CN111992893A - 激光加工装置 - Google Patents

激光加工装置 Download PDF

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Publication number
CN111992893A
CN111992893A CN202010277835.7A CN202010277835A CN111992893A CN 111992893 A CN111992893 A CN 111992893A CN 202010277835 A CN202010277835 A CN 202010277835A CN 111992893 A CN111992893 A CN 111992893A
Authority
CN
China
Prior art keywords
optical system
processing
mask
laser
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010277835.7A
Other languages
English (en)
Chinese (zh)
Inventor
中本裕见
船山昌彦
鹫山裕之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Orc Manufacturing Co Ltd
Original Assignee
Orc Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Orc Manufacturing Co Ltd filed Critical Orc Manufacturing Co Ltd
Publication of CN111992893A publication Critical patent/CN111992893A/zh
Pending legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/083—Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
    • B23K26/0661—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks disposed on the workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08—Devices involving relative movement between laser beam and workpiece
    • B23K26/0869—Devices involving movement of the laser head in at least one axial direction
    • B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Laser Beam Processing (AREA)
  • Dicing (AREA)
CN202010277835.7A 2019-05-27 2020-04-10 激光加工装置 Pending CN111992893A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019098389A JP7278868B2 (ja) 2019-05-27 2019-05-27 レーザ加工装置
JP2019-098389 2019-05-27

Publications (1)

Publication Number Publication Date
CN111992893A true CN111992893A (zh) 2020-11-27

Family

ID=73461720

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010277835.7A Pending CN111992893A (zh) 2019-05-27 2020-04-10 激光加工装置

Country Status (4)

Country Link
JP (1) JP7278868B2 (ja)
KR (1) KR102627053B1 (ja)
CN (1) CN111992893A (ja)
TW (1) TW202042948A (ja)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1691293A (zh) * 2004-04-23 2005-11-02 株式会社半导体能源研究所 激光照射设备和制造半导体器件的方法
KR20060012398A (ko) * 2004-08-03 2006-02-08 주식회사 이오테크닉스 오차 보정이 가능한 폴리곤 미러를 이용한 레이저 가공장치
JP2008068275A (ja) * 2006-09-13 2008-03-27 Hiraide Seimitsu:Kk ビーム加工装置およびビーム観察装置
JP2008147242A (ja) * 2006-12-06 2008-06-26 Hitachi Via Mechanics Ltd プリント基板のレーザ加工方法
CN101878088A (zh) * 2007-11-27 2010-11-03 三星钻石工业股份有限公司 激光加工装置
CN103358018A (zh) * 2012-03-28 2013-10-23 东丽工程株式会社 激光光轴校准方法和利用该方法的激光加工装置
CN105026098A (zh) * 2013-02-22 2015-11-04 古河电气工业株式会社 激光焊接装置以及激光焊接方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001079678A (ja) 1999-09-13 2001-03-27 Sumitomo Heavy Ind Ltd レーザ穴あけ加工方法及び加工装置
JP2001096390A (ja) 1999-09-29 2001-04-10 Sumitomo Heavy Ind Ltd レーザ加工装置用コンタクトマスクのクリーニング方法及びマスククリーニング機構付きレーザ加工装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1691293A (zh) * 2004-04-23 2005-11-02 株式会社半导体能源研究所 激光照射设备和制造半导体器件的方法
KR20060012398A (ko) * 2004-08-03 2006-02-08 주식회사 이오테크닉스 오차 보정이 가능한 폴리곤 미러를 이용한 레이저 가공장치
JP2008068275A (ja) * 2006-09-13 2008-03-27 Hiraide Seimitsu:Kk ビーム加工装置およびビーム観察装置
JP2008147242A (ja) * 2006-12-06 2008-06-26 Hitachi Via Mechanics Ltd プリント基板のレーザ加工方法
CN101878088A (zh) * 2007-11-27 2010-11-03 三星钻石工业股份有限公司 激光加工装置
CN103358018A (zh) * 2012-03-28 2013-10-23 东丽工程株式会社 激光光轴校准方法和利用该方法的激光加工装置
CN105026098A (zh) * 2013-02-22 2015-11-04 古河电气工业株式会社 激光焊接装置以及激光焊接方法

Also Published As

Publication number Publication date
TW202042948A (zh) 2020-12-01
KR20200136304A (ko) 2020-12-07
KR102627053B1 (ko) 2024-01-19
JP2020192550A (ja) 2020-12-03
JP7278868B2 (ja) 2023-05-22

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