CN112563374B - Automatic wafer loading and unloading device for silicon wafer detection in solar cell production - Google Patents

Automatic wafer loading and unloading device for silicon wafer detection in solar cell production Download PDF

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Publication number
CN112563374B
CN112563374B CN202011455962.8A CN202011455962A CN112563374B CN 112563374 B CN112563374 B CN 112563374B CN 202011455962 A CN202011455962 A CN 202011455962A CN 112563374 B CN112563374 B CN 112563374B
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plate
material pushing
shaft
silicon wafer
gear
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CN112563374A (en
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许文凡
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Shenzhen Zanyu New Energy Material Technology Co ltd
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Shenzhen Zanyu New Energy Material Technology Co ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/1804Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706Mechanical details, e.g. roller, belt
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10Measuring as part of the manufacturing process
    • H01L22/12Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/20Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/547Monocrystalline silicon PV cells

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  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The invention discloses an automatic wafer loading and unloading device for detecting a silicon wafer in solar cell production, which comprises a base plate, wherein front side plates are arranged on the left side and the right side of the front end of the base plate, middle side plates are arranged on the left side and the right side of the middle part of the base plate, a rear vertical plate is fixedly arranged on the rear end of the base plate, the upper ends of the front side plates are fixedly connected to the left side and the right side of the lower end of a storage rack respectively, silicon wafer materials are placed on the inner side of the storage rack, a material pushing opening is arranged in the middle of the lower end of the storage rack, a material pushing plate is connected to the lower side of the material pushing opening in a sliding mode, 2 material pushing rods are arranged at the upper end of the material pushing plate, and the lower end of the material pushing plate is fixedly connected to the left side of the upper end of a movable sliding seat. This silicon chip detects with automatic loading and unloads piece device in solar cell production can be convenient for to the loading of silicon chip, detect and unload the piece and carry out full automation mechanized operation, reduces staff's intensity of labour, and is convenient for carry out centralized processing to the waste material that detects out to check out equipment input cost is lower.

Description

Automatic wafer loading and unloading device for silicon wafer detection in solar cell production
Technical Field
The invention relates to the technical field of solar cell production, in particular to an automatic wafer loading and unloading device for detecting a silicon wafer in solar cell production.
Background
The solar cell is also called a photovoltaic cell, is a photoelectric semiconductor sheet which directly generates electricity by utilizing sunlight, has the advantages of high reliability, long service life, high conversion rate and the like, and is widely applied to the fields of military, aerospace, industry, agriculture and the like.
But current solar cell apparatus for producing is not convenient for carry out the loading to silicon chip material, detect and unload the piece automatically, and detection efficiency is lower to detect the cost is higher, be not convenient for handle the waste material, need detect silicon chip material in the current solar cell production process, screen out the silicon chip that has the latent crack, prevent the production of defective products, and current silicon chip detection device cost input is higher.
Disclosure of Invention
The invention aims to provide an automatic wafer loading and unloading device for detecting a silicon wafer in solar cell production, and aims to solve the problems that the conventional solar cell production device is inconvenient to automatically load, detect and unload the silicon wafer material, the detection efficiency is low, and the detection cost is high in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme: an automatic wafer loading and unloading device for detecting a silicon wafer in solar cell production comprises a base plate, wherein front side plates are arranged on the left side and the right side of the front end of the base plate, middle side plates are arranged on the left side and the right side of the middle of the base plate, a rear vertical plate is fixedly mounted on the rear end of the base plate, the upper end of each front side plate is fixedly connected to the left side and the right side of the lower end of a storage rack, silicon wafer materials are placed on the inner side of the storage rack, a material pushing opening is formed in the middle of the lower end of the storage rack, a material pushing plate is connected to the lower side of the material pushing opening in a sliding mode, 2 material pushing rods are arranged at the upper end of the material pushing opening, the lower end of the material pushing plate is fixedly connected to the left side of the upper end of a movable sliding seat, the middle of the movable sliding seat and a sliding rod form a sliding connection structure, a sliding sleeve is arranged at the upper end of the sliding rod, the sliding sleeve and a guide rod form a sliding connection structure, and the guide rod is fixedly mounted on the lower side surface of the storage rack, the right side bearing of the movable sliding seat is connected with a connector, the lower end of the right side of the connector is fixedly connected to the upper end of the push rod, the push rod and the inner side of the fixed sliding seat form a sliding connection structure, the upper end of the fixed sliding seat is provided with a spring which is connected to the outer side of the push rod in an embedded mode, the right side of the fixed sliding seat and the left end of the connecting shaft form a fixed connection structure, the connecting shaft and the lower end of the fixed support form a bearing connection structure, the fixed support is fixedly connected to the lower side surface of the storage rack, the middle part of the connecting shaft is connected with a residual tooth gear in a key mode, the right end of the connecting shaft penetrates through the front side plate to be connected with the shaft end of the motor, the motor is fixedly installed on the outer side surface of the front side plate, the rear side of the residual tooth gear is provided with a transmission gear, the lower side of the transmission gear is meshed with a steering gear, and the transmission gear and the steering gear are both connected with installation shafts in a bearing mode, the right end of the mounting shaft is fixedly connected to the inner side of the front side plate, the right side of the steering gear and one end of a first belt transmission mechanism form a fixed connection structure, the other end of the first belt transmission mechanism and the transmission shaft form a key connection structure, the left and right ends of the transmission shaft are fixedly mounted on the base plate through a first mounting seat, the middle part of the transmission shaft is connected with the middle shaft through a second belt transmission mechanism, the left and right ends of the middle shaft are connected with rolling shafts through universal joints, the rolling shafts and the upper ends of the middle side plates on the left and right sides form bearing connection structures respectively, 2 rolling shafts are arranged at the front and rear ends of the middle side plates respectively, a mounting bracket is mounted at the upper end of the middle side plate, a hydraulic detection device is fixedly mounted at the middle part of the lower end of the mounting bracket, a waste bin is arranged below the hydraulic detection device, and a transmission belt is arranged at the upper end of the inner side of the middle side plate, the front end and the rear end of the transmission belt respectively form a nested connection structure with the rolling shafts at the front end and the rear end of the middle side plate, the outer ends of the rolling shafts are fixedly connected with cams, the lower sides of the cams are respectively provided with a pressing plate, the middle parts of the pressing plates respectively form a shaft connection structure with the supporting frame through supporting shafts, the supporting frames are respectively provided with 2 inner sides of the middle side plates at the left side and the right side, the lower ends of the supporting frames are respectively fixedly connected with the inner sides of the middle side plates, the upper ends of the supporting frames form the shaft connection structure with the supporting plates, the supporting plates are provided with 2 inner ends of the middle side plates at the left side and the right side in a symmetrical mode, the front end and the rear end of the lower side of the supporting plate are respectively connected with idler wheels in a sliding mode, the idler wheels are respectively connected with the inner ends of the pressing plates in a bearing mode, the right end of the transmission shaft is connected with the right end of the lifting shaft through a chain transmission mechanism, and the left end and right end of the lifting shaft form a bearing connection structure with a second mounting seat, and the equal fixed mounting of mount pad No. two is in the upper surface of bed plate, the left end fixedly connected with fluted disc of lift axle, and the left side and the lifting gear of fluted disc mesh mutually to the lower extreme of lifting gear constitutes bearing connection structure with the upper surface of bed plate, the upper end fixedly connected with screw rod of lifting gear, and the upper end fixed connection of screw rod in the upper end lower surface of back riser to threaded connection has the nut on the screw rod, nut fixed connection is in the middle part of bracket, and the rear side of bracket and the front side of back riser constitute the sliding connection structure.
Preferably, the material pushing opening is a T-shaped opening and penetrates through the front end and the rear end of the storage rack.
Preferably, the material pushing rod is cylindrical, the height of the material pushing rod is lower than the thickness of the silicon wafer material, and the material pushing rod is arranged on the inner side of the material pushing opening.
Preferably, the residual tooth gear is arranged on the outer side of the fixed support, and the gear teeth on the residual tooth gear are meshed with the transmission gear.
Preferably, the rollers are obliquely arranged on the inner side of the middle side plate, the rollers are symmetrically arranged on the inner side of the middle side plate, and the transmission belts on the rollers are in an oblique structure.
Preferably, the structural shape of the support frame is L-shaped, and the support frame is arranged on the inner side of the middle side plate in a left-right symmetrical mode.
Preferably, the mounting bracket has an inverted U-shaped structural shape, and the lower end of the mounting bracket is connected with the upper ends of the left and right middle side plates respectively.
Compared with the prior art, the invention has the beneficial effects that: this silicon chip detects with automatic loading and unloads piece device in solar cell production can be convenient for to the loading of silicon chip, detect and unload the piece and carry out full automatization operation, reduces staff's intensity of labour, and is convenient for carry out centralized processing to the waste material that detects out to the check out test set input cost is lower:
1. The movable sliding seat is driven by the motor to move along a rectangular track along the sliding rod and the guide rod, so that the movable sliding seat drives the material pushing plate and the material pushing rod to push silicon chip materials to the conveying belt, then the silicon chip materials are subjected to pressure detection by the hydraulic detection device, then the conveying belt is driven by the residual tooth gear driven by the motor to work, the silicon chip materials are conveyed to the bracket by the conveying belt to be stored, the residual tooth gear drives the bracket to descend when the conveying belt works, the silicon chip materials on the bracket are kept lower than the silicon chip materials on the conveying belt, the silicon chip materials can be automatically subjected to charging and discharging and waste material removal through an automatic operation process, the labor intensity of workers is greatly reduced, the mechanical automation operation efficiency is high, and the error rate is low;
2. the roller drives the cam to rotate while the conveying belt works, the inner end of the pressing plate loosens the support of the supporting plate through the cooperation of the cam and the pressing plate, so that the supporting plate is turned downwards, broken silicon wafer materials fall into a waste bin below along the inclined conveying belt and the supporting plate, the waste materials are conveniently and automatically recovered, the subsequent treatment of the waste materials is facilitated, and the working efficiency is improved;
3. The silicon wafer material with the hidden cracks is removed by setting corresponding detection pressure through the hydraulic detection device, the detection cost is reduced, and 1 motor drives a plurality of mechanical structures to perform full-flow operation on the silicon wafer material, so that the production cost of the equipment is reduced, and the operation stability is high.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is an enlarged schematic view of point A of FIG. 1 according to the present invention;
FIG. 3 is a schematic side view of the cross-sectional structure of the present invention;
FIG. 4 is a perspective view of the inside of the present invention;
FIG. 5 is a schematic view of the front end inner side perspective of the present invention;
FIG. 6 is an enlarged view of point B of FIG. 5 according to the present invention;
FIG. 7 is a schematic sectional view of the storage rack of the present invention;
FIG. 8 is an enlarged view of point C of FIG. 7 according to the present invention;
FIG. 9 is a schematic cross-sectional view of a conveyor belt according to the present invention;
fig. 10 is an enlarged view of point D in fig. 9 according to the present invention.
In the figure: 1. a base plate; 2. a front side plate; 3. a middle side plate; 4. a rear vertical plate; 5. a storage rack; 6. a silicon wafer material; 7. a material pushing opening; 8. a material pushing plate; 9. a material pushing rod; 10. a movable slide seat; 11. a slide bar; 12. a sliding sleeve; 13. a guide bar; 14. a connector; 15. a push rod; 16. fixing the sliding seat; 17. a spring; 18. a connecting shaft; 19. fixing a bracket; 20. a residual gear; 21. a motor; 22. a transmission gear; 23. installing a shaft; 24. a steering gear; 25. a first belt transmission mechanism; 26. a drive shaft; 27. a first mounting seat; 28. a second belt transmission mechanism; 29. a middle shaft; 30. a universal joint; 31. a roller; 32. a conveyor belt; 33. a cam; 34. pressing a plate; 35. a support shaft; 36. a support frame; 37. a roller; 38. a support plate; 39. a chain transmission mechanism; 40. a lifting shaft; 41. a second mounting seat; 42. a fluted disc; 43. a lifting gear; 44. a screw; 45. a nut; 46. a bracket; 47. mounting a bracket; 48. a hydraulic pressure detecting device; 49. a waste bin.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-10, the present invention provides a technical solution: an automatic wafer loading and unloading device for silicon wafer detection in solar cell production comprises a base plate 1, a front side plate 2, a middle side plate 3, a rear vertical plate 4, a storage rack 5, silicon wafer materials 6, a material pushing opening 7, a material pushing plate 8, a material pushing rod 9, a movable sliding seat 10, a sliding rod 11, a sliding sleeve 12, a guide rod 13, a connecting head 14, a push rod 15, a fixed sliding seat 16, a spring 17, a connecting shaft 18, a fixed support 19, a residual tooth gear 20, a motor 21, a transmission gear 22, a mounting shaft 23, a steering gear 24, a first belt transmission mechanism 25, a transmission shaft 26, a first mounting seat 27, a second belt transmission mechanism 28, a middle shaft 29, a universal joint 30, a rolling shaft 31, a transmission belt 32, a cam 33, a pressing plate 34, a supporting shaft 35, a supporting frame 36, a rolling wheel 37, a supporting plate 38, a chain transmission mechanism 39, a lifting shaft 40, a second mounting seat 41, a fluted disc 42, a lifting gear 43, a lifting gear, a spring, the automatic silicon wafer pushing device comprises a screw 44, a nut 45, a bracket 46, a mounting bracket 47, a hydraulic detection device 48 and a waste bin 49, wherein front side plates 2 are arranged on the left and right sides of the front end of a base plate 1, middle side plates 3 are arranged on the left and right sides of the middle part of the base plate 1, a rear vertical plate 4 is fixedly arranged on the rear end of the base plate 1, the upper end of each front side plate 2 is fixedly connected to the left and right sides of the lower end of a storage rack 5, silicon wafer materials 6 are placed on the inner side of the storage rack 5, a material pushing opening 7 is arranged in the middle of the lower end of the storage rack 5, a material pushing plate 8 is connected to the lower side of the material pushing opening 7 in a sliding mode, 2 material pushing rods 9 are arranged on the upper end of the material pushing plate 8, the lower end of the material pushing plate 8 is fixedly connected to the left side of the upper end of a movable sliding seat 10, the middle of the movable sliding seat 10 and a sliding rod 11 form a sliding connection structure, a sliding sleeve 12 is arranged on the upper end of the sliding rod 11, and the sliding connection structure is formed by the sliding sleeve 12 and a guide rod 13, the guide rod 13 is fixedly arranged on the lower side surface of the storage rack 5, the right side bearing of the movable sliding seat 10 is connected with the connector 14, the lower right side end of the connector 14 is fixedly connected with the upper end of the push rod 15, the push rod 15 and the inner side of the fixed sliding seat 16 form a sliding connection structure, the upper end of the fixed sliding seat 16 is provided with a spring 17, the spring 17 is connected with the outer side of the push rod 15 in a nesting mode, the right side of the fixed sliding seat 16 and the left end of the connecting shaft 18 form a fixed connection structure, the connecting shaft 18 and the lower end of the fixed support 19 form a bearing connection structure, the fixed support 19 is fixedly connected with the lower side surface of the storage rack 5, the middle part of the connecting shaft 18 is in key connection with the stub gear 20, the right end of the connecting shaft 18 penetrates through the front side plate 2 to be connected with the shaft end of the motor 21, the motor 21 is fixedly arranged on the outer side surface of the front side plate 2, and the rear side of the stub gear 20 is provided with a transmission gear 22, the lower side of the transmission gear 22 is engaged with the steering gear 24, the transmission gear 22 and the steering gear 24 are respectively in bearing connection with a mounting shaft 23, the right end of the mounting shaft 23 is fixedly connected to the inner side of the front side plate 2, the right side of the steering gear 24 and one end of a first belt transmission mechanism 25 form a fixed connection structure, the other end of the first belt transmission mechanism 25 and a transmission shaft 26 form a key connection structure, the left end and the right end of the transmission shaft 26 are respectively fixedly mounted on the base plate 1 through a first mounting seat 27, the middle part of the transmission shaft 26 is connected with a middle shaft 29 through a second belt transmission mechanism 28, the left end and the right end of the middle shaft 29 are respectively connected with a roller 31 through a universal joint 30, the roller 31 and the upper ends of the middle side plates 3 on the left side and the right side form a bearing connection structure, 2 rollers 31 are respectively arranged at the front end and the rear end of the middle side plate 3, and the upper end of the middle side plate 3 is provided with a mounting bracket 47, a hydraulic detection device 48 is fixedly arranged in the middle of the lower end of the mounting bracket 47, a waste bin 49 is arranged below the hydraulic detection device 48, the upper ends of the inner sides of the middle side plates 3 are respectively provided with a transmission belt 32, the front end and the rear end of the transmission belt 32 respectively form a nested connection structure with the rollers 31 at the front end and the rear end of the middle side plates 3, the outer ends of the rollers 31 are respectively and fixedly connected with a cam 33, the lower sides of the cams 33 are respectively provided with a pressing plate 34, the middle parts of the pressing plates 34 respectively form a shaft connection structure with the supporting frame 36 through supporting shafts 35, the inner sides of the middle side plates 3 at the left side and the right side of the supporting frame 36 are respectively provided with 2 supporting frames, the lower ends of the supporting frames 36 are respectively and fixedly connected with the inner sides of the middle side plates 3, the upper ends of the supporting frames 36 and the supporting plate 38 form a shaft connection structure, 2 supporting plates 38 are symmetrically arranged at the upper ends of the inner sides of the middle side plates 3 at the left side and the right side, the front end and the rear end of the supporting plate 38 are respectively and the rollers 37 in a sliding connection mode, and the equal bearing of gyro wheel 37 is connected in the inner of clamp plate 34, the right-hand member of transmission shaft 26 is connected with the right-hand member of lift axle 40 through chain drive 39, and lift axle 40 about both ends all constitute bearing connection structure with mount pad 41 No. two, and the equal fixed mounting of mount pad 41 in the upper surface of bed plate 1 No. two, the left end fixedly connected with fluted disc 42 of lift axle 40, and the left side of fluted disc 42 meshes with lift gear 43 mutually, and the lower extreme of lift gear 43 constitutes bearing connection structure with the upper surface of bed plate 1, the upper end fixedly connected with screw rod 44 of lift gear 43, and the upper end fixed connection of screw rod 44 is in the upper end lower surface of back riser 4, and threaded connection has nut 45 on screw rod 44, nut 45 fixed connection is in the middle part of bracket 46, and the rear side of bracket 46 constitutes the sliding connection structure with the front side of back riser 4.
The material pushing opening 7 is a T-shaped opening in structural shape, the material pushing opening 7 penetrates through the front end and the rear end of the storage rack 5, the material pushing rod 9 can slide in the material pushing opening 7 conveniently, therefore, silicon wafer materials 6 are pushed to be loaded, and the silicon wafer materials 6 can be discharged from the rear end of the storage rack 5 through the T-shaped structure of the material pushing opening 7.
The material pushing rod 9 is cylindrical, the height of the material pushing rod 9 is smaller than the thickness of the silicon chip material 6, the material pushing rod 9 is arranged on the inner side of the material pushing opening 7, the silicon chip material 6 can be conveniently pushed through the material pushing rod 9, and the silicon chip material 6 falls onto the conveying belt 32 to perform the next step.
The residual tooth gear 20 is disposed outside the fixing bracket 19, and teeth of the residual tooth gear 20 are engaged with the transmission gear 22, so that the transmission gear 22 can be driven to rotate only when the connecting shaft 18 rotates to a specific position by the structure of the residual tooth gear 20.
The rollers 31 are obliquely arranged on the inner side of the middle side plate 3, the rollers 31 are arranged on the inner side of the middle side plate 3 in a bilaterally symmetrical mode, and the conveying belt 32 on the rollers 31 is of an oblique structure, so that the upper surface of the conveying belt 32 can be changed into an oblique surface through the obliquely arranged rollers 31, and detected waste materials fall into a waste bin 49 below through the oblique surface.
The support 36 is L-shaped, and the support 36 is symmetrically disposed on the inner side of the middle side plate 3, so that the support plate 38 can be supported by the support 36, and the silicon wafer material 6 can be supported by the support plate 38 when the hydraulic pressure detecting device 48 detects the pressure of the silicon wafer material 6.
The mounting bracket 47 has an inverted U-shaped structure, the lower end of the mounting bracket 47 is connected with the upper ends of the left and right middle side plates 3 respectively, and the hydraulic detection device 48 can be fixed and mounted conveniently through the mounting bracket 47, so that the pressure detection is carried out on the silicon wafer material 6.
The working principle is as follows: according to fig. 1, silicon wafer material 6 is first stacked inside a storage rack 5;
starting a motor 21, wherein the motor 21 drives a connecting shaft 18 and a residual tooth gear 20 to rotate, and the connecting shaft 18 drives a fixed sliding seat 16 to rotate;
the fixed sliding seat 16 drives the push rod 15 to rotate in the rotating process, the push rod 15 drives the movable sliding seat 10 to move through the connector 14, and meanwhile, the movable sliding seat 10 reaches a farther distance as far as possible in the moving process through the spring 17;
when moving, the movable sliding seat 10 can only move up and down through the matching with the sliding rod 11, and meanwhile, the movable sliding seat 10 can move back and forth together with the sliding rod 11 through the matching of the sliding sleeve 12 at the upper end of the sliding rod 11 and the guide rod 13;
So that the movable sliding seat 10 drives the material pushing plate 8 and the material pushing rod 9 to move along a rectangular track;
when the movable slide carriage 10 drives the material pushing plate 8 and the material pushing rod 9 to move backwards, the silicon chip material 6 is pushed to enter the conveying belt 32;
the motor 21 stops rotating, the hydraulic detection device 48 is started to detect the pressure of the silicon wafer material 6, and the support plate 38 supports the lower surface of the silicon wafer material 6;
the lower end of the supporting plate 38 is supported by the pressing plate 34 and the roller 37, and the outer end of the pressing plate 34 is propped by the cam 33 to fix the pressing plate 34;
when the hydraulic detection device 48 detects the silicon wafer material 6, the qualified silicon wafer material 6 generates micro elastic deformation, and the silicon wafer material 6 with hidden cracks is cracked;
after the detection is finished, the motor 21 continues to rotate to drive the movable sliding seat 10 to move downwards along the sliding rod 11, and meanwhile, the residual tooth gear 20 rotates to a position meshed with the transmission gear 22;
the residual tooth gear 20 drives the transmission gear 22 to rotate, and the transmission gear 22 drives the steering gear 24 to rotate;
the steering gear 24 drives the transmission shaft 26 to rotate through the first belt transmission mechanism 25, and the transmission shaft 26 drives the middle shaft 29 to rotate through the second belt transmission mechanism 28;
the middle shaft 29 drives the roller 31 to rotate through the universal joints 30 at the left side and the right side, and the roller 31 drives the transmission belt 32 to work;
The rotation of the roller 31 is accelerated through the matching of the transmission gear 22 of the residual tooth gear 20 and the diameter difference of a belt pulley in the first belt transmission mechanism 25, so that the transmission distance of the transmission belt 32 is increased;
the roller 31 drives the cam 33 to rotate while rotating, and the cam 33 is matched with the pressing plate 34 through the structural shape of the cam 33 to enable the right end of the pressing plate 34 to be tilted upwards, so that the left end of the pressing plate 34 is lowered;
releasing the support of the support plate 38 and rotating the support plate 38 downward so that the broken silicon wafer material 6 falls along the inclined conveyor belt 32 and the support plate 38 into the waste bin 49 below;
and the completed silicon wafer material 6 is transferred along the transfer belt 32 onto the carriage 46;
the transmission shaft 26 drives the transmission belt 32 to move and simultaneously drives the lifting shaft 40 to rotate through the chain transmission mechanism 39;
the lifting shaft 40 drives the fluted disc 42 to rotate, and the fluted disc 42 drives the lifting gear 43 and the screw 44 to rotate;
the screw 44 drives the bracket 46 to move downwards through cooperation with the nut 45, so that the silicon wafer material 6 on the bracket 46 is lower than the silicon wafer material 6 on the conveyor belt 32, which is not described in detail in this specification and is well known in the art.
It is to be understood that the terms "central," "longitudinal," "lateral," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like are used in the orientations and positional relationships indicated in the drawings for the purpose of convenience and simplicity of description, and do not indicate or imply that the referenced devices or components must be in a particular orientation, constructed and operated in a particular orientation, and are not to be considered limiting of the scope of the present invention.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. The utility model provides a silicon chip detects and unloads piece device with automatic loading in solar cell production, includes bed plate (1), its characterized in that: the silicon wafer pushing device is characterized in that front side plates (2) are arranged on the left side and the right side of the front end of the base plate (1), middle side plates (3) are arranged on the left side and the right side of the middle of the base plate (1), a rear vertical plate (4) is fixedly mounted on the rear end of the base plate (1), the upper ends of the front side plates (2) are fixedly connected to the left side and the right side of the lower end of a storage rack (5), silicon wafer materials (6) are placed on the inner side of the storage rack (5), a material pushing opening (7) is arranged in the middle of the lower end of the storage rack (5), a material pushing plate (8) is connected to the lower side of the material pushing opening (7) in a sliding mode, 2 material pushing rods (9) are arranged at the upper end of the material pushing plate (8), the lower end of the material pushing plate (8) is fixedly connected to the left side of the upper end of the movable sliding seat (10), the middle of the movable sliding seat (10) and a sliding rod (11) form a sliding connection structure, and a sliding sleeve (12) is arranged at the upper end of the sliding rod (11), sliding sleeve (12) and guide bar (13) constitute sliding connection structure, and guide bar (13) fixed mounting in the downside surface of storage rack (5), the right side bearing of activity slide (10) is connected with connector (14), and the right side lower extreme fixed connection of connector (14) is in the upper end of push rod (15), and push rod (15) constitutes sliding connection structure with the inboard of fixed slide (16), the upper end of fixed slide (16) is provided with spring (17), and spring (17) nested connection in the outside of push rod (15), and the right side of fixed slide (16) constitutes fixed connection structure with the left end of connecting axle (18), the lower extreme of connecting axle (18) and fixed bolster (19) constitutes bearing connection structure, and fixed bolster (19) fixed connection in the downside surface of storage rack (5), and the middle part key-type connection of connecting axle (18) has incomplete tooth gear (20), the right end of the connecting shaft (18) penetrates through the front side plate (2) and is connected with the shaft end of the motor (21), the motor (21) is fixedly installed on the outer side surface of the front side plate (2), the rear side of the residual tooth gear (20) is provided with a transmission gear (22), the lower side of the transmission gear (22) is meshed with a steering gear (24), the transmission gear (22) and the steering gear (24) are in bearing connection with an installation shaft (23), the right end of the installation shaft (23) is fixedly connected to the inner side of the front side plate (2), the right side of the steering gear (24) and one end of a belt transmission mechanism (25) form a fixed connection structure, the other end of the belt transmission mechanism (25) and the transmission shaft (26) form a key connection structure, and the left and right ends of the transmission shaft (26) are fixedly installed on the base plate (1) through an installation seat (27), the middle part of the transmission shaft (26) is connected with a middle shaft (29) through a second belt transmission mechanism (28), the left end and the right end of the middle shaft (29) are connected with rolling shafts (31) through universal joints (30), the rolling shafts (31) respectively form a bearing connection structure with the upper ends of the middle side plates (3) on the left side and the right side, the front end and the rear end of each rolling shaft (31) of the middle side plate (3) are respectively provided with 2, the upper end of each middle side plate (3) is provided with a mounting bracket (47), the middle part of the lower end of the mounting bracket (47) is fixedly provided with a hydraulic detection device (48), a waste box (49) is arranged below the hydraulic detection device (48), the upper end of the inner side of each middle side plate (3) is provided with a transmission belt (32), and the front end and the rear end of the transmission belt (32) respectively form a nested connection structure with the rolling shafts (31) on the front end and the rear end of the middle side plate (3), the outer ends of the rolling shafts (31) are fixedly connected with cams (33), the lower sides of the cams (33) are respectively provided with a pressing plate (34), the middle parts of the pressing plates (34) and supporting frames (36) form a shaft connecting structure through supporting shafts (35), the inner sides of the middle side plates (3) on the left side and the right side of the supporting frames (36) are respectively provided with 2 supporting frames, the lower ends of the supporting frames (36) are respectively and fixedly connected to the inner sides of the middle side plates (3), the upper ends of the supporting frames (36) and supporting plates (38) form a shaft connecting structure, the upper ends of the inner sides of the middle side plates (3) on the left side and the right side of the supporting plates (38) are symmetrically provided with 2 supporting plates (38), the front end and the rear end of the lower side of the supporting plates (38) are respectively connected with rollers (37) in a sliding mode, the rollers (37) are respectively connected to the inner ends of the pressing plates (34) in a bearing mode, and the right end of the transmission shaft (26) is connected with the right end of a lifting shaft (40) through a chain transmission mechanism (39), and both ends all constitute bearing connection structure with mount pad (41) No. two about lift axle (40), and the equal fixed mounting in upper surface of bed plate (1) of mount pad (41) No. two, the left end fixedly connected with fluted disc (42) of lift axle (40), and the left side and the lifting gear (43) of fluted disc (42) mesh mutually, and the lower extreme of lifting gear (43) and the upper surface of bed plate (1) constitute bearing connection structure, the upper end fixedly connected with screw rod (44) of lifting gear (43), and the upper end fixed connection of screw rod (44) in the upper end lower surface of back riser (4), and threaded connection has nut (45) on screw rod (44), nut (45) fixed connection is in the middle part of bracket (46), and the rear side of bracket (46) constitutes sliding connection structure with the front side of back riser (4).
2. The automatic wafer loading and unloading device for detecting the silicon wafer in the solar cell production as claimed in claim 1, wherein: the material pushing opening (7) is a T-shaped opening in structural shape, and the material pushing opening (7) penetrates through the front end and the rear end of the storage rack (5).
3. The automatic wafer loading and unloading device for detecting the silicon wafer in the solar cell production as claimed in claim 1, wherein: the structure shape of the material pushing rod (9) is cylindrical, the height of the material pushing rod (9) is lower than the thickness of the silicon wafer material (6), and the material pushing rod (9) is arranged on the inner side of the material pushing opening (7).
4. The automatic wafer loading and unloading device for detecting the silicon wafer in the solar cell production as claimed in claim 1, wherein: the residual tooth gear (20) is arranged on the outer side of the fixed support (19), and gear teeth on the residual tooth gear (20) are meshed with the transmission gear (22).
5. The automatic wafer loading and unloading device for detecting the silicon wafer in the solar cell production as claimed in claim 1, wherein: the roller (31) is obliquely arranged on the inner side of the middle side plate (3), the roller (31) is arranged on the inner side of the middle side plate (3) in a bilateral symmetry mode, and the transmission belt (32) on the roller (31) is of an oblique structure.
6. The automatic wafer loading and unloading device for detecting the silicon wafer in the solar cell production as claimed in claim 1, wherein: the structural shape of the support frame (36) is L-shaped, and the support frame (36) is arranged on the inner side of the middle side plate (3) in a bilaterally symmetrical mode.
7. The automatic wafer loading and unloading device for detecting the silicon wafer in the solar cell production as claimed in claim 1, wherein: the mounting bracket (47) is in an inverted U-shaped structure, and the lower end of the mounting bracket (47) is connected with the upper ends of the left and right middle side plates (3) respectively.
CN202011455962.8A 2020-12-10 2020-12-10 Automatic wafer loading and unloading device for silicon wafer detection in solar cell production Active CN112563374B (en)

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