CN1127777A - 切削液、其制造方法及结晶块的切断方法 - Google Patents

切削液、其制造方法及结晶块的切断方法 Download PDF

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Publication number
CN1127777A
CN1127777A CN95118266A CN95118266A CN1127777A CN 1127777 A CN1127777 A CN 1127777A CN 95118266 A CN95118266 A CN 95118266A CN 95118266 A CN95118266 A CN 95118266A CN 1127777 A CN1127777 A CN 1127777A
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China
Prior art keywords
cutting fluid
imidazoles
cutting
fatty acid
toughener
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CN95118266A
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Inventor
镝木新吾
芦田昭雄
木内悦男
早川和男
外山公平
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Mimasu Semiconductor Industry Co Ltd
Shin Etsu Handotai Co Ltd
Ohtomo Chemical Ins Corp
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Mimasu Semiconductor Industry Co Ltd
Shin Etsu Handotai Co Ltd
Ohtomo Chemical Ins Corp
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Application filed by Mimasu Semiconductor Industry Co Ltd, Shin Etsu Handotai Co Ltd, Ohtomo Chemical Ins Corp filed Critical Mimasu Semiconductor Industry Co Ltd
Publication of CN1127777A publication Critical patent/CN1127777A/zh
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Abstract

水溶性切削液，是在无机膨润土的水分散液中，溶解聚合脂肪酸甘油三酯咪唑和、2甲基-1-硬脂酸酯和、硼酸咪唑，在该主成分中添加油酸(润滑性增强剂)、乙二胺四醋酸钠盐(金属离子吸附剂)、苯并三唑(防锈力辅助剂)以及硅系消泡剂等辅助剂而构成的。解决了使用非水溶性切削油时，被切削材料洗净工序中所伴随的大气污染等问题，同时还降低了用钢丝锯切断大直径单结晶硅等晶块时晶片的挠曲性。

Description

切削液、其制造方法及结晶块的切断方法
本发明涉及单晶硅和多晶硅、其它化合物半导体和陶瓷等结晶块切断用的有效切削液(水溶性切削液)、其制造方法及使用此切削液的结晶块切断方法。
以往，作为单晶硅等的结晶块切断用的切削液，主要使用以矿物油为主要成分的非水溶性切削油，在该切削油中，混合、分散SiC等磨料的切削剂(浆液)供给结晶块的切断部，进行结晶块的切片。然后，该切片经过洗净工序供给下一个工序。另外，结晶块切断后的浆液作为废弃物处理。
洗涤上述的切片就是除去附着其上面的切削油，以往，作为洗涤液可使用有机溶剂(例如三氯乙烷、二氯甲烷等)。使用该有机溶剂系的洗涤液，具有洗涤操作简单的优点。
另外，作为上述结晶块切断用的加工工具，可使用外周刃具、内周刃具、带锯或钢丝锯。此时，在切断直径3英寸以上较大直径的结晶块时，大多使用钢丝锯或带锯。其理由是与其他加工工具相比，可以更均一的厚度切断结晶块，切断屑的发生量不仅少，且一次可切割多个晶片。
但是，以矿物油为主要成分的切削油是具有易燃性的危险物，有安全性的问题。另外，上述有机溶剂系的洗净液，由于是致癌及大气污染(破坏臭氧层)的主要原因，所以最近被禁止使用。进而，用于切断后的上述浆液，一般作为废弃物被焚烧处理，该焚烧便成为大气污染的原因之一。为此，有待开发其替代品。
进而，在切断结晶块中，随着切断速度增大的同时，在得到的薄片上容易发生“挠曲”(薄片的中部呈凸状)，在使用钢丝锯时，若以切断速度为1mm/min以上切断直径8英寸的单晶硅结晶块时，挠曲度往往超过20μm，这样大的挠曲，在制造加工硅晶片时会发生故障，而且其结果，也成为其生产率下降的原因。
本发明，鉴于上述几点，其目的在于通过将切削液作成水溶性的，以解决以往使用非水溶性切削油时着火的危险及在被切削材料洗净工序中使用有机溶剂引起的大气污染等问题，同时，降低切断大直径单晶硅结晶块时薄片的挠曲度。
权利要求1所述的切削液，其特征是含有无机膨润土、有机膨润土的至少一种和、脂肪酸咪唑水溶液为主要成分。
根据权利要求2所述的切削液，其特征是权利要求1中，作为上述脂肪酸咪唑含有聚合脂肪酸甘油三酯咪唑，进而含有2甲基-1-硬脂酸酯。
根据权利要求3所述的切削液，其特征是权利要求1中，作为上述脂肪酸咪唑含有聚合脂肪酸甘油三酯咪唑，进而含有硼酸咪唑、2甲基-1-硬脂酸酯。
权利要求4所述的切削液，其特征是权利要求1，2或3中含有从保水性增强剂、水洗净增强剂、防止磨料沉淀剂、磨料分散性增强剂、润滑性增强剂、冷却性增强剂、浸透性增强剂、防锈剂、防锈辅助剂、不冻性增强剂、粘度恢复辅助剂及消泡剂组成的群中任意选出的多种主剂或辅助剂。
权利要求5所述的切削液的制造方法，其特征是在制造权利要求2所述的切削液时，将无机膨润土，有机膨润土的至少一种分散在水中，在该分散液中溶解含有由聚合脂肪酸甘油三酯和咪唑反应而得到的聚合脂肪酸甘油三酯咪唑的原料(1)后，在该溶液中溶解含有由N-甲基-2-吡咯烷酮和硬酯酸反应而得到的2甲基-1-硬脂酸酯的原料液(2)和油酸，进而在此溶液中溶解含有咪唑和硼酸反应得到的硼酸咪唑的原料液(3)后，向此溶液中添加乙二胺四醋酸钠盐、苯并三唑、硅系消泡剂等的多种主剂或者辅助剂。
权利要求6所述的结晶块的切断方法，其特征是作为切削剂使用在权利要求1，2，3或4中所述的切削液中分散了磨料的分散液，用钢丝锯或带锯将单晶硅等的晶块切成晶片。
本发明涉及的切削液含有无机膨润土、有机膨润土的至少1种和、脂肪酸咪唑的水溶液为主要成分，一般是由下述的主要原料和各种辅剂组合而构成的。
(A)无机膨润土、有机膨润土(主要原料)：
是交联型的分散剂作为磨料的防止沉降剂、或磨料的分散性促进剂使用。
(B)聚合脂肪酸甘油三酯咪唑(原料液1)：
作为脂肪酸咪唑，除了作为恢复剂有维持磨料的分散性效果、具有保水性增强剂作用之外，还兼作该切削液的粘度恢复性辅助剂、及该切削液的防锈剂。
(C)2甲基-1-硬脂酸盐(原料液2)：
除了作为水洗净性增强剂外，也作为磨料的分散性增强剂及该切削液的润滑性增强剂(摩擦系数降低剂)、冷却性增强剂、不冻性增强剂。
(D)油酸(不饱和脂肪酸)：
除了作为该切削液的润滑性增强剂(摩擦系数降低剂)以外，还有浸透性增强剂的效果。
(E)硼酸咪唑(原料液3)：
是该切削液的防锈剂。
(F)乙二胺四醋酸钠盐：
是金属离子吸附剂(螯合剂)。使用2Na～4Na盐。
(G)苯并三唑(甲苯并三唑)：
是该切削液的防锈辅助剂。
(H)硅酮系消泡剂：
是二甲基聚硅氧烷的乳化液，是该切削液的消泡剂。
(I)蒸馏水：
是将该切削液进行离子化的离子化溶剂。
以下，列举制造本发明切削液的原材料。
(1)N-甲基-2-吡咯烷酮：
也作为促进饱和脂肪酸溶解的溶剂。
(2)聚合脂肪酸甘油三酯：
(3)硬脂酸(饱和脂肪酸)：
(4)咪唑：
是该切削液的主要原料，同时也作为增粘、防锈剂用。分子式使用C4H6N2的2MZ型。
(5)硼酸：
也作为该切削液的防锈辅助剂用。
上述聚合脂肪酸甘油酯，至少含有羧基。作为聚合脂肪酸甘油酯，平均分子量最好约为2000的。
本发明的切削液用以下步骤进行制造。
①原料液(1)的配制(聚合脂肪酸甘油三酯咪唑的合成)：
将蒸馏水加热到50℃～60℃，持续搅拌下、添加聚合脂肪酸甘油三酯，在充分搅拌，回到温度50℃～60℃时，添加咪唑2MZ使其反应。
②原料液(2)的配制(2甲基-硬脂酸酯的合成)：
将甲基-2-吡咯烷酮液加热到温度60℃～70℃，且一面搅拌，一面添加饱和脂肪酸(硬脂酸)使其反应。
③原料液(3)的配制(硼酸咪唑的合成)：
将蒸馏水加热到温度50℃～60℃，且一面搅拌，一面添加咪唑2MZ，溶解终了后，添加硼酸使其反应。
④切削液(1)的配制：
在蒸馏水中添加膨润土，进行搅拌、分散，将原料液(1)在常温下溶解，在该溶液中添加并溶解上述原料液(2)。随后加入原料液(3)，溶解后，加热到50℃～60℃后，使不饱和脂肪酸(油酸)溶解。由此，可得到切削液(1)的主成分液。在该主成分液中，添加、混合金属离子吸附剂(螯合剂)、苯并三唑(甲苯并三唑)类的防锈辅助剂、其他如硅酮系消泡剂，而作成完成品。
本发明的切削液是在向其中混合、分散磨料成为浆液的形式而使用的，可以有效地利用在单晶硅或多晶硅的结晶块的切断用，也可以广泛地用于化合物半导体或者陶瓷等的切断用。
此外，作为使用此切削液的切断装置包括了钢丝锯、带锯和使这些多重化的多个钢丝锯和多个带锯。进而也可用于外周刃具和内周刃具的切断装置上。
用于制造本发明切削液的原料液(1)～(3)的成分、组成表示在表[1]～表[3]中。
                 表1
原料液(1)：含有聚合脂肪酸甘油三酯咪唑的液体
         原料成分     组成(重量％)
    蒸馏水聚合脂肪酸甘油三酯咪唑2MZ      62.0～71.019.0～24.010.0～14.0
    合计         100.0
            表2
原料液(2)：含有2甲基-1-硬脂酸酯液体
        原料成分     组成(重量％)
    N-甲基-2-吡咯烷酮饱和脂肪酸(硬脂酸)      72.0～79.021.0～28.0
    合计        100.0
                表3
原料液(3)：含有硼酸咪唑液
   原料成分     组成(重量％)
    蒸馏水咪唑2MZ硼酸      74.0～79.012.0～14.09.0～12.0
    合计        100.0
使用上述原料液(1)～(3)制造的切削液成分、组成表示在表[4]中。
                    表4
       原料成分       组成(重量％)
  蒸馏水无机膨润土原料液(1)原料液(2)原料液(3)不饱和脂肪酸(油酸)乙二胺四醋酸二钠盐苯并三唑(甲苯并三唑)硅系消泡剂        39.0～48.00.8～1.213.1～15.015.9～17.514.1～16.25.3～6.80.8～1.21.2～1.90.8～1.2
    合计           100.0
以下，对于本发明的实施例和，使用以往切削液的比较例进行说明。
实施例1及比较例1
构成实施例1切削液的原料液(1)～(3)成分、组成表示在[表5]～[表7]中，构成此切削液的各原料成分和组成表示在[表8]中。
                    表5
原料液(1)：含有聚合脂肪酸甘油三酯咪唑液体
        原料成分    组成(重量％)
    蒸馏水聚合脂肪酸甘油三酯咪唑2MZ        66.521.312.2
    合计        100.0
            表6
原料液(2)：含有2甲基-1-硬脂酸酯液体
    原料成分    组成(重量％)
  N-甲基-2-吡咯烷酮饱和脂肪酸(硬脂酸)        76.923.1
    合计        100.0
                表7原料液(3)：含有硼酸咪唑液体
   原料成分    组成(重量％)
    蒸馏水咪唑2MZ硼酸        76.313.210.5
    合计       100.0
                表8
      原料成分    组成(重量％)
  蒸馏水无机膨润土原料液(1)原料液(2)原料液(3)不饱和脂肪酸(油酸)乙二胺四醋酸二钠盐苯并三唑(甲苯并三唑)硅系消泡剂       42.71.014.216.915.26.51.01.51.0
    合计        100.0
以上本发明的切削液和，以往的非水溶性切削油的物性表示在[表9]中。
                            表9
    本发明      以往例
比重25℃粘度25℃(m·Pa·s)pH25℃表面张力25℃(达因/厘米)着火点(℃)(克利弗兰得开放式)摩擦系数COD(mg/l)1％水溶液     1.027808.4630.6无100℃下沸腾0.0876610      0.898100--31.81480.092～0.100--
使用上述本发明的切削液以及，以往的切削液和磨料(SiC磨料、GC#600、平均磨料粒径19～20μm)以1.0～1.5开：1.5kg的比例混合、分散的浆液，在0.18mm线径的多个钢丝锯张力为3.10kgf下，以切断速度1mm/min将单晶硅的结晶块切成厚度0.75mm的晶片。
其结果，使用实施例1的切削液时，对于直径8英寸的结晶块，晶片的挠曲度(变形成凸状的中央部和外圆周高度差的最大值)，100片均在20μm以下。
与此相反，使用比较例的以往切削油时，对于直径8英寸的结晶块，晶片的挠曲度，在100片中有96片在20μm以下。
因此，使用本发明的水溶性切削液，可以得的与以往的非水溶性切削油相同的切断效果。
从以上说明很明显地看出使用本发明的切削液可以将大直径的单晶硅等的结晶块，使用从前切削油相同的高速，而且在不发生大挠曲下可以进行切断。
另外，由于本发明的切削液是水溶性，所以不会有因着火而发生火灾的危险，同时也适于通过水洗将附着在晶片上的切削液洗净。对于洗净排水的处理中，可以利用现有的排水处理设备，供给切断用浆液的处理也可以同样进行，所以本法与以往使用有机溶剂系洗净液不同，可以避免对大气的污染，进而，本发明的切削液由于不含有胺系化合物，所以还有避免发癌的效果。

Claims (6)

1.切削液，其特征是含有无机膨润土、有机膨润土的至少一种和、脂肪酸咪唑水溶液为主要成分。
2.根据权利要求1所述的切削液，其特征是作为上述脂肪酸咪唑含有聚合脂肪酸甘油三酯咪唑，进而含有2甲基-1-硬脂酸酯。
3.根据权利要求1所述的切削液，其特征是作为上述硬酯酸咪唑含有聚合脂肪酸甘油三酯咪唑，进而含有硼酸咪唑，2甲基-1-硬脂酸酯。
4.根据权利要求1、或2、3所述的切削液，其特征是含有从保水性增强剂、水洗净增强剂、防止磨料沉淀剂、磨料分散性增强剂、润滑性增强剂、冷却性增强剂、浸透性增强剂、防锈剂、防锈辅助剂、不冻性增强剂、粘度恢复辅助剂及消泡剂组成的君中任意选出的多种主剂或辅助剂。
5.切削液的制造方法，其特征是在制造权利要求2所述的切削液时，将无机膨润土，有机膨润土的至少一种分散在水中，在该分散液中溶解含有由聚合脂肪酸甘油三酯和咪唑反应而得到的聚合脂肪酸甘油三酯咪唑的原料(1)后，在该溶液中溶解含有由N-甲基-2-吡咯烷酮和硬酯酸反应而得到的2甲基-1-硬脂酸酯的原料液(2)和油酸，进而在此溶液中溶解含有咪唑和硼酸反应得到的硼酸咪唑的原料液(3)后，向此溶液中添加乙二胺四醋酸钠盐、苯并三唑、硅系消泡剂等的多种主剂或者辅助剂。
6.结晶块的切断方法，其特征是作为切削剂(浆液)使用在权利要求1，2，3或4中所述的切削液中分散了磨料的分散液，用钢丝锯或带锯将单晶硅等的晶块切成晶片。
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1320607C (zh) * 2002-10-28 2007-06-06 株式会社迪斯科 切削装置
CN1946834B (zh) * 2004-04-28 2011-09-14 出光兴产株式会社 金属加工油组合物
CN102257092A (zh) * 2008-12-19 2011-11-23 嘉柏微电子材料股份公司 含有非离子型聚合物的浆料组合物及使用方法
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Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1053789A (ja) * 1996-08-12 1998-02-24 Nippei Toyama Corp ワイヤー切断加工機用水性加工液組成物
DE19703085A1 (de) * 1997-01-29 1998-07-30 Henkel Kgaa Kühlschmierstoffemulsion
JPH11349979A (ja) * 1998-01-09 1999-12-21 Nof Corp 水性切削液、水性切削剤及びそれを用いる硬脆材料の切断方法
DE19904510A1 (de) * 1999-02-04 2000-08-10 Wacker Chemie Gmbh Siliconkautschuk
US6705925B1 (en) 2000-10-20 2004-03-16 Lightwave Microsystems Apparatus and method to dice integrated circuits from a wafer using a pressurized jet
US7326324B2 (en) * 2002-11-20 2008-02-05 Shin-Etsu Chemical Co., Ltd. Purification and use of gellan in electrophoresis gels
US7674754B2 (en) * 2005-12-01 2010-03-09 Masco Corporation Water-based metalworking fluid incorporating polymeric boron materials
US20090032006A1 (en) * 2007-07-31 2009-02-05 Chul Woo Nam Wire saw process
WO2010071875A2 (en) * 2008-12-20 2010-06-24 Cabot Microelectronics Corporation Cutting fluid composition for wiresawing
WO2011111064A1 (en) 2010-03-08 2011-09-15 Indian Oil Corporation Ltd. Composition of semi - synthetic, bio -stable soluble cutting oil.
JP5588786B2 (ja) * 2010-08-24 2014-09-10 出光興産株式会社 シリコンウェハ加工液およびシリコンウェハ加工方法
TWI432281B (zh) 2010-09-29 2014-04-01 切削液之回收方法
CN105985853A (zh) * 2015-02-27 2016-10-05 全椒县兴盛化工厂 一种聚苯胺切削液
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Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2121606A (en) * 1936-07-31 1938-06-21 Westinghouse Electric & Mfg Co Coating for ferrous alloys
FR974127A (fr) * 1941-12-27 1951-02-19 Lubrifiant
US3390085A (en) * 1961-10-25 1968-06-25 Atlantic Richfield Co Grease composition
US3266923A (en) * 1963-03-07 1966-08-16 Exxon Research Engineering Co Mixture of clay and fatty acid salt
US3377278A (en) * 1966-07-05 1968-04-09 Chrysler Corp Drawing lubricant
US3654171A (en) * 1969-06-04 1972-04-04 Exxon Research Engineering Co Water and metal oxides or hydroxides as dispersants for clay-thickened greases
RO77672A2 (ro) * 1979-02-27 1981-11-24 Intreprinderea De Piese Radio Si Semiconductori,Ro Fluid pentru taiere cu suspensii abrazive a plachetelor de semiconductori in industria electronica
HU185944B (en) * 1981-08-11 1985-04-28 Janssen Pharmacfutica Nv Process for production of new /4-/diaril-metiliden-piperidino/-alkil-pirimidinone derivatives
US4382868A (en) * 1981-08-13 1983-05-10 Venture Innovations, Inc. Organophilic clay gellants
US4464274A (en) * 1981-08-13 1984-08-07 Venture Innovations, Inc. Organophilic clay suspending agents
US4622158A (en) * 1983-11-09 1986-11-11 The Lubrizol Corporation Aqueous systems containing organo-borate compounds
US4853140A (en) * 1987-08-21 1989-08-01 Nalco Chemical Company Lubricating fluids for slicing silicon ingots
JPH04216897A (ja) * 1990-12-19 1992-08-06 Nippon Steel Corp ワイヤソーによる切断法および加工液
US5409622A (en) * 1994-02-07 1995-04-25 Orpac, Inc. Surface lubricant for objects contacting forms of water and method of preparation

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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