet lamp tube, the ultraviolet ray of the ultraviolet lamp tube enables the oxygen sprayed and introduced by the spraying device to react into ozone, the ozone is contacted with the section of the sliced battery to carry out passivation treatment, the isolation box comprises an isolation main body and an isolation cover plate, the isolation main body comprises an isolation cavity, the passivation box is positioned in the isolation cavity, a sealing ring is arranged on the upper end face of the isolation main body, a vent pipe and a thermocouple are arranged on the isolation main body, the vent pipe is communicated with the isolation cavity, the vent pipe is filled with protective gas or compressed air to sweep the isolation cavity, and the thermocouple extends into the passivation box, the temperature inside the passivation chamber was measured. Further, the method comprises the following steps of; the passivation box also comprises a cover plate and a loading structure used for loading the carrier device and the heating device, the loading structure comprises a loading bottom plate, a loading connecting plate, a loading partition plate and two groups of loading side plates, the two groups of loading side plates are symmetrically arranged and fixedly connected with the loading bottom plate and the loading connecting plate, the loading partition plate is fixedly connected with the two groups of loading side plates, the loading structure forms a carrier cavity for loading the carrier device and a heating cavity for loading the heating device through the loading partition plate, a reaction window is fixedly arranged on the loading partition plate, the heating device is communicated with the carrier device through the reaction window, passivation gas flows into the carrier cavity through the reaction window to passivate the section of the sliced battery, the loading connecting plate is connected with a diffusion piece, a plurality of groups of diffusion holes are fixedly arranged on the diffusion piece, an air inlet pipe is communicated with the loading connecting plate and is arranged on the loading connecting plate, the air inlet pipe penetrates through the isolation main body and extends outwards, and the air inlet pipe leads nitrogen to the carrier device and the carrier cavity, the dispersion holes of the dispersion piece control the dispersion uniformity of the nitrogen introduced into the air inlet pipe.
Further, the method comprises the following steps of; the carrier device includes the carrier back plate, the carrier left side board, the carrier right side board, carrier bottom plate and carrier upper plate, the carrier bottom plate is used for supporting the section battery, the section of section battery is towards the reaction window, the carrier back plate, carrier left side board and carrier right side board are all installed on the carrier bottom plate, carrier left side board and carrier right side board symmetric distribution, the carrier back plate, the carrier left side board, carrier right side board and carrier bottom plate form the chamber that bears the weight of the section battery of bearing the weight of, carrier upper plate and carrier bottom plate restriction section battery are in the removal of vertical direction, carrier left side board and carrier right side board restriction section battery remove at the horizontal direction.
Further, the method comprises the following steps of; the heating device comprises a shell and a heating pipe, the heating pipe adopts an infrared lamp tube or an electric furnace wire, and the heating pipe is fixed on the shell through a fixing rod.
Further, the method comprises the following steps of; spray set includes air duct and shower, air duct and shower intercommunication, and the air duct passes heating device and keeps apart the main part and extends to the shielded box outside, has set firmly a plurality of holes that spray on the shower, and the shower is relative with reaction window position, and passivation gas lets in and sprays the section to the section of section battery through spraying the hole by the air duct, and the air duct lets in the protective gas and sweeps passivation incasement portion.
Further, the method comprises the following steps of; still include exhaust apparatus, exhaust apparatus includes blast pipe and exhaust tube, has set firmly a plurality of exhaust holes on the blast pipe, blast pipe and exhaust tube intercommunication, and the exhaust tube passes heating device in proper order and keeps apart the main part and extend to the shielded box outside, is provided with the vacuum gauge on the exhaust tube, and exhaust apparatus controls the atmospheric pressure in the passivation incasement to detect the atmospheric pressure in the passivation incasement through the vacuum gauge, exhaust apparatus will passivate the atmospheric pressure control in the incasement at the within range of setting for.
Further, the method comprises the following steps of; the ultraviolet lamp tube is fixedly arranged on the shell of the heating device, the heating pipe is positioned between the ultraviolet lamp tube and the carrier device, and the ultraviolet lamp tube and the heating pipe are isolated through a heat-insulating lampshade.
A passivation method, characterized by: the method is used for passivating the section of the sliced battery by the passivating device, and the passivating treatment comprises the step of contacting passivating gas with the section of the sliced battery.
Further, the method comprises the following steps;
(1) pre-assembling a sliced battery;
(2) vacuumizing and detecting leakage;
(3) controlling the temperature and pressure of the passivation tank;
(4) passivating;
protective gas is continuously introduced into the gas inlet pipe, the spraying device sprays passivation gas on the section of the sliced battery or/and ozone is generated by ultraviolet rays of the ultraviolet lamp tube, and the ozone is in contact with the section of the sliced battery for passivation treatment;
(5) vacuumizing;
(6) purging the isolation box and the passivation box;
(7) and taking out the passivated sliced battery.
In conclusion, the invention has the advantages that:
1) the technical scheme that the spraying device is used for spraying ozone on the section of the sliced battery for passivation treatment is simple to operate, and industrial and large-scale development can be realized.
2) The concentration of the ozone for passivation is controlled to be less than 2000ppm, the flow is controlled to be 0.1slm-30slm, and the spraying time is controlled to be 2min-60min, so that a compact silicon dioxide protective layer is formed on the section of the sliced cell, the spraying period is shortened, the spraying efficiency is improved, the damage of the ozone to an electrode and a surface coating is avoided, and the photoelectric efficiency of the sliced cell is further improved.
3) The section of the sliced battery can be passivated by ozone generated by the ultraviolet lamp tube, and the ozone generation mode is various.
4) According to the invention, the protective gas is introduced to protect the electrode and the surface coating of the sliced battery, so that the ozone only oxidizes the section, and the efficiency of the sliced battery is improved.
5) The invention adopts the spray pipe of the spray device to spray the passivation gas to the section of the sliced battery, thereby ensuring the uniform spraying of the passivation gas and the passivation effect.
6) According to the invention, the temperature of the passivation box is effectively ensured by arranging the isolation box and the passivation box into an inner box structure and an outer box structure.
7) The carrier cavity is provided with the carrier limiting columns, so that the mounting efficiency and the mounted stability of the carrier device are effectively improved.
8) The invention is also provided with a dispersion piece, the protective gas introduced into the air inlet pipe is uniformly dispersed through dispersion holes of the dispersion piece, and the carrier device and the dispersion piece are sealed through a sealing ring, so that the protective gas introduced into the air inlet pipe is completely and uniformly ensured.
9) The distance between the carrier left side plate and the carrier right side plate of the carrier device is adjustable, so that the sliced batteries can be conveniently assembled and disassembled, the sliced batteries with different sizes can be adapted, and the application range is wide.
Drawings
Fig. 1 is a schematic diagram of an apparatus according to a first embodiment of the present invention.
Fig. 2 is a schematic view of the inside of an isolation box according to an embodiment of the invention.
FIG. 3 is a schematic view of the interior of a passivation chamber according to an embodiment of the present invention.
Fig. 4 is a schematic view of a loading structure according to an embodiment of the invention.
Fig. 5 is a schematic diagram of a first embodiment of the invention.
FIG. 6 is a schematic view of a heating apparatus according to an embodiment of the present invention.
Fig. 7 is a first schematic view of a carrier device according to an embodiment of the invention.
Fig. 8 is a second schematic view of a carrier device according to an embodiment of the invention.
Fig. 9 is an exploded view of a carrier device according to an embodiment of the invention.
Fig. 10 is a schematic view of a heating device and an ultraviolet lamp tube according to a second embodiment of the present invention.
The labels in the figure are: an isolation box 1, an isolation cover plate 11, an isolation body 12, an isolation cavity 121, a cable interface 13, a sealing ring 14, a thermocouple 15, a passivation box 2, a loading structure 21, a carrier device 22, a heating device 23, a dispersion member 24, a cover plate 25, a mounting plate 217, a loading connecting plate 211, two sets of loading side plates 212, a loading partition plate 213, a loading bottom plate 214, a carrier cavity 215, a heating cavity 216, a carrier limiting column 2151, an empty space 2121, an adjusting groove 2122, a fixing member 2123, a reaction window 2131, a shell 231, a heating pipe 233, a fixing rod 235, a carrier rear plate 221, a carrier left side plate 223, a carrier right side plate 224, a carrier bottom plate 224, a carrier upper plate 222, a first positioning cavity 2211, a second positioning cavity 2251, a side plate pressing block 227, a limiting groove 2253, a limiting block 2233, a positioning block 2234, a positioning rod 22342, a positioning plate 22341, a lifting handle 2221, a buckle 2222, a buckle cavity 2231, a pressing block 228, a vent cavity 2213, a sealing ring 2212, an ultraviolet lamp 232 and a lamp tube 232, The heat insulation lamp shade 234, the sliced battery 3, the air duct 41, the spray pipe 42, the air inlet pipe 43, the air vent pipe 44, the exhaust pipe 52, the exhaust pipe 51 and the vacuum gauge 6.
Detailed Description
The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention. It is to be noted that the features in the following embodiments and examples may be combined with each other without conflict.
It should be noted that the drawings provided in the following embodiments are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.
All directional indicators (such as up, down, left, right, front, rear, lateral, longitudinal … …) in the embodiments of the present invention are only used to explain the relative positional relationship between the components, the movement, etc. in a particular posture, and if the particular posture is changed, the directional indicator is changed accordingly.
The first embodiment is as follows:
as shown in fig. 1-9, a passivation apparatus comprises an isolation box 1, a passivation box 2 located in the isolation box 1, a carrier device 22 and a heating device 23 located inside the passivation box 2, a spraying device is arranged between the carrier device 22 and the heating device 23, the carrier device 22 carries a sliced battery 3, the heating device 23 controls the temperature in the passivation box 2, and the spraying device sprays passivation gas on the cross section of the sliced battery 3.
In this embodiment, the passivation gas is a mixed gas containing ozone, and the following description refers to ozone, and the sliced battery 3 has at least one cross section.
The isolation box 1 is a square structure and comprises an isolation main body 12 and an isolation cover plate 11, the isolation main body 12 comprises an isolation cavity 121 with an upward opening, the passivation box 2 is located in the isolation cavity 121, a sealing ring 14 is arranged on the upper end face of the isolation main body 12 to ensure the installation tightness of the isolation main body 12 and the isolation cover plate 11, a cable interface 13, a vent pipe 44 and a thermocouple 15 are arranged on the isolation main body 12, the vent pipe 44 is communicated with the isolation cavity 121, protective gas is introduced into the vent pipe 44, such as nitrogen or compressed air, to purge the isolation cavity 121, and the thermocouple 15 extends into the passivation box 2 to measure the temperature in the passivation box 2.
The loading structure 21 includes a loading bottom plate 214, a loading connecting plate 211, a loading partition plate 213 and two sets of loading side plates 212, the two sets of loading side plates 212 are symmetrically disposed and fixedly connected to the loading bottom plate 214 and the loading connecting plate 211, the left and right sides of the loading partition plate 213 are respectively and fixedly connected to the two sets of loading side plates 212, and the lower end surface of the loading partition plate 213 is fixedly connected to the loading bottom plate 214, as shown in fig. 4, the loading structure 21 forms a carrier cavity 215 of the loading carrier device 22 and a heating cavity 216 of the loading heating device 23 through the loading partition plate 213, in this embodiment, the loading structure 21 may be integrally formed.
In order to improve the installation efficiency and the stability of the carrier device 22 after installation, a plurality of carrier limiting columns 2151 are fixedly arranged on the lower end face of the carrier cavity 215, in the embodiment, the carrier limiting columns 2151 are provided with four groups and the four groups of carrier limiting columns 2151 are distributed in a rectangular mode, so that the carrier device 22 can be installed in the carrier cavity 215 in a balanced and stable mode, the carrier limiting columns 2151 are used for positioning the installation of the carrier device 22 and limiting the transverse movement of the carrier device 22, the installation stability of the carrier device 22 is further ensured, preferably, the carrier limiting columns 2151 are of a conical structure, the carrier limiting columns 2151 can be conveniently guided into the carrier device 22, and the installation efficiency of the carrier device 22 is improved.
The diffusion piece 24 is fixed in the carrier cavity 215, as shown in fig. 5, the diffusion piece 24 is fixed on the loading connecting plate 211, the diffusion piece 24 is fixed with a plurality of uniformly distributed diffusion holes (not shown), the loading connecting plate 211 is provided with an air inlet pipe 43 in a communicating manner, the air inlet pipe 43 penetrates through the isolation main body 12 and extends outwards, the air inlet pipe 43 is communicated with a protective gas, such as nitrogen, to the carrier device 22 and the carrier cavity 215 to remove air in the carrier device 22 and the carrier cavity 215 and protect the electrode and the surface coating of the sliced battery 3, the diffusion holes of the diffusion piece 24 can uniformly disperse the protective gas introduced by the air inlet pipe 43, and the upper surface and the lower surface of the sliced battery of the lamination are protected from the influence of ozone.
The two sets of loading side plates 212 are respectively and fixedly provided with a clearance 2121 located in the heating cavity 216, the two sides of the clearance 2121 of the loading side plates 212 are symmetrically and fixedly provided with an adjusting groove 2122, a fixing member 2123 is arranged in the adjusting groove 2122, the heating device 23 is installed in the heating cavity 216 through the fixing member 2123, and the distance between the heating device 23 located in the heating cavity 216 and the loading partition 213 can be adjusted by adjusting the position of the fixing member 2123 in the adjusting groove 2122.
A through reaction window 2131 is fixedly arranged on the loading partition plate 213, the reaction window 2131 is of a square structure, the heating device 23 is communicated with the carrier device 22 through the reaction window 2131, meanwhile, ozone flows into the carrier cavity 215 through the reaction window 2131 to passivate the cross section of the sliced cell 3, the area of the communication area of the reaction window 2131 is matched with the total area of the cross section of the carrier device 22 capable of loading the maximum number of sliced cells 3, as shown in fig. 4, the thermocouple 15 extends to the heating cavity 216 and is positioned between the spray pipe 42 and the reaction window 2131.
The spraying device comprises a gas guide tube 41 and a spraying tube 42, the gas guide tube 41 is communicated with the spraying tube 42, the gas guide tube 41 sequentially penetrates through the heating device 23 and the isolation main body 12 and extends to the outer side of the isolation box 1, a plurality of uniformly distributed spraying holes (not shown) are fixedly arranged on the spraying tube 42 to ensure the uniformity of ozone spraying, in the embodiment, ozone is introduced into the spraying tube 42 from the gas guide tube 41 and is sprayed out through the spraying holes, the spraying tube 42 is opposite to the reaction window 2131, the spraying area of the spraying tube 42 is matched with the communicating area of the reaction window 2131, when the spraying tube 42 sprays ozone, the gas inlet tube 43 continuously introduces protective gas to ensure that the ozone sprayed by the spraying tube 42 reacts with the section near the section of the slicing battery 3 without entering the carrier cavity 215 area to damage the surface electrode and the coating of the slicing battery 3, in the embodiment, the ozone is sprayed onto the end surface of the slicing battery 3 through the spraying tube 42, the operation is simple, the industrial production can be carried out, the passivation speed of the sliced battery 3 is improved, and the gas guide pipe 41 can be filled with protective gas such as nitrogen after the passivation reaction to blow the interior of the passivation box 2.
An exhaust device is arranged between the spraying device and the heating device 23 and comprises an exhaust pipe 52 and an exhaust pipe 51, a plurality of exhaust holes (not shown) are fixedly arranged on the exhaust pipe 52, the exhaust pipe 52 is communicated with the exhaust pipe 51, the exhaust pipe 51 sequentially penetrates through the heating device 23 and the isolation main body 12 and extends to the outer side of the isolation box 1, a vacuum gauge 6 is arranged on the exhaust pipe 51 positioned on the outer side, the exhaust device controls the air pressure in the passivation box 2 and detects the air pressure in the passivation box 2 through the vacuum gauge 6 to ensure that the air pressure in the passivation box 2 is stabilized in a set range.
In addition, in this embodiment, both the spraying device and the exhaust device can move in the heating cavity 216, the positions of the spraying device and the exhaust device in the heating cavity 216 are adjusted, the spraying device and the exhaust device can move independently, or the spraying device and the exhaust device can be connected to each other, and the spraying device and the exhaust device can move synchronously by driving any device therein, or certainly, a third device can be arranged to drive the spraying device and the exhaust device to move synchronously; the distance between the spraying device and the reaction window 2131 is adjusted through the movement of the spraying device and the exhaust device, so that the ozone airflow contacting the section of the sliced battery 3 is adjusted, the section achieves the passivation effect, and the influence on the upper surface and the lower surface of the silicon chip is reduced.
As shown in fig. 6, the heating device 23 includes a housing 231 and a heating pipe 233, the heating pipe 233 may be an infrared lamp tube or an electric furnace wire, and preferably, the heating pipe 233 is an infrared lamp tube; the length direction of the heating pipes 233 is distributed horizontally, in this embodiment, the heating pipes 233 are set into three groups, the three groups of heating pipes 233 are parallel to each other and are uniformly distributed in the housing 231, the heating pipes 233 are fixed by the fixing rods 235, specifically, the fixing rods 235 are symmetrically located at two sides of the heating pipes 233, one group of heating pipes 233 corresponds to the two groups of fixing rods 235, the heating pipes 233 are stably fixed on the housing 231 by the fixing rods 235, fixing holes (not shown) are respectively fixed on the side surfaces of the housing 231, the fixing member 2123 fixedly connects the heating device 23 and the loading structure 21 by sequentially passing through the fixing holes and the adjusting groove 2122, and the position of the heating device 23 in the heating cavity 216 is adjusted by adjusting the position of the fixing member 2123 in the adjusting groove 2122.
The carrier device 22 comprises a carrier back plate 221, a carrier left side plate 223, a carrier right side plate 224, a carrier bottom plate 224 and a carrier upper plate 222, the carrier bottom plate 224 is used for supporting a plurality of sliced cells 3 stacked in sequence, the cross sections of the stacked sliced cells 3 face the reaction window 2131, the carrier back plate 221, the carrier left side plate 223 and the carrier right side plate 224 are all installed on the carrier bottom plate 224, the carrier left side plate 223 and the carrier right side plate 224 are symmetrically distributed, the carrier back plate 221, the carrier left side plate 223, the carrier right side plate 224 and the carrier bottom plate 224 form a bearing cavity (not shown) for bearing the sliced cells 3, the sliced cells 3 are placed in the bearing cavity, the sliced cells 3 can be stacked horizontally, stacked vertically or stacked in other stacking modes, as long as the sliced cells 3 can be tightly arranged and the cross sections face the reaction window 2131, the carrier upper plate 222 is used for covering the sliced cells 3 on the top layer, namely, the sliced battery 3 is fixed in the vertical direction through the carrier upper plate 222 and the carrier bottom plate 224, the movement of the sliced battery 3 in the vertical direction is limited, the sliced battery 3 is fixed in the horizontal direction through the carrier left side plate 223 and the carrier right side plate 224, the movement of the sliced battery 3 in the horizontal direction is limited, so that the sliced battery 3 is fastened in the bearing cavity, on one hand, the sliced battery 3 is prevented from shaking due to the blowing force of ozone in the ozone spraying process, the passivation effect of the sliced battery 3 is ensured, on the other hand, a plurality of sliced batteries 3 are stacked in sequence, even if the front surface of the sliced battery 3 positioned below and the back surface of the sliced battery 3 positioned above are completely covered, the effects of the carrier rear plate 221 and the carrier bottom plate 224 are added to cover the front surface and the back surface of the sliced battery 3, and simultaneously, the carrier left side plate 223 and the carrier right side plate 224 cover the left side surface and the right side surface of the sliced battery 3, thereby avoiding the adverse effects of ozone on the front, back and side surfaces of the wafer cell 3 during the passivation process.
First positioning cavities 2211 are symmetrically and fixedly arranged on two sides of a carrier rear plate 221, second positioning cavities 2251 are fixedly arranged on two sides of a carrier bottom plate 224, the positions of the first positioning cavities 2211 and the second positioning cavities 2251 on the same side are opposite and have the same width, so that synchronous positioning in the horizontal direction and the vertical direction can be ensured when the carrier left side plate 223 and the carrier right side plate 224 move, a side plate pressing block 227 is fixedly arranged on any one or two groups of first positioning cavities 2211, the carrier left side plate 223 or/and the carrier right side plate 224 is fixed by the side plate pressing block 227, a limiting groove 2253 is fixedly arranged on one group of second positioning cavities 2251, the example of the second positioning cavity 2251 on the left side is given as an example, a limiting groove 2253 is fixedly arranged on the second positioning cavity 2251 on the left side plate 2251 on the left side, a limiting block 2233 matched with the limiting groove 2253 is fixedly arranged on the carrier left side plate 223, and the limiting block 2233 slides in the limiting groove 2253 to adjust the position of the carrier left side plate 223 in the second positioning cavity 2251, the carrier left side plate 223 is fixed by a positioning block 2234, specifically, the positioning block 2234 includes a positioning rod 22342 and a positioning plate 22341, a moving groove (not shown) is fixed on the positioning plate 22341, the positioning plate 22341 is composed of two groups of flat plates with different thicknesses, which are respectively a first flat plate and a second flat plate, the first flat plate has a thickness smaller than the second flat plate, a positioning groove 2232 is fixed on the carrier left side plate 223, the positioning groove 2232 is matched with the first flat plate, the first flat plate is inserted into the positioning groove 2232 for fixation, the two end surfaces of the flat plates are abutted against the carrier left side plate 223, the lower end surfaces of the second flat plates are abutted against the end surface of the second positioning cavity 2251, the positioning rod 22342 is inserted into the moving groove and the limiting groove 2253 in sequence and screwed to fix the carrier left side plate 223 in the second positioning cavity 2251, that is, the position of the carrier left side plate 223 in the second positioning cavity 2251 is adjusted by the positioning block 2234, the carrier right side plate 224 can be fixedly connected with the second positioning cavity 1 on the right side, that is, the position of the carrier right side plate 224 cannot be adjusted, and the distance between the carrier left side plate 223 and the carrier right side plate 224 is adjusted by the position of the carrier left side plate 223 in the second positioning cavity 2251, so that on one hand, the sliced battery 3 can be conveniently assembled and disassembled, and on the other hand, the carrier device 22 can be adapted to sliced batteries 3 with different sizes, and the application range is wide.
A handle 2221 is fixedly arranged on the upper end surface of the carrier upper plate 222 to facilitate taking of the carrier upper plate 222, two ends of the carrier upper plate 222 and a carrier left side plate 223 and a carrier right side plate 224 are respectively and fixedly provided with a convex buckle 2222, a buckle cavity 2231 is fixedly arranged on the carrier left side plate 223 or/and the carrier right side plate 224, the buckle cavity 2231 is matched with the buckle 2222, the buckle 2222 is inserted into the buckle cavity 2231 to limit the position of the carrier upper plate 222 in the vertical direction, meanwhile, the carrier left side plate 223 and the carrier right side plate 224 are respectively provided with a pressing block 228, the pressing block 228 can rotate circumferentially relative to the left side plate 223 and the carrier right side plate 224, and the carrier upper plate 222 is fixed through two groups of pressing blocks 228.
The carrier back plate 221 abuts against the dispersion member 24, and the carrier back plate 221 is provided with the vent cavities 2213, in this embodiment, the vent cavities 2213 are provided with three groups, the three groups of vent cavities 2213 are opposite to the distribution area of the dispersion holes on the dispersion member 24, the side of the carrier back plate 221 abutting against the dispersion member 24 is fixedly provided with the sealing ring 2212, the carrier back plate 221 is hermetically connected with the dispersion member 24 through the sealing ring 2212, so that the protective gas introduced into the air inlet pipe 43 completely and uniformly enters the bearing cavity through the dispersion holes and the vent cavities 2213, and the interior of the bearing cavity and the carrier cavity 215 are purged.
In this embodiment, the placement process of the sliced battery 3 is as follows, the carrier right side plate 224 is fixed in the second positioning cavity 2251, the sliced batteries 3 are stacked one on top of another and the side of the sliced battery 3 abuts against the carrier right side plate 224, the carrier left side plate 223 is adjusted in the second positioning cavity 2251 to make the side of the carrier left side plate 223 abut against the sliced battery 3, at this time, the carrier left side plate 223 is fixed by the positioning block 2234, the movement of the sliced battery 3 in the horizontal direction is limited by the carrier left side plate 223 and the carrier right side plate 224, the buckle block 2222 of the carrier upper plate 222 is inserted into the buckle cavity 2231, the sliced battery 3 on the top layer is covered, and the carrier upper plate 222 is fixed by the pressing block 228, so as to limit the movement of the sliced battery 3 in the vertical direction.
Example two:
as shown in fig. 10, the present embodiment is different from the first embodiment in that ozone is introduced from the gas-guide tube 41 and sprayed through the spraying tube 42, and in the present embodiment, ozone is generated by irradiating oxygen through the ultraviolet lamp tube 232.
In this embodiment, the ultraviolet lamp tubes 232 are fixedly disposed on the housing 231 of the heating device 23, two groups of ultraviolet lamp tubes 232 are disposed, in the vertical direction, the ultraviolet lamp tubes 232 and the heating pipes 233 are distributed at intervals, that is, the ultraviolet lamp tubes 232 are located between the adjacent heating pipes 233, in the horizontal direction, the ultraviolet lamp tubes 232 are located at the rear side of the heating pipes 233, that is, the heating pipes 233 are located between the ultraviolet lamp tubes 232 and the carrier device 22, and in order to prevent the heating pipes 233 from radiatively heating the ultraviolet lamp tubes 232, a heat-insulating lamp cover 234 is fixedly disposed between two groups of fixing rods 235 of one group of heating pipes 233; both side ends of the ultraviolet lamp 232 extend to the outside of the housing 231, and when the heating device 23 is installed, the ends of the ultraviolet lamp 232 are located in the clearance 2121.
In this embodiment, the exhaust device not only serves as a structure for controlling the air pressure in the passivation chamber 2, but also forms a gas curtain with the spraying device, specifically, oxygen is introduced into the gas guide tube 41 of the spraying device, the oxygen is sprayed through the spraying tube 42, the gas is introduced into the spraying device, the exhaust device exhausts the gas, the gas curtain is formed by the spraying device and the exhaust device, the flow of the oxygen to the carrier cavity 215 can be reduced, the ozone is generated through the ultraviolet action of the ultraviolet lamp tube 232 and reacts with the oxygen, and the generated ozone is passivated at the section of the sliced battery.
In other embodiments, the carrier left side plate 223 and the carrier right side plate 224 may have the same structure, the carrier right side plate 224 may also have a positioning block 2234 or other structures to adjust the position in the second positioning cavity 2251 on the right side, and the distance between the carrier left side plate 223 and the carrier right side plate 224 is controlled by the positions of the carrier left side plate 223 and the carrier right side plate 224 in the second positioning cavity 2251, respectively.
In other embodiments, the ultraviolet lamp 232 may be integrated, that is, the gas guiding tube 41 of the spraying device may be introduced with ozone of a certain concentration, and the ultraviolet lamp 232 generates ozone of a certain concentration, and the passivation treatment of the sliced battery 3 is implemented by combining the two.
The invention also provides a passivation method, the method carries out passivation treatment on the section of the sliced cell 3 through the passivation equipment, the passivation treatment comprises the step of introducing ozone to the section of the sliced cell 3, so that the passivation speed and the passivation effect are improved, and by adopting the method, the silicon dioxide protective layer formed on the section of the sliced cell 3 can avoid the recombination of photon-generated carriers, so that the photoelectric efficiency of the sliced cell 3 is greatly improved.
According to the invention, the specific operating method is as follows:
(1) pre-assembling the sliced battery 3;
the sliced battery 3 is stacked on the carrier device 2, the carrier device 2 is installed in the carrier cavity 215, and the cover plate 25 and the isolation cover plate 11 are sequentially placed.
(2) Vacuumizing and detecting leakage;
vacuumizing the exhaust device, detecting air pressure through a vacuum gauge 6, and confirming the tightness of the isolation box 1; if the change in the air pressure value detected by the vacuum gauge 6 is within the allowable range, it indicates that the sealing performance of the isolation box 1 is good, and if the air pressure value detected by the vacuum gauge 6 increases beyond a certain range, it indicates that the sealing performance of the isolation box 1 is poor, and it is necessary to perform a sealing process on the isolation box 1 until the sealing performance of the isolation box 1 is good.
(3) Controlling the temperature and pressure of the passivation tank 2;
protective gas is introduced from the gas inlet pipe 43, the gas flow is controlled to be 0.1slm-30slm, the gas pressure in the passivation box 2 is controlled to be 50mbar-1000mbar by the exhaust device, the temperature in the passivation box 2 is controlled to be 50 ℃ to 500 ℃ by the heating device 23, and the passivation box 2 is kept in a constant temperature and constant pressure state.
(4) Passivating;
the gas inlet pipe 43 continuously introduces the protective gas, in the first embodiment, the gas guide pipe 41 of the spraying device introduces ozone, the spraying pipe 42 sprays the ozone onto the section of the sliced battery 3 for passivation treatment, the concentration of the ozone introduced into the gas guide pipe 41 is less than 1%, the flow rate is controlled to be 0.1slm-30slm, the ozone spraying time is controlled to be 1min-60min, the concentration, the flow rate and the spraying time of the ozone have direct influence on the density of the silicon dioxide protection on the section, the concentration of the ozone is low or the spraying time is short, which can cause the density of the silicon dioxide protective layer formed on the section to be low, in the present embodiment, the concentration of the ozone is less than 1%, the spraying time is controlled to be 1min-60min, the temperature is 50-500 degrees, firstly, a compact silicon dioxide protective layer can be formed on the section, and secondly, the waste of the ozone is not caused, thirdly, the spraying time of the ozone is not excessively prolonged so as to shorten the spraying period and improve the spraying efficiency, when the actual passivation treatment is carried out, a certain reasonable specific value is selected in the numerical value interval of the concentration, the flow and the spraying time according to the thickness of the sliced batteries 3 to be passivated and the number of the sliced batteries so as to use the lowest cost and the fastest speed to form the most compact silicon dioxide protective layer, the flow of the ozone spraying directly influences the speed of the ozone flowing through the section, namely, the faster the spraying flow rate is, the faster the silicon dioxide protective layer can be formed on the section, in the embodiment, the flow of the ozone spraying is controlled to be 0.1slm-30slm, firstly, the silicon dioxide protective layer can be formed on the section, secondly, the ozone on the section of the flow can be fully utilized, the ozone can not be wasted due to redundancy, and thirdly, the ozone flow is not too large, causing ozone to enter the silicon wafer lamination gap.
In the second embodiment, oxygen is introduced into the gas-guide tube 41 of the spraying device, the spraying tube 42 sprays the oxygen, the ultraviolet lamp tube 232 generates ozone with a set concentration in an oxygen environment with a certain concentration, and the ozone contacts with the section of the sliced battery 3 through the reaction window 2131 to perform passivation treatment.
(5) Vacuumizing to remove ozone in the cavity;
(6) purging;
protective gas is introduced into the gas guide pipe 41 and the gas inlet pipe 43 to sweep the interior of the passivation box 2, protective gas or compressed air is introduced into the gas vent pipe 44 to sweep the isolation cavity 121, gas is introduced while gas is pumped, and residual ozone in the cavity is removed;
(7) annealing;
introducing protective gas into the gas inlet pipe 43, controlling the flow of the gas to be 0.5slm-30slm, heating, controlling the temperature to be 75-600 ℃ and the time to be 2min-30 min;
(8) taking a sliced battery 3;
and (3) introducing protective gas or compressed air to return to normal pressure, opening the isolation cover plate 11 and the cover plate 25 in sequence, taking out the carrier device 2, and taking out the passivated sliced battery 3.
The passivation method of the present invention is further illustrated below with reference to specific examples.
Example three:
in this embodiment, the method specifically includes the following steps:
(1) pre-assembling the sliced battery 3;
the sliced battery 3 is stacked on the carrier device 2, the carrier device 2 is arranged in the carrier cavity 215, and the cover plate 25 and the isolation cover plate 11 are sequentially placed
(2) Vacuumizing and detecting leakage;
vacuumizing the exhaust device, detecting air pressure through a vacuum gauge 6, and confirming the tightness of the isolation box 1; if the change in the air pressure value detected by the vacuum gauge 6 is within the allowable range, it indicates that the sealing performance of the isolation box 1 is good, and if the air pressure value detected by the vacuum gauge 6 increases beyond a certain range, it indicates that the sealing performance of the isolation box 1 is poor, and it is necessary to perform a sealing process on the isolation box 1 until the sealing performance of the isolation box 1 is good.
(3) Controlling the temperature and pressure of the passivation tank 2;
protective gas is introduced from the gas inlet pipe 43, the gas flow is controlled to be 1slm, the gas guide pipe 41 is introduced with the protective gas, the flow of the protective gas is controlled to be 0.5slm, the air pressure in the passivation box 2 is controlled to be 100mbar by the exhaust device, the temperature in the passivation box 2 is controlled to be 50 ℃ by the heating device 23, and the passivation box 2 is kept in a constant temperature and constant pressure state.
(4) Passivating;
the gas inlet pipe 43 continuously introduces protective gas, the gas flow is kept at 1slm, the gas guide pipe 41 introduces ozone, the concentration of the ozone is set to 1800ppm, the flow is controlled at 0.5slm, and the ozone spraying time is controlled at 2 min.
(5) Vacuumizing to remove ozone in the cavity;
(6) purging;
protective gas is introduced into the gas guide pipe 41 and the gas inlet pipe 43 to blow the interior of the passivation box 2, protective gas or compressed air is introduced into the gas vent pipe 44 to blow the isolation cavity 121, gas is introduced while gas is pumped, and residual ozone in the cavity is removed.
(7) Annealing:
introducing protective gas into the gas inlet pipe 43, controlling the flow of the protective gas to be 0.5slm-30slm, heating, controlling the temperature to be 150 ℃ and the time to be 30 min;
(8) taking a sliced battery 3;
and (3) introducing protective gas or compressed air to return to normal pressure, opening the isolation cover plate 11 and the cover plate 25 in sequence, taking out the carrier device 2, and taking out the passivated sliced battery 3.
The cells 3 were sliced after passivation by this method and were designated as experimental group 1.
Example four:
in this embodiment, the method specifically includes the following steps:
(1) pre-assembling the sliced battery 3;
the sliced battery 3 is stacked on the carrier device 2, the carrier device 2 is installed in the carrier cavity 215, and the cover plate 25 and the isolation cover plate 11 are sequentially placed.
(2) Vacuumizing and detecting leakage;
vacuumizing the exhaust device, detecting air pressure through a vacuum gauge 6, and confirming the tightness of the isolation box 1; if the change in the air pressure value detected by the vacuum gauge 6 is within the allowable range, it indicates that the sealing performance of the isolation box 1 is good, and if the air pressure value detected by the vacuum gauge 6 increases beyond a certain range, it indicates that the sealing performance of the isolation box 1 is poor, and it is necessary to perform a sealing process on the isolation box 1 until the sealing performance of the isolation box 1 is good.
(3) Controlling the temperature and pressure of the passivation tank 2;
protective gas is introduced from the gas inlet pipe 43, the flow of the protective gas is controlled at 5slm, the gas guide pipe 41 is introduced with the protective gas, the flow of the protective gas is controlled at 2slm, the air pressure in the passivation box 2 is controlled at 950mbar by the exhaust device, the temperature in the passivation box 2 is controlled at 500 ℃ by the heating device 23, and the passivation box 2 keeps a constant temperature and constant pressure state.
(4) Passivating;
the air inlet pipe 43 continuously introduces protective gas, the flow of the protective gas is kept at 5slm, the air guide pipe 41 introduces ozone, the concentration of the ozone is set to be 400ppm, the flow is controlled at 2slm, and the ozone spraying time is controlled at 30 min.
(5) Vacuumizing to remove ozone in the cavity;
(6) purging;
protective gas is introduced into the gas guide pipe 41 and the gas inlet pipe 43 to blow the interior of the passivation box 2, protective gas or compressed air is introduced into the gas vent pipe 44 to blow the isolation cavity 121, gas is introduced while gas is pumped, and residual ozone in the cavity is removed.
(7) Annealing;
introducing protective gas into the gas inlet pipe 43, controlling the flow of the protective gas to be 0.5slm-30slm, heating, controlling the temperature to be 600 ℃ and keeping the time for 10 min;
(8) taking a sliced battery 3;
and (3) introducing protective gas or compressed air to return to normal pressure, opening the isolation cover plate 11 and the cover plate 25 in sequence, taking out the carrier device 2, and taking out the passivated sliced battery 3.
The cells 3 were sliced after passivation by this method and designated as experimental group 2.
Example five:
in this embodiment, the method specifically includes the following steps:
(1) pre-assembling the sliced battery 3;
the sliced battery 3 is stacked on the carrier device 2, the carrier device 2 is installed in the carrier cavity 215, and the cover plate 25 and the isolation cover plate 11 are sequentially placed.
(2) Vacuumizing and detecting leakage;
vacuumizing the exhaust device, detecting air pressure through a vacuum gauge 6, and confirming the tightness of the isolation box 1; if the change in the air pressure value detected by the vacuum gauge 6 is within the allowable range, it indicates that the sealing performance of the isolation box 1 is good, and if the air pressure detected by the vacuum gauge 6 increases beyond a certain range, it indicates that the sealing performance of the isolation box 1 is poor, and it is necessary to perform a sealing process on the isolation box 1 until the sealing performance of the isolation box 1 is good.
(3) Controlling the temperature and pressure of the passivation tank 2;
protective gas is introduced from the gas inlet pipe 43, the flow of the protective gas is controlled at 5slm, the gas guide pipe 41 is introduced with the protective gas, the flow of the protective gas is controlled at 2slm, the air pressure in the passivation box 2 is controlled at 950mbar by the exhaust device, the temperature in the passivation box 2 is controlled at 200 ℃ by the heating device 23, and the passivation box 2 is kept in a constant temperature and constant pressure state.
(4) Passivating;
and the air inlet pipe 43 is continuously filled with protective air, the flow of the protective air is kept at 5slm, the air guide pipe 41 is filled with ozone, the flow is controlled at 2slm, the ultraviolet lamp tube 232 is opened, and the time is controlled at 30 min.
(5) Vacuumizing to remove ozone in the cavity;
(6) purging;
protective gas is introduced into the gas guide pipe 41 and the gas inlet pipe 43 to blow the interior of the passivation box 2, protective gas or compressed air is introduced into the gas vent pipe 44 to blow the isolation cavity 121, gas is introduced while gas is pumped, and residual ozone in the cavity is removed.
(7) Annealing;
introducing protective gas into the gas inlet pipe 43, controlling the flow of the protective gas to be 0.5slm-30slm, heating, controlling the temperature to be 300 ℃ and the time to be 10 min;
(8) taking a sliced battery 3;
and (3) introducing protective gas or compressed air to return to normal pressure, opening the isolation cover plate 11 and the cover plate 25 in sequence, taking out the carrier device 2, and taking out the passivated sliced battery 3.
The cells 3 were sliced after passivation by this method and designated as experimental group 3.
Comparative example one:
in this embodiment, the method is different from the above embodiment in that the step of introducing the shielding gas into the gas inlet pipe 43 is not performed, and the method specifically includes the following steps:
(1) pre-assembling the sliced battery 3;
the sliced battery 3 is stacked on the carrier device 2, the carrier device 2 is installed in the carrier cavity 215, and the cover plate 25 and the isolation cover plate 11 are sequentially placed.
(2) Vacuumizing and detecting leakage;
vacuumizing the exhaust device, detecting air pressure through a vacuum gauge 6, and confirming the tightness of the isolation box 1; if the change in the air pressure value detected by the vacuum gauge 6 is within the allowable range, it indicates that the sealing performance of the isolation box 1 is good, and if the air pressure value detected by the vacuum gauge 6 increases beyond a certain range, it indicates that the sealing performance of the isolation box 1 is poor, and it is necessary to perform a sealing process on the isolation box 1 until the sealing performance of the isolation box 1 is good.
(3) Controlling the temperature and pressure of the passivation tank 2;
protective gas is introduced into the gas guide tube 41, the flow of the protective gas is controlled at 2slm, the air pressure in the passivation box 2 is controlled at 800mbar by the exhaust device, the temperature in the passivation box 2 is controlled at 150 ℃ by the heating device 23, and the passivation box 2 is kept in a constant-temperature and constant-pressure state.
(4) Passivating;
ozone is introduced into the gas-guide tube 41, the concentration of the ozone is set to be 200ppm, the flow is controlled to be 0.5slm, and the ozone spraying time is controlled to be 5 min.
(5) Vacuumizing to remove ozone in the cavity;
(6) purging;
the gas guide pipe 41 is filled with protective gas to sweep the interior of the passivation box 2, and the gas guide pipe 44 is filled with protective gas or compressed air to sweep the isolation cavity 121;
(7) annealing; introducing protective gas into the gas inlet pipe 43, controlling the flow of the protective gas to be 0.5slm-30slm, heating, controlling the temperature to be 350 ℃ and the time to be 18 min;
(8) taking a sliced battery 3;
and (3) introducing protective gas or compressed air to return to normal pressure, opening the isolation cover plate 11 and the cover plate 25 in sequence, taking out the carrier device 2, and taking out the passivated sliced battery 3.
The cells 3 were sectioned after being passivated by this method and designated as control 1.
Comparative example two:
in this embodiment, the method is different from the above embodiment in that the step of introducing the shielding gas into the gas inlet pipe 43 is not performed, and ozone is not introduced, and the method specifically comprises the following steps:
(1) pre-assembling the sliced battery 3;
the sliced battery 3 is stacked on the carrier device 2, the carrier device 2 is installed in the carrier cavity 215, and the cover plate 25 and the isolation cover plate 11 are sequentially placed.
(2) Vacuumizing and detecting leakage;
vacuumizing the exhaust device, detecting air pressure through a vacuum gauge 6, and confirming the tightness of the isolation box 1; if the change in the air pressure value detected by the vacuum gauge 6 is within the allowable range, it indicates that the sealing performance of the isolation box 1 is good, and if the air pressure value detected by the vacuum gauge 6 increases beyond a certain range, it indicates that the sealing performance of the isolation box 1 is poor, and it is necessary to perform a sealing process on the isolation box 1 until the sealing performance of the isolation box 1 is good.
(3) Controlling the temperature and pressure of the passivation tank 2;
protective gas is introduced into the gas guide tube 41, the flow of the protective gas is controlled at 2slm, the air pressure in the passivation box 2 is controlled at 800mbar by the exhaust device, the temperature in the passivation box 2 is controlled at 450 ℃ by the heating device 23, and the passivation box 2 is kept in a constant-temperature and constant-pressure state.
(4) Introducing oxygen;
oxygen is introduced into the gas-guide tube 41, the flow rate of the oxygen is controlled at 2slm, and the oxygen spraying time is controlled at 20 min.
(5) Vacuumizing;
(6) purging;
the gas guide pipe 41 is filled with protective gas to sweep the interior of the passivation box 2, and the gas guide pipe 44 is filled with protective gas or compressed air to sweep the isolation cavity 121;
(7) annealing;
introducing protective gas such as nitrogen, controlling the flow of the protective gas at 0.5slm-30slm, heating, controlling the temperature at 550 ℃ and keeping the time for 10 min;
(8) taking a sliced battery 3;
and (3) introducing protective gas or compressed air to return to normal pressure, opening the isolation cover plate 11 and the cover plate 25 in sequence, taking out the carrier device 2, and taking out the passivated sliced battery 3.
The cells 3 were sectioned after being passivated by this method and designated as control 2.
The sliced batteries 3 of examples three, four and five and comparative examples one and two before and after the passivation treatment by this method were respectively tested for electrical properties while observing the oxidation of the electrodes and surface plating layers of the sliced battery 3 in each example, 20 pieces were set in number, and the five examples were subjected to the control test as follows:
TABLE 1
According to the test effects: the sliced battery 3 obtained by the method can improve the efficiency of the sliced battery 3, protect the electrode and the surface coating of the sliced battery 3 and prevent oxidation.
Furthermore, the annealing process of step 7 is not an essential process, and in other embodiments, there may be no annealing process.
It is to be understood that the described embodiments are merely a few embodiments of the invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Claims (9)
1. A passivation apparatus, characterized by: the device comprises an isolation box, a passivation box positioned in the isolation box, a carrier device and a heating device, wherein the carrier device and the heating device are positioned in the passivation box, the carrier device bears a sliced battery, the heating device controls the temperature in the passivation box, a spraying device is arranged between the carrier device and the heating device, the spraying device sprays oxygen or sprays passivation gas on the section of the sliced battery, the device also comprises an ultraviolet lamp tube, the ultraviolet ray of the ultraviolet lamp tube enables the oxygen sprayed and introduced by the spraying device to react into ozone, the ozone is contacted with the section of the sliced battery to carry out passivation treatment, the isolation box comprises an isolation main body and an isolation cover plate, the isolation main body comprises an isolation cavity, the passivation box is positioned in the isolation cavity, a sealing ring is arranged on the upper end face of the isolation main body, a vent pipe and a thermocouple are arranged on the isolation main body, the vent pipe is communicated with the isolation cavity, the vent pipe is filled with protective gas or compressed air to sweep the isolation cavity, and the thermocouple extends into the passivation box, the temperature inside the passivation chamber was measured.
2. A passivation device according to claim 1, characterized in that: the passivation box also comprises a cover plate and a loading structure used for loading the carrier device and the heating device, the loading structure comprises a loading bottom plate, a loading connecting plate, a loading partition plate and two groups of loading side plates, the two groups of loading side plates are symmetrically arranged and fixedly connected with the loading bottom plate and the loading connecting plate, the loading partition plate is fixedly connected with the two groups of loading side plates, the loading structure forms a carrier cavity for loading the carrier device and a heating cavity for loading the heating device through the loading partition plate, a reaction window is fixedly arranged on the loading partition plate, the heating device is communicated with the carrier device through the reaction window, passivation gas flows into the carrier cavity through the reaction window to passivate the section of the sliced battery, the loading connecting plate is connected with a diffusion piece, a plurality of groups of diffusion holes are fixedly arranged on the diffusion piece, an air inlet pipe is communicated with the loading connecting plate and is arranged on the loading connecting plate, the air inlet pipe penetrates through the isolation main body and extends outwards, and the air inlet pipe leads nitrogen to the carrier device and the carrier cavity, the dispersion holes of the dispersion piece control the dispersion uniformity of the nitrogen introduced into the air inlet pipe.
3. A passivation device according to claim 2, characterized in that: the carrier device includes the carrier back plate, the carrier left side board, the carrier right side board, carrier bottom plate and carrier upper plate, the carrier bottom plate is used for supporting the section battery, the section of section battery is towards the reaction window, the carrier back plate, carrier left side board and carrier right side board are all installed on the carrier bottom plate, carrier left side board and carrier right side board symmetric distribution, the carrier back plate, the carrier left side board, carrier right side board and carrier bottom plate form the chamber that bears the weight of the section battery of bearing the weight of, carrier upper plate and carrier bottom plate restriction section battery are in the removal of vertical direction, carrier left side board and carrier right side board restriction section battery remove at the horizontal direction.
4. A passivation device according to claim 1, characterized in that: the heating device comprises a shell and a heating pipe, the heating pipe adopts an infrared lamp tube or an electric furnace wire, and the heating pipe is fixed on the shell through a fixing rod.
5. A passivation device according to claim 3, characterized in that: spray set includes air duct and shower, air duct and shower intercommunication, and the air duct passes heating device and keeps apart the main part and extends to the shielded box outside, has set firmly a plurality of holes that spray on the shower, and the shower is relative with reaction window position, and passivation gas lets in and sprays the section of section battery through spraying the hole by the air duct, and the air duct lets in the protective gas and sweeps passivation incasement portion.
6. A passivation device according to claim 1, characterized in that: still include exhaust apparatus, exhaust apparatus includes blast pipe and exhaust tube, has set firmly a plurality of exhaust holes on the blast pipe, blast pipe and exhaust tube intercommunication, and the exhaust tube passes heating device in proper order and keeps apart the main part and extend to the shielded box outside, is provided with the vacuum gauge on the exhaust tube, and exhaust apparatus controls the atmospheric pressure in the passivation incasement to detect the atmospheric pressure in the passivation incasement through the vacuum gauge, exhaust apparatus will passivate the atmospheric pressure control in the incasement at the within range of setting for.
7. A passivation device according to claim 4, characterized in that: the ultraviolet lamp tube is fixedly arranged on the shell of the heating device, the heating pipe is positioned between the ultraviolet lamp tube and the carrier device, and the ultraviolet lamp tube and the heating pipe are isolated through a heat-insulating lampshade.
8. A passivation method, characterized by: the method is used for passivating the section of the sliced cell by the passivating device of any one of claims 1 to 7, and the passivating treatment comprises contacting a passivating gas with the section of the sliced cell.
9. A passivation method according to claim 8, comprising the steps of:
(1) pre-assembling a sliced battery;
(2) vacuumizing and detecting leakage;
(3) controlling the temperature and pressure of the passivation tank;
(4) passivating;
the passivation box is provided with an air inlet pipe, protective gas is continuously introduced into the air inlet pipe, the spraying device sprays passivation gas on the section of the sliced battery or/and irradiates oxygen through an ultraviolet lamp tube to generate ozone, and the ozone is in contact with the section of the sliced battery to perform passivation treatment;
(5) vacuumizing;
(6) purging the isolation box and the passivation box;
(7) and taking out the passivated sliced battery.
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| CN202011626771.3A CN112864274B (en) | 2020-12-31 | 2020-12-31 | Passivation equipment and passivation method |
| CN202111552904.1A CN114400271A (en) | 2020-12-31 | 2020-12-31 | Passivation equipment that possesses gaseous even dispersion function |
| CN202111551038.4A CN114613878A (en) | 2020-12-31 | 2020-12-31 | Passivation equipment and loading structure |
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| CN202011626771.3A CN112864274B (en) | 2020-12-31 | 2020-12-31 | Passivation equipment and passivation method |
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| CN202111552904.1A Division CN114400271A (en) | 2020-12-31 | 2020-12-31 | Passivation equipment that possesses gaseous even dispersion function |
| CN202111551038.4A Division CN114613878A (en) | 2020-12-31 | 2020-12-31 | Passivation equipment and loading structure |
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| CN105925960A (en) * | 2016-06-07 | 2016-09-07 | 江苏微导纳米装备科技有限公司 | Atomic layer deposition-based vacuum coating device for solar cell production |
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| CN111509090A (en) * | 2020-05-08 | 2020-08-07 | 常州时创能源股份有限公司 | Battery edge passivation method |
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| US8153513B2 (en) * | 2006-07-25 | 2012-04-10 | Silicon Genesis Corporation | Method and system for continuous large-area scanning implantation process |
| US20150101662A1 (en) * | 2010-04-23 | 2015-04-16 | Solexel, Inc. | Surface passivation of high-efficiency crystalline silicon solar cells |
| CN105322046B (en) * | 2014-06-13 | 2017-06-09 | 南京华伯仪器科技有限公司 | A kind of device and method for being passivated to crystalline silicon |
| CN210443580U (en) * | 2019-09-19 | 2020-05-01 | 苏州阿特斯阳光电力科技有限公司 | Passivating device for sliced battery |
| CN212113734U (en) * | 2020-02-28 | 2020-12-08 | 苏州拓升智能装备有限公司 | Deposition device for silicon oxide film of polycrystalline silicon passivation contact solar cell |
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2020
- 2020-12-31 CN CN202111552904.1A patent/CN114400271A/en active Pending
- 2020-12-31 CN CN202111551038.4A patent/CN114613878A/en active Pending
- 2020-12-31 CN CN202011626771.3A patent/CN112864274B/en active Active
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| CN105925960A (en) * | 2016-06-07 | 2016-09-07 | 江苏微导纳米装备科技有限公司 | Atomic layer deposition-based vacuum coating device for solar cell production |
| CN209104181U (en) * | 2018-12-29 | 2019-07-12 | 苏州阿特斯阳光电力科技有限公司 | A kind of silicon wafer paralysis facility |
| CN110137271A (en) * | 2019-04-25 | 2019-08-16 | 泰州隆基乐叶光伏科技有限公司 | The passivating method and device and slice battery and photovoltaic module of slice battery |
| CN111509090A (en) * | 2020-05-08 | 2020-08-07 | 常州时创能源股份有限公司 | Battery edge passivation method |
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| CN114400271A (en) | 2022-04-26 |
| CN112864274A (en) | 2021-05-28 |
| CN114613878A (en) | 2022-06-10 |
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