CN112045323A - Double laser head window opening method and device - Google Patents

Double laser head window opening method and device Download PDF

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CN112045323A
CN112045323A CN202010967385.4A CN202010967385A CN112045323A CN 112045323 A CN112045323 A CN 112045323A CN 202010967385 A CN202010967385 A CN 202010967385A CN 112045323 A CN112045323 A CN 112045323A
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laser
window
carbonization
window opening
opening
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雷志辉
续振林
赵晓杰
李毅峰
秦国双
钟石兰
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Xiamen Flexible Electronics Research Institute Co ltd
Advanced Optowave Corp
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Advanced Optowave Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70Auxiliary operations or equipment
    • B23K26/702Auxiliary equipment

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Abstract

本发明涉及双激光头开窗方法及装置,该方法包括采用紫外皮秒激光切割开窗的轮廓,以得到没有碳化的轮廓;采用CO2激光对没有碳化的轮廓内的开窗区域去除材料,以对没有碳化的轮廓内的开窗区域进行开窗。本发明通过紫外皮秒激光先把开窗的轮廓切透,得到干净且没有碳化的轮廓,对于开窗区域的内部填充用CO2激光直接去除材料,开窗边缘无碳化和残留,基材不受损,不影响电路板性能和使用,可加工密集开窗、精密开窗,以解决现有技术中无法加工密集开窗、精密开窗效率低、速度慢的问题。

Figure 202010967385

The invention relates to a method and a device for opening a window with a double laser head. The method comprises using an ultraviolet picosecond laser to cut the outline of a window to obtain a contour without carbonization; Windowed areas within contours that are not carbonized. In the present invention, the outline of the window opening is firstly cut through the ultraviolet picosecond laser to obtain a clean outline without carbonization, and CO2 laser is used for the internal filling of the window opening area to directly remove the material, so that the edge of the opening window is free of carbonization and residue, and the substrate is not affected. It does not affect the performance and use of the circuit board, and can process intensive windowing and precision windowing to solve the problems of inability to process intensive windowing, low precision windowing efficiency and slow speed in the prior art.

Figure 202010967385

Description

双激光头开窗方法及装置Double laser head window opening method and device

技术领域technical field

本发明涉及开窗方法,更具体地说是指双激光头开窗方法及装置。The present invention relates to a window opening method, and more particularly to a double laser head window opening method and device.

背景技术Background technique

电路板上的导线带有覆盖膜层或阻焊油墨层,可以防止短路对器件造成伤害,开窗就是去掉导线的焊盘上对应的覆盖膜层或阻焊油墨层,让导线的焊盘裸露可以上锡。The wires on the circuit board are provided with a cover film layer or a solder mask ink layer, which can prevent the short circuit from causing damage to the device. Opening the window is to remove the corresponding cover film layer or solder mask ink layer on the pads of the wires, so that the pads of the wires are exposed. Can be tinned.

如是覆盖膜层,在覆盖膜贴压于电路板前,先进行开窗制作,开窗的方式一般包括模具冲切或者用普通纳秒激光器或者采用皮秒激光器进行开窗,模具冲切的加工最小孔直径0.8mm、最小矩形开窗尺寸0.8*0.8mm,精度±50μm,且无法加工密集开窗;普通纳秒激光器进行开窗由于热效应的影响导致边缘碳化或基材受损影响电路板性能。且无法加工密集孔,而采用皮秒激光器开窗则效率低,速度慢。In the case of the cover film layer, before the cover film is pressed on the circuit board, the window is made first. The window opening method generally includes die punching or window opening with ordinary nanosecond laser or picosecond laser, and the processing of die punching is the smallest. The hole diameter is 0.8mm, the minimum rectangular window size is 0.8*0.8mm, the accuracy is ±50μm, and it is impossible to process intensive windowing; ordinary nanosecond lasers for windowing lead to edge carbonization or damage to the substrate due to thermal effects, which affects the performance of the circuit board. And it is impossible to process dense holes, and the use of picosecond lasers to open windows is inefficient and slow.

如是阻焊油墨层,在阻焊油墨层上经进行曝光、显影、后固化等工序制作出开窗,目前此方式加工最小孔直径0.2mm、最小矩形开窗尺寸0.2*0.2mm,精度±25μm,可加工密集开窗,但工序多道,生产成本高且生产效率低。In the case of the solder mask ink layer, a window is made on the solder mask ink layer through exposure, development, post-curing and other processes. At present, the minimum hole diameter is 0.2mm, the minimum rectangular window size is 0.2*0.2mm, and the accuracy is ±25μm. , can be processed intensively to open windows, but with multiple processes, high production cost and low production efficiency.

因此,有必要设计一种新的方法,以解决现有技术中无法加工密集开窗、精密开窗、效率低、速度慢的问题。Therefore, it is necessary to design a new method to solve the problems of inability to process intensive windowing, precise windowing, low efficiency and slow speed in the prior art.

发明内容SUMMARY OF THE INVENTION

本发明的目的在于克服现有技术的缺陷,提供双激光头开窗方法及装置。The purpose of the present invention is to overcome the defects of the prior art, and to provide a method and device for opening a window with dual laser heads.

为实现上述目的,本发明采用以下技术方案:双激光头开窗方法,包括:In order to achieve the above object, the present invention adopts the following technical solutions: a double laser head window opening method, comprising:

采用紫外皮秒激光切割开窗的轮廓,以得到没有碳化的轮廓;Use UV picosecond laser to cut the profile of the window to get the profile without carbonization;

采用CO2激光对没有碳化的轮廓内的开窗区域去除材料,以对没有碳化的轮廓内的开窗区域进行开窗。A CO2 laser was used to remove material from the fenestrated areas within the non-carbonized contours to fenestrate the fenestrated areas within the non-carbonized contours.

其进一步技术方案为:所述采用紫外皮秒激光切割开窗的轮廓,以得到没有碳化的轮廓,包括:Its further technical scheme is: the profile of the window is cut by the ultraviolet picosecond laser to obtain the profile without carbonization, including:

采用紫外皮秒激光器发射出紫外皮秒激光切割开窗的轮廓,以得到没有碳化的轮廓。A UV picosecond laser is used to emit a UV picosecond laser to cut the profile of the fenestration to obtain a profile without carbonization.

其进一步技术方案为:所述采用CO2激光对没有碳化的轮廓内的开窗区域去除材料,以对没有碳化的轮廓内的开窗区域进行开窗,包括:Its further technical solution is: the CO2 laser is used to remove material from the windowed area in the contour without carbonization, so as to open the windowed area in the contour without carbonization, including:

采用CO2激光器发射CO2激光对没有碳化的轮廓内的开窗区域去除材料,以对没有碳化的轮廓内的开窗区域进行开窗。A CO2 laser is used to emit a CO2 laser to remove material from the fenestration area within the contour without carbonization to fenestrate the fenestration area within the contour without carbonization.

其进一步技术方案为:开窗的最小尺寸小于0.1mm。Its further technical solution is: the minimum size of the opening window is less than 0.1mm.

其进一步技术方案为:开窗的精度小于±10μm。Its further technical solution is: the precision of opening the window is less than ±10μm.

本发明还提供了双激光头开窗装置,包括CO2激光器、紫外皮秒激光器以及光学器件,所述CO2激光器以及所述紫外皮秒激光器分别与所述光学器件连接,所述光学器件的下方设有工作平台。The present invention also provides a double-laser head window opening device, including a CO2 laser, an ultraviolet picosecond laser and an optical device, wherein the CO2 laser and the ultraviolet picosecond laser are respectively connected to the optical device, and a lower part of the optical device is arranged There are working platforms.

其进一步技术方案为:还包括工控机,所述工控机分别与所述CO2激光器、所述紫外皮秒激光器以及工作平台连接。Its further technical scheme is as follows: it further comprises an industrial computer, and the industrial computer is respectively connected with the CO2 laser, the ultraviolet picosecond laser and the working platform.

其进一步技术方案为:所述光学器件包括至少一个反射镜、至少一个扩束镜、至少一个振镜以及至少一个透镜,所述扩束镜分别与所述CO2激光器以及所述紫外皮秒激光器连接,所述扩束镜以及所述振镜分别与所述反射镜连接,所述振镜的下方连接有所述透镜。Its further technical scheme is: the optical device includes at least one mirror, at least one beam expander, at least one galvanometer and at least one lens, and the beam expander is respectively connected with the CO2 laser and the ultraviolet picosecond laser , the beam expander and the galvanometer are respectively connected with the reflector, and the lens is connected below the galvanometer.

其进一步技术方案为:所述工作平台位于所述透镜的下方。A further technical solution is: the working platform is located below the lens.

其进一步技术方案为:所述振镜位于所述反射镜的下方。Its further technical solution is: the galvanometer is located below the reflector.

本发明与现有技术相比的有益效果是:本发明通过紫外皮秒激光先把开窗的轮廓切透,得到干净且没有碳化的轮廓,对于开窗区域的内部填充用CO2激光直接去除材料,开窗边缘无碳化和残留,基材不受损,不影响电路板性能和使用,可加工密集开窗,以解决现有技术中无法加工密集开窗、开窗效率低、速度慢的问题。Compared with the prior art, the present invention has the following beneficial effects: the present invention first cuts the outline of the window through the ultraviolet picosecond laser to obtain a clean outline without carbonization, and CO2 laser is used to directly remove the material for the internal filling of the window area. , There is no carbonization and residue on the edge of the window opening, the substrate is not damaged, it does not affect the performance and use of the circuit board, and it can be processed intensively to open the window to solve the existing technology. .

下面结合附图和具体实施例对本发明作进一步描述。The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

附图说明Description of drawings

为了更清楚地说明本发明实施例技术方案,下面将对实施例描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施例,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to explain the technical solutions of the embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the embodiments. Obviously, the drawings in the following description are some embodiments of the present invention, which are of great significance to the art For those of ordinary skill, other drawings can also be obtained from these drawings without any creative effort.

图1为本发明具体实施例提供的双激光头开窗方法的流程示意图;1 is a schematic flowchart of a method for opening a window with a dual laser head provided by a specific embodiment of the present invention;

图2为本发明具体实施例提供的双激光头开窗装置的结构示意图。FIG. 2 is a schematic structural diagram of a double laser head window opening device provided by a specific embodiment of the present invention.

具体实施方式Detailed ways

为了使本发明的目的、技术方案及优点更加清楚明白,下面结合附图和具体实施方式对本发明作进一步详细说明。In order to make the objectives, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

下面将结合本发明实施例中的附图,对本发明实施例中的技术方案进行清楚、完整地描述,显然,所描述的实施例仅仅是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域技术人员在没有作出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts shall fall within the protection scope of the present invention.

在本发明的描述中,需要理解的是,术语“中心”、“纵向”、“横向”、“长度”、“宽度”、“厚度”、“上”、“下”、“前”、“后”、“左”、“右”、“竖直”、“水平”、“顶”、“底”“内”、“外”、“顺时针”、“逆时针”等指示的方位或位置关系为基于附图所示的方位或位置关系,仅是为了便于描述本发明和简化描述,而不是指示或暗示所指的装置或元件必须具有特定的方位、以特定的方位构造和操作,因此不能理解为对本发明的限制。In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", " Orientation or position indicated by rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc. The relationship is based on the orientation or positional relationship shown in the drawings, only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore It should not be construed as a limitation of the present invention.

此外,术语“第一”、“第二”仅用于描述目的,而不能理解为指示或暗示相对重要性或者隐含指明所指示的技术特征的数量。由此,限定有“第一”、“第二”的特征可以明示或者隐含地包括一个或者更多个该特征。在本发明的描述中,“多个”的含义是两个或两个以上,除非另有明确具体的限定。In addition, the terms "first" and "second" are only used for descriptive purposes, and should not be construed as indicating or implying relative importance or implying the number of indicated technical features. Thus, a feature defined as "first" or "second" may expressly or implicitly include one or more of that feature. In the description of the present invention, "plurality" means two or more, unless otherwise expressly and specifically defined.

在本发明中,除非另有明确的规定和限定,术语“安装”、“相连”、“连接”、“固定”等术语应做广义理解,例如,可以是连接,也可以是可拆卸连接,或成一体;可以是机械连接,也可以是电连接;可以是直接相连,也可以通过中间媒介间接相连,可以是两个元件内部的连通或两个元件的相互作用关系。对于本领域的普通技术人员而言,可以根据具体情况理解上述术语在本发明中的具体含义。In the present invention, unless otherwise expressly specified and limited, the terms "installation", "connection", "connection", "fixing" and other terms should be understood in a broad sense, for example, it may be a connection or a detachable connection, It can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the internal communication between the two elements or the interaction relationship between the two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific situations.

在本发明中,除非另有明确的规定和限定,第一特征在第二特征之“上”或之“下”可以包括第一和第二特征直接接触,也可以包括第一和第二特征不是直接接触而是通过它们之间的另外的特征接触。而且,第一特征在第二特征“之上”、“上方”和“上面”包括第一特征在第二特征正上方和斜上方,或仅仅表示第一特征水平高度高于第二特征。第一特征在第二特征“之下”、“下方”和“下面”包括第一特征在第二特征正下方和斜下方,或仅仅表示第一特征水平高度小于第二特征。In the present invention, unless otherwise expressly specified and limited, a first feature "on" or "under" a second feature may include the first and second features in direct contact, or may include the first and second features Not directly but through additional features between them. Also, the first feature being "above", "over" and "above" the second feature includes the first feature being directly above and obliquely above the second feature, or simply means that the first feature is level higher than the second feature. The first feature is "below", "below" and "below" the second feature includes the first feature being directly below and diagonally below the second feature, or simply means that the first feature has a lower level than the second feature.

在本说明书的描述中,参考术语“一个实施例”、“一些实施例”、“示例”、“具体示例”、或“一些示例”等的描述意指结合该实施例或示例描述的具体特征、结构、材料或者特点包含于本发明的至少一个实施例或示例中。在本说明书中,对上述术语的示意性表述不应理解为必须针对的是相同的实施例或示例。而且,描述的具体特征、结构、材料或者特点可以在任何的一个或多个实施例或示例中以合适的方式结合。此外,本领域的技术人员可以将本说明书中描述的不同实施例或示例进行结合和组合。In the description of this specification, description with reference to the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples", etc., mean specific features described in connection with the embodiment or example , structure, material or feature is included in at least one embodiment or example of the present invention. In this specification, schematic representations of the above terms should not be construed as necessarily referring to the same embodiment or example. Furthermore, the particular features, structures, materials or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, those skilled in the art may combine and combine the different embodiments or examples described in this specification.

如图1~2所示的具体实施例,本实施例提供的双激光头开窗方法,可以运用在加工密集开窗以及精度高的电路板开窗过程中。As shown in the specific embodiments shown in FIGS. 1 to 2 , the double laser head window opening method provided in this embodiment can be used in the process of processing intensive window opening and high-precision circuit board window opening.

请参阅图1,上述的双激光头开窗方法,包括步骤S110~S120。Please refer to FIG. 1 , the above-mentioned double laser head window opening method includes steps S110 - S120 .

S110、采用紫外皮秒激光切割开窗的轮廓,以得到没有碳化的轮廓。S110, using an ultraviolet picosecond laser to cut the profile of the window to obtain a profile without carbonization.

在本实施例中,没有碳化的轮廓是指开窗区域的外边缘,且该边缘是干净且没有碳化的。In this example, the outline without carbonation refers to the outer edge of the fenestration area, and the edge is clean and free of carbonation.

具体地,采用紫外皮秒激光器10发射出紫外皮秒激光切割开窗的轮廓,以得到没有碳化的轮廓。开窗边缘无碳化和残留,基材不受损,不影响电路板性能和使用。Specifically, the contour of the window opening is cut by using the ultraviolet picosecond laser 10 to emit an ultraviolet picosecond laser, so as to obtain the contour without carbonization. There is no carbonization and residue on the edge of the window opening, the substrate is not damaged, and the performance and use of the circuit board are not affected.

S120、采用CO2激光对没有碳化的轮廓内的开窗区域去除材料,以对没有碳化的轮廓内的开窗区域进行开窗。S120, using a CO2 laser to remove material from the windowed area within the contour without carbonization, so as to open the windowed area within the contour without carbonization.

在本实施例中,采用CO2激光器20发射CO2激光对没有碳化的轮廓内的开窗区域进行材料去除,主要去除FPC焊盘上的覆盖膜层或阻焊油墨层。In this embodiment, the CO2 laser 20 is used to emit CO2 laser to remove the material in the window area within the outline without carbonization, mainly to remove the cover film layer or the solder resist ink layer on the FPC pad.

具体地,开窗的最小尺寸小于0.1mm。开窗的精度小于±10μm。Specifically, the minimum size of the fenestration is less than 0.1 mm. The fenestration accuracy is less than ±10μm.

采用CO2激光对开窗区域进行去除,由于基材的铜材料不吸收该激光,不会对基材造成影响,可加工密集开窗、精密开窗。The CO2 laser is used to remove the window area. Since the copper material of the base material does not absorb the laser, it will not affect the base material. It can process intensive window opening and precise window opening.

采用紫外皮秒激光以及CO2激光结合的方式进行开窗,可以提高整个开窗的效率以及速度。The combination of UV picosecond laser and CO2 laser for window opening can improve the efficiency and speed of the entire window opening.

上述的双激光开窗方法,通过紫外皮秒激光先把开窗的轮廓切透,得到干净且没有碳化的轮廓,对于开窗区域的内部填充用CO2激光直接去除材料,开窗边缘无碳化和残留,基材不受损,不影响电路板性能和使用,可加工密集孔,以解决现有技术中无法加工密集开窗、精密开窗、开窗效率低、速度慢的问题。The above-mentioned dual-laser window opening method first cuts the outline of the window through the ultraviolet picosecond laser to obtain a clean outline without carbonization. Residues, the substrate is not damaged, the performance and use of the circuit board are not affected, and dense holes can be processed to solve the problems of inability to process intensive windowing, precision windowing, low windowing efficiency and slow speed in the prior art.

在一实施例中,请参阅图2,还提供了双激光头开窗装置,包括CO2激光器10、紫外皮秒激光器10以及光学器件,CO2激光器20以及紫外皮秒激光器10分别与光学器件连接,光学器件的下方设有工作平台70。In one embodiment, referring to FIG. 2, a double-laser head window opening device is also provided, including a CO2 laser 10, an ultraviolet picosecond laser 10 and an optical device, and the CO2 laser 20 and the ultraviolet picosecond laser 10 are respectively connected with the optical device, A working platform 70 is provided below the optical device.

具体地,上述的装置还包括工控机80,工控机80分别与CO2激光器20、紫外皮秒激光器10以及工作平台70连接。工作平台70是一个滚动平台,可以由工控机80控制,以进行电路板的移动,CO2激光器20、紫外皮秒激光器10的激光发射等操作均是由工控机80控制。Specifically, the above-mentioned device further includes an industrial computer 80 , which is connected to the CO 2 laser 20 , the ultraviolet picosecond laser 10 and the working platform 70 respectively. The working platform 70 is a rolling platform, which can be controlled by the industrial computer 80 to move the circuit board.

请参阅图2,上述的光学器件包括至少一个反射镜40、至少一个扩束镜30、至少一个振镜50以及至少一个透镜60,扩束镜30分别与CO2激光器20以及紫外皮秒激光器10连接,扩束镜30以及振镜50分别与反射镜40连接,振镜50的下方连接有透镜60。Please refer to FIG. 2, the above-mentioned optical device includes at least one mirror 40, at least one beam expander 30, at least one galvanometer 50 and at least one lens 60, and the beam expander 30 is respectively connected with the CO2 laser 20 and the ultraviolet picosecond laser 10 , the beam expander 30 and the galvanometer 50 are respectively connected with the reflector 40 , and a lens 60 is connected below the galvanometer 50 .

具体地,工作平台70位于透镜60的下方。Specifically, the working platform 70 is located below the lens 60 .

具体地,振镜50位于反射镜40的下方。Specifically, the galvanometer 50 is located below the mirror 40 .

在本实施例中,反射镜40、扩束镜30、振镜50以及透镜60的个数分别为两个。In this embodiment, the number of the reflecting mirror 40 , the beam expander 30 , the galvanometer 50 and the lens 60 is two respectively.

具体地,紫外皮秒激光器10提供紫外皮秒激光束,发射的激光束经超高频光扩束镜30,扩束镜30用于扩大平行输入光束的直径至较大的平行输出光束,平行输出光束传输至反射镜,经反射镜偏转后进入振镜50,进而由透镜60聚焦并投射至设置于工作平台70表面的待加工件;CO2激光器20提供CO2激光束,发射的激光束经超高频光扩束镜30,扩束镜30用于扩大平行输入光束的直径至较大的平行输出光束,平行输出光束传输至反射镜40,经反射镜40偏转后进入振镜50,进而由透镜60聚焦并投射至设置于工作平台70表面的待加工件。Specifically, the ultraviolet picosecond laser 10 provides an ultraviolet picosecond laser beam, and the emitted laser beam is passed through an ultra-high frequency optical beam expander 30. The beam expander 30 is used to expand the diameter of the parallel input beam to a larger parallel output beam, and the parallel output beam It is transmitted to the reflector, deflected by the reflector, and then enters the galvanometer 50, which is then focused by the lens 60 and projected to the workpiece to be processed on the surface of the working platform 70; the CO2 laser 20 provides a CO2 laser beam, and the emitted laser beam is subjected to ultra-high frequency optical expansion. The beam mirror 30 and the beam expander 30 are used to expand the diameter of the parallel input beam to a larger parallel output beam, and the parallel output beam is transmitted to the reflector 40, which is deflected by the reflector 40 and then enters the galvanometer 50, which is then focused and focused by the lens 60. Projected to the workpiece to be processed disposed on the surface of the work platform 70 .

光学器件包括扩束镜30、准直镜、反射镜40、振镜50、物镜、透镜60中的一种或多种。The optical device includes one or more of a beam expander 30 , a collimating mirror, a reflecting mirror 40 , a galvanometer 50 , an objective lens, and a lens 60 .

采用CO2激光器20以及紫外皮秒激光器10进行结合开窗,开窗边缘无碳化和残留,基材不受损,不影响电路板性能和使用,可加工密集开窗、精密开窗,具有切割速度快、成本低、设备简单灵活的优点,切割速度有了大幅提升,以解决现有技术中无法加工密集开窗、精密开窗、开窗效率低、速度慢的问题。Using CO2 laser 20 and UV picosecond laser 10 for combined windowing, there is no carbonization and residue on the edge of the window, the substrate is not damaged, and the performance and use of the circuit board are not affected. It can process intensive windowing, precision windowing, and cutting speed. With the advantages of fast, low cost, simple and flexible equipment, the cutting speed has been greatly improved to solve the problems of inability to process intensive window opening, precise window opening, low window opening efficiency and slow speed in the prior art.

上述仅以实施例来进一步说明本发明的技术内容,以便于读者更容易理解,但不代表本发明的实施方式仅限于此,任何依本发明所做的技术延伸或再创造,均受本发明的保护。本发明的保护范围以权利要求书为准。The above only uses examples to further illustrate the technical content of the present invention, so that readers can understand it more easily, but it does not mean that the embodiments of the present invention are limited to this, and any technical extension or re-creation made according to the present invention is subject to the protection of. The protection scope of the present invention is subject to the claims.

Claims (10)

1.双激光头开窗方法,其特征在于,包括:1. The double laser head window opening method is characterized in that, comprising: 采用紫外皮秒激光切割开窗的轮廓,以得到没有碳化的轮廓;Use UV picosecond laser to cut the profile of the window to get the profile without carbonization; 采用CO2激光对没有碳化的轮廓内的开窗区域去除材料,以对没有碳化的轮廓内的开窗区域进行开窗。A CO2 laser was used to remove material from the fenestrated areas within the non-carbonized contours to fenestrate the fenestrated areas within the non-carbonized contours. 2.根据权利要求1所述的双激光头开窗方法,其特征在于,所述采用紫外皮秒激光切割开窗的轮廓,以得到没有碳化的轮廓,包括:2. The method for opening a window with dual laser heads according to claim 1, wherein the outline of the window opening is cut by an ultraviolet picosecond laser to obtain an outline without carbonization, comprising: 采用紫外皮秒激光器发射出紫外皮秒激光切割开窗的轮廓,以得到没有碳化的轮廓。A UV picosecond laser is used to emit a UV picosecond laser to cut the profile of the fenestration to obtain a profile without carbonization. 3.根据权利要求1所述的双激光头开窗方法,其特征在于,所述采用CO2激光对没有碳化的轮廓内的开窗区域去除材料,以对没有碳化的轮廓内的开窗区域进行开窗,包括:3. The double laser head window opening method according to claim 1, characterized in that, the CO2 laser is used to remove material from the window opening area in the outline without carbonization, so that the window opening area in the outline without carbonization is removed. Open windows, including: 采用CO2激光器发射CO2激光对没有碳化的轮廓内的开窗区域去除材料,以对没有碳化的轮廓内的开窗区域进行开窗。A CO2 laser is used to emit a CO2 laser to remove material from the fenestration area within the contour without carbonization to fenestrate the fenestration area within the contour without carbonization. 4.根据权利要求3所述的双激光头开窗方法,其特征在于,开窗的最小尺寸小于0.1mm。4 . The method for opening a window with dual laser heads according to claim 3 , wherein the minimum size of the opening window is less than 0.1 mm. 5 . 5.根据权利要求4所述的双激光头开窗方法,其特征在于,开窗的精度小于±10μm。5 . The method for opening a window with dual laser heads according to claim 4 , wherein the precision of opening the window is less than ±10 μm. 6 . 6.双激光头开窗装置,其特征在于,包括CO2激光器、紫外皮秒激光器以及光学器件,所述CO2激光器以及所述紫外皮秒激光器分别与所述光学器件连接,所述光学器件的下方设有工作平台。6. A double-laser head window opening device, characterized in that it comprises a CO2 laser, an ultraviolet picosecond laser and an optical device, the CO2 laser and the ultraviolet picosecond laser are respectively connected with the optical device, and the lower part of the optical device is connected to the optical device. There is a working platform. 7.根据权利要求6所述的双激光头开窗装置,其特征在于,还包括工控机,所述工控机分别与所述CO2激光器、所述紫外皮秒激光器以及工作平台连接。7 . The double laser head window opening device according to claim 6 , further comprising an industrial computer, which is respectively connected to the CO2 laser, the ultraviolet picosecond laser and the working platform. 8 . 8.根据权利要求7所述的双激光头开窗装置,其特征在于,所述光学器件包括至少一个反射镜、至少一个扩束镜、至少一个振镜以及至少一个透镜,所述扩束镜分别与所述CO2激光器以及所述紫外皮秒激光器连接,所述扩束镜以及所述振镜分别与所述反射镜连接,所述振镜的下方连接有所述透镜。8. The double laser head window opening device according to claim 7, wherein the optical device comprises at least one reflecting mirror, at least one beam expander, at least one galvanometer and at least one lens, the beam expander are respectively connected with the CO2 laser and the ultraviolet picosecond laser, the beam expander and the galvanometer are respectively connected with the reflection mirror, and the lens is connected under the galvanometer. 9.根据权利要求8所述的双激光头开窗装置,其特征在于,所述工作平台位于所述透镜的下方。9 . The double laser head window opening device according to claim 8 , wherein the working platform is located below the lens. 10 . 10.根据权利要求9所述的双激光头开窗装置,其特征在于,所述振镜位于所述反射镜的下方。10 . The double laser head window opening device according to claim 9 , wherein the galvanometer mirror is located below the reflection mirror. 11 .
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