GB1405362A - Device for positioning slides - Google Patents

Device for positioning slides

Info

Publication number
GB1405362A
GB1405362A GB1306773A GB1306773A GB1405362A GB 1405362 A GB1405362 A GB 1405362A GB 1306773 A GB1306773 A GB 1306773A GB 1306773 A GB1306773 A GB 1306773A GB 1405362 A GB1405362 A GB 1405362A
Authority
GB
United Kingdom
Prior art keywords
grating
lines
slit diaphragm
degrees
slide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB1306773A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jenoptik AG
Original Assignee
Carl Zeiss Jena GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Carl Zeiss Jena GmbH filed Critical Carl Zeiss Jena GmbH
Priority to GB1306773A priority Critical patent/GB1405362A/en
Publication of GB1405362A publication Critical patent/GB1405362A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices

Abstract

1405362 Optical displacement encoder CARL ZEISS JENA VEB 19 March 1973 13067/73 Heading G1A In an optical displacement encoder for positioning a slide in at least one co-ordinate direction, the lines of the measuring grating and a slit diaphragm are inclined at 45 degrees to the coordinate direction(s). Grating 2 mounted on slide 1 has its lines 6 inclined at 45 degrees to both x & y directions. An image of the grating is projected on to slit diaphragm 7, the lines of which are parallel to the grating lines. Lens 10 projects both the slit diaphragm and grating image on to opto-electronic detector 9, the output of which is fed to signal processing means 11.
GB1306773A 1973-03-19 1973-03-19 Device for positioning slides Expired GB1405362A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB1306773A GB1405362A (en) 1973-03-19 1973-03-19 Device for positioning slides

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1306773A GB1405362A (en) 1973-03-19 1973-03-19 Device for positioning slides

Publications (1)

Publication Number Publication Date
GB1405362A true GB1405362A (en) 1975-09-10

Family

ID=10016193

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1306773A Expired GB1405362A (en) 1973-03-19 1973-03-19 Device for positioning slides

Country Status (1)

Country Link
GB (1) GB1405362A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0534759A1 (en) * 1991-09-27 1993-03-31 Canon Kabushiki Kaisha Position detector
EP0838665A1 (en) * 1996-10-28 1998-04-29 Mitutoyo Corporation Optical displacement detecting apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0534759A1 (en) * 1991-09-27 1993-03-31 Canon Kabushiki Kaisha Position detector
US5369486A (en) * 1991-09-27 1994-11-29 Canon Kabushiki Kaisha Position detector for detecting the position of an object using a diffraction grating positioned at an angle
EP0838665A1 (en) * 1996-10-28 1998-04-29 Mitutoyo Corporation Optical displacement detecting apparatus
US5841133A (en) * 1996-10-28 1998-11-24 Mitutoyo Corporation Optical displacement detecting apparatus having gratings and a light receiving chip

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Legal Events

Date Code Title Description
PS Patent sealed
PCNP Patent ceased through non-payment of renewal fee