CN112260659A - 一种高q值薄膜体声波谐振器及其制备方法 - Google Patents
一种高q值薄膜体声波谐振器及其制备方法 Download PDFInfo
- Publication number
- CN112260659A CN112260659A CN202011152721.6A CN202011152721A CN112260659A CN 112260659 A CN112260659 A CN 112260659A CN 202011152721 A CN202011152721 A CN 202011152721A CN 112260659 A CN112260659 A CN 112260659A
- Authority
- CN
- China
- Prior art keywords
- substrate
- bulk acoustic
- layer
- film bulk
- acoustic resonator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000002360 preparation method Methods 0.000 title abstract description 7
- 239000000758 substrate Substances 0.000 claims abstract description 75
- 239000010410 layer Substances 0.000 claims description 70
- 239000010408 film Substances 0.000 claims description 55
- 238000000034 method Methods 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 17
- 238000003475 lamination Methods 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 9
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 7
- 238000005530 etching Methods 0.000 claims description 7
- 229910052710 silicon Inorganic materials 0.000 claims description 7
- 239000010703 silicon Substances 0.000 claims description 7
- 239000010409 thin film Substances 0.000 claims description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 6
- 239000002356 single layer Substances 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 229910052594 sapphire Inorganic materials 0.000 claims description 3
- 239000010980 sapphire Substances 0.000 claims description 3
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 2
- 238000005516 engineering process Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
- H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
- H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
- H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
- H03H9/173—Air-gaps
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02007—Details of bulk acoustic wave devices
- H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
- H03H2003/021—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks the resonators or networks being of the air-gap type
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
Claims (9)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011152721.6A CN112260659B (zh) | 2020-10-26 | 2020-10-26 | 一种高q值薄膜体声波谐振器及其制备方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202011152721.6A CN112260659B (zh) | 2020-10-26 | 2020-10-26 | 一种高q值薄膜体声波谐振器及其制备方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN112260659A true CN112260659A (zh) | 2021-01-22 |
CN112260659B CN112260659B (zh) | 2022-02-01 |
Family
ID=74262081
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202011152721.6A Active CN112260659B (zh) | 2020-10-26 | 2020-10-26 | 一种高q值薄膜体声波谐振器及其制备方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN112260659B (zh) |
Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20030069542A (ko) * | 2002-02-21 | 2003-08-27 | 엘지전자 주식회사 | 용적 탄성파 공진기 및 그 제조방법 |
US20040026755A1 (en) * | 2000-11-13 | 2004-02-12 | Eon-Kyeong Kim | Thin film resonator and method for manufacturing the same |
EP1482638A2 (en) * | 2003-05-29 | 2004-12-01 | Samsung Electronics Co., Ltd. | Film bulk acoustic resonator having supports and manufacturing method therefor |
CN1619944A (zh) * | 2003-11-07 | 2005-05-25 | 松下电器产业株式会社 | 压电谐振器及制造法、用其之滤波器、双工器、通讯器件 |
JP2005236518A (ja) * | 2004-02-18 | 2005-09-02 | Sony Corp | 薄膜バルク音響共振子およびその製造方法 |
US20130214875A1 (en) * | 2012-02-16 | 2013-08-22 | Elwha Llc | Graphene sheet and nanomechanical resonator |
CN104767500A (zh) * | 2014-01-03 | 2015-07-08 | 李国强 | 空腔型薄膜体声波谐振器及其制备方法 |
CN110474616A (zh) * | 2019-08-29 | 2019-11-19 | 华南理工大学 | 一种空气隙型薄膜体声波谐振器及其制备方法 |
CN110601673A (zh) * | 2019-08-12 | 2019-12-20 | 清华大学 | 基于铪系铁电薄膜的声表面波器件及薄膜体声波器件 |
CN111010127A (zh) * | 2019-12-23 | 2020-04-14 | 武汉大学 | 一种薄膜体声波谐振器及其制备方法 |
CN111082775A (zh) * | 2019-12-30 | 2020-04-28 | 中国电子科技集团公司第五十五研究所 | 一种高品质因数的薄膜体声波谐振器 |
CN111342799A (zh) * | 2018-12-18 | 2020-06-26 | 天津大学 | 具有扩大的释放通道的体声波谐振器、滤波器、电子设备 |
CN111817682A (zh) * | 2020-07-27 | 2020-10-23 | 松山湖材料实验室 | 一种薄膜体声波谐振器及其制备方法 |
CN111817679A (zh) * | 2020-06-09 | 2020-10-23 | 杭州见闻录科技有限公司 | 一种薄膜体声波谐振器及其制作工艺 |
-
2020
- 2020-10-26 CN CN202011152721.6A patent/CN112260659B/zh active Active
Patent Citations (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040026755A1 (en) * | 2000-11-13 | 2004-02-12 | Eon-Kyeong Kim | Thin film resonator and method for manufacturing the same |
KR20030069542A (ko) * | 2002-02-21 | 2003-08-27 | 엘지전자 주식회사 | 용적 탄성파 공진기 및 그 제조방법 |
EP1482638A2 (en) * | 2003-05-29 | 2004-12-01 | Samsung Electronics Co., Ltd. | Film bulk acoustic resonator having supports and manufacturing method therefor |
KR20040103587A (ko) * | 2003-05-29 | 2004-12-09 | 삼성전자주식회사 | 지지대를 갖는 박막 벌크 음향 공진기 및 그 제조방법 |
CN1619944A (zh) * | 2003-11-07 | 2005-05-25 | 松下电器产业株式会社 | 压电谐振器及制造法、用其之滤波器、双工器、通讯器件 |
JP2005236518A (ja) * | 2004-02-18 | 2005-09-02 | Sony Corp | 薄膜バルク音響共振子およびその製造方法 |
US20130214875A1 (en) * | 2012-02-16 | 2013-08-22 | Elwha Llc | Graphene sheet and nanomechanical resonator |
CN104767500A (zh) * | 2014-01-03 | 2015-07-08 | 李国强 | 空腔型薄膜体声波谐振器及其制备方法 |
CN111342799A (zh) * | 2018-12-18 | 2020-06-26 | 天津大学 | 具有扩大的释放通道的体声波谐振器、滤波器、电子设备 |
CN110601673A (zh) * | 2019-08-12 | 2019-12-20 | 清华大学 | 基于铪系铁电薄膜的声表面波器件及薄膜体声波器件 |
CN110474616A (zh) * | 2019-08-29 | 2019-11-19 | 华南理工大学 | 一种空气隙型薄膜体声波谐振器及其制备方法 |
CN111010127A (zh) * | 2019-12-23 | 2020-04-14 | 武汉大学 | 一种薄膜体声波谐振器及其制备方法 |
CN111082775A (zh) * | 2019-12-30 | 2020-04-28 | 中国电子科技集团公司第五十五研究所 | 一种高品质因数的薄膜体声波谐振器 |
CN111817679A (zh) * | 2020-06-09 | 2020-10-23 | 杭州见闻录科技有限公司 | 一种薄膜体声波谐振器及其制作工艺 |
CN111817682A (zh) * | 2020-07-27 | 2020-10-23 | 松山湖材料实验室 | 一种薄膜体声波谐振器及其制备方法 |
Non-Patent Citations (2)
Title |
---|
HAKHAMANESH MANSOORZARE: "Acoustoelectric Amplification in Lateral-Extensional Composite Piezo-Silicon Resonant Cavities", 《2019 JOINT CONFERENCE OF THE IEEE INTERNATIONAL FREQUENCY CONTROL SYMPOSIUM AND EUROPEAN FREQUENCY AND TIME FORUM (EFTF/IFC)》 * |
陈剑鸣: "分子印迹型薄膜体声波谐振毒品检测传感器", 《光学精密工程》 * |
Also Published As
Publication number | Publication date |
---|---|
CN112260659B (zh) | 2022-02-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US10038422B2 (en) | Single-chip multi-frequency film bulk acoustic-wave resonators | |
US6496085B2 (en) | Solidly mounted multi-resonator bulk acoustic wave filter with a patterned acoustic mirror | |
JP4950267B2 (ja) | 薄膜バルク音響共鳴器フィルタの製造方法および薄膜バルク音響共鳴器フィルタを用いた回路 | |
CN111294010B (zh) | 一种薄膜体声波谐振器的腔体结构及制造工艺 | |
CN110995196B (zh) | 谐振器的制备方法和谐振器 | |
CN109660227B (zh) | 薄膜体声波滤波器及其封装方法 | |
CN111162746B (zh) | 一种体声波谐振器的平坦压电层结构及制作工艺 | |
KR100631217B1 (ko) | 박막 벌크 음향 공진기 및 표면 음향파 공진기가 집적된인티그레이티드 필터 및 그 제작 방법 | |
JP2007028669A (ja) | 薄膜音響共振器の製造方法 | |
JP2005236337A (ja) | 薄膜音響共振器及びその製造方法 | |
JP2006339873A (ja) | 薄膜圧電共振器、フィルタ及び電圧制御発振器 | |
KR20180108603A (ko) | 표면 탄성파 디바이스를 위한 하이브리드 구조 | |
JP2008182543A (ja) | 薄膜圧電共振器とそれを用いた薄膜圧電フィルタ | |
CN113193846A (zh) | 一种带混合横向结构特征的薄膜体声波谐振器 | |
JP2002372974A (ja) | 薄膜音響共振器及びその製造方法 | |
CN113258899B (zh) | 一种薄膜体声波谐振器及其制造方法 | |
JP2004328739A (ja) | 基板からフローティングされたエアギャップを有する薄膜のバルク音響共振器及びその製造方法 | |
CN112260659B (zh) | 一种高q值薄膜体声波谐振器及其制备方法 | |
JP2002076824A (ja) | 圧電薄膜共振子、フィルタおよび電子機器 | |
JP2005303573A (ja) | 薄膜圧電共振器及びその製造方法 | |
CN113992183A (zh) | 一种体声波谐振器 | |
CN113315488A (zh) | 一种fbar谐振器及其制备方法与应用 | |
JP2009290591A (ja) | Bawフィルタ | |
CN220798237U (zh) | 一种薄膜体声波谐振器 | |
WO2021109090A1 (zh) | 谐振器的制备方法和谐振器 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220407 Address after: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee after: Ningbo Huazhang enterprise management partnership (L.P.) Address before: 430072 Hubei Province, Wuhan city Wuchang District of Wuhan University Luojiashan Patentee before: WUHAN University |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220825 Address after: No.01, 4th floor, building D7, phase 3, Wuhan Software New Town, No.9 Huacheng Avenue, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000 Patentee after: Wuhan Minsheng New Technology Co.,Ltd. Address before: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee before: Ningbo Huazhang enterprise management partnership (L.P.) |