CN106840051A - The non-contact measurement apparatus and measuring method of displacement motor platform motion flatness - Google Patents
The non-contact measurement apparatus and measuring method of displacement motor platform motion flatness Download PDFInfo
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- CN106840051A CN106840051A CN201710125859.9A CN201710125859A CN106840051A CN 106840051 A CN106840051 A CN 106840051A CN 201710125859 A CN201710125859 A CN 201710125859A CN 106840051 A CN106840051 A CN 106840051A
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- flatness
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- quadrant detector
- displacement motor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- Length Measuring Devices By Optical Means (AREA)
Abstract
Displacement motor platform motion flatness non-contact measurement apparatus and measuring method, including automatic focus light path structure, the realization of automatic detection algorithm, to displacement motor platform move flatness measurement, the step such as the record of data and fitting.One automatic focus light path is built by laser, 4 quadrant detector, astigmatic lens etc., automatic detection is realized by arithmetic programming.When displacement motor platform starts to move, the amplitude of motor platform up-down vibration in motion process is detected by automatic checkout system, record and draw Oscillation Amplitude of the displacement platform in diverse location.Simple and practical, simple operation of the invention, realizes the measurement for moving flatness to displacement motor platform in the case of contactless, with application value very high.
Description
Technical field
It is a kind of displacement motor platform motion flatness the present invention relates to the motion roughness measurement of displacement motor platform
Non-contact measurement apparatus and measuring method.
Background technology
In recent years, continuing to develop with science and technology, in high-accuracy machine-building and processing, high-precision optical and electronic component
Manufacture, high-precision optical measurement, high accuracy 3D printing manufacture, and semiconductor manufacturing industry etc., the requirement to precision is more next
It is higher, and in the precision manufactureing and processing in these fields, displacement motor platform is a kind of a kind of very conventional processing platform,
Therefore, the error measure and elimination for moving flatness in itself to displacement motor platform also become increasingly urgent, currently employed
Amesdial measuring method is contact type measurement, and its precision proposes one kind far from the demand for meeting high-accuracy measurement, the present invention
Displacement motor platform moves the contactless measurement apparatus and measuring method of flatness, and its certainty of measurement is high, more than 100nm,
With application value very high.
The content of the invention
Non-contact measurement apparatus and survey it is an object of the invention to provide a kind of displacement motor platform motion flatness
Amount method.Up-down vibration fluctuating of the displacement motor platform in motion process causes to reflex to the hot spot shape on 4 quadrant detector
Shape changes, and by the treatment to 4 quadrant detector signal, obtains the now direction of vibration of motor movement platform and shakes
Dynamic amplitude, not with displacement motor contact with platform in the case of motion flatness to displacement motor platform in motion process enter
Row measurement.
To reach above-mentioned purpose, technical solution of the invention is：
A kind of displacement motor platform moves the non-contact measurement apparatus of flatness, and its feature is, including computer, control
It is device processed, laser, beam-expanding collimation device, 1/2 wave plate, 4 quadrant detector, astigmatic lens, polarization splitting prism, quarter wave plate, anti-
Mirror, the focusing objective len being fixed on piezoelectric ceramics are penetrated, and for the two-dimensional motor displacement platform of aluminium film sample placement；
The output end of the 4 quadrant detector is connected with the input of the controller, the output end difference of the controller
It is connected with piezoelectric ceramics and two-dimensional motor displacement platform, and the controller is communicated with the computer.
The distance between described astigmatic lens and 4 quadrant detector m meet following condition,
M=2fc
In formula, fcIt is the focal length of astigmatic lens.
Described laser sends the feux rouges that wavelength is 658nm.
The measuring method that displacement motor platform moves flatness, its feature are carried out using described non-contact measurement apparatus
It is that the method is comprised the following steps：
Step 1) last layer aluminium film is plated on the glass substrate with magnetically controlled sputter method as aluminium film sample；
Step 2) design 4 quadrant detector circuit：
A) four quadrants of 4 quadrant detector are set to A, B, C, D successively, using current-to-voltage convertor by four as
The current signal that limit is collected is converted to voltage signal, if measuring four magnitude of voltage of quadrant respectively VA、VB、VC、VD；
B) using adder, subtracter and divider, focusing error voltage signal FES is calculated：
C) by the focusing error voltage signal incoming controllers of FES；
Step 3) regulation piezoelectric ceramics and aluminium film sample distance, even if aluminium film sample surfaces from focusing objective len it is near burnt to
It is remote burnt mobile, four quadrant magnitudes of voltage of piezoelectric ceramics each position are measured by 4 quadrant detector, calculate and record everybody
Corresponding focusing error voltage signal FES is put, and S curve is depicted as according to FES values；
Step 4) FES values according to corresponding to the intermediate value of the range of linearity of S curve are used as a reference value SP；
Step 5) Digital PID Controller algorithm is utilized,
Wherein, e (k) is input deviation, e (k)=SP-PV；U (k) is piezoelectric ceramics on output variable, i.e. focusing objective len
Stroke；Kp、Ti、TdRespectively proportionality coefficient, the time of integration and derivative time；T is the sampling period, it then follows nyquist sampling
Law, sets sample frequency and is more than more than the twice of signal frequency；
Step 6) controller control two-dimensional motor displacement platform movement, by 4 quadrant detector four quadrant electricity this moment
Pressure value, calculates and records corresponding focusing error voltage signal FES as |input paramete PV；
Step 7) scale parameter K is adjusted successivelyp, integral parameter TiWith differential parameter Td, make e (k) as close possible to 0；
Step 8) controller control two-dimensional motor displacement platform movement, the stroke of piezoelectric ceramics is calculated in real time, meanwhile, control
Device processed transmits to computer, computer the stroke of two-dimensional motor displacement platform current location and corresponding piezoelectric ceramics in the lump
Graphic plotting is carried out according to two-dimensional motor displacement platform shift position and stroke, and image is entered into line using least square method
Property fitting, obtain the motion flatness curve map of two-dimensional motor displacement platform.
The method of astigmatism principle that the present invention focuses on saturating object lens, astigmatic lens and 4 quadrant detector composition is as follows：Using imaging
Formula can be obtained
Wherein, a1And b1The respectively object distance and image distance of focusing objective len, a2And b2The respectively object distance and picture of astigmatic lens
Away from f0And fcThe respectively focal length of focusing objective len and astigmatic lens.
If half axial length of the hot spot on 4 quadrant detector in x-axis and y-axis direction is respectively RxAnd Ry, by geometrical relationship
Can obtain
Rx/Rc=(m-b2)/b2 (3)
Ry/Rc=(a2-m)/a2 (4)
Rc=Roa2/b1 (5)
Wherein RcIt is the radius of astigmatic lens, m is the distance between astigmatic lens and 4 quadrant detector.
Formula (1) (2) (5) is brought into formula (3) and (4), R can be solvedxAnd Ry：
Wherein l is the distance between focusing objective len and astigmatic lens, RoIt is the radius of focusing objective len.
When focus of the reflected sample surface in focusing objective len, a1=f0, now the hot spot on 4 quadrant detector is circle light
Spot, i.e. Rx=Ry, formula (6) and (7) are substituted into can be in the hope of
M=2fc (8)
Can obtain the distance between astigmatic lens and 4 quadrant detector m.Value according to the m and l being calculated is set
4 quadrant detector and astigmatic lens and the distance between astigmatic lens and focusing objective len.
Technique effect of the invention is as follows：
Using optical method, by measurement motor displacement platform four-quadrant caused by up-down vibration rises and falls in motion process
The change of the light spot shape on limit detector, the treatment to 4 quadrant detector signal obtains shaking for now motor movement platform
Dynamic direction and Oscillation Amplitude, not with displacement motor contact with platform in the case of to displacement motor platform in motion process
Flatness is measured.
Its advantage is：
1) non-contact measurement.
2) certainty of measurement is very high, can reach below 100nm.
3) it is with low cost, it is simple to operate.
Brief description of the drawings
Fig. 1 is the schematic diagram of the non-contact measurement apparatus of displacement motor platform motion flatness of the present invention
Fig. 2 is method of astigmatism schematic diagram of the invention
Fig. 3 is the hot spot schematic diagram on 4 quadrant detector of the invention
Fig. 4 is 4 quadrant detector circuit diagram of the invention
Fig. 5 is program flow diagram of the invention
Fig. 6 is that PZT of the invention sets curve image
Fig. 7 is S curve image of the present invention
Fig. 8 is the data image before present invention fitting
Fig. 9 is the displacement motor platform flatness image after present invention fitting
In figure：1- computers, 2- controllers, 3- laser (658nm), 4- beam-expanding collimation devices, 5-1/2 wave plates, 6- four-quadrants
Detector, 7- astigmatic lenses, 8- polarization splitting prisms, 9-1/4 wave plates, 10- speculums, 11- focusing objective lens, 12- piezoelectric ceramics,
13- aluminium film samples, 14- two-dimensional motor displacement platforms.
Specific embodiment
Below by embodiment and accompanying drawing, the invention will be further described, but should not limit protection model of the invention with this
Enclose.
Embodiment 1：
A kind of displacement motor platform moves the non-contact measurement apparatus of flatness, including computer 1, controller 2, laser
Device 3, beam-expanding collimation device 4,1/2 wave plate 5,4 quadrant detector 6, astigmatic lens 7, polarization splitting prism 8, quarter wave plate 9, reflection
Mirror 10, focusing objective len 11, piezoelectric ceramics 12, aluminium film sample 13, two-dimensional motor displacement platform 14：As shown in figure 1, laser 3 is sent out
Go out the feux rouges that wavelength is 658nm, become directional light by beam-expanding collimation device 4, then in turn through 1/2 wave plate 5, polarization spectro rib
Mirror 8, quarter wave plate 9, reflected mirror 10 incides focusing objective len 11 after reflecting, and finally focuses on reflected sample 13.Laser is passed through
Cross reflected sample 13 to reflect, returned along light path, then reflected by polarization splitting prism 8, four-quadrant is converged to by astigmatic lens 7
On detector 6.In the incoming controller 2 of signal that 4 quadrant detector is collected, controller 2 is assisted with computer 1 by TCP/IP
View is communicated.
Fig. 2 show the saturating object lens 11 of focusing, astigmatic lens 7, and the method for astigmatism schematic diagram that 4 quadrant detector 6 is constituted.
Can be obtained using imaging formula
Wherein, a1And b1The respectively object distance and image distance of focusing objective len 11, a2And b2Respectively the object distance of astigmatic lens 7 and
Image distance, f0=2mm and fc=50mm is respectively the focal length of focusing objective len 11 and astigmatic lens 6.
If half axial length of the hot spot on 4 quadrant detector in x-axis and y-axis direction is respectively RxAnd Ry, by geometrical relationship
Can obtain
Rx/Rc=(m-b2)/b2 (3)
Ry/Rc=(a2-m)/a2 (4)
Rc=Roa2/b1 (5)
Wherein Rc=5mm is the radius of astigmatic lens, and m is the distance between astigmatic lens 7 and 4 quadrant detector 6.
Formula (1) (2) (5) is brought into formula (3) and (4), R can be solvedxAnd Ry：
Wherein l=230mm is the distance between focusing objective len 11 and astigmatic lens 7, Ro=5mm is the half of focusing objective len 11
Footpath.
When focus of the reflected sample surface in focusing objective len 11, a1=f0, now the hot spot on 4 quadrant detector 6 be
Circle hot spot, i.e. Rx=Ry, formula (6) and (7) are substituted into can be in the hope of
M=2fc=100mm (8)
Can obtain the distance between astigmatic lens and 4 quadrant detector m.
Value according to m and l is set between 4 quadrant detector 6 and astigmatic lens 7 and astigmatic lens and focusing objective len 11
Distance.
The measuring method that displacement motor platform moves flatness is carried out using above-mentioned non-contact measurement apparatus：
1. last layer aluminium film is plated on the glass substrate as reflected sample 13 with the method for magnetron sputtering.
2. according to design 4 quadrant detector circuit shown in Fig. 4：
A) four quadrants of 4 quadrant detector are set to A, B, C, D successively.Using current-to-voltage convertor by four as
The current signal that limit is collected is converted to voltage signal, if measuring four magnitude of voltage of quadrant respectively VA、VB、VC、VD。
B) adder is utilized, subtracter, divider, according to
Obtain the voltage signal of focusing error FES.
C) the incoming controller 2 of the signal of the focusing error that will be obtained.
3. programming is carried out according to program flow diagram (as shown in Figure 5)
1) S curve is found：
A) laser reflection on reflected sample surface is incided, by focusing objective len 11 and astigmatic lens 6, in Quadrant detector
A hot spot is showed on device.When the surface of reflected sample 13 be located at focusing objective len 11 focus when, i.e., the B of Fig. 2 points when, in four-quadrant
What is presented on limit detector is circle hot spot, as shown in Fig. 3-B.When the surface of reflected sample 13 is located at nearly Jiao of focusing objective len 11,
I.e. the A of Fig. 2 points when, what is presented on 4 quadrant detector is ellipse light spot, wherein transverse along x-axis, such as Fig. 3-A institutes
Show.When the surface of reflected sample 13 is located at remote Jiao, the i.e. C of Fig. 2 points of focusing objective len 11, presented on 4 quadrant detector
Be ellipse light spot, wherein transverse along y-axis, as shown in Fig. 3-C.When sample is successively near burnt, accurate burnt, remote burnt position
When, the curve that the value of corresponding FES is depicted as can be presented S types, also referred to as S curve.
B) as shown in fig. 6, from 0 to 100um again to 0, interval 100nm changes the flexible of piezoelectric ceramics on focusing objective len successively
Amount, the cycle is set to 1s, the value of corresponding focusing error FES during record piezoelectric ceramics difference stroke, and draws FES curve maps
Picture.
C) displacement motor platform is moved near the focal plane of focusing objective len, vernier focusing object lens and displacement motor platform it
Between distance, observe FES curve images, until S curve (as shown in Figure 7) occur in FES curve images.
2) automatic detection is realized：
A) Digital PID Controller formula is utilized
Carry out algorithm for design and realize Automatic Detection and Control, wherein e (k)=SP-PV, e (k) is input deviation, is worth on the basis of SP,
PV is input variable, and u (k) is output variable.Kp、Ti、TdRespectively proportionality coefficient, the time of integration and derivative time, T are sampling
Cycle.
B) the corresponding FES values 16 of intermediate value of the S curve range of linearity 15 in Fig. 7 are selected as a reference value SP.
C) suitable sampling period T is set, it then follows nyquist sampling law, sample frequency is set more than signal frequency
It is more than twice.
D) the focusing error FES being calculated from 4 quadrant detector data is calculated as |input paramete PV through PID
Output quantity u (k) be set to the stroke of piezoelectric ceramics on focusing objective len.
E) suitable pid parameter is set：First adjust scale parameter KpCoarse adjustment is carried out, then adjusts integral parameter Ti, eliminate static
Error, finally adjusts differential parameter Td, improve the response speed of system.
3) displacement motor platform control system and automatic checkout system are synchronized.Set motor translational speed be
0.1mm/s, movable length is 10mm.
4) when displacement motor platform starts to move, automatic checkout system is started working, and a piezoelectricity is recorded every 10ms
The stroke of ceramics, when displacement motor platform is stopped, stop recording records 10000 data altogether.
5) automated collection systems are set, the piezoelectric ceramics stroke Real-time Collection that controller is recorded is passed back computer, and
Document is set to be preserved.
6) data that will be collected carry out graphic plotting, the data image for being measured, as shown in Figure 8.
7) image is carried out into linear fit using least square method, the cancellation element linearity error that tilting band is come in itself, most
The curve map that displacement motor platform moves flatness is obtained afterwards.As shown in Figure 9.
The data image of measurement is observed, as shown in figure 8, place to be placed with aluminium film sample by displacement motor platform being brought
Linearity error, showed beyond the produced Oscillation Amplitude in motion process of displacement motor platform sheet, therefore curve
One oblique line of bending, linear fit, the linearity error that removal displacement motor platform and sample itself are brought are being carried out to curve
Flatness image of the displacement motor platform in motion process is obtained afterwards, as shown in figure 9, observation displacement motor platform is smooth
Write music line chart as can be seen that displacement motor platform the axle Oscillation Amplitude more than 600nm, the present apparatus is effective, high-precision
Measure the motion flatness of displacement motor platform.
Claims (4)
1. a kind of displacement motor platform moves the non-contact measurement apparatus of flatness, it is characterised in that including computer (1),
Controller (2), laser (3), beam-expanding collimation device (4), 1/2 wave plate (5), 4 quadrant detector (6), astigmatic lens (7), polarization
Amici prism (8), quarter wave plate (9), speculum (10), the focusing objective len (11) that is fixed on piezoelectric ceramics (12), and supply aluminium
The two-dimensional motor displacement platform (14) that membrane sample (13) is placed；
The output end of the 4 quadrant detector (6) is connected with the input of the controller (2), the output of the controller (2)
End is connected with piezoelectric ceramics (12) and two-dimensional motor displacement platform (14) respectively, and the controller (2) enters with the computer (1)
Row communication.
2. displacement motor platform according to claim 1 moves the non-contact measurement apparatus of flatness, it is characterised in that
The distance between described astigmatic lens (7) and 4 quadrant detector (6) m meet following condition,
M=2fc
In formula, fcIt is the focal length of astigmatic lens (6).
3. displacement motor platform according to claim 1 moves the non-contact measurement apparatus of flatness, it is characterised in that
Described laser (3) sends the feux rouges that wavelength is 658nm.
4. the survey that displacement motor platform moves flatness is carried out using claim 1-3 any described non-contact measurement apparatus
Amount method, it is characterised in that the method is comprised the following steps：
Step 1) last layer aluminium film is plated on the glass substrate with magnetically controlled sputter method as aluminium film sample (13)；
Step 2) design 4 quadrant detector circuit：
A) four quadrants of 4 quadrant detector are set to A, B, C, D successively, are adopted four quadrants using current-to-voltage convertor
The current signal for collecting is converted to voltage signal, if measuring four magnitude of voltage of quadrant respectively VA、VB、VC、VD；
B) using adder, subtracter and divider, focusing error voltage signal FES is calculated：
C) by the incoming controllers of focusing error voltage signal FES (2)；
Step 3) regulation piezoelectric ceramics (12) and aluminium film sample (13) distance, even if aluminium film sample (13) surface is from focusing objective len
(11) nearly Jiao measures four quadrant voltages of piezoelectric ceramics (12) each position by 4 quadrant detector to remote burnt mobile
Value, calculates and records the corresponding focusing error voltage signal FES of each position, and be depicted as S curve according to FES values；
Step 4) FES values according to corresponding to the intermediate value of the range of linearity of S curve are used as a reference value SP；
Step 5) Digital PID Controller algorithm is utilized,
Wherein, e (k) is input deviation, e (k)=SP-PV；U (k) is the flexible of piezoelectric ceramics on output variable, i.e. focusing objective len
Amount；Kp、Ti、TdRespectively proportionality coefficient, the time of integration and derivative time；T is the sampling period, it then follows nyquist sampling law,
Sample frequency is set to be more than more than the twice of signal frequency；
Step 6) controller control two-dimensional motor displacement platform (14) movement, by 4 quadrant detector four quadrant electricity this moment
Pressure value, calculates and records corresponding focusing error voltage signal FES as |input paramete PV；
Step 7) scale parameter K is adjusted successivelyp, integral parameter TiWith differential parameter Td, make e (k) as close possible to 0；
Step 8) controller control two-dimensional motor displacement platform (14) movement, the stroke of piezoelectric ceramics is calculated in real time, meanwhile, control
Device processed transmits to computer, meter the stroke of two-dimensional motor displacement platform (14) current location and corresponding piezoelectric ceramics in the lump
Calculation machine carries out graphic plotting according to two-dimensional motor displacement platform (14) shift position and stroke, and will be schemed using least square method
As carrying out linear fit, the motion flatness curve map of two-dimensional motor displacement platform (14) is obtained.
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