CN112525081A - Measuring method based on laser displacement - Google Patents
Measuring method based on laser displacement Download PDFInfo
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- CN112525081A CN112525081A CN202011279819.8A CN202011279819A CN112525081A CN 112525081 A CN112525081 A CN 112525081A CN 202011279819 A CN202011279819 A CN 202011279819A CN 112525081 A CN112525081 A CN 112525081A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention relates to the technical field of measurement, in particular to a measurement method based on laser displacement. Comprises a one-dimensional laser displacement sensor internally provided with a CCD linear camera, the one-dimensional laser displacement sensor is suspended above a platform to be measured or a workpiece to be measured, laser is emitted to vertically irradiate the upper surface of the platform to be measured to form an irradiation point, the platform to be measured and/or the one-dimensional laser displacement sensor continuously displace in the motion plane of the platform to be measured, the distance data of the irradiation point of the platform to be measured and the one-dimensional laser displacement sensor is calculated by receiving the laser scattered by the surface of the platform to be measured, the running parallelism of the motion platform to be measured or the warping degree of the workpiece to be measured can be obtained by processing and calculating the distance data, the changes of the position, the displacement and the like of the measured object can be measured in a non-contact and accurate mode, the device has the advantages of being high in measuring accuracy, low in price, mature in technology, simple and convenient to operate and the like, and the detection requirements of most users on low cost and high detection accuracy are met.
Description
Technical Field
The invention relates to the technical field of measurement, in particular to a measurement method based on laser displacement.
Background
The optical measurement method can realize non-contact, long-distance and non-consumption detection of various machines, platforms and instruments, but due to the precision and manufacture of the optical instruments, the conventional optical instruments are expensive, and the price of equipment such as laser interferometers, optical profile detectors and the like is between 20 and 30 ten thousands.
Many industrial manufacturing requirements, such as parallelism of mechanical motion, are usually measured using laser interferometers, and their high price makes many automated equipment manufacturing companies unable to obtain good measurements, and the existing manual inspection does not meet the requirement of inspection accuracy.
The warpage measuring mode of the existing machined part is generally to measure by manually utilizing a feeler gauge, so that human errors are easily caused, the detection accuracy and efficiency are low, and the risk of scratching the surface of the machined part is increased.
Disclosure of Invention
The invention aims to provide a measuring method based on laser displacement, and the technical scheme provided by the invention provides a measuring method which utilizes a one-dimensional laser displacement sensor to realize the running parallelism of detection equipment and the warping degree of a product and mainly uses the laser displacement sensor.
In order to solve the technical problem, the invention provides a measuring method based on laser displacement, a measuring device comprises a one-dimensional laser displacement sensor with a CCD linear camera inside, and the measuring steps are as follows:
s100: and suspending the one-dimensional laser displacement sensor above the moving platform to be detected, wherein the one-dimensional laser displacement sensor emits laser to vertically irradiate the upper surface of the moving platform to be detected to form an irradiation point.
S200: the motion platform to be detected and/or the one-dimensional laser displacement sensor continuously generate displacement in a motion plane of the motion platform to be detected, the CCD linear camera receives laser scattered by an irradiation point on the surface of the motion platform to be detected according to a set time interval, and the distances S1, S2, S3, … … and SN between the one-dimensional laser displacement sensor and the motion platform to be detected are calculated;
s300: fitting the obtained distance values to obtain a regression line equation through a least square method, then calculating the distances from all the irradiation points on the surface of the motion platform to be measured to the regression line equation, and finding out the points farthest from the regression line equation on the upper side and the lower side of the regression line equation respectively, wherein the sum of the distances between the two points and the regression line equation is the running parallelism of the motion platform to be measured.
Preferably, the measuring device further includes a detection gauge block, in step S100, the detection gauge block is placed on the moving platform to be measured, and the one-dimensional laser displacement sensor emits laser to vertically irradiate on the upper surface of the detection gauge block to form an irradiation point.
Preferably, the precision of the detection gauge block is higher than that of the motion platform to be detected by one grade.
Preferably, the warp measuring method based on the measuring method is used for detecting the warp of the workpiece, the measuring device further comprises an XY axis motion platform, and the motion platform to be measured is replaced by the workpiece to be measured; the measurement steps are as follows:
in step S100, a one-dimensional laser displacement sensor is fixed on an XY axis motion platform, and a workpiece to be measured is horizontally and statically placed below the one-dimensional laser displacement sensor;
in step S200, starting the XY axis motion platform to move the one-dimensional laser displacement sensor above the workpiece to be measured, taking nine points a1-a9 from the surface of the workpiece to be measured in a shape like a Chinese character 'tian', receiving laser scattered by the surface of the workpiece to be measured by the CCD linear camera, and sequentially calculating the distance between the one-dimensional laser displacement sensor and each point to obtain the height values of the nine points a1-a 9;
the original step S300 is replaced by: every 3 points can be connected into a line, 8 lines are formed, the height values of 3 points of the 8 lines are sequentially substituted into B, C, D of a formula of 'warping degree |2 × C-B-D |', 8 warping degree results are obtained through calculation, and the result screened out with the largest warping degree is the warping degree of the workpiece to be measured.
From the above, the following beneficial effects can be obtained by applying the invention: the one-dimensional laser displacement sensor is suspended above the platform to be detected or the workpiece to be detected, laser is emitted to vertically irradiate the upper surface of the platform to be detected to form an irradiation point, displacement continuously occurs between the platform to be detected and/or the one-dimensional laser displacement sensor in a motion plane of the platform to be detected, laser scattered on the surface of the platform to be detected is received, distance data of the irradiation point of the platform to be detected and the one-dimensional laser displacement sensor is calculated, the running parallelism of the motion platform to be detected or the warping degree of the workpiece to be detected is obtained by processing and calculating the distance data, changes of the position, the displacement and the like of the measured object can be measured in a non-contact and accurate mode, the method has the advantages of being high in measurement accuracy, low in price, mature in technology, simple and convenient.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments of the present invention or the prior art will be briefly described below. It is obvious that the drawings in the following description are only some embodiments of the invention, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.
Fig. 1 is a flow chart of a laser displacement-based measurement method according to embodiment 1 of the present invention;
fig. 2 is a flow chart of a warp degree measuring method in embodiment 2 of the present invention;
fig. 3 is a schematic point drawing of a warp degree measuring method in embodiment 2 of the present invention;
fig. 4 is a schematic view of warp calculation in embodiment 2 of the present invention.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
The embodiment provides a measuring method based on laser displacement, which is used for detecting the parallelism of a moving platform.
The laser displacement sensor is a novel measuring instrument consisting of a laser, a laser detector and a measuring circuit, and can accurately measure the changes of the position, the displacement and the like of a measured object in a non-contact manner. The one-dimensional laser displacement sensor has the advantages of high precision, low price, mature technology and the like.
The working principle of the laser displacement sensor is as follows: the laser emitter emits visible red laser to the surface of an object to be detected through the lens, the laser scattered by the surface of the object passes through the receiver lens and is received by the internal CCD linear camera, and the CCD linear camera can 'see' the light spot at different angles according to different distances. Based on this angle and the known distance between the laser lens and the camera, the digital signal processor can calculate the distance between the sensor and the object to be measured.
As shown in fig. 1, the measurement steps are as follows:
s100: suspending a one-dimensional laser displacement sensor above a moving platform to be measured, wherein the one-dimensional laser displacement sensor emits laser to vertically irradiate the upper surface of the moving platform to be measured to form an irradiation point;
s200: continuously generating displacement between the motion platform to be detected and/or the one-dimensional laser displacement sensor in the motion plane of the motion platform to be detected, receiving laser scattered by an irradiation point on the surface of the motion platform to be detected by the CCD linear camera according to a set time interval, and calculating the distances S1, S2, S3, … … and SN between the one-dimensional laser displacement sensor and the motion platform to be detected;
s300: fitting the obtained distance value to obtain a regression line equation by a least square method, then calculating the distances from all the irradiation points on the surface of the motion platform to be measured to the regression line, respectively finding out the points farthest away from the regression line on the upper side and the lower side of the regression line, wherein the sum of the distances from the points to the regression line is the running parallelism of the motion platform to be measured.
The embodiment provides an operation parallelism measuring method based on the measuring method, which comprises the following measuring steps:
step 1, placing a detection gauge block on a motion platform to be detected, suspending the one-dimensional laser displacement sensor above the motion platform to be detected, and emitting laser to vertically irradiate the upper surface of the detection gauge block to form an irradiation point by the one-dimensional laser displacement sensor.
The method comprises the steps of placing a detection gauge block on a motion platform to be detected, fixing a one-dimensional laser displacement sensor above the motion platform to be detected, adjusting the position of the one-dimensional laser displacement sensor to enable a laser lens to vertically irradiate the upper surface of the detection gauge block, enabling laser emitted by the one-dimensional laser displacement sensor to vertically irradiate the starting point position of the detection gauge block, and forming a red irradiation point on the surface of the detection gauge block.
Step 2, starting the motion platform to be detected to enable the detection gauge block to continuously displace, receiving laser scattered by an irradiation point on the surface of the detection gauge block by the CCD linear camera according to a set time interval, and calculating the distances S1, S2, S3, S4, … … and SN between the one-dimensional laser displacement sensor and the surface of the detection gauge block;
the motion platform to be detected is started to enable the detection gauge block to continuously generate displacement, the one-dimensional laser displacement sensor continuously emits laser to irradiate the upper surface of the detection gauge block in the period, and along with the displacement of the detection gauge block, irradiation points of the laser are located at different positions of the upper surface of the detection gauge block. During the period from the start to the end of the motion platform to be detected, the CCD linear camera in the one-dimensional laser displacement sensor receives laser scattered by the irradiation point on the surface of the detection gauge block according to a set time interval, and the distance values S1, S2, S3, S4, … … and SN between the one-dimensional laser displacement sensor and the surface of the detection gauge block are calculated through the digital signal processor.
And 3, fitting the obtained distance numerical values to obtain a regression line equation through a least square method, then solving the distances from all the irradiation points on the surface of the detection gauge block to the regression line, respectively finding out the points farthest away from the regression line on the upper side and the lower side of the regression line, wherein the sum of the distances from the two points to the regression line is the running parallelism of the motion platform to be detected.
And (3) fitting the distance values S1, S2, S3, S4, … … and SN of each measuring irradiation point on the surfaces of the one-dimensional laser displacement sensor and the detection gauge block obtained in the step (2) by a least square method to obtain a regression linear equation, wherein in the moving process of the motion platform to be detected, the displacement variation quantity of the one-dimensional laser displacement sensor relative to the detection gauge block is measured, and the maximum value of the displacement variation quantity is the parallelism of the motion platform to be detected.
Further, according to the distance values S1, S2, S3, S4, … … and SN of the one-dimensional laser displacement sensor and each measured irradiation point on the surface of the detection gauge block obtained in the step 2, the distances from all the irradiation points to the regression line are calculated, the points farthest from the regression line are found out on the upper side and the lower side of the regression line respectively, and the sum of the distances from the two points to the regression line is the running parallelism of the motion platform to be measured.
The precision of the detection gauge block is higher than that of the motion platform to be detected by one grade. The measuring precision of the motion platform to be measured is 0.01mm grade, and the precision of the detection gauge block needs to reach 0.005mm precision.
According to the parallelism measuring method, the one-dimensional laser displacement sensor and the detection gauge block are arranged, the running parallelism of the moving platform can be accurately detected, changes such as the displacement of the moved platform can be accurately measured in a non-contact mode, and the parallelism measuring method has the advantages of being low in cost, high in measuring accuracy and simple and convenient to operate.
Example 2
The present embodiment provides a warpage measuring method based on the laser displacement measuring method described in embodiment 1, which is used for measuring the warpage of a workpiece to be measured, and a measuring device of the method includes a one-dimensional laser displacement sensor with a CCD linear camera mounted therein and a platform capable of moving along XY axes, as shown in fig. 2, the measuring steps are as follows:
a100: fixing a one-dimensional laser displacement sensor on an XY-axis motion platform, and horizontally and statically placing a workpiece to be measured below the one-dimensional laser displacement sensor;
the XY-axis motion platform can move on a horizontal plane along an X axis and a Y axis, the one-dimensional laser displacement sensor is fixed on the XY-axis motion platform, the XY-axis motion platform drives the one-dimensional laser displacement sensor to move on the horizontal plane, a workpiece to be measured is horizontally placed below the one-dimensional laser displacement sensor in a static mode, and then the one-dimensional laser displacement sensor moves horizontally above the workpiece to be measured.
A200: starting an XY-axis motion platform to enable the one-dimensional laser displacement sensor to move above a workpiece to be measured, taking nine points A1-A9 when the surface of the workpiece to be measured is in a 'tian' -shape, receiving laser scattered by the surface of the workpiece to be measured through the CCD linear camera, and sequentially calculating the distance between the one-dimensional laser displacement sensor and each point to obtain height values of the nine points A1-A9;
starting the XY-axis motion platform, enabling the one-dimensional laser displacement sensor to move above the workpiece to be measured in a 'field' shape through the XY-axis motion platform, taking nine points A1-A9 on the surface of the workpiece to be measured, receiving laser scattered by the surface of the workpiece to be measured through the CCD linear camera, sequentially calculating the distance between the one-dimensional laser displacement sensor and each point, and obtaining the height values of the nine points A1-A9.
A300: every 3 points can be connected into a line to form 8 lines (A1-A2-A3, A4-A5-A6, A7-A8-A9, A1-A4-A7, A2-A5-A8, A3-A6-A9, A1-A5-A9 and A3-A5-A7), the heights of the 3 points of the 8 lines are sequentially substituted into B, C, D of a formula of 'warping degree |2 × C-B-D |', 8 warping degree results are obtained through calculation, and the result of the maximum warping degree is the warping degree of the workpiece to be tested.
As shown in fig. 3-4, the three points can be connected into a line through 3 points, and a total of 8 straight lines can be connected, namely a1-a2-A3, a4-A5-A6, a7-A8-a9, a1-a4-a7, a2-A5-A8, A3-A6-a9, a1-A5-a9, and A3-A5-a7, wherein, as shown in fig. 4, assuming that there are three points BCE on an ideal straight line, the BCE satisfies the following equation: since B-C-E, E-2C-B, and warpage | E-D | 2C-B-D |.
And sequentially substituting the heights of 3 points of 8 lines into B, C, D of a formula of 'warpage ═ 2 × C-B-D |', calculating to obtain 8 warpage results, and screening out the result with the largest warpage, namely the warpage of the workpiece to be measured.
According to the parallelism measuring method, the one-dimensional laser displacement sensor and the XY-axis motion platform are arranged, the warping degree of the workpiece to be measured is accurately detected, the position change of the workpiece can be accurately measured in a non-contact mode, and the parallelism measuring method has the advantages of being high in measuring accuracy, low in price, mature in technology, simple and convenient to operate and the like.
The above-described embodiments do not limit the scope of the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the above-described embodiments should be included in the protection scope of the technical solution.
Claims (4)
1. A measuring method based on laser displacement is used for detecting the parallelism of a moving platform and is characterized in that: the measuring device comprises a one-dimensional laser displacement sensor internally provided with a CCD linear camera, and the measuring steps are as follows:
s100: suspending the one-dimensional laser displacement sensor above a moving platform to be measured, wherein the one-dimensional laser displacement sensor emits laser to vertically irradiate the upper surface of the moving platform to be measured to form an irradiation point;
s200: the motion platform to be detected and/or the one-dimensional laser displacement sensor continuously generate displacement in a motion plane of the motion platform to be detected, the CCD linear camera receives laser scattered by an irradiation point on the surface of the motion platform to be detected according to a set time interval, and the distances S1, S2, S3, … … and SN between the one-dimensional laser displacement sensor and the motion platform to be detected are calculated;
s300: fitting the obtained distance values to obtain a regression line equation by a least square method, then calculating the distances from all the irradiation points on the surface of the motion platform to be measured to the regression line, respectively finding out the points farthest away from the regression line on the upper side and the lower side of the regression line, wherein the sum of the distances from the two points to the regression line is the running parallelism of the motion platform to be measured.
2. A running parallelism measuring method based on the measuring method of claim 1, characterized in that: the measuring device also comprises a detection gauge block;
in step S100, the detection gauge block is placed on a movement platform to be detected, and the one-dimensional laser displacement sensor emits laser light to vertically irradiate the upper surface of the detection gauge block to form an irradiation point.
3. The running parallelism measuring method according to claim 2, characterized in that: the precision of the detection gauge block is higher than that of the motion platform to be detected by one grade.
4. A warp measuring method for detecting the warp of a workpiece based on the measuring method according to claim 1, characterized in that: the measuring device also comprises an XY axis motion platform, and the motion platform to be measured is replaced by a workpiece to be measured; the measurement steps are as follows:
in step S100, a one-dimensional laser displacement sensor is fixed on an XY axis motion platform, and a workpiece to be measured is horizontally and statically placed below the one-dimensional laser displacement sensor;
in step S200, starting the XY axis motion platform to move the one-dimensional laser displacement sensor above the workpiece to be measured, taking nine points a1-a9 from the surface of the workpiece to be measured in a shape like a Chinese character 'tian', receiving laser scattered by the surface of the workpiece to be measured by the CCD linear camera, and sequentially calculating the distance between the one-dimensional laser displacement sensor and each point to obtain the height values of the nine points a1-a 9;
the original step S300 is replaced by: every 3 points can be connected into a line, 8 lines are formed, the height values of 3 points of the 8 lines are sequentially substituted into B, C, D of a formula of 'warping degree |2 × C-B-D |', 8 warping degree results are obtained through calculation, and the result screened out with the largest warping degree is the warping degree of the workpiece to be measured.
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Cited By (4)
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| CN114353676A (en) * | 2021-12-07 | 2022-04-15 | 江苏华创微系统有限公司 | Automatic measurement device for height of surface-mounted chip and test method thereof |
| CN114608471A (en) * | 2022-01-27 | 2022-06-10 | 广东工业大学 | Curved surface scanning and measuring device and scanning and measuring method thereof |
| CN116592795A (en) * | 2023-07-14 | 2023-08-15 | 浙江至格科技有限公司 | AR lens parallelism measuring method and system |
| CN116772783A (en) * | 2023-08-22 | 2023-09-19 | 青岛大东自动化科技有限公司 | Method for measuring straightness and parallelism of parts |
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