CN106556360A - A kind of step segment difference On-line Measuring Method - Google Patents
A kind of step segment difference On-line Measuring Method Download PDFInfo
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- CN106556360A CN106556360A CN201510615980.0A CN201510615980A CN106556360A CN 106556360 A CN106556360 A CN 106556360A CN 201510615980 A CN201510615980 A CN 201510615980A CN 106556360 A CN106556360 A CN 106556360A
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Abstract
The invention discloses a kind of step segment difference On-line Measuring Method, wherein, confocal displacement measuring head is arranged on into voice coil motor and is driven on platform, drive platform to drive confocal displacement measuring head to carry out short transverse data scanning measurement using voice coil motor；Voice coil motor is driven into the moving coordinate of platform, the height value of each confocal displacement meter measurement according to default constant spacing correspondence；On secondary meter, this two numerical value is corresponded the surface two-dimensional silhouette curve for drawing out scanned object；Any two points are selected in two-dimensional silhouette data, the confocal displacement meter measurement value difference between point and point is difference in height, and point is range difference with the plane coordinates difference of point, by secondary meter setting, calculates difference in height or stand out.A kind of step segment difference On-line Measuring Method that the present invention is provided, it is possible to achieve non-cpntact measurement, will not scratch sample surfaces, and gauge head will not be because measuring adding up for access times and progress decline.
Description
Technical field
The present invention relates to a kind of detection method, more particularly to a kind of electronics, automobile and other industries precision zero
Part step segment difference On-line Measuring Method.
Background technology
In prior art, step instrument belongs to contact surface topography measuring instrument.Its measuring principle is：
When contact pilotage is gently slipped over along measured surface, as surface has small peak valley to make contact pilotage same what is slided
When, also move up and down along peak valley.The motion conditions of contact pilotage just reflect the situation of surface profile.Pass
The signal of telecommunication of sensor output Jing after measuring bridge exports the displacement for deviateing equilbrium position to contact pilotage and is directly proportional
Amplitude-modulated signal.After amplified and phase depending on rectification, displacement signal can be demodulated out from amplitude-modulated signal,
The slowly varying signal being directly proportional to contact pilotage displacement being amplified.Jing noise filters, waviness again
Wave filter is further filtered off modulating frequency and roughness is surveyed with the factor such as external interference signal and waviness
The impact of amount.At present according to the difference using sensor, contact step height measurement can be divided into inductance type,
3 kinds of piezoelectric type and photo-electric.Inductance type is using inductance displacement sensor as sensing element, measurement essence
Degree is high, signal to noise ratio is high, but processing of circuit is complicated；The displacement sensing element of piezoelectric type is piezoquartz,
Its sensitivity is high, simple structure, but sensor LF-response it is bad, and easily electric leakage cause measurement to miss
Difference；Photo-electric is to receive light flux variations through slit detecting the change of displacement using photoelectric cell
Change.
The shortcoming of step instrument is at present：
1st, due to gauge head with survey part contact cause gauge head deformation and wear and tear, make instrument using one section
After time, certainty of measurement declines；
2 gauge heads can not be made to ensure wearability and rigidity it is very tiny sharp, if gauge head head
Portion's radius of curvature necessarily causes the inclined of measurement data at this more than the radius of microscopic pockets on measured surface
Difference；
3 to make gauge head be unlikely to wear and tear quickly, and the hardness of gauge head is general all very high, therefore is unsuitable for essence
The measurement of close part and soft surface.
If 4 samples place level, measurement result can be adversely effected, and measurement accuracy can be placed
Levelness affects.
In sum, the drawbacks described above for existing for step instrument in prior art, the present invention propose one
Plant the step segment difference On-line Measuring Method different from prior art.
The content of the invention
The technical scheme that the present invention is adopted to solve above-mentioned technical problem is to provide a kind of step segment difference
On-line Measuring Method, wherein：
Confocal displacement measuring head is arranged on voice coil motor to drive on platform, platform band is driven using voice coil motor
Moving confocal displacement measuring head carries out short transverse data scanning measurement；
Voice coil motor is driven into the moving coordinate of platform, according to each confocal position of default constant spacing correspondence
Move the height value of measurement amount；
On secondary meter, this two numerical value is corresponded the surface two dimension wheel for drawing out scanned object
Wide curve；
Any two points are selected in two-dimensional silhouette data, the confocal displacement meter measurement value difference between point and point is
Difference in height, point are range differences with the plane coordinates difference of point, arrange, calculate height by secondary meter
Degree difference or stand out.
Confocal displacement measuring head, voice coil motor are arranged on the detection work of manufacturing and processing equipment by connecting plate
Position above, when sample is moved to below confocal displacement measuring head, is surveyed to confocal displacement meter controller
Amount signal, voice coil motor drive platform to drive confocal displacement measuring head to enter according to default step-length and sweep length
The scanning of row height value is obtained.
The present invention is had the advantages that relative to prior art：
1st, using the gauge head of focusing technology altogether, it is possible to achieve non-cpntact measurement, sample table will not be scratched
Face, gauge head will not be because measuring adding up for access times and progress decline.
2nd, using the gauge head of focusing technology altogether, measurement hot spot minimum can be to 1.8 microns, and plane is divided
Resolution can be to 0.9 micron, than the less step that can be measured in very small region of traditional step instrument hot spot.
3rd, due to voice coil motor small volume, confocal displacement meter small volume, a whole set of instrument conveniently can add
Processing site is downloaded to, online shoulder height measurement in real time is realized.
4th, confocal gauge head is obtained on a line tracking during scanning is driven in voice coil motor
The mass data of more than 100 to 1000, rather than conventional contact step instrument can only beat several to ten
The data of several points are measured.Based on the big measurement on a line tracking, can take advantage of by two
Method eliminates testee and places the measurement error that level is not caused, while big measurement can also be passed through
Meansigma methodss filter the impact of the fineness, roughness on sample surface to measurement result.
Description of the drawings
Fig. 1 is the structural representation of confocal displacement meter.
Fig. 2 is the mounting structure schematic diagram of confocal displacement meter and other instruments.
Fig. 3 is the two-dimensional silhouette curve of traditional step instrument.
Fig. 4 is the two-dimensional silhouette curve of the present invention.
Fig. 5 is the two-dimensional silhouette curve of the present invention.
In figure：
1 confocal 2 voice coil motor of displacement measuring head, 3 connecting plate
4 confocal displacement meter controller, 5 secondary meter, 6 confocal displacement meter optical fiber
Specific embodiment
The invention will be further described with reference to the accompanying drawings and examples.
First relevant technical terms in the present invention are explained：
Confocal displacement meter：Confocal displacement meter is that a kind of new superhigh precision and the non-of ultrastability connect
Tactile optical detector for displacement measuring device, projects the polychromatic light (white) of a beam of broad spectrum by light source, passes through
There is spectral dispersion in dispersion camera lens, form a series of monochromatic light of different wave lengths on an axis, often
One wavelength all corresponds to a distance value to testee.Irradiation light is reflected by body surface,
Filtered by copolymerization Jiao's aperture, only meet the monochromatic light of confocal condition, can be by aperture by spectrum
Instrument is sensed.By calculating the wavelength being sensed, conversion obtains distance value.
Voice coil motor：Voice coil motor (VoiceCoilActuator) is a kind of direct drive of specific form
Galvanic electricity machine, accelerates with simple structure, small volume, high speed, height, responds the characteristic such as fast, its work
Principle is switched on coil (conductor) and is placed on generation power, the size of power and the electricity being applied on coil in magnetic field
Stream is proportional, can realize the fortune in straight line or circular arc direction based on this principle voice coil motor forms of motion
It is dynamic.
The present invention provides a kind of step segment difference On-line Measuring Method and is specially：
Confocal displacement measuring head 1 is connected to the voice coil motor with slide unit to drive on platform, slide unit is used for adjusting
Section probe location is made it in working range, drives platform to drive confocal displacement to measure using voice coil motor
1 carries out short transverse data scanning measurement, voice coil motor is driven the moving coordinate of platform, according to pre-
If constant spacing correspondence each confocal displacement meter measurement height value, on secondary meter 5, by this
Two numerical value, one-to-one corresponding draw out the surface two-dimensional silhouette curve of scanned object, in two-dimensional silhouette number
According to can above select any two points computed altitude difference or stand out.Confocal displacement between point and point is measured
Difference in magnitude is difference in height, and point is range difference with the plane coordinates difference of point, arranged by secondary meter 5,
Calculate final result.
Confocal displacement meter is by usb bus/232 bus and upper machine communication transmission data, confocal displacement
The height value and horizontal position value that meter is collected is passed to upper computer software by communication bus and is analyzed
Process, the point based data for collecting is plotted as one two by regression algorithm by cut scanning analysis software
Dimension contour line, reflects the two dimension change on the surface linear position of scanned object, by host computer
Software analysis process, you can draw the discrepancy in elevation and differential horizontal of needs.Host computer passes through communication bus control
Making confocal displacement meter carries out DATA REASONING, while host computer can arrange measurement parameter by Survey Software
And measurement pattern.
Voice coil motor is connected with the encoder interfaces of confocal displacement meter using encoder and realizes positional value
Must feed back, host computer is using motor driver control voice coil motor motion, motor driver and host computer
Using 232 bus communications, can be with the motion mode of controlled motor using Survey Software, and feedback system.
This device is arranged on above the detection station of manufacturing and processing equipment by connecting plate 3, works as sample
When moving to below online step profiler gauge head, to confocal 4 measurement signal of displacement meter controller, sound
Circle Motor drive platform drives confocal displacement measuring head 1 to carry out height value according to default step-length and sweep length
Scanning is obtained.Any two points or two fragment positions can be set in scan lines, secondary meter meter is allowed
Calculated altitude is poor.
The present invention provides a kind of step segment difference On-line Measuring Method operation principle：
Spectrum peak change, scanned object apparent height in confocal displacement meter real-time monitoring range ability
Change can make confocal displacement sensing to the change of spectrum peak, and confocal displacement meter is by calculating spectrum peak
Changing value calculates the change of actual object apparent height.
Voice coil motor drives platform to drive confocal displacement measuring head 1 to carry out surface profile scanning, voice coil motor
2 interval steps that can arrange more than 1um, voice coil motor slide unit often moves a step-length can be to altogether
47 1 triggers of burnt displacement meter controller, confocal displacement meter have be triggered after measure function,
A trigger is connected to often, confocal displacement meter feeds back the height value of a position at that time.
Thus each height value of confocal displacement meter measurement drives every in platform scanning process with voice coil motor
Individual positional value can be corresponded, and one-to-one two columns value can be depicted as scanned sample surfaces
Two-dimensional silhouette curve, the respective heights value of any two position on contour curve is on two positions
The difference of confocal displacement meter measured value, width value are that voice coil motor slide unit triggering step-length is poor on two positions
Value.
Traditional step instrument:The gathered data on the several points of fixation, calculates the step discrepancy in elevation, sample inclination pair
Measurement result has considerable influence.In addition, being affected larger by sample surface smoothness, roughness.
Step height measurement of the present invention:Obtain more than 100 to 1000 on a line tracking a large amount of
Data, based on the big measurement on a line tracking, can eliminate testee by square law and put
The measurement error that not level is caused is put, while can also filter tested by the meansigma methodss of big measurement
Impact of the fineness, roughness of sample surfaces to measurement result.
Raw measurement data, such as accompanying drawing 4；Measurement data after smoothing, measurement position do average computation：
Such as accompanying drawing 5.
Although the present invention is disclosed as above with preferred embodiment, so which is not limited to the present invention, appoints
What those skilled in the art, without departing from the spirit and scope of the present invention, when a little modification can be made
With it is perfect, therefore protection scope of the present invention is when by being defined that claims are defined.
Claims (2)
1. a kind of step segment difference On-line Measuring Method, it is characterised in that：
Confocal displacement measuring head is arranged on voice coil motor to drive on platform, platform band is driven using voice coil motor
Moving confocal displacement measuring head carries out short transverse data scanning measurement；
Voice coil motor is driven into the moving coordinate of platform, according to each confocal position of default constant spacing correspondence
Move the height value of measurement amount；
On secondary meter, this two numerical value is corresponded the surface two dimension wheel for drawing out scanned object
Wide curve；
Any two points are selected in two-dimensional silhouette data, the confocal displacement meter measurement value difference between point and point is
Difference in height, point are range differences with the plane coordinates difference of point, arrange, calculate height by secondary meter
Degree difference or stand out.
2. a kind of step segment difference On-line Measuring Method as claimed in claim 1, it is characterised in that：
Confocal displacement measuring head, voice coil motor are arranged on the detection work of manufacturing and processing equipment by connecting plate
Position above, when sample is moved to below confocal displacement measuring head, is surveyed to confocal displacement meter controller
Amount signal, voice coil motor drive platform to drive confocal displacement measuring head to enter according to default step-length and sweep length
The scanning of row height value is obtained.
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| CN201510615980.0A CN106556360A (en) | 2015-09-24 | 2015-09-24 | A kind of step segment difference On-line Measuring Method |
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| CN201510615980.0A CN106556360A (en) | 2015-09-24 | 2015-09-24 | A kind of step segment difference On-line Measuring Method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110112079A (en) * | 2019-04-29 | 2019-08-09 | 中国电子科技集团公司第十三研究所 | The etch process parameters evaluation method of step sample block |
| CN112556607A (en) * | 2020-12-09 | 2021-03-26 | 四川航天计量测试研究所 | Non-contact plane roughness measurement system and method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003057553A (en) * | 2001-08-09 | 2003-02-26 | Olympus Optical Co Ltd | Confocal scanning type microscope |
| CN102538687A (en) * | 2010-12-30 | 2012-07-04 | 财团法人工业技术研究院 | Method and device for measuring morphology of moving sample |
| CN102749027A (en) * | 2011-04-18 | 2012-10-24 | 陈亮嘉 | Linear color confocal microscope system |
| CN202885804U (en) * | 2012-11-15 | 2013-04-17 | 东华大学 | Analog measuring platform for texture touch evaluation procedure |
-
2015
- 2015-09-24 CN CN201510615980.0A patent/CN106556360A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003057553A (en) * | 2001-08-09 | 2003-02-26 | Olympus Optical Co Ltd | Confocal scanning type microscope |
| CN102538687A (en) * | 2010-12-30 | 2012-07-04 | 财团法人工业技术研究院 | Method and device for measuring morphology of moving sample |
| CN102749027A (en) * | 2011-04-18 | 2012-10-24 | 陈亮嘉 | Linear color confocal microscope system |
| CN202885804U (en) * | 2012-11-15 | 2013-04-17 | 东华大学 | Analog measuring platform for texture touch evaluation procedure |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110112079A (en) * | 2019-04-29 | 2019-08-09 | 中国电子科技集团公司第十三研究所 | The etch process parameters evaluation method of step sample block |
| CN112556607A (en) * | 2020-12-09 | 2021-03-26 | 四川航天计量测试研究所 | Non-contact plane roughness measurement system and method |
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