CN110438453A - 坩埚内原料剩余量的预警装置及预警方法 - Google Patents
坩埚内原料剩余量的预警装置及预警方法 Download PDFInfo
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- CN110438453A CN110438453A CN201910574225.0A CN201910574225A CN110438453A CN 110438453 A CN110438453 A CN 110438453A CN 201910574225 A CN201910574225 A CN 201910574225A CN 110438453 A CN110438453 A CN 110438453A
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- Prior art keywords
- crucible
- electromagnet
- starting material
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- electrical current
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007858 starting material Substances 0.000 title claims abstract description 56
- 238000000034 method Methods 0.000 title claims description 32
- 230000001105 regulatory effect Effects 0.000 claims abstract description 30
- 238000012360 testing method Methods 0.000 claims abstract description 22
- 239000011148 porous material Substances 0.000 claims description 16
- 238000005192 partition Methods 0.000 claims description 10
- 230000005611 electricity Effects 0.000 claims description 5
- 230000003467 diminishing effect Effects 0.000 claims description 2
- 230000008859 change Effects 0.000 abstract description 13
- 238000007789 sealing Methods 0.000 abstract description 2
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 22
- 230000008569 process Effects 0.000 description 17
- 239000002994 raw material Substances 0.000 description 16
- 239000012212 insulator Substances 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 12
- 238000001514 detection method Methods 0.000 description 9
- 239000011248 coating agent Substances 0.000 description 5
- 238000000576 coating method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical group [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910052571 earthenware Inorganic materials 0.000 description 4
- 230000005484 gravity Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- KGWWEXORQXHJJQ-UHFFFAOYSA-N [Fe].[Co].[Ni] Chemical compound [Fe].[Co].[Ni] KGWWEXORQXHJJQ-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/543—Controlling the film thickness or evaporation rate using measurement on the vapor source
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Crucibles And Fluidized-Bed Furnaces (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910574225.0A CN110438453A (zh) | 2019-06-28 | 2019-06-28 | 坩埚内原料剩余量的预警装置及预警方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910574225.0A CN110438453A (zh) | 2019-06-28 | 2019-06-28 | 坩埚内原料剩余量的预警装置及预警方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
CN110438453A true CN110438453A (zh) | 2019-11-12 |
Family
ID=68428599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910574225.0A Pending CN110438453A (zh) | 2019-06-28 | 2019-06-28 | 坩埚内原料剩余量的预警装置及预警方法 |
Country Status (1)
Country | Link |
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CN (1) | CN110438453A (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114182209A (zh) * | 2022-01-18 | 2022-03-15 | 福建华佳彩有限公司 | 一种oled材料蒸镀坩埚装置及其使用方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB840639A (en) * | 1957-07-16 | 1960-07-06 | Cyril Best | Improvements in or relating to weighing devices |
DE4042254A1 (de) * | 1990-12-31 | 1992-07-02 | Becker Wolf Juergen Prof Dipl | Elektromechanische kompensationswaage |
CN104278249A (zh) * | 2013-07-02 | 2015-01-14 | 上海和辉光电有限公司 | 坩埚材料量检测装置、方法及蒸镀机 |
-
2019
- 2019-06-28 CN CN201910574225.0A patent/CN110438453A/zh active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB840639A (en) * | 1957-07-16 | 1960-07-06 | Cyril Best | Improvements in or relating to weighing devices |
DE4042254A1 (de) * | 1990-12-31 | 1992-07-02 | Becker Wolf Juergen Prof Dipl | Elektromechanische kompensationswaage |
CN104278249A (zh) * | 2013-07-02 | 2015-01-14 | 上海和辉光电有限公司 | 坩埚材料量检测装置、方法及蒸镀机 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN114182209A (zh) * | 2022-01-18 | 2022-03-15 | 福建华佳彩有限公司 | 一种oled材料蒸镀坩埚装置及其使用方法 |
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PB01 | Publication | ||
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CB02 | Change of applicant information |
Address after: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Applicant after: Beijing Dingrong Photovoltaic Technology Co.,Ltd. Address before: 3001, room 6, building No. 7, Rongchang East Street, Beijing economic and Technological Development Zone, Beijing, Daxing District 100176, China Applicant before: BEIJING APOLLO DING RONG SOLAR TECHNOLOGY Co.,Ltd. |
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TA01 | Transfer of patent application right |
Effective date of registration: 20210422 Address after: No. 201, No. 1 A, No. 1 A (Shenzhen Qianhai business secretary Co., Ltd.), Qianhai Shenzhen Hong Kong cooperation zone, Qianhai Applicant after: Shenzhen Zhengyue development and Construction Co.,Ltd. Address before: 100076 6015, 6th floor, building 8, 9 Yingshun Road, Yinghai Town, Daxing District, Beijing Applicant before: Beijing Dingrong Photovoltaic Technology Co.,Ltd. |
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TA01 | Transfer of patent application right | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20210916 Address after: 201203 3rd floor, no.665 Zhangjiang Road, China (Shanghai) pilot Free Trade Zone, Pudong New Area, Shanghai Applicant after: Shanghai zuqiang Energy Co.,Ltd. Address before: 518066 Room 201, building A, No. 1, Qian Wan Road, Qianhai Shenzhen Hong Kong cooperation zone, Shenzhen, Guangdong (Shenzhen Qianhai business secretary Co., Ltd.) Applicant before: Shenzhen Zhengyue development and Construction Co.,Ltd. |
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