CN112113979A

CN112113979A - Inspection device

Info

Publication number: CN112113979A
Application number: CN202010939283.1A
Authority: CN
Inventors: 张福涛; 郑文岗; 于南南
Original assignee: Rongcheng Gol Microelectronics Co ltd
Current assignee: Rongcheng Gol Microelectronics Co ltd
Priority date: 2020-09-08
Filing date: 2020-09-08
Publication date: 2020-12-22
Anticipated expiration: 2040-09-08
Also published as: CN112113979B

Abstract

The invention discloses a checking device, comprising: the device comprises a storage box and a moving component, wherein the storage box is used for storing the sheet materials, and one side of the storage box is open; the moving component is arranged in the opening direction of the storage box, the moving component can be close to or far away from the storage box, the moving component comprises a moving part, the moving component is close to the storage box, and the moving part moves the plate. The technical scheme of the invention can reduce the probability of touching the circuit board by hands and reduce the pollution of products, thereby reducing the scrappage of the products.

Description

Inspection device

Technical Field

The invention relates to the technical field of detection, in particular to a detection device.

Background

In the semiconductor processing industry, various electronic components are generally mounted on a circuit board after the electronic components are mounted. The mounting position of the electronic component needs to be checked. And (4) checking whether the installation condition of the electronic components meets the requirements, such as whether the installation position is correct, whether glue overflows and the like. However, currently, during the inspection process, fingers of operators touch the circuit board. Therefore, various electronic components on the circuit board are easily polluted. Resulting in the scrapping of contaminated electronic components and even the scrapping of the entire processed product.

Disclosure of Invention

Based on this, to current inspection process to the circuit board, operation personnel's finger can touch the circuit board, easily makes electronic components on the circuit board receive the pollution, leads to electronic components to appear condemned problem, needs to provide a verifying attachment, aims at can reducing the probability that the circuit board was touched to the people's hand to reduce scrapping of product.

In order to achieve the above object, the present invention provides a testing apparatus, comprising:

a storage box for storing the plate material, one side of the storage box being open; and

move and get the subassembly, it locates to move and get the subassembly the opening direction of storage box, it can be close to or keep away from to move and get the subassembly the storage box, it includes the portion of getting to move to get the subassembly, it is close to move to get the subassembly the storage box, it moves to get the portion and gets panel.

Optionally, the moving part comprises an upper clamping plate and a lower clamping plate which are oppositely arranged, the moving component is close to the storage box, and the upper clamping plate and the lower clamping plate are clamped on the plate.

Optionally, the moving assembly further comprises a first fixing piece and a second fixing piece which are connected, the upper clamping plate is arranged on the first fixing piece, the moving assembly further comprises a connecting shaft and an elastic clamp, the connecting shaft is vertically arranged in a penetrating mode on the second fixing piece, the lower clamping plate is connected with the connecting shaft, a through hole is formed in the surface of the second fixing piece, and the elastic clamp is arranged in a penetrating mode on the through hole and connected with the connecting shaft.

Optionally, the second fixing member includes a first fixing section and a second fixing section disposed at a lower end of the first fixing section, an outer wall of the second fixing section protrudes out of an outer wall of the first fixing section, and the through hole extends from the first fixing section to the second fixing section.

Optionally, the moving assembly further comprises an elastic member, one end of the elastic member is connected to the connecting shaft, and the other end of the elastic member is connected to the second fixing section.

Optionally, the inspection device further includes a loading board and a first guide rail disposed on the loading board, the storage box is disposed at one end of the first guide rail, the opening of the storage box faces the first guide rail, and the moving component is slidably disposed on the first guide rail.

Optionally, the inspection device further comprises a base, a second guide rail is arranged on the upper surface of the base, the extending direction of the second guide rail is orthogonal to the extending direction of the first guide rail, and the bearing plate is arranged on the second guide rail.

Optionally, the inspection device further comprises a lifting assembly, the lifting assembly comprises a driving part and a slider, the slider is connected to the storage box, and the driving part drives the slider to move up and down.

Optionally, the storage box is provided with a plurality of parallel slots, the plates are stored in the slots, the inspection device includes a first support frame and a second support frame, the first support frame and the second support frame are disposed on two sides of the moving component, the moving component moves the plates, and the plates move on the support surfaces of the first support frame and the second support frame.

Optionally, the inspection device further comprises a magnifying lens group, the magnifying lens group is arranged on one side of the moving path of the moving assembly, and the magnifying lens group is used for magnifying the details of the plate material.

According to the technical scheme, the circuit board is one of the plates, the plates are stored in the storage box, and the plates can be taken and placed through the opening of the storage box. When moving and getting the subassembly and being close to the storage box, move and get the portion and also be close to the storage box in step, move and get portion and contact panel through the opening one side of storage box to it accomplishes the fixed to panel to move and get the portion. Move and get the subassembly and keep away from the storage box, move and get the portion also synchronous keeping away from the storage box, move the in-process that the portion kept away from the storage box of getting from this, move and get a drive panel and remove, move panel and get the storage box. In this process, the worker comes into contact with the plate material through the removing portion. Thereby reducing the probability that the fingers of the operator directly touch the plate. Thereby reducing the pollution of the product and further reducing the rejection of the product.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

FIG. 1 is a schematic structural diagram of an embodiment of an inspection apparatus according to the present invention;

FIG. 2 is a schematic view of the removal assembly of FIG. 1;

FIG. 3 is a schematic structural view of the second fastening member of FIG. 2;

fig. 4 is a schematic structural view of the lifting assembly in fig. 1.

The reference numbers illustrate:

reference numerals	Name (R)	Reference numerals	Name (R)
				10	Storage box	310	First guide rail
110	Clamping groove	320	Push handle
				20	Moving assembly	40	First position limiting part
210	Moving part	50	Base seat
				211	Upper splint	510	Second guide rail
212	Lower splint	60	Second position limiting part
				220	First fixed part	70	Lifting assembly
230	Second fixing part	710	Driving part
				231	Through hole	720	Sliding block
232	First fixed section	730	Fixing plate
				233	Second fixed section	740	Mounting seat
240	Connecting shaft	750	Pulley wheel
				250	Elastic clip	760	Guide member
260	Elastic piece	80	Magnifying lens group
				270	Handle bar	910	First support frame
30	Bearing plate	920	Second support frame

The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that all the directional indicators (such as up, down, left, right, front, and rear … …) in the embodiment of the present invention are only used to explain the relative position relationship between the components, the movement situation, etc. in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indicator is changed accordingly.

In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "connected," "secured," and the like are to be construed broadly, and for example, "secured" may be a fixed connection, a removable connection, or an integral part; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In addition, the technical solutions in the embodiments of the present invention may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination of technical solutions should not be considered to exist, and is not within the protection scope of the present invention.

In the current semiconductor processing industry, the circuit board is inspected manually, and fingers of operators touch the circuit board in the inspection process. The fingers are typically dusty and greasy to excrete. After the finger touches the circuit board, the electronic components on the circuit board are polluted, and the electronic components are influenced by the external force of the finger touch, so that the position is deviated or twisted. Under these conditions, electronic components are scrapped, and even the whole processed product is scrapped.

In order to solve the above problems, referring to fig. 1 to 3, the present invention provides a testing apparatus, comprising: a storage case 10 and a removal assembly 20 for accessing products from the storage case 10.

The storage box 10 is used for storing the plate materials, and one side of the storage box 10 is opened; access to the sheets may be accomplished through an opening in the storage box 10. In addition, the storage box 10 can be opened at two ends, so that the two ends can be used for taking and placing the plates. The board comprises a circuit board, and various electronic components are attached to the circuit board. For example, a Micro-Electro-Mechanical System (MEMS) chip is mounted on a circuit board, and an operator needs to check the mounting condition of the MEMS chip to determine that the mounting of the MEMS chip meets the requirement.

The moving component 20 is arranged in the opening direction of the storage box 10, the moving component 20 can be close to or far away from the storage box 10, the moving component 20 comprises a moving part 210, the moving component 20 is close to the storage box 10, and the moving part 210 moves a plate material. The removal assembly 20 is moved closer to or away from the case 10, as the removal portion 210 is also moved closer to or away from the case 10. The moving part 210 may complete the fixing of the plate after contacting the plate, and the fixing mode may be grabbing or vacuum adsorption. The contact between the human hand and the circuit board can be reduced by replacing the human hand and the circuit board with the removing part 210.

In the technical scheme provided by this embodiment, the circuit board is one of the boards, the board is stored in the storage box 10, and the board can be taken and placed through the opening of the storage box 10. When the removing assembly 20 is close to the storage box 10, the removing part 210 is also close to the storage box 10, and the removing part 210 contacts the plate material through the opening side of the storage box 10, so that the removing part 210 finishes fixing the plate material. The removing assembly 20 is far away from the storage box 10, and the removing portion 210 is also synchronously far away from the storage box 10, so that the removing portion 210 drives the sheet material to move to remove the sheet material from the storage box 10 in the process that the removing portion 210 is far away from the storage box 10. In this process, the worker comes into contact with the plate material through the removing portion 210. Thereby reducing the probability that the fingers of the operator directly touch the plate. Thereby reducing the pollution of the product and further reducing the rejection of the product.

In the above embodiment, the moving part 210 may also adopt a clamping manner. The moving part 210 includes an upper clamping plate 211 and a lower clamping plate 212 which are oppositely arranged, the moving assembly 20 is close to the storage box 10, and the upper clamping plate 211 and the lower clamping plate 212 are clamped on the plate. The electronic components are attached to the middle area of the plate, the edge area of the plate generally forms a blank area, and the moving part 210 moves the plate by clamping the edge area of the plate. In addition, in order to avoid the moving part 210 from clamping the electronic component in the middle of the board, the upper clamping plate 211 has a first bending part extending downward, the lower clamping plate 212 has a second bending part extending downward, when the circuit board is clamped, the first bending part and the second bending part are matched with each other, and the edge position of the circuit board abuts against the first bending part, so that the upper clamping plate 211 and the lower clamping plate 212 cannot go deep into the middle area of the board.

In the above embodiment, in order to make the moving part 210 more convenient to grip the plate material. The removing assembly 20 further comprises a first fixing member 220 and a second fixing member 230 connected to each other, wherein the first fixing member 220 is disposed on one side surface of the second fixing member 230. The first fixing member 220 and the second fixing member 230 may be connected by screws or may be integrally formed. The upper clamp plate 211 is arranged on the first fixing member 220, the moving assembly 20 further comprises a connecting shaft 240 and an elastic clamp 250, the connecting shaft 240 vertically penetrates through the second fixing member 230, the lower clamp plate 212 is connected to the connecting shaft 240, and the connecting shaft 240 can vertically move up and down in the second fixing member 230. In the process of moving the connecting shaft 240 up and down, the lower clamping plate 212 is synchronously driven to move. Since the upper clamp 211 is fixed, the lower clamp 212 approaches or moves away from the upper clamp 211 during the up-and-down movement of the lower clamp 212. That is, the plate material is clamped or unclamped by the removing unit 210 by moving the lower clamp plate 212 up and down. The surface of the second fixing member 230 is provided with a through hole 231, and the elastic clip 250 is inserted into the through hole 231 and connected to the connecting shaft 240. The elastic clip 250 has elasticity itself, and the elastic clip 250 is fastened to the second fixing member 230 under its own elastic pressure in a natural state. When the plate is gripped, the elastic clamp 250 is pulled in the transverse direction, and the elastic clamp 250 is pulled to make the lower clamping plate 212 close to the upper clamping plate 211, and the moving member grips the plate. The elastic clip 250 generates an opposite restoring force due to the transverse pulling of the elastic clip 250, and after the elastic clip 250 is released, the elastic clip 250 is automatically fastened to the second fixing member 230, and the fixed state of the lower clamping plate 212 is stabilized by the elastic pressure of the elastic clip 250.

In the above embodiment, in order to further improve the stability of the clamping force of the removing part 210 on the plate, the second fixing member 230 includes the first fixing section 232 and the second fixing section 233 provided at the lower end of the first fixing section 232, the outer wall of the second fixing section 233 protrudes out of the outer wall of the first fixing section 232, and the through hole 231 extends from the first fixing section 232 to the second fixing section 233. Therefore, in the process of clamping the plate, the elastic clamp 250 is lifted and pulled to move upwards along the through hole 231, after the elastic clamp 250 moves to the first fixing section 232, the upper clamp plate 211 and the lower clamp plate 212 finish clamping the plate, and after the elastic clamp 250 is loosened, the elastic clamp 250 is clamped on the convex outer wall of the second fixing section 233, at this time, the elastic clamp 250 cannot move downwards, so that the positions of the upper clamp plate 211 and the lower clamp plate 212 are stable.

In the above embodiment, in order to make the operation of the removing unit 210 more flexible, the removing unit 210 is more easily clamped to the plate material. The removing assembly 20 further comprises an elastic member 260, one end of the elastic member 260 is connected to the connecting shaft 240, and the other end of the elastic member 260 is connected to the second fixing section 233. Normally, the elastic member 260 is in a compressed state, so that the elastic member 260 has a reverse acting force, that is, the connecting shaft 240 always maintains an upward pushing force under the reverse acting force of the elastic member 260. When the moving part 210 is used, the elastic clamp 250 is firstly pulled downwards, the elastic clamp 250 moves downwards to drive the connecting shaft 240 to move downwards, so that the elastic part 260 is further compressed, the elastic part 260 generates larger upward thrust, and after the elastic clamp 250 is loosened, the lower clamp plate 212 can be folded with the upper clamp plate 211 more quickly under the action of the larger upward thrust, so that the acting force of the operator for upwards pulling the elastic clamp 250 can be saved, and the operation of the moving part 210 is more flexible. The removing assembly 20 is further provided with a handle 270, and the handle 270 facilitates the operator to hold the removing assembly 20 and apply pushing force to the removing assembly 20.

In order to more accurately move the removal assembly 20 toward the storage case 10. The checking apparatus further includes a loading board 30 and a first guide rail 310 disposed on the loading board 30, the storage box 10 is disposed at one end of the first guide rail 310, the opening of the storage box 10 faces the first guide rail 310, and the removing assembly 20 is slidably disposed on the first guide rail 310. The moving assembly 20 moves back and forth along the first guide rail 310, so that the moving direction of the moving assembly 20 is ensured to be more accurate. The two first guide rails 310 are parallel to each other, the two first guide rails 310 are laid on the upper surface of the bearing plate 30, and the moving assembly 20 slides along the two first guide rails 310, so that better stability can be obtained. The checking device further includes two first limiting members 40, one first limiting member 40 is disposed at one end of the first guide rail 310, and the other first limiting member 40 is disposed at the other end of the first guide rail 310. The first limiting member 40 limits the moving range of the removing assembly 20, so as to prevent the removing assembly 20 from being separated from the first guide rail 310. In addition, the loading plate 30 is provided with a pushing handle 320, by which an operator can push and pull the loading plate 30 conveniently by the pushing handle 320.

In the above embodiment, in order to enable the moving and taking assembly 20 to accurately clamp the plate, the inspection device further includes a base 50, a second guide rail 510 is disposed on the upper surface of the base 50, the extending direction of the second guide rail 510 is orthogonal to the extending direction of the first guide rail 310, and the carrier plate 30 is disposed on the second guide rail 510. The supporting plate 30 can move along the second guide rail 510, and the moving component 20 is disposed on the supporting plate 30, so that when the supporting plate 30 is pushed to move along the second guide rail 510, the position of the moving component 20 corresponding to the storage box 10 can be adjusted, and the moving component 20 can be aligned to the opening of the storage box 10. In addition, the second guide rails 510 also include a flexible root, the two second guide rails 510 are parallel to each other, the two second guide rails 510 are laid on the upper surfaces of the two second guide rails 510, and the bearing plate 30 slides along the two second guide rails 510, so that better stability can be obtained. Furthermore, the checking apparatus further includes two second limiting members 60, one second limiting member 60 is disposed at one end of the second guide rail 510, and the other second limiting member 60 is disposed at the other end of the second guide rail 510. The moving range of the loading plate 30 is limited by the second limiting member 60, so that the loading plate 30 is prevented from being separated from the second guide rail 510.

In the related art, the inspection of the slabs is generally performed in a spot check manner, but the removing assembly 20 generally moves in the same horizontal plane, and in order to select slabs at different positions in the storage box 10, as shown in fig. 4, the inspection apparatus further includes a lifting assembly 70, wherein the lifting assembly 70 includes a driving part 710 and a slider 720, the slider 720 is connected to the storage box 10, and the driving part 710 drives the slider 720 to move up and down. The driving part 710 includes an electric cylinder, the lifting assembly 70 further includes a guide 760, and the slider 720 is provided to the guide 760, and the slider 720 is driven by the driving part 710 to move up and down along the guide 760. A fixing plate 730 is coupled between the storage case 10 and the slider 720. The lifting assembly 70 further includes a mounting seat 740, the mounting seat 740 is used for mounting the storage box 10, and the mounting seat 740 is fixedly connected to the fixing plate 730, so that the storage box 10 moves up and down synchronously in the process of moving the slider 720 up and down, and thus different up and down positions in the storage box 10 can correspond to the horizontal plane where the moving assembly 20 is located, and then the operator can complete the sampling inspection of the sheet material by adjusting the up and down positions of the storage box 10. In addition, a pulley 750 is further disposed on the side wall surface of the installation, so that when the storage box 10 is placed, the storage box 10 can be placed more conveniently and more conveniently in a labor-saving manner.

In another embodiment, the storage box 10 is provided with a plurality of parallel card slots 110, the sheets being stored in the card slots 110, the plurality of card slots 110 enabling the storage box 10 to hold more sheets. The inspection device comprises a first support frame 910 and a second support frame 920, wherein the first support frame 910 and the second support frame 920 are arranged at two sides of the moving assembly 20, the moving assembly moves a plate, and the plate moves on the support surfaces of the first support frame 910 and the second support frame 920. The removal assembly 20 typically only holds one end of the sheet material and during pulling of the sheet material, the sheet material may be broken easily by bending and sinking the end of the sheet material remote from the removal assembly 20 because the sheet material may be relatively soft. Or the upper and lower sheets collide when the sheets are pushed back into the storage box 10, resulting in the failure of the sheets to be accurately retracted into the storage box 10. Through the supporting action of the first supporting frame 910 and the second supporting frame 920, the whole plate moves in the same supporting plane, so that the plate is prevented from being bent and broken, and the plate can be guaranteed to be taken out or stored at the same position of the storage box 10.

Generally, the human eye has limited ability to distinguish between the electronic components in the board, and in order to inspect the electronic components in the board more clearly, the inspection apparatus further includes a magnifying lens group 80, the magnifying lens group 80 is disposed on one side of the moving path of the removing assembly 20, and the magnifying lens group 80 is used for magnifying the details of the board. In addition, the moving assembly 20 can be close to or far from the magnifying lens group 80, so that the plate can be moved to the optimal observation position of the magnifying lens group 80. In addition, the magnifying lens assembly 80 can adjust the vertical distance from the surface of the plate material, so as to further observe the plate material clearly.

The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.

Claims

1. An inspection device, comprising:

2. The inspection device of claim 1, wherein said removal portion includes an upper clamp and a lower clamp disposed in opposition, said removal assembly being proximate to said storage magazine, said upper clamp and said lower clamp being clamped to said sheet material.

3. The testing device of claim 2, wherein the moving assembly further comprises a first fixing member and a second fixing member connected with each other, the upper clamping plate is disposed on the first fixing member, the moving assembly further comprises a connecting shaft and an elastic clamp, the connecting shaft vertically penetrates through the second fixing member, the lower clamping plate is connected with the connecting shaft, a through hole is formed in the surface of the second fixing member, and the elastic clamp penetrates through the through hole and is connected with the connecting shaft.

4. The testing device as claimed in claim 3, wherein said second fixing member includes a first fixing section and a second fixing section provided at a lower end of said first fixing section, an outer wall of said second fixing section protrudes from an outer wall of said first fixing section, and said through hole extends from said first fixing section to said second fixing section.

5. The testing device of claim 4, wherein the removal assembly further comprises a resilient member, one end of the resilient member being connected to the connecting shaft and the other end of the resilient member being connected to the second stationary section.

6. The testing device of any one of claims 1 to 5, further comprising a carrier plate and a first guide rail disposed on said carrier plate, wherein said storage box is disposed at one end of said first guide rail, said storage box is open toward said first guide rail, and said removing member is slidably disposed on said first guide rail.

7. The testing device of claim 6, further comprising a base, wherein a second guide rail is disposed on an upper surface of the base, an extending direction of the second guide rail is orthogonal to an extending direction of the first guide rail, and the carrier plate is disposed on the second guide rail.

8. The testing device of any one of claims 1 to 5, further comprising a lift assembly, said lift assembly comprising a drive and a slider, said slider being connected to said storage cartridge, said drive driving said slider up and down.

9. The inspection device of any one of claims 1 to 5, wherein the storage cassette is provided with a plurality of parallel slots in which the sheets are stored, the inspection device comprising a first support frame and a second support frame, the first support frame and the second support frame being provided on both sides of the removal assembly, the removal member removing the sheets, the sheets being moved on the support surfaces of the first support frame and the second support frame.

10. The inspection device of any one of claims 1 to 5, further comprising a magnifying lens group disposed on one side of the path of movement of the removal assembly, the magnifying lens group being for magnifying details of the sheet material.