CN111921287A - 一种半导体生产用空气净化装置 - Google Patents
一种半导体生产用空气净化装置 Download PDFInfo
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- CN111921287A CN111921287A CN202011087224.2A CN202011087224A CN111921287A CN 111921287 A CN111921287 A CN 111921287A CN 202011087224 A CN202011087224 A CN 202011087224A CN 111921287 A CN111921287 A CN 111921287A
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- shell
- air inlet
- baffle
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
- B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/06—Polluted air
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Abstract
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202011087224.2A CN111921287B (zh) | 2020-10-13 | 2020-10-13 | 一种半导体生产用空气净化装置 |
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CN202011087224.2A CN111921287B (zh) | 2020-10-13 | 2020-10-13 | 一种半导体生产用空气净化装置 |
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CN111921287A true CN111921287A (zh) | 2020-11-13 |
CN111921287B CN111921287B (zh) | 2021-05-18 |
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CN202011087224.2A Active CN111921287B (zh) | 2020-10-13 | 2020-10-13 | 一种半导体生产用空气净化装置 |
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CN (1) | CN111921287B (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170361258A1 (en) * | 2013-06-24 | 2017-12-21 | Pecofacet (Us), Inc. | Filter elements, coalescing baffles, filtration vessel and methods |
EP3269440A1 (de) * | 2016-07-12 | 2018-01-17 | Filtration Group GmbH | Steuereinrichtung für eine reinigungseinrichtung einer filtereinrichtung |
CN207610322U (zh) * | 2017-11-30 | 2018-07-13 | 浙江宝智环境设备科技有限公司 | 带切换风阀的新风机 |
CN108458130A (zh) * | 2017-02-17 | 2018-08-28 | 美的集团股份有限公司 | 用于流体管道中的流道切换装置和空气处理设备 |
CN110812970A (zh) * | 2019-11-22 | 2020-02-21 | 深圳市琦美创科技有限公司 | 一种用于工业生产车间的高效型通风除尘设备 |
CN210638189U (zh) * | 2019-07-09 | 2020-05-29 | 青岛海尔空调器有限总公司 | 用于空调室外机的送风组件及空调室外机 |
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2020
- 2020-10-13 CN CN202011087224.2A patent/CN111921287B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20170361258A1 (en) * | 2013-06-24 | 2017-12-21 | Pecofacet (Us), Inc. | Filter elements, coalescing baffles, filtration vessel and methods |
EP3269440A1 (de) * | 2016-07-12 | 2018-01-17 | Filtration Group GmbH | Steuereinrichtung für eine reinigungseinrichtung einer filtereinrichtung |
CN108458130A (zh) * | 2017-02-17 | 2018-08-28 | 美的集团股份有限公司 | 用于流体管道中的流道切换装置和空气处理设备 |
CN207610322U (zh) * | 2017-11-30 | 2018-07-13 | 浙江宝智环境设备科技有限公司 | 带切换风阀的新风机 |
CN210638189U (zh) * | 2019-07-09 | 2020-05-29 | 青岛海尔空调器有限总公司 | 用于空调室外机的送风组件及空调室外机 |
CN110812970A (zh) * | 2019-11-22 | 2020-02-21 | 深圳市琦美创科技有限公司 | 一种用于工业生产车间的高效型通风除尘设备 |
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CN111921287B (zh) | 2021-05-18 |
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CB03 | Change of inventor or designer information |
Inventor after: Li Songhe Inventor after: Liu Jun Inventor after: Liu Ruixin Inventor after: Lin Mingqing Inventor before: Lin Mingqing |
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CB03 | Change of inventor or designer information | ||
TA01 | Transfer of patent application right |
Effective date of registration: 20210428 Address after: 271000 No.10, Longji science and Technology City, yitianmen street, beijipo, development zone, Tai'an City, Shandong Province Applicant after: Tot semiconductor (Shandong) Co.,Ltd. Address before: Room 2579, Tianhe building, 163 Yingchun street, Laishan District, Yantai City, Shandong Province Applicant before: Yantai Beilun Environmental Protection Technology Co.,Ltd. |
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