CN111826714B - 基于射频电源施加偏压以增强cvd金刚石异质外延形核的方法 - Google Patents
基于射频电源施加偏压以增强cvd金刚石异质外延形核的方法 Download PDFInfo
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- CN111826714B CN111826714B CN202010733639.6A CN202010733639A CN111826714B CN 111826714 B CN111826714 B CN 111826714B CN 202010733639 A CN202010733639 A CN 202010733639A CN 111826714 B CN111826714 B CN 111826714B
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/04—Diamond
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/272—Diamond only using DC, AC or RF discharges
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
- C23C16/27—Diamond only
- C23C16/274—Diamond only using microwave discharges
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
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- Crystallography & Structural Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
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CN202010733639.6A CN111826714B (zh) | 2020-07-27 | 2020-07-27 | 基于射频电源施加偏压以增强cvd金刚石异质外延形核的方法 |
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CN202010733639.6A CN111826714B (zh) | 2020-07-27 | 2020-07-27 | 基于射频电源施加偏压以增强cvd金刚石异质外延形核的方法 |
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CN111826714A CN111826714A (zh) | 2020-10-27 |
CN111826714B true CN111826714B (zh) | 2021-10-01 |
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Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
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CN112609240B (zh) * | 2020-12-11 | 2022-05-24 | 哈尔滨工业大学 | 基于复合结构样品台提高金刚石异质外延大尺寸形核均匀性的方法 |
CN112695382B (zh) * | 2020-12-14 | 2022-03-15 | 哈尔滨工业大学 | 基于网格化结构电极提高金刚石异质外延形核均匀性的方法 |
CN113430642B (zh) * | 2021-06-29 | 2022-10-28 | 哈尔滨工业大学 | 降低异质外延偏压阈值的方法 |
CN113832541B (zh) * | 2021-09-29 | 2024-02-09 | 太原理工大学 | 用于外延生长大尺寸单晶金刚石的复合衬底的制备方法 |
Citations (5)
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WO2010100702A1 (ja) * | 2009-03-04 | 2010-09-10 | 富士電機ホールディングス株式会社 | 成膜方法及び成膜装置 |
CN105839071A (zh) * | 2016-04-19 | 2016-08-10 | 中国科学院大学 | 双频电感耦合射频等离子体喷射沉积金刚石的方法 |
CN206109529U (zh) * | 2016-09-14 | 2017-04-19 | 中国科学院金属研究所 | 一种高功率大面积偏压微波等离子体金刚石薄膜沉积装置 |
CN108707965A (zh) * | 2018-06-15 | 2018-10-26 | 西安碳星半导体科技有限公司 | 一种cvd单晶金刚石异质外延衬底的结构及制备方法 |
CN111206280A (zh) * | 2020-01-07 | 2020-05-29 | 北京科技大学 | 一种高质量大尺寸单晶金刚石外延生长的方法 |
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2020
- 2020-07-27 CN CN202010733639.6A patent/CN111826714B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2010100702A1 (ja) * | 2009-03-04 | 2010-09-10 | 富士電機ホールディングス株式会社 | 成膜方法及び成膜装置 |
CN105839071A (zh) * | 2016-04-19 | 2016-08-10 | 中国科学院大学 | 双频电感耦合射频等离子体喷射沉积金刚石的方法 |
CN206109529U (zh) * | 2016-09-14 | 2017-04-19 | 中国科学院金属研究所 | 一种高功率大面积偏压微波等离子体金刚石薄膜沉积装置 |
CN108707965A (zh) * | 2018-06-15 | 2018-10-26 | 西安碳星半导体科技有限公司 | 一种cvd单晶金刚石异质外延衬底的结构及制备方法 |
CN111206280A (zh) * | 2020-01-07 | 2020-05-29 | 北京科技大学 | 一种高质量大尺寸单晶金刚石外延生长的方法 |
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