CN112649472A - 一种基于静电喷涂聚合物绝缘层的no2气体传感器的制备方法 - Google Patents
一种基于静电喷涂聚合物绝缘层的no2气体传感器的制备方法 Download PDFInfo
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Abstract
本发明是一种基于静电喷涂聚合物绝缘层的NO2气体传感器的制备方法，利用静电喷涂的方法，通过调控聚甲基丙烯酸甲酯溶液（1）的浓度，同时调控直流高压电源（2）的输出电压，将聚甲基丙烯酸甲酯球状雾滴（3），静电喷涂在SiNx/Si衬底片（4）表面，形成多维半球面绝缘层。利用真空蒸镀法先后将六联苯分子和酞菁铜分子蒸镀在多维球面绝缘层上，形成六联苯有机诱导层（5）和酞菁铜有机半导体敏感层（6）。最后蒸镀金叉指电极（7），得到基于静电喷涂聚合物绝缘层的NO2气体传感器。
Description
技术领域
本发明涉及一种基于静电喷涂聚合物绝缘层的NO2气体传感器的制备方法，属于有机气体传感器技术领域。
背景技术
有机材料的电荷输运能力在气体传感器中起着至关重要的作用。应用于气体传感器的共轭材料大多在电荷迁移率较高的场效应晶体管中表现良好。在气体传感器的工作过程中，需要有效的电荷传输，以确保在暴露于分析物时产生或捕获的电荷载流子能够传输而得到最终电信号，从而获得良好的灵敏度和快速响应。优化分子结构和形貌是获得良好电荷输运性能的有效途径。
将薄膜的形貌调制成具有多吸收点和短扩散路径的结构是实现高灵敏度和快速响应/回复的有效途径。因此，为了获得高性能的气体传感器，如果把气敏材料制备成超薄、多维、球面的晶体薄膜，有望进一步提高传感器的灵敏度，减少响应/回复时间，实现低检测限。
本发明采用静电喷涂法，将聚合物溶液喷涂在SiNx/Si衬底片表面，通过控制聚合物溶液浓度和喷涂时间，在SiNx/Si衬底片表面形成由诸多聚合物雾滴形成的多维球面绝缘层，利用真空蒸镀法将有机半导体材料蒸镀在多维球面绝缘层，蒸镀金叉指电极，得到多吸附点、多接触点的基于静电喷涂聚合物绝缘层的NO2气体传感器。
发明内容
本发明是一种基于静电喷涂聚合物绝缘层的NO2气体传感器的制备方法，采用该法制备的NO2气体传感器的有机半导体层在传感器NO2气体时，可以实现与NO2气体的多角度吸附/接触，传感器的性能得到进一步的提升。
该气体传感器主要采用静电喷涂法制备，如图1和图2所示，利用静电喷涂的方法，通过调控聚甲基丙烯酸甲酯溶液（1）的浓度，同时调控直流高压电源（2）的输出电压，将聚甲基丙烯酸甲酯球状雾滴（3），静电喷涂在SiNx/Si衬底片（4）表面，形成多维半球面绝缘层。利用真空蒸镀法先后将六联苯分子和酞菁铜分子蒸镀在多维球面绝缘层上，形成六联苯有机诱导层（5）和酞菁铜有机半导体敏感层（6）。最后蒸镀金叉指电极（7），得到基于静电喷涂聚合物绝缘层的NO2气体传感器。
附图说明
图1 基于静电喷涂聚合物绝缘层的NO2气体传感器的聚合物绝缘层的制备示意图。
图2 基于静电喷涂聚合物绝缘层的NO2气体传感器的器件结构示意图。
具体实施方式
本发明是一种基于静电喷涂聚合物绝缘层的NO2气体传感器的制备方法，具体实现过程如图1和图2所示：
a）称取0.40 g 聚甲基丙烯酸甲酯，5 mL氯仿做溶剂，配制80 mg/mL 聚甲基丙烯酸甲酯预喷涂溶液。将聚甲基丙烯酸甲酯预喷涂溶液装入静电喷涂推进装置（1）。
b）利用静电喷涂的方法，设置直流高压电源（2）的输出电压为17 kV，将聚甲基丙烯酸甲酯球状雾滴（3），静电喷涂在SiNx/Si衬底片（4）表面，形成多维半球面绝缘层，100℃下烘干2 h。
c）利用真空蒸镀法，先后将六联苯分子和酞菁铜分子蒸镀在多维球面绝缘层上，形成六联苯有机诱导层（5）和酞菁铜有机半导体敏感层（6）。最后蒸镀金叉指电极（7），得到基于静电喷涂聚合物绝缘层的NO2气体传感器。
Claims (4)
1.一种基于静电喷涂聚合物绝缘层的NO2气体传感器的制备方法包括：利用静电喷涂的方法，通过调控聚甲基丙烯酸甲酯溶液（1）的浓度，同时调控直流高压电源（2）的输出电压，将聚甲基丙烯酸甲酯球状雾滴（3），静电喷涂在SiNx/Si衬底片（4）表面，形成多维球面绝缘层，利用真空蒸镀法先后将六联苯分子和酞菁铜分子蒸镀在多维球面绝缘层上，形成六联苯有机诱导层（5）和酞菁铜有机半导体敏感层（6），最后蒸镀金叉指电极（7），得到基于静电喷涂聚合物绝缘层的NO2气体传感器。
2.根据权利要求1所述的一种基于静电喷涂聚合物绝缘层的NO2气体传感器的制备方法，其特征在于，称取0.40 g 聚甲基丙烯酸甲酯，5 mL氯仿做溶剂，配制80 mg/mL 聚甲基丙烯酸甲酯预喷涂溶液，将聚甲基丙烯酸甲酯预喷涂溶液装入静电喷涂推进装置（1）。
3.根据权利要求1所述的一种基于静电喷涂聚合物绝缘层的NO2气体传感器的制备方法，其特征在于，利用静电喷涂的方法，设置直流高压电源（2）的输出电压为16±1 kV，将聚甲基丙烯酸甲酯球状雾滴（3），静电喷涂在SiNx/Si衬底片（4）表面，形成多维半球面绝缘层，100 ℃下烘干2 h。
4.根据权利要求1所述的一种基于静电喷涂聚合物绝缘层的NO2气体传感器的制备方法，其特征在于，利用真空蒸镀法，先后将六联苯分子和酞菁铜分子蒸镀在多维球面绝缘层上，形成六联苯有机诱导层（5）和酞菁铜有机半导体敏感层（6），最后蒸镀金叉指电极（7），得到基于静电喷涂聚合物绝缘层的NO2气体传感器。
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| CN104865293A (zh) * | 2015-05-19 | 2015-08-26 | 清华大学 | 基于三维网络结构敏感薄膜的柔性气体传感器及制备方法 |
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| CN108508075A (zh) * | 2018-04-02 | 2018-09-07 | 长春工业大学 | 一种界面修饰底接触电极有机薄膜晶体管气体传感器的制备方法 |
| CN109142446A (zh) * | 2018-08-20 | 2019-01-04 | 长春工业大学 | 一种聚合物薄膜孔状立体有机气体传感器制备方法 |
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Patent Citations (5)
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| CN104865293A (zh) * | 2015-05-19 | 2015-08-26 | 清华大学 | 基于三维网络结构敏感薄膜的柔性气体传感器及制备方法 |
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| CN108508075A (zh) * | 2018-04-02 | 2018-09-07 | 长春工业大学 | 一种界面修饰底接触电极有机薄膜晶体管气体传感器的制备方法 |
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