CN112505063A - Electronic chip crack detection device with flip structure - Google Patents
Electronic chip crack detection device with flip structure Download PDFInfo
- Publication number
- CN112505063A CN112505063A CN202011464724.3A CN202011464724A CN112505063A CN 112505063 A CN112505063 A CN 112505063A CN 202011464724 A CN202011464724 A CN 202011464724A CN 112505063 A CN112505063 A CN 112505063A
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- electronic chip
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/9501—Semiconductor wafers
- G01N21/9505—Wafer internal defects, e.g. microcracks
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
The invention relates to an electronic chip crack detection device with a turnover structure, which comprises an equipment shell and a first gear, wherein a detection box body, a support frame and a first electric slide rail are sequentially arranged at the front end of the inner lower wall of the equipment shell from left to right, a first multi-section hydraulic cylinder is arranged at the upper end of the support frame, the other end of a first spring is connected with a connecting box body, a bearing is connected with the outside of a second gear, a magnifying lens is connected with the outside of a threaded rod, and a first belt conveyor, a second belt conveyor and a third belt conveyor are sequentially arranged at the rear end of the inner lower wall of the equipment shell from left to right, and the electronic chip crack detection device has the beneficial effects that: this electronic chip crack detection device with flip structure can enlarge the gap on the electronic chip through the magnifying glass to make the crack on the scanning electronic chip that the scanner in the equipment can be clear, prevent that the crack is too little to lead to equipment can't scan the crack and the mistake appears.
Description
Technical Field
The invention relates to the technical field of electronic chip detection, in particular to an electronic chip crack detection device with a turnover structure.
Background
Integrated circuits, or microcircuits, microchips, chips/chips (chips), are a way to miniaturize circuits (including mainly semiconductor devices, also passive components, etc.) in electronics, and are often manufactured on the surface of semiconductor wafers, and after the electronic chips are processed, crack detection devices are required to detect the electronic chips.
The existing crack detection device easily causes the situation that a scanner cannot scan the electronic chip because the crack of the electronic chip is too small when the electronic chip is scanned and detected, thereby causing the problem that the scanning of equipment is influenced by errors.
Disclosure of Invention
The invention aims to provide an electronic chip crack detection device with a turnover structure, which aims to solve the problem that when the conventional crack detection device provided in the background art scans and detects an electronic chip, the gap of the electronic chip is too small, so that a scanner cannot scan the electronic chip easily, and the influence of equipment scanning is wrong.
In order to achieve the purpose, the invention provides the following technical scheme: an electronic chip crack detection device with a turnover structure comprises an equipment shell and a first gear, wherein a detection box body, a support frame and a first electric slide rail are sequentially arranged at the front end of the inner lower wall of the equipment shell from left to right, a photosensitive sensor and a rubber sealing bracket are sequentially arranged in the detection box body from bottom to top, a first multi-section hydraulic cylinder is arranged at the upper end of the support frame, a first spring and a first guide rod are sequentially connected to the other end of the first multi-section hydraulic cylinder from middle to upper and lower sides, the other end of the first spring is connected with a connection box body, a motor is arranged in the connection box body, the first gear is positioned at the upper end of the motor, one side of the first gear is connected with a second gear, the outer part of the second gear is connected with a bearing, the other side of the second gear is connected with a clamping block, and a second electric slide rail is arranged at, and the upper end of the second electric slide rail is connected with a scanner and a threaded rod in sequence from the middle to the left and right sides, the outer part of the threaded rod is connected with a magnifier, the inner lower wall rear end of the equipment shell is sequentially provided with a first belt conveyor, a second belt conveyor and a third belt conveyor from left to right, the upper end of the first belt conveyor is sequentially provided with an electronic chip body and a pushing positioning mechanism from right to left, the inner upper wall of the equipment shell is provided with a third electric slide rail, the lower end of the third electric slide rail is provided with a fourth electric slide rail, the lower end of the fourth electric slide rail is provided with a third multi-section hydraulic cylinder, the lower end of the third multi-section hydraulic cylinder is provided with a sucker clamp, and the inner rear wall of the equipment shell is provided with a light lamp.
Preferably, the size of the photosensitive sensor is consistent with that of the bottom surface of the detection box body, and the detection box body is adhered to the rubber sealing bracket.
Preferably, the connecting box body forms an elastic structure with the first multi-section hydraulic cylinder through the first spring, and the first spring is fixedly connected with the connecting box body.
Preferably, the connecting box body forms a sliding structure with the first multi-section hydraulic cylinder through a first guide rod, and the first guide rod and the connecting box body are welded.
Preferably, the outer surface of the first gear is meshed with the outer surface of the second gear, and the horizontal central axis of the second gear is coincident with the horizontal central axis of the connecting box body.
Preferably, the second gear and the connecting box body form a rotating structure through a bearing, and a welding integrated structure is formed between the second gear and the clamping block.
Preferably, be swing joint between threaded rod and the electronic slide rail of second, and be threaded connection between threaded rod and the magnifying glass to the threaded rod is symmetrical about the axis of scanner.
Preferably, the pushing and positioning mechanism comprises a second multi-section hydraulic cylinder, a second spring, a second guide rod and a push plate, one end of the second multi-section hydraulic cylinder is sequentially connected with the second spring and the second guide rod from the middle to the upper side and the lower side, and the other end of the second spring is connected with the push plate.
Preferably, the push plate and the second multi-section hydraulic cylinder form an elastic structure through a second spring, and the push plate and the second multi-section hydraulic cylinder form a sliding structure through a second guide rod.
Preferably, the sucking disc clamp and the third multi-section hydraulic cylinder form a welding integrated structure through a lifting structure formed between the third multi-section hydraulic cylinder and the fourth electric sliding rail.
Compared with the prior art, the invention has the following beneficial effects:
1. the electronic chip body arranged on the detection box body can be supported through the rubber sealing bracket, and meanwhile, the rubber sealing bracket can enable the connection part between the detection box body and the electronic chip body to be in a sealed state, so that the light irradiated by the light illuminator is prevented from penetrating from the edge, and the detection data of the photosensitive sensor is prevented from being wrong.
2. According to the invention, the clamping effect can be increased when the clamping block clamps the electronic chip body by virtue of the elastic structure formed between the first spring and the first multi-section hydraulic cylinder of the connecting box body, so that the clamping of equipment is prevented from loosening, and meanwhile, the connecting box body is positioned by virtue of the sliding structure formed between the first guide rod and the first multi-section hydraulic cylinder.
3. According to the invention, the motor drives the first gear to rotate, so that the rotating mechanism formed between the bearing and the connecting box body is driven to rotate, and the clamping block is driven to rotate, so that the equipment can drive the electronic chip body to turn over, and the equipment can conveniently scan and detect the double surfaces of the electronic chip body.
4. According to the invention, the height of the magnifier can be adjusted when the threaded rod is rotated through the threaded connection between the magnifier and the threaded rod, so that the distance between the magnifier and the scanner is adjusted, the magnifying effect of the magnifier is adjusted, the scanner can conveniently scan the electronic chip body, and the scanner can identify smaller cracks on the electronic chip body.
5. The push plate can be pushed by the second multi-section hydraulic cylinder so as to push the electronic chip body to be positioned, and meanwhile, the push plate can be buffered by the aid of an elastic structure formed by the second spring and the second multi-section hydraulic cylinder, so that the electronic chip body is prevented from being damaged due to overlarge pressure of the push plate.
Drawings
FIG. 1 is a schematic diagram of a front cross-sectional view of an electronic chip crack detection device with a flip structure according to the present invention;
FIG. 2 is an enlarged schematic view of a crack detection device of an electronic chip with a flip structure shown in FIG. 1;
FIG. 3 is an enlarged schematic view of a crack detection device for an electronic chip with a flip structure shown in FIG. 1 at B;
FIG. 4 is an enlarged schematic structural diagram of a crack detection device for an electronic chip with a flip structure shown in FIG. 1 at C;
fig. 5 is a schematic diagram of an enlarged top view of an electronic chip of the electronic chip crack detection apparatus with a flip structure according to the present invention.
In the figure: 1. an equipment housing; 2. detecting the box body; 3. a support frame; 4. a first electric slide rail; 5. a photosensitive sensor; 6. a rubber seal bracket; 7. a first multi-section hydraulic cylinder; 8. a first spring; 9. a first guide bar; 10. connecting the box body; 11. a motor; 12. a first gear; 13. a second gear; 14. a bearing; 15. a clamping block; 16. a second electric slide rail; 17. a scanner; 18. a threaded rod; 19. a magnifying glass; 20. a first belt conveyor; 21. a second belt conveyor; 22. a third belt conveyor; 23. an electronic chip body; 24. pushing the positioning mechanism; 2401. a second multi-section hydraulic cylinder; 2402. a second spring; 2403. a second guide bar; 2404. pushing the plate; 25. a third electric slide rail; 26. a fourth electric slide rail; 27. a third multi-section hydraulic cylinder; 28. a suction cup clamp; 29. a light illuminator.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing and simplifying the description, and do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus are not to be construed as limiting the present invention, and furthermore, the terms "first", "second", "third", and the like are only used for descriptive purposes and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; they may be directly connected or indirectly connected through an intermediate, and those skilled in the art will understand the specific meaning of the above terms in the present invention in specific situations.
Referring to fig. 1-5, the present invention provides a technical solution: an electronic chip crack detection device with a turnover structure comprises an equipment shell 1 and a first gear 12, wherein the front end of the inner lower wall of the equipment shell 1 is sequentially provided with a detection box body 2, a support frame 3 and a first electric slide rail 4 from left to right, and the inside of the detection box body 2 is sequentially provided with a photosensitive sensor 5 and a rubber sealing bracket 6 from bottom to top, the size of the photosensitive sensor 5 is consistent with that of the bottom surface of the detection box body 2, the detection box body 2 and the rubber sealing bracket 6 are bonded, the electronic chip body 23 placed on the inspection case 2 can be supported by the rubber seal bracket 6, meanwhile, the rubber sealing bracket 6 can enable the connection part between the detection box body 2 and the electronic chip body 23 to be in a sealed state, so that light irradiated by the light illuminator 29 is prevented from penetrating from the edge, and errors in detection data of the photosensitive sensor 5 are caused.
First multisection pneumatic cylinder 7 is installed to the upper end of support frame 3, and the other end of first multisection pneumatic cylinder 7 has connected gradually first spring 8 and first guide arm 9 from middle to upper and lower both sides, connect box 10 and constitute elastic construction between first spring 8 and the first multisection pneumatic cylinder 7, and be fixed connection between first spring 8 and the connection box 10, rely on connection box 10 to increase the centre gripping effect when making grip block 15 carry out the centre gripping to electron chip body 23 through the elastic construction that constitutes between first spring 8 and the first multisection pneumatic cylinder 7, prevent that the equipment centre gripping from becoming flexible, rely on connection box 10 to fix a position connection box 10 through the sliding construction that constitutes between first guide arm 9 and the first multisection pneumatic cylinder 7 simultaneously.
The other end of the first spring 8 is connected with a connecting box body 10, a motor 11 is arranged in the connecting box body 10, the connecting box body 10 forms a sliding structure with the first multi-section hydraulic cylinder 7 through a first guide rod 9, and the first guide rod 9 and the connecting box body 10 are welded, the first gear 12 is positioned at the upper end of the motor 11, and one side of the first gear 12 is connected with a second gear 13, the outer surface of the first gear 12 is engaged with the outer surface of the second gear 13, and the horizontal central axis of the second gear 13 coincides with the horizontal central axis of the connection box 10, the first gear 12 is rotated by the motor 11, thereby rotating the rotary mechanism formed by the bearing 14 and the connecting box 10, and then drive grip block 15 and rotate to make equipment can drive electronic chip body 23 upset, the equipment of being convenient for scans the two-sided detection of electronic chip body 23.
The external of the second gear 13 is connected with a bearing 14, the other side of the second gear 13 is connected with a clamping block 15, the second gear 13 forms a rotating structure with the connecting box body 10 through the bearing 14, a welding integrated structure is formed between the second gear 13 and the clamping block 15, the upper end of the first electric slide rail 4 is provided with a second electric slide rail 16, the upper end of the second electric slide rail 16 is sequentially connected with a scanner 17 and a threaded rod 18 from the middle to the left and the right sides, the external of the threaded rod 18 is connected with a magnifier 19, the threaded rod 18 is movably connected with the second electric slide rail 16, the threaded rod 18 is in threaded connection with the magnifier 19, the threaded rod 18 is symmetrical about the central axis of the scanner 17, the height of the magnifier 19 can be adjusted when the threaded rod 18 is rotated through the threaded connection of the magnifier 19 and the threaded rod 18, so as to adjust the distance between the magnifier 19, the amplification effect of the magnifier 19 is adjusted, so that the scanner 17 can scan the electronic chip body 23 conveniently, and the scanner 17 can identify smaller cracks on the electronic chip body 23.
A first belt conveyor 20, a second belt conveyor 21 and a third belt conveyor 22 are sequentially arranged at the rear end of the inner lower wall of the equipment shell 1 from left to right, an electronic chip body 23 and a pushing and positioning mechanism 24 are sequentially arranged at the upper end of the first belt conveyor 20 from right to left, the pushing and positioning mechanism 24 comprises a second multi-section hydraulic cylinder 2401, a second spring 2402, a second guide rod 2403 and a push plate 2404, one end of the second multi-section hydraulic cylinder 2401 is sequentially connected with the second spring 2402 and the second guide rod 2403 from the middle to the upper and lower sides, the other end of the second spring 2402 is connected with the push plate 2404, the push plate 2404 forms an elastic structure with the second multi-section hydraulic cylinder 2401 through the second spring 2402, the push plate 2404 forms a sliding structure with the second multi-section hydraulic cylinder 2401 through the second guide rod 2403, the push plate 2404 can be pushed by the second multi-section hydraulic cylinder 2401, so as to push the electronic chip body 23 to, meanwhile, the push plate 2404 can be buffered through an elastic structure formed between the second spring 2402 and the second multi-section hydraulic cylinder 2401 by virtue of the push plate 2404, so that the electronic chip body 23 is prevented from being damaged due to overlarge pressure of the push plate 2404.
A third electric slide rail 25 is mounted on the upper wall inside the equipment casing 1, a fourth electric slide rail 26 is mounted at the lower end of the third electric slide rail 25, a third multi-section hydraulic cylinder 27 is mounted at the lower end of the fourth electric slide rail 26, a suction cup fixture 28 is mounted at the lower end of the third multi-section hydraulic cylinder 27, the suction cup fixture 28 forms a lifting structure with the fourth electric slide rail 26 through the third multi-section hydraulic cylinder 27, a welding integrated structure is formed between the suction cup fixture 28 and the third multi-section hydraulic cylinder 27, and a light lamp 29 is mounted on the rear wall inside the equipment casing 1.
In summary, when the electronic chip crack detection device with the flip structure is used, the electronic chip body 23 is conveyed by the first belt conveyor 20, the second multi-section hydraulic cylinder 2401 drives the push plate 2404 to push the electronic chip body 23, the electronic chip body 23 is positioned, the push plate 2404 prevents the electronic chip body 23 from being damaged by extrusion of the push plate 2404 through the elastic telescopic structure formed between the second guide rod 2403 and the second spring 2402 and the second multi-section hydraulic cylinder 2401, the suction cup clamp 28 is driven by the third electric slide rail 25, the fourth electric slide rail 26 and the third multi-section hydraulic cylinder 27 to clamp and move the electronic chip body 23, the electronic chip body 23 is placed inside the detection box 2, is supported by the rubber seal bracket 6, is irradiated by strong light through the light illuminator 29, and is used for detecting whether light leakage occurs or not through the photosensitive sensor 5, light leakage indicates that a crack is directly placed on the second belt conveyor 21 for conveying, if no light is leaked, the electronic chip body 23 is conveyed to the clamping block 15 again, the clamping block 15 is pushed to clamp the electronic chip body 23 through the first multi-section hydraulic cylinder 7, clamping looseness is prevented through an elastic telescopic structure formed between the first guide rod 9 and the first spring 8 and the first multi-section hydraulic cylinder 7 by the connecting box body 10, the height of the magnifying glass 19 can be adjusted when the threaded rod 18 is rotated through threaded connection of the magnifying glass 19 and the threaded rod 18, scanning of the scanner 17 can be clear, the first gear 12 and the second gear 13 are driven to rotate through the motor 11, so that the clamping block 15 rotates to perform turnover double-face detection on the electronic chip body 23, and detection accuracy is improved.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (10)
1. An electronic chip crack detection device with a turnover structure comprises a device shell (1) and a first gear (12), and is characterized in that: the device comprises a device shell (1), wherein a detection box body (2), a support frame (3) and a first electric sliding rail (4) are sequentially arranged at the front end of the inner lower wall of the device shell (1) from left to right, a photosensitive sensor (5) and a rubber sealing bracket (6) are sequentially arranged in the detection box body (2) from bottom to top, a first multi-section hydraulic cylinder (7) is installed at the upper end of the support frame (3), a first spring (8) and a first guide rod (9) are sequentially connected to the other end of the first multi-section hydraulic cylinder (7) from the middle to the upper and lower sides, the other end of the first spring (8) is connected with a connecting box body (10), a motor (11) is installed in the connecting box body (10), a first gear (12) is located at the upper end of the motor (11), a second gear (13) is connected to one side of the first gear (12), and a bearing (, and the other side of the second gear (13) is connected with a clamping block (15), a second electric slide rail (16) is installed at the upper end of the first electric slide rail (4), a scanner (17) and a threaded rod (18) are sequentially connected to the upper end of the second electric slide rail (16) from the middle to the left and right sides, a magnifier (19) is connected to the outside of the threaded rod (18), a first belt conveyor (20), a second belt conveyor (21) and a third belt conveyor (22) are sequentially arranged at the rear end of the inner lower wall of the equipment shell (1) from left to right, an electronic chip body (23) and a pushing and positioning mechanism (24) are sequentially arranged at the upper end of the first belt conveyor (20) from right to left, a third electric slide rail (25) is installed at the inner upper wall of the equipment shell (1), and a fourth electric slide rail (26) is installed at the lower end of the third electric slide rail (25), and a third multi-section hydraulic cylinder (27) is installed at the lower end of the fourth electric sliding rail (26), a sucker clamp (28) is installed at the lower end of the third multi-section hydraulic cylinder (27), and a lighting lamp (29) is installed on the inner rear wall of the equipment shell (1).
2. The crack detector of electronic chip with flip structure as claimed in claim 1, wherein: the size of the photosensitive sensor (5) is consistent with that of the bottom surface of the detection box body (2), and the detection box body (2) is bonded with the rubber sealing bracket (6).
3. The crack detector of electronic chip with flip structure as claimed in claim 1, wherein: the connecting box body (10) and the first multi-section hydraulic cylinder (7) form an elastic structure through the first spring (8), and the first spring (8) is fixedly connected with the connecting box body (10).
4. The crack detector of electronic chip with flip structure as claimed in claim 1, wherein: the connecting box body (10) forms a sliding structure with the first multi-section hydraulic cylinder (7) through the first guide rod (9), and the first guide rod (9) and the connecting box body (10) are welded.
5. The crack detector of electronic chip with flip structure as claimed in claim 1, wherein: the outer surface of the first gear (12) is meshed with the outer surface of the second gear (13), and the horizontal central axis of the second gear (13) is coincided with the horizontal central axis of the connecting box body (10).
6. The crack detector of electronic chip with flip structure as claimed in claim 1, wherein: the second gear (13) forms a rotating structure with the connecting box body (10) through a bearing (14), and a welding integrated structure is formed between the second gear (13) and the clamping block (15).
7. The crack detector of electronic chip with flip structure as claimed in claim 1, wherein: be swing joint between threaded rod (18) and the electronic slide rail of second (16), and be threaded connection between threaded rod (18) and magnifying glass (19), and threaded rod (18) are symmetrical about the axis of scanner (17).
8. The crack detector of electronic chip with flip structure as claimed in claim 1, wherein: the pushing and positioning mechanism (24) comprises a second multi-section hydraulic cylinder (2401), a second spring (2402), a second guide rod (2403) and a push plate (2404), one end of the second multi-section hydraulic cylinder (2401) is sequentially connected with the second spring (2402) and the second guide rod (2403) from the middle to the upper side and the lower side, and the other end of the second spring (2402) is connected with the push plate (2404).
9. The crack detector of electronic chip with flip structure as claimed in claim 8, wherein: the push plate (2404) forms an elastic structure with the second multi-section hydraulic cylinder (2401) through a second spring (2402), and the push plate (2404) forms a sliding structure with the second multi-section hydraulic cylinder (2401) through a second guide rod (2403).
10. The crack detector of electronic chip with flip structure as claimed in claim 1, wherein: the sucking disc clamp (28) forms a lifting structure between the third multi-section hydraulic cylinder (27) and the fourth electric sliding rail (26), and a welding integrated structure is formed between the sucking disc clamp (28) and the third multi-section hydraulic cylinder (27).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011464724.3A CN112505063A (en) | 2020-12-14 | 2020-12-14 | Electronic chip crack detection device with flip structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011464724.3A CN112505063A (en) | 2020-12-14 | 2020-12-14 | Electronic chip crack detection device with flip structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112505063A true CN112505063A (en) | 2021-03-16 |
Family
ID=74972157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011464724.3A Withdrawn CN112505063A (en) | 2020-12-14 | 2020-12-14 | Electronic chip crack detection device with flip structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112505063A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113237442A (en) * | 2021-07-12 | 2021-08-10 | 江苏澳芯微电子有限公司 | Chip flatness detection device and detection method |
| CN113828528A (en) * | 2021-09-23 | 2021-12-24 | 深圳市阿龙通讯技术有限公司 | Chip detection device with classification structure for mobile phone intelligent manufacturing |
| CN114371177A (en) * | 2021-12-03 | 2022-04-19 | 桂林芯隆科技有限公司 | Method and device for detecting surface defects of DFB laser chip |
-
2020
- 2020-12-14 CN CN202011464724.3A patent/CN112505063A/en not_active Withdrawn
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113237442A (en) * | 2021-07-12 | 2021-08-10 | 江苏澳芯微电子有限公司 | Chip flatness detection device and detection method |
| CN113237442B (en) * | 2021-07-12 | 2021-09-24 | 江苏澳芯微电子有限公司 | Chip flatness detection device and detection method |
| CN113828528A (en) * | 2021-09-23 | 2021-12-24 | 深圳市阿龙通讯技术有限公司 | Chip detection device with classification structure for mobile phone intelligent manufacturing |
| CN113828528B (en) * | 2021-09-23 | 2023-06-02 | 深圳市阿龙通讯技术有限公司 | Chip detection device with classification structure for intelligent manufacturing of mobile phone |
| CN114371177A (en) * | 2021-12-03 | 2022-04-19 | 桂林芯隆科技有限公司 | Method and device for detecting surface defects of DFB laser chip |
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Application publication date: 20210316 |