CN1116586C - 光学位移检测装置 - Google Patents
光学位移检测装置 Download PDFInfo
- Publication number
- CN1116586C CN1116586C CN97122401A CN97122401A CN1116586C CN 1116586 C CN1116586 C CN 1116586C CN 97122401 A CN97122401 A CN 97122401A CN 97122401 A CN97122401 A CN 97122401A CN 1116586 C CN1116586 C CN 1116586C
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- China
- Prior art keywords
- light
- parts
- grating
- optical
- receiving sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
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Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
- G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
- G01D5/34715—Scale reading or illumination devices
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP285541/96 | 1996-10-28 | ||
JP285541/1996 | 1996-10-28 | ||
JP8285541A JPH10132612A (ja) | 1996-10-28 | 1996-10-28 | 光学式変位検出装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1183546A CN1183546A (zh) | 1998-06-03 |
CN1116586C true CN1116586C (zh) | 2003-07-30 |
Family
ID=17692882
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN97122401A Expired - Lifetime CN1116586C (zh) | 1996-10-28 | 1997-10-28 | 光学位移检测装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5841133A (de) |
EP (1) | EP0838665B1 (de) |
JP (1) | JPH10132612A (de) |
CN (1) | CN1116586C (de) |
DE (1) | DE69715554T2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100375890C (zh) * | 2005-09-09 | 2008-03-19 | 清华大学 | 含有可调零的gmr芯片的磁位移传感器 |
Families Citing this family (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6166723A (en) * | 1995-11-17 | 2000-12-26 | Immersion Corporation | Mouse interface device providing force feedback |
US6374255B1 (en) | 1996-05-21 | 2002-04-16 | Immersion Corporation | Haptic authoring |
AT410485B (de) * | 1997-07-30 | 2003-05-26 | Rsf Elektronik Gmbh | Positionsmesseinrichtung |
US6256011B1 (en) | 1997-12-03 | 2001-07-03 | Immersion Corporation | Multi-function control device with force feedback |
US6704683B1 (en) | 1998-04-28 | 2004-03-09 | Immersion Corporation | Direct velocity estimation for encoders using nonlinear period measurement |
WO1999056087A1 (en) * | 1998-04-30 | 1999-11-04 | Immersion Corporation | Encoder with improved sensing resolution |
DE19855828A1 (de) | 1998-12-03 | 2000-06-08 | Heidenhain Gmbh Dr Johannes | Dreidimensionales Meßmodul |
US6175109B1 (en) * | 1998-12-16 | 2001-01-16 | Renco Encoders, Inc. | Encoder for providing incremental and absolute position data |
DE19921309A1 (de) * | 1999-05-07 | 2000-11-09 | Heidenhain Gmbh Dr Johannes | Abtasteinheit für eine optische Positionsmeßeinrichtung |
US6492637B1 (en) * | 1999-05-10 | 2002-12-10 | Citizen Watch Co., Ltd. | Dimension measuring device |
US6564168B1 (en) | 1999-09-14 | 2003-05-13 | Immersion Corporation | High-resolution optical encoder with phased-array photodetectors |
US6279248B1 (en) | 1999-09-22 | 2001-08-28 | Central Purchasing, Inc. | Digital measuring system having a multi-row encoder disk |
CH706182B1 (de) * | 1999-11-18 | 2013-09-13 | Baumer Innotec Ag | Winkel- oder Weg-Messvorrichtung. |
US6693626B1 (en) | 1999-12-07 | 2004-02-17 | Immersion Corporation | Haptic feedback using a keyboard device |
DE69900267T2 (de) * | 1999-12-15 | 2002-06-27 | Tesa Brown & Sharpe Sa | Positionsgeber |
JP2001201308A (ja) * | 2000-01-21 | 2001-07-27 | Mitsutoyo Corp | 静電容量式変位検出装置及びその製造方法 |
DE10029380A1 (de) * | 2000-06-20 | 2002-01-03 | Pwb Ruhlatec Ind Prod Gmbh | Taktlineal oder Taktscheibe |
JP2002228491A (ja) * | 2001-02-05 | 2002-08-14 | Mitsutoyo Corp | 光学式エンコーダ用発光光源装置 |
JP4250894B2 (ja) * | 2001-12-28 | 2009-04-08 | 富士ゼロックス株式会社 | 光学式エンコーダ及びエンコーダ用スケール |
JP2003227735A (ja) * | 2002-01-31 | 2003-08-15 | Olympus Optical Co Ltd | 光学式エンコーダーおよびそのセンサーヘッド |
JP3743426B2 (ja) | 2002-02-13 | 2006-02-08 | オムロン株式会社 | 光学式エンコーダ |
US6904823B2 (en) | 2002-04-03 | 2005-06-14 | Immersion Corporation | Haptic shifting devices |
DE10320991B4 (de) * | 2002-08-03 | 2017-10-19 | Dr. Johannes Heidenhain Gmbh | Optische Positionsmesseinrichtung |
DE10244234A1 (de) * | 2002-09-23 | 2004-03-25 | Dr. Johannes Heidenhain Gmbh | Positionsmesseinrichtung |
WO2004036405A2 (en) | 2002-10-15 | 2004-04-29 | Immersion Corporation | Products and processes for providing force sensations in a user interface |
JP4350419B2 (ja) * | 2003-05-16 | 2009-10-21 | 株式会社ミツトヨ | 光電式エンコーダ |
GB2418475B (en) | 2003-06-09 | 2007-10-24 | Immersion Corp | Interactive gaming systems with haptic feedback |
JP4416544B2 (ja) | 2004-03-12 | 2010-02-17 | 株式会社ミツトヨ | 光学式変位測定装置 |
US7466416B2 (en) * | 2004-04-30 | 2008-12-16 | X-Rite, Inc. | Color measurement system |
JP4365292B2 (ja) * | 2004-09-02 | 2009-11-18 | 株式会社カイジョー | ワイヤボンディングにおけるボール圧着厚の測定方法 |
US8157650B2 (en) | 2006-09-13 | 2012-04-17 | Immersion Corporation | Systems and methods for casino gaming haptics |
US9440812B2 (en) | 2007-01-11 | 2016-09-13 | 3M Innovative Properties Company | Web longitudinal position sensor |
KR20100037089A (ko) | 2007-06-19 | 2010-04-08 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 변위 스케일을 제조하는 시스템 및 방법 |
WO2008157623A1 (en) | 2007-06-19 | 2008-12-24 | 3M Innovative Properties Company | Systems and methods for indicating the position of a web |
US9486292B2 (en) | 2008-02-14 | 2016-11-08 | Immersion Corporation | Systems and methods for real-time winding analysis for knot detection |
US7875844B2 (en) * | 2008-09-02 | 2011-01-25 | Delta Electronics, Inc. | Absolute-type encoder and method for detecting absolute position |
JP5592397B2 (ja) | 2008-12-29 | 2014-09-17 | スリーエム イノベイティブ プロパティズ カンパニー | ウェブ基準を使用して位相固定したウェブ位置信号 |
BRPI0918692A2 (pt) | 2008-12-30 | 2015-12-01 | 3M Innovative Properties Co | aparelho e método para a produção de fiduciais sobre um substrato |
US9104791B2 (en) | 2009-05-28 | 2015-08-11 | Immersion Corporation | Systems and methods for editing a model of a physical system for a simulation |
US8841766B2 (en) | 2009-07-30 | 2014-09-23 | Taiwan Semiconductor Manufacturing Company, Ltd. | Cu pillar bump with non-metal sidewall protection structure |
US9018758B2 (en) | 2010-06-02 | 2015-04-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Cu pillar bump with non-metal sidewall spacer and metal top cap |
US8902434B2 (en) | 2010-08-19 | 2014-12-02 | Elesta Relays Gmbh | Position measuring device and method for determining an absolute position |
CN102840841A (zh) * | 2011-06-25 | 2012-12-26 | 四川大学 | 光栅位置调节装置 |
CN102706373B (zh) * | 2012-05-24 | 2015-01-21 | 广东工业大学 | 一种单轨绝对光栅尺及其图像编码方法 |
CN103063239B (zh) * | 2012-12-28 | 2016-03-23 | 广东工业大学 | 一种绝对光栅尺测试平台及其测试方法 |
US9866924B2 (en) | 2013-03-14 | 2018-01-09 | Immersion Corporation | Systems and methods for enhanced television interaction |
JP5853115B1 (ja) * | 2015-05-25 | 2016-02-09 | 株式会社Nttファシリティーズ | 変位計、位置検出方法及びプログラム |
US10451704B2 (en) | 2016-02-02 | 2019-10-22 | Kenneth Perlin | Tracking apparatus using light through rotating transmissive diffraction patterns, and method |
JP6690998B2 (ja) * | 2016-05-27 | 2020-04-28 | 株式会社ミツトヨ | 発光ユニット、発光受光ユニットおよび光電式エンコーダ |
JP2018066639A (ja) | 2016-10-19 | 2018-04-26 | 株式会社ミツトヨ | 光源装置およびこれを備えた光電式エンコーダ |
US10648839B2 (en) | 2017-05-22 | 2020-05-12 | Mitutoyo Corporation | Photoelectric encoder |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1405362A (en) * | 1973-03-19 | 1975-09-10 | Zeiss Jena Veb Carl | Device for positioning slides |
JPS60171418A (ja) * | 1984-02-17 | 1985-09-04 | Matsushita Electric Ind Co Ltd | エンコ−ダ |
DE3444878A1 (de) * | 1984-12-08 | 1986-06-12 | Bodenseewerk Gerätetechnik GmbH, 7770 Überlingen | Abtastkopf fuer schrittgeber, insbesondere winkelschrittgeber |
JPH01136021A (ja) * | 1987-11-20 | 1989-05-29 | Mitsutoyo Corp | 光学式変位検出器 |
US5283434A (en) * | 1991-12-20 | 1994-02-01 | Canon Kabushiki Kaisha | Displacement detecting device with integral optics |
EP0564683B1 (de) * | 1992-04-08 | 2000-12-13 | Dr. Johannes Heidenhain GmbH | Optoelektronisches Weg-, Winkel- oder Rotationsmessgerät |
DE9305151U1 (de) * | 1993-04-03 | 1993-06-09 | Dr. Johannes Heidenhain Gmbh, 8225 Traunreut | Lichtelektrische Längen- oder Winkelmeßeinrichtung |
BE1007513A3 (nl) * | 1993-09-13 | 1995-07-18 | Philips Electronics Nv | Meetinrichting voor het bepalen van de verplaatsing van een beweegbaar voorwerp. |
-
1996
- 1996-10-28 JP JP8285541A patent/JPH10132612A/ja active Pending
-
1997
- 1997-10-27 US US08/958,154 patent/US5841133A/en not_active Expired - Lifetime
- 1997-10-28 EP EP97118720A patent/EP0838665B1/de not_active Revoked
- 1997-10-28 CN CN97122401A patent/CN1116586C/zh not_active Expired - Lifetime
- 1997-10-28 DE DE69715554T patent/DE69715554T2/de not_active Revoked
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100375890C (zh) * | 2005-09-09 | 2008-03-19 | 清华大学 | 含有可调零的gmr芯片的磁位移传感器 |
Also Published As
Publication number | Publication date |
---|---|
US5841133A (en) | 1998-11-24 |
JPH10132612A (ja) | 1998-05-22 |
EP0838665B1 (de) | 2002-09-18 |
DE69715554T2 (de) | 2003-05-15 |
DE69715554D1 (de) | 2002-10-24 |
CN1183546A (zh) | 1998-06-03 |
EP0838665A1 (de) | 1998-04-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CX01 | Expiry of patent term | ||
CX01 | Expiry of patent term |
Granted publication date: 20030730 |