CN1253698C - 光发射接收复合单元和使用它的位移检测装置 - Google Patents
光发射接收复合单元和使用它的位移检测装置 Download PDFInfo
- Publication number
- CN1253698C CN1253698C CNB028009045A CN02800904A CN1253698C CN 1253698 C CN1253698 C CN 1253698C CN B028009045 A CNB028009045 A CN B028009045A CN 02800904 A CN02800904 A CN 02800904A CN 1253698 C CN1253698 C CN 1253698C
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- China
- Prior art keywords
- light
- mentioned
- polarization
- light source
- recombiner unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 27
- 230000003287 optical effect Effects 0.000 claims abstract description 39
- 230000010287 polarization Effects 0.000 claims description 72
- 230000008859 change Effects 0.000 claims description 12
- 230000005540 biological transmission Effects 0.000 claims description 4
- 238000005259 measurement Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 35
- 239000000758 substrate Substances 0.000 description 15
- 238000001514 detection method Methods 0.000 description 13
- 238000000926 separation method Methods 0.000 description 8
- 239000002131 composite material Substances 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000000034 method Methods 0.000 description 4
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
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- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
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- 238000002310 reflectometry Methods 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/36—Forming the light into pulses
- G01D5/38—Forming the light into pulses by diffraction gratings
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Transform (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims (6)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP026743/2001 | 2001-02-02 | ||
JP2001026743A JP4862108B2 (ja) | 2001-02-02 | 2001-02-02 | 受発光複合ユニット及びこれを用いた変位検出装置 |
JP26743/01 | 2001-02-02 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1460174A CN1460174A (zh) | 2003-12-03 |
CN1253698C true CN1253698C (zh) | 2006-04-26 |
Family
ID=18891509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB028009045A Expired - Fee Related CN1253698C (zh) | 2001-02-02 | 2002-02-01 | 光发射接收复合单元和使用它的位移检测装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US6980303B2 (zh) |
EP (1) | EP1286139B1 (zh) |
JP (1) | JP4862108B2 (zh) |
KR (1) | KR20030003705A (zh) |
CN (1) | CN1253698C (zh) |
WO (1) | WO2002063246A1 (zh) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9943847B2 (en) | 2002-04-17 | 2018-04-17 | Cytonome/St, Llc | Microfluidic system including a bubble valve for regulating fluid flow through a microchannel |
US7187449B2 (en) | 2002-04-26 | 2007-03-06 | Sony Precision Technology Inc. | Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device |
DE10325108A1 (de) * | 2003-06-03 | 2005-01-05 | Trw Automotive Electronics & Components Gmbh & Co. Kg | Optoelektronischer Drehwinkelsensor |
US7298478B2 (en) | 2003-08-14 | 2007-11-20 | Cytonome, Inc. | Optical detector for a particle sorting system |
JP4751032B2 (ja) | 2004-04-22 | 2011-08-17 | 株式会社森精機製作所 | 変位検出装置 |
US7466416B2 (en) * | 2004-04-30 | 2008-12-16 | X-Rite, Inc. | Color measurement system |
US7289227B2 (en) * | 2004-10-01 | 2007-10-30 | Nomos Corporation | System and tracker for tracking an object, and related methods |
US9260693B2 (en) | 2004-12-03 | 2016-02-16 | Cytonome/St, Llc | Actuation of parallel microfluidic arrays |
CA2588753C (en) | 2004-12-03 | 2014-02-18 | Cytonome, Inc. | Unitary cartridge for particle processing |
US20060145066A1 (en) * | 2004-12-13 | 2006-07-06 | Hideaki Tamiya | Displacement detection apparatus, displacement gauging apparatus and fixed point detection apparatus |
JP5095475B2 (ja) * | 2008-04-14 | 2012-12-12 | 株式会社森精機製作所 | 光学式変位測定装置 |
NL2005545A (en) | 2009-11-17 | 2011-05-18 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
NL2006118A (en) * | 2010-03-03 | 2011-09-06 | Asml Netherlands Bv | Lithographic apparatus and method for measuring a position. |
CN103414519B (zh) * | 2013-07-01 | 2016-09-07 | 中国科学院上海光学精密机械研究所 | 光控微波波束形成器 |
TW201508361A (zh) * | 2013-08-27 | 2015-03-01 | 鴻海精密工業股份有限公司 | 透鏡單元以及光通訊模組 |
CN104949616A (zh) * | 2014-03-25 | 2015-09-30 | 上海微电子装备有限公司 | 回射式光栅尺测量系统及其应用 |
JP2018066629A (ja) * | 2016-10-19 | 2018-04-26 | 太陽誘電株式会社 | ロードセル |
CN113917780B (zh) * | 2021-10-20 | 2023-02-14 | 深圳怡趣科技有限公司 | 投影仪光路测试器 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5822335B2 (ja) | 1975-07-29 | 1983-05-09 | 呉羽化学工業株式会社 | ソウコウフイル゜ノヨウセツホウホウ オヨビソウチ |
JPS63247616A (ja) * | 1987-04-03 | 1988-10-14 | Canon Inc | エンコ−ダ− |
US5051579A (en) | 1987-04-03 | 1991-09-24 | Canon Kabushiki Kaisha | Optical scale encoder with light intensity alarm |
JPH068726B2 (ja) | 1987-05-11 | 1994-02-02 | キヤノン株式会社 | 測長装置 |
EP0555943B1 (en) * | 1988-04-06 | 1996-06-19 | Mitsubishi Denki Kabushiki Kaisha | Optical distance detector |
JPH04295648A (ja) * | 1991-03-25 | 1992-10-20 | Ricoh Co Ltd | 光情報記録再生装置 |
JPH05215574A (ja) * | 1992-02-06 | 1993-08-24 | Olympus Optical Co Ltd | 光学式位置検出装置 |
JPH0642914A (ja) * | 1992-07-24 | 1994-02-18 | Canon Inc | 変位測定装置 |
JPH11134666A (ja) * | 1997-10-29 | 1999-05-21 | Sony Corp | 光学ヘッド並びに記録及び/又は再生装置 |
JP4023923B2 (ja) * | 1998-07-02 | 2007-12-19 | ソニーマニュファクチュアリングシステムズ株式会社 | 光学式変位測定装置 |
JP2001273650A (ja) * | 2000-03-29 | 2001-10-05 | Optware:Kk | 光ピックアップ装置 |
JP2003202205A (ja) * | 2001-12-28 | 2003-07-18 | Mitsubishi Electric Corp | 光学式距離センサ |
US7187449B2 (en) * | 2002-04-26 | 2007-03-06 | Sony Precision Technology Inc. | Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device |
-
2001
- 2001-02-02 JP JP2001026743A patent/JP4862108B2/ja not_active Expired - Fee Related
-
2002
- 2002-02-01 US US10/240,417 patent/US6980303B2/en not_active Expired - Lifetime
- 2002-02-01 CN CNB028009045A patent/CN1253698C/zh not_active Expired - Fee Related
- 2002-02-01 WO PCT/JP2002/000841 patent/WO2002063246A1/ja active Application Filing
- 2002-02-01 EP EP02710467.8A patent/EP1286139B1/en not_active Expired - Lifetime
- 2002-02-01 KR KR1020027012873A patent/KR20030003705A/ko not_active Application Discontinuation
Also Published As
Publication number | Publication date |
---|---|
JP2002228412A (ja) | 2002-08-14 |
KR20030003705A (ko) | 2003-01-10 |
EP1286139A1 (en) | 2003-02-26 |
EP1286139A4 (en) | 2004-10-27 |
CN1460174A (zh) | 2003-12-03 |
US20030169434A1 (en) | 2003-09-11 |
WO2002063246A1 (fr) | 2002-08-15 |
US6980303B2 (en) | 2005-12-27 |
EP1286139B1 (en) | 2015-08-12 |
JP4862108B2 (ja) | 2012-01-25 |
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Legal Events
Date | Code | Title | Description |
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C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Free format text: FORMER OWNER: SONY MANUFACTURING SYSTEM CORPORATION Effective date: 20120109 Owner name: MEGENSUGU CORPORATION Free format text: FORMER OWNER: SONY CORPORATION Effective date: 20120109 Owner name: K. K. MORI SEIKI SEISAKUSHO Free format text: FORMER OWNER: MEGENSUGU CORPORATION Effective date: 20120109 |
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C41 | Transfer of patent application or patent right or utility model | ||
C56 | Change in the name or address of the patentee | ||
CP01 | Change in the name or title of a patent holder |
Address after: Tokyo, Japan Co-patentee after: Sony Manufacturing Co.,Ltd. Patentee after: Sony Corp. Address before: Tokyo, Japan Co-patentee before: Sony Precision Technology Co.,Ltd. Patentee before: Sony Corp. |
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TR01 | Transfer of patent right |
Effective date of registration: 20120109 Address after: Nara County in Japan and Koriyama City Patentee after: Mori Seiki Co.,Ltd. Address before: Tokyo, Japan Patentee before: Ltd. Mei roots lattice Effective date of registration: 20120109 Address after: Tokyo, Japan Patentee after: Ltd. Mei roots lattice Address before: Tokyo, Japan Co-patentee before: Sony Manufacturing Co.,Ltd. Patentee before: Sony Corp. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20060426 Termination date: 20210201 |
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CF01 | Termination of patent right due to non-payment of annual fee |