CN112146729A - 坩埚内原料剩余量的检测装置及检测方法 - Google Patents
坩埚内原料剩余量的检测装置及检测方法 Download PDFInfo
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- G01G7/00—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups
- G01G7/02—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups by electromagnetic action
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Citations (13)
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JPS63107888A (ja) * | 1986-10-27 | 1988-05-12 | Kyushu Denshi Kinzoku Kk | 単結晶引上げ装置の熱分布検知方法及び自動制御方法 |
JPH02305963A (ja) * | 1989-05-19 | 1990-12-19 | Osaka Shinku Kiki Seisakusho:Kk | イオンプレーティング装置に於ける材料蒸発速度検出装置及び材料蒸発速度制御装置 |
JP2005104767A (ja) * | 2003-09-30 | 2005-04-21 | Dowa Mining Co Ltd | 半導体単結晶の製造方法及び半導体単結晶の製造装置 |
RU2366925C1 (ru) * | 2008-02-18 | 2009-09-10 | Государственное образовательное учреждение высшего профессионального образования "Уральский государственный технический университет УГТУ-УПИ" | Способ бесконтактного измерения вязкости металлических расплавов и устройство для его осуществления |
CN101701356A (zh) * | 2009-11-17 | 2010-05-05 | 中山大学 | 一种用于光电晶体等径生长的下称重方法 |
CN101956163A (zh) * | 2009-07-13 | 2011-01-26 | 三菱重工业株式会社 | 真空气相沉积装置 |
CN102808167A (zh) * | 2011-06-02 | 2012-12-05 | 丽佳达普株式会社 | 坩埚装置、坩埚装置控制方法、膜厚测量装置及包含它的薄膜沉积设备 |
CN104614282A (zh) * | 2015-02-03 | 2015-05-13 | 中国工程物理研究院总体工程研究所 | 一种带加热功能的高温流体密度测试装置 |
JP2015127608A (ja) * | 2013-12-27 | 2015-07-09 | シンフォニアテクノロジー株式会社 | 加熱溶解装置、加熱溶解システムおよび出湯制御装置 |
CN106338320A (zh) * | 2015-07-06 | 2017-01-18 | Abb 技术有限公司 | 用于液体的非侵入性连续液位测量的系统和方法 |
CN109518152A (zh) * | 2018-12-19 | 2019-03-26 | 北京铂阳顶荣光伏科技有限公司 | 金属源剩余量检测装置及检测方法、蒸镀设备 |
CN109580782A (zh) * | 2018-12-25 | 2019-04-05 | 宁波宝斯达坩埚保温制品有限公司 | 一种石英坩埚表面在线检测装置 |
CN109855703A (zh) * | 2018-12-20 | 2019-06-07 | 北京铂阳顶荣光伏科技有限公司 | 金属源剩余量的检测装置及检测方法、蒸镀设备 |
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2019
- 2019-06-28 CN CN201910573737.5A patent/CN112146729A/zh active Pending
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63107888A (ja) * | 1986-10-27 | 1988-05-12 | Kyushu Denshi Kinzoku Kk | 単結晶引上げ装置の熱分布検知方法及び自動制御方法 |
JPH02305963A (ja) * | 1989-05-19 | 1990-12-19 | Osaka Shinku Kiki Seisakusho:Kk | イオンプレーティング装置に於ける材料蒸発速度検出装置及び材料蒸発速度制御装置 |
JP2005104767A (ja) * | 2003-09-30 | 2005-04-21 | Dowa Mining Co Ltd | 半導体単結晶の製造方法及び半導体単結晶の製造装置 |
RU2366925C1 (ru) * | 2008-02-18 | 2009-09-10 | Государственное образовательное учреждение высшего профессионального образования "Уральский государственный технический университет УГТУ-УПИ" | Способ бесконтактного измерения вязкости металлических расплавов и устройство для его осуществления |
CN101956163A (zh) * | 2009-07-13 | 2011-01-26 | 三菱重工业株式会社 | 真空气相沉积装置 |
CN101701356A (zh) * | 2009-11-17 | 2010-05-05 | 中山大学 | 一种用于光电晶体等径生长的下称重方法 |
CN102808167A (zh) * | 2011-06-02 | 2012-12-05 | 丽佳达普株式会社 | 坩埚装置、坩埚装置控制方法、膜厚测量装置及包含它的薄膜沉积设备 |
JP2015127608A (ja) * | 2013-12-27 | 2015-07-09 | シンフォニアテクノロジー株式会社 | 加熱溶解装置、加熱溶解システムおよび出湯制御装置 |
CN104614282A (zh) * | 2015-02-03 | 2015-05-13 | 中国工程物理研究院总体工程研究所 | 一种带加热功能的高温流体密度测试装置 |
CN106338320A (zh) * | 2015-07-06 | 2017-01-18 | Abb 技术有限公司 | 用于液体的非侵入性连续液位测量的系统和方法 |
CN109518152A (zh) * | 2018-12-19 | 2019-03-26 | 北京铂阳顶荣光伏科技有限公司 | 金属源剩余量检测装置及检测方法、蒸镀设备 |
CN109855703A (zh) * | 2018-12-20 | 2019-06-07 | 北京铂阳顶荣光伏科技有限公司 | 金属源剩余量的检测装置及检测方法、蒸镀设备 |
CN109580782A (zh) * | 2018-12-25 | 2019-04-05 | 宁波宝斯达坩埚保温制品有限公司 | 一种石英坩埚表面在线检测装置 |
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