CN111653516A - Workpiece bearing device and curing equipment - Google Patents
Workpiece bearing device and curing equipment Download PDFInfo
- Publication number
- CN111653516A CN111653516A CN202010504199.7A CN202010504199A CN111653516A CN 111653516 A CN111653516 A CN 111653516A CN 202010504199 A CN202010504199 A CN 202010504199A CN 111653516 A CN111653516 A CN 111653516A
- Authority
- CN
- China
- Prior art keywords
- workpiece
- workbench
- driving
- guide rail
- steering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008878 coupling Effects 0.000 claims abstract description 11
- 238000010168 coupling process Methods 0.000 claims abstract description 11
- 238000005859 coupling reaction Methods 0.000 claims abstract description 11
- 238000004519 manufacturing process Methods 0.000 claims abstract description 8
- 239000004065 semiconductor Substances 0.000 claims abstract description 5
- 230000000712 assembly Effects 0.000 claims description 49
- 238000000429 assembly Methods 0.000 claims description 49
- 230000007246 mechanism Effects 0.000 claims description 39
- 230000005540 biological transmission Effects 0.000 claims description 17
- 238000000034 method Methods 0.000 claims description 13
- 230000008569 process Effects 0.000 claims description 13
- 238000005304 joining Methods 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 3
- 238000003754 machining Methods 0.000 abstract 1
- 230000000875 corresponding effect Effects 0.000 description 25
- 230000033001 locomotion Effects 0.000 description 15
- 230000001276 controlling effect Effects 0.000 description 4
- 238000009826 distribution Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 230000002596 correlated effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Automatic Assembly (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
The invention provides a workpiece bearing device, which is used for bearing a workpiece to be processed and adjusting the position of the workpiece to be processed in the manufacturing process of a semiconductor device, and comprises a workbench, a support frame and a plurality of connecting components; the workbench is used for bearing a workpiece to be machined; the support frame with be provided with a plurality ofly between the workstation coupling assembling, coupling assembling is used for driving the workstation for the support frame translation and/or rotation. The workpiece bearing device provided by the invention can be used for stably adjusting the position of the workbench on the premise of ensuring the levelness of the workbench, so that the relative positions of the display screen on the workbench, the waiting workpiece, the support frame and the machining device can be flexibly and stably adjusted. The invention also provides curing equipment.
Description
Technical Field
The invention relates to the field of semiconductor equipment, in particular to a workpiece bearing device and curing equipment comprising the same.
Background
In the production and manufacturing process of workpieces such as display screens and the like, the display screens are often required to be placed on the workbench corresponding to each process for multiple times, and after the process is finished, the display screens are taken down and conveyed to the next process. However, in the prior art, in order to ensure the alignment between the display screen and the processing equipment, the height, the levelness and the horizontal position of the worktable often need to be adjusted by a plurality of motion mechanisms such as a lifting device and an air cylinder after the display screen is placed. However, in the adjusting process, a plurality of different types of motion mechanisms need to be coordinated to move successively, the feeding amount of each motion mechanism is difficult to determine at one time, the adjusting operation is too complicated, and the adjusting efficiency is low; moreover, mechanical vibration generated when the rear movement mechanism is adjusted easily causes the position of the adjusted movement mechanism to deviate, and the adjustment precision is low; in addition, when the workbench is fixed, the locking of the positions of all the moving mechanisms is difficult to ensure, and the overall stability of the equipment is poor.
Therefore, how to provide a workpiece carrying device capable of stably and efficiently adjusting the position of the worktable is a technical problem to be solved in the field.
Disclosure of Invention
The invention aims to provide a workpiece bearing device and curing equipment which can stably and efficiently adjust the position of a workbench.
To achieve the above object, as one aspect of the present invention, there is provided a workpiece carrying device for carrying a workpiece to be processed and performing position adjustment in a semiconductor device manufacturing process, the workpiece carrying device including a table, a support frame, and a plurality of connecting members; wherein the content of the first and second substances,
the workbench is used for bearing a workpiece to be machined;
the support frame with be provided with a plurality ofly between the workstation coupling assembling, coupling assembling is used for driving the workstation for the support frame translation and/or rotation.
Optionally, the connecting assembly includes at least one first guide rail fixedly disposed on the workbench and at least one second guide rail fixedly disposed on the supporting frame, each first guide rail corresponds to at least one second guide rail in position, and the first guide rails are disposed in a manner of intersecting with the corresponding second guide rails;
coupling assembling still includes first steering part and the second steering part of mutual articulated, first steering part with first guide rail links to each other, and can follow first guide rail slides, the second steering part with the second guide rail links to each other, and can follow the second guide rail slides.
Optionally, the first steering member and the second steering member are connected by a ball joint, and the first steering member is rotatable relative to the second steering member.
Optionally, the connecting assembly further includes a hinge ball, hinge holes are formed on the first steering member and the second steering member, and two ends of the hinge ball are respectively disposed in the hinge hole of the first steering member and the hinge hole of the second steering member.
Optionally, the connecting assemblies are arranged in pairs, each pair of the connecting assemblies are symmetrically arranged on two sides of the central position of the support frame, the first guide rails of each pair of the connecting assemblies are arranged in the same direction, and the second guide rails of each pair of the connecting assemblies are arranged in the same direction.
Optionally, at least one pair of the connecting assemblies further comprises a driving mechanism for driving the second steering members of the corresponding connecting assemblies to move along the respective second guide rails.
Optionally, the driving mechanism comprises a driving block, a motor and a transmission screw;
the motor is arranged on the support frame and is used for driving the transmission lead screw to rotate;
the driving block is fixedly connected with the corresponding second steering piece, the driving block is provided with a driving threaded hole, and the transmission lead screw is arranged in the driving threaded hole in a matching manner; two guide rail through holes are formed in the driving block, the two second guide rails corresponding to the driving mechanism are respectively arranged in the two guide rail through holes in a matching mode, the transmission screw rod and the second guide rails are arranged in the same direction, and the transmission screw rod is arranged between the two second guide rails.
Optionally, two pairs of the connecting assemblies include the driving mechanism, and an included angle exists between the extending directions of the second guide rails corresponding to the two pairs of the connecting assemblies.
Optionally, the included angle is 90 degrees.
As a second aspect of the present invention, a curing apparatus is provided, where the curing apparatus includes a workpiece bearing device and a curing device, the curing device is configured to perform a curing process on a display screen borne by the workpiece bearing device, and the workpiece bearing device is the aforementioned workpiece bearing device.
In the workpiece bearing device and the curing equipment provided by the invention, the connecting component can not only support the workbench and uniformly share the load on the workbench, but also allow the workbench to translate and/or rotate relative to the supporting frame, so that the position of the workbench can be stably adjusted on the premise of ensuring the levelness of the workbench, and further the relative positions between workpieces such as a display screen on the workbench and the like and the processing device can be flexibly adjusted.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a top view of a workpiece carrier provided in accordance with an embodiment of the invention;
FIG. 2 is a schematic diagram of one configuration of a linkage assembly in a workpiece carrier according to an embodiment of the present invention;
FIG. 3 is a schematic view of an alternative construction of a linkage assembly in a workpiece carrier according to an embodiment of the present invention;
fig. 4 to 7 are schematic views illustrating an embodiment of the workpiece position adjustment performed by the workpiece support device according to the present invention;
fig. 8 to 11 are schematic views illustrating another embodiment of the workpiece position adjustment performed by the workpiece support device according to the present invention.
Description of the reference numerals
100: the working table 200: supporting frame
300: the connection component 311: first guide rail
312: second guide rail 320: steering mechanism
321: first steering member 322: second steering member
330: the drive mechanism 331: driving block
332: a motor 333: transmission lead screw
400: display screen
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
To solve the above technical problems, as one aspect of the present invention, there is provided a workpiece carrying device for carrying a workpiece to be processed and performing position adjustment of the workpiece (e.g., a display 400) during a semiconductor device manufacturing process. As shown in fig. 1, the workpiece carrying device includes a workbench 100, a supporting frame 200, and a plurality of connecting assemblies 300, wherein the workbench 100 is used for carrying a workpiece to be processed, the supporting frame 200 is provided with the plurality of connecting assemblies 300 with the supporting workbench 100, and the connecting assemblies 300 are used for driving the workbench 100 to translate and/or rotate relative to the supporting frame 200.
In the workpiece bearing device provided by the invention, the supporting frame 200 is connected with the workbench 100 through the plurality of connecting assemblies 300, the connecting assemblies 300 not only can support the workbench 100 and uniformly share the load (such as the weight of the display screen 400) on the workbench 100, but also can allow the workbench 100 to translate and/or rotate relative to the supporting frame 200, so that the position of the workbench 100 can be stably adjusted on the premise of ensuring the levelness of the workbench 100, the relative position between a workpiece such as the display screen on the workbench 100 and a processing device can be flexibly and stably adjusted, and the efficiency and the accuracy of adjusting the position of the workpiece to be processed are improved.
In order to ensure the uniformity of the load on the connecting assembly 300 and the smoothness of the workbench 100 when the workbench 100 and the supporting frame 200 move relative to each other, as shown in fig. 1 and 3, as a preferred embodiment of the present invention, the connecting assembly 300 includes at least one first guide rail 311 fixedly disposed on the workbench 100, and at least one second guide rail 312 fixedly disposed on the supporting frame 200, each first guide rail 311 corresponds to at least one second guide rail 312 in position, and the first guide rail 311 intersects with the corresponding second guide rail 312.
The connecting assembly 300 further includes a steering mechanism 320, wherein the steering mechanism 320 includes a first steering member 321 and a second steering member 322 hinged to each other, the first steering member 321 is connected to the first guide rail 311 and can move along the first guide rail 311, and the second steering member 322 is connected to the second guide rail 312 and can move along the second guide rail 312.
Fig. 3 is a schematic view illustrating one structure of a connecting assembly 300 according to an embodiment of the present invention, in which the table 100 of fig. 1 is shown as transparent (a pattern shown by a dotted line frame) and the table 100 is not shown in fig. 3 for the purpose of facilitating visual understanding of the structure of the connecting assembly 300. As shown in fig. 3, the fixing members on both sides of the first guide rail 311 are used to fix the first guide rail 311 to the workbench 100, the hatched portion on the fixing members is the region for fixedly connecting with the workbench 100, and similarly, the fixing members on both sides of the second guide rail 312 fix the second guide rail 312 to the supporting frame 200.
In the embodiment of the present invention, the connecting assembly 300 includes a first guide rail 311, a second guide rail 312, and a steering mechanism 320, and the steering mechanism 320 can move along the first guide rail 311 and the second guide rail 312, so as to allow the workbench 100 and the supporting frame 200 to slide relatively in a horizontal direction. For example, when the first guide rail 311 and the second guide rail 312 are respectively distributed on the table 100 and the supporting frame 200 as shown in fig. 1, the table 100 and the supporting frame 200 can be moved by the same distance only by moving the steering mechanisms 320 in one direction of the first guide rail 311 and/or the second guide rail 312 which are provided in the same direction.
Also, in the embodiment of the present invention, the steering mechanism 320 includes a first steering member 321 and a second steering member 322 that move along the two guide rails, respectively, so that the first guide rail 311 and the second guide rail 312 can relatively move along the horizontal plane and also relatively rotate, thereby allowing the workbench 100 to rotate on the supporting surface of the supporting frame 200. When the worktable 100 rotates on the supporting frame 200 along the horizontal plane, the first guide rail 311 and the second guide rail 312 distributed at each position are moved and rotated relatively, the moving distance thereof is positively correlated with the distance between the connecting assembly 300 and the rotation center of the worktable 100, and the rotation angle thereof is the same as the rotation angle of the worktable 100 relative to the supporting frame 200.
In the embodiment of the present invention, only by the horizontal sliding between the steering mechanism 320 and the guide rail in the connecting assembly 300 and the horizontal twisting of the steering mechanism 320 itself, the relative movement and rotation between the workbench 100 and the supporting frame 200 can be achieved, and the stability of the workbench 100 is improved. In addition, in the embodiment of the present invention, the movable connection between the workbench 100 and the supporting frame 200 is realized by the plurality of connecting assemblies 300, so that the stability of the relative distance between the workbench 100 and the supporting frame 200 is ensured, the levelness of the workbench 100 is further improved, the time for adjusting the levelness of the workbench 100 is saved, and the production efficiency is further improved.
It should be noted that, the distribution of the first guide rails 311 and the second guide rails 312 is not specifically limited, and fig. 1 only adopts a relatively beautiful installation manner, and even if the installation manner of the first guide rails 311 and the second guide rails 312 is different from that of fig. 1 (for example, the first guide rails 311 are installed in different directions, and the second guide rails 311 are installed in different directions), the structure provided by the embodiment of the present invention can also realize the relative movement and rotation between the workbench 100 and the support frame 200 along the horizontal plane.
The connection form between the first steering member 321 and the second steering member 322 in the steering mechanism 320 is not particularly limited in the present invention, and for example, the first steering member 321 may be rotatably connected to the second steering member 322 by a bearing or a sliding sleeve member. In order to further improve the levelness of the workbench 100, preferably, the first steering member 321 is connected with the second steering member 322 in a spherical hinge manner, and the first steering member 321 can rotate relative to the second steering member 322, so that a certain inclination between the first steering member 321 and the second steering member 322 can be allowed, and the phenomenon that the workbench 100 jumps in the height direction when the first steering member 321 and the second steering member 322 rotate relatively due to manufacturing errors of the first steering member 321 and the second steering member 322 and the like is avoided, so that the levelness and the stability of the workbench 100 are further improved.
The present invention does not specifically limit how the ball joint connection is implemented between the first steering member 321 and the second steering member 322, and for example, one of the first steering member 321 and the second steering member 322 may be connected with a ball joint member, and the other may be formed with a ball joint seat, so that the ball joint connection is implemented through the cooperation between the ball joint member and the ball joint seat.
To simplify the structure of the device, when the support stand 200 is located under the workbench 100, the steering mechanism 320 preferably further comprises a hinge ball, and the first steering member 321 and the second steering member 322 are formed with hinge holes, and two ends of the hinge ball are respectively disposed in the hinge hole of the first steering member 321 and the hinge hole of the second steering member 322, so that the hinge ball is restrained in the hinge holes of the first steering member 321 and the second steering member 322 by gravity.
In order to improve the uniformity of the force applied to the first and second steering members 321 and 322, it is preferable that each of the first and second steering members 321 and 322 has a disc shape, and a circular surface of the first steering member 321 is opposite to a circular surface of the second steering member 322, as shown in fig. 3.
The present invention does not specifically limit the distribution of the connecting assemblies 300 in the workpiece bearing device, for example, in order to improve the uniformity of the load bearing capacity of each connecting assembly 300 and the accuracy of the displacement and the rotational feeding amount of the control table, it is preferable that, as shown in fig. 4, a plurality of connecting assemblies 300 are arranged in pairs, each pair of connecting assemblies 300 is symmetrically arranged on both sides of the central position (for example, the geometric center) of the supporting frame 200, the first guide rails 311 of each pair of connecting assemblies 300 are arranged in the same direction, and the second guide rails 312 of each pair of connecting assemblies 300 are arranged in the same direction.
In the embodiment of the present invention, the plurality of pairs of connecting assemblies 300 are symmetrically arranged with the center position of the supporting frame 200 as the symmetric center, so that the uniformity of the load borne by each connecting assembly 300 is improved, and the first guide rails 311 and the second guide rails 312 in each pair of connecting assemblies 300 are arranged in the same direction, so that when the connecting assemblies 300 move along the guide rails, the friction force between each pair of connecting assemblies 300 and the corresponding guide rails is the same, thereby avoiding the error of the rotation angle of the workbench 100 caused by the different forces applied when each pair of connecting assemblies 300 move, and further improving the accuracy of controlling the displacement and the rotation feeding amount of the workbench.
In order to realize the automatic adjustment of the relative position between the working platform 100 and the supporting frame 200, preferably, as shown in fig. 1 to 2, at least one pair of connecting assemblies 300 further includes a driving mechanism 330, and the driving mechanism 330 is configured to drive the second steering member 322 in the corresponding connecting assembly 300 to move along the corresponding second guiding rail 312 of the connecting assembly 300, so as to push the first guiding rail 311 to move along a direction intersecting with the extending direction of the first guiding rail 311 by the steering mechanism 320, thereby pushing the working platform 100 to translate or rotate.
The invention is not limited to how the driving mechanism 330 drives the second steering member 322 to move, and for example, the second steering member 322 may be dragged by a traction rope, or a rack connected to the second steering member 322 may be driven by a gear to move.
In order to improve the accuracy of controlling the movement of the workbench 100, it is preferable that the driving mechanism 330 includes a driving block 331, a motor 332 and a driving screw 333, and the motor 332 is disposed on the supporting frame 200 and is used for driving the driving screw 333 to rotate, as shown in fig. 1 and 2. The driving block 331 is fixedly connected with the corresponding second steering member 322, and a driving threaded hole is formed in the driving block 331, and the transmission screw 333 is arranged in the driving threaded hole in a matching manner.
Two guide rail through holes are further formed in the driving block 331, the two second guide rails 312 corresponding to the driving mechanism 330 are respectively arranged in the two guide rail through holes of the driving block 331 in a matching manner, the transmission screw 333 is arranged in the same direction as the second guide rails 312, and the transmission screw 333 is arranged between the two second guide rails 312 corresponding to the two guide rail through holes.
In the embodiment of the invention, the driving block 331 is subjected to screw transmission by the transmission screw 333, so that the accuracy of controlling the position of the driving block 331 is improved, and the accuracy of controlling the movement of the workbench 100 is further improved.
In the embodiment of the present invention, two guide through holes are formed in the driving block 331, and the driving screw 333 is disposed between two corresponding second guide rails 312. The transmission screw 333 is arranged between the two second guide rails 312 which are arranged in the same direction, so that when the transmission screw 333 applies driving force to the driving block 331, the driving block 331 is not subjected to excessive moment, and the smoothness of the movement of the driving block 331 on the guide rails is improved.
In order to simplify the structure of the device while simultaneously achieving the automatic adjustment of the position and the angle of the working platform 100, it is preferable that, as shown in fig. 1, two pairs of connecting assemblies 300 include a driving mechanism 330, and an included angle exists between the extending directions of the second guide rails 312 corresponding to the two pairs of connecting assemblies 300.
In the embodiment of the present invention, the relative movement and rotation of the worktable 100 and the supporting stand 200 in the horizontal plane direction can be realized only by two pairs of connecting assemblies 300 having the driving mechanisms 330, which are arranged in different directions.
In order to facilitate the control of the distance and the direction of the movement of the workbench 100 relative to the support frame 200, preferably, as shown in fig. 1, the included angle between the second guide rails 312 corresponding to the two pairs of connecting assemblies 300 is 90 degrees, so that when the workbench 100 is controlled to move relative to the support frame 200, the distance and the direction of the movement can be orthogonally decomposed into the feeding amount of the movement of the second guide rails 312 of the steering mechanism 320 along different directions, thereby improving the convenience of the movement of the workbench 100.
To facilitate understanding by those skilled in the art, two reference examples are provided below for the case where two pairs of linkage assemblies 300 have drive mechanisms 330:
the first embodiment is as follows:
as shown in fig. 4, the workpiece carrier device includes two pairs of connecting assemblies 300 having driving mechanisms 330, wherein for the sake of convenience of distinction, the driving assemblies such as motors and screws in one pair of driving mechanisms 330 are respectively denoted as assembly a and assembly B, and the driving assemblies such as motors and screws in the other pair of driving mechanisms 330 are respectively denoted as assembly C and assembly D, wherein the second guide rails 312 corresponding to the assembly a and the assembly B are disposed in the same direction, and the second guide rails 312 corresponding to the assembly C and the assembly D are disposed in the same direction.
Fig. 4 shows a case where the display 400 is placed on the work table 100 with a positional deviation, and as shown in the drawing, the display 400 is placed at a position shifted to the left, and in order to align the display 400 with a corresponding process apparatus (e.g., a curing apparatus), the display 400 needs to be moved to the right.
As shown in fig. 5, the assembly a and the assembly B simultaneously push the first guide rail 311 to the right (as shown by the arrow in the figure), so as to translate the worktable 100 to the right until reaching the positions shown in fig. 6 and 7, at this time, as shown in fig. 7, the display screen 400 also moves to the right along with the worktable 100, thereby achieving the alignment between the display screen 400 and the supporting frame 200 and the corresponding process equipment.
Example two:
as shown in fig. 8, in a case where the display 400 is placed on the work table 100 with an angular deviation, the display 400 is placed at an angle that is inclined clockwise as shown in the drawing, and the display 400 is rotated counterclockwise in order to align the display 400 with the corresponding process apparatus.
As shown in fig. 9, the assembly a and the assembly B push the corresponding first guide rails 311 in opposite directions (as shown by arrows in the figure), so as to apply a counterclockwise moment to the workbench 100, and in order to improve the pushing effect, the assembly C and the assembly D can also push the corresponding first guide rails 311 in opposite directions, so as to rotate the workbench 100 counterclockwise until reaching the position shown in fig. 10 and 11, at this time, as shown in fig. 11, the display screen 400 also rotates counterclockwise with the workbench 100, so as to achieve the alignment between the display screen 400 and the supporting frame 200 and the corresponding process equipment.
In addition, the above structure provided by the embodiment of the present invention can also adjust the position of the worktable 100 along other tracks. For example, one pair of linkage assemblies 300 may drive the second rail 312 in the same direction to translate the table 100, and the other pair of linkage assemblies 300 drive the second rail 312 in the opposite direction to rotate the table 100, thereby achieving both translation and rotation of the table 100.
For example, one pair of connecting assemblies 300 may drive the second guide rail 312 along a first direction, and the other pair of connecting assemblies 300 may drive the second guide rail 312 along a second direction, so that the workbench 100 may travel along a certain direction between the first direction and the second direction under the driving of the two groups of connecting assemblies 300, and the adjustment of the translation direction and the travel rate of the workbench 100 may be achieved by adjusting the speed ratio of the two groups of connecting assemblies 300 driving the second guide rail 312 to move. Therefore, the workpiece carrier provided by the embodiment of the invention can smoothly and efficiently align the workpiece with the supporting frame 200 and the corresponding process device no matter what angle the workpiece (such as the display screen 400) is placed on the worktable 100, within the allowable range of the length of the guide rail.
The present invention does not specifically limit the distribution of the joining assemblies 300 in the work piece carrier, as long as it can ensure uniform load bearing on the work table 100, and for example, as shown in fig. 4, the work piece carrier may include 6 pairs (12) of joining assemblies 300.
As a second aspect of the present invention, there is provided a curing apparatus, including a workpiece carrying device and a curing device, where the curing device is configured to perform a curing process on a display screen carried on the workpiece carrying device, and the workpiece carrying device is the workpiece carrying device in the foregoing embodiment.
In the display screen curing apparatus provided by the present invention, the connecting assembly 300 not only can support the workbench 100 and uniformly share the load on the workbench 100, but also can allow the workbench 100 to translate and/or rotate relative to the supporting frame 200, so that the position of the workbench 100 can be stably adjusted on the premise of ensuring the levelness of the workbench 100, and further, the relative positions between the process system and the workpieces such as the display screen on the workbench 100 can be flexibly adjusted.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A workpiece bearing device is used for bearing a workpiece to be machined in the manufacturing process of a semiconductor device and carrying out position adjustment, and is characterized by comprising a workbench, a support frame and a plurality of connecting assemblies; wherein the content of the first and second substances,
the workbench is used for bearing a workpiece to be machined;
the support frame with be provided with a plurality ofly between the workstation coupling assembling, coupling assembling is used for driving the workstation for the support frame translation and/or rotation.
2. The workpiece carrier device of claim 1, wherein the coupling assembly comprises at least one first rail fixedly disposed on the table and at least one second rail fixedly disposed on the support frame, each first rail corresponding in position to at least one second rail, and the first rails being disposed crosswise to the corresponding second rails;
coupling assembling still includes first steering part and the second steering part of mutual articulated, first steering part with first guide rail links to each other, and can follow first guide rail slides, the second steering part with the second guide rail links to each other, and can follow the second guide rail slides.
3. The workpiece carrier device of claim 2, wherein the first and second steering members are connected by a ball joint, and wherein the first steering member is rotatable relative to the second steering member.
4. The workpiece carrier device of claim 3, wherein the linkage assembly further comprises a hinge ball, wherein each of the first and second steering members has a hinge hole formed therein, and wherein two ends of the hinge ball are disposed in the hinge holes of the first and second steering members, respectively.
5. A workpiece carrier device according to any one of claims 2 to 4 in which a plurality of said joining assemblies are provided in pairs, each pair of said joining assemblies being symmetrically disposed on either side of a central location on the support frame, and the first tracks of each pair of said joining assemblies being disposed in a common direction and the second tracks of each pair of said joining assemblies being disposed in a common direction.
6. The workpiece carrier device of claim 5, wherein at least one pair of the linkage assemblies further comprises a drive mechanism for driving the second diverter members of the respective linkage assembly along the respective second guide rails.
7. The workpiece carrier device of claim 6, wherein the drive mechanism comprises a drive block, a motor, and a drive screw;
the motor is arranged on the support frame and is used for driving the transmission lead screw to rotate;
the driving block is fixedly connected with the corresponding second steering piece, the driving block is provided with a driving threaded hole, and the transmission lead screw is arranged in the driving threaded hole in a matching manner; two guide rail through holes are formed in the driving block, the two second guide rails corresponding to the driving mechanism are respectively arranged in the two guide rail through holes in a matching mode, the transmission screw rod and the second guide rails are arranged in the same direction, and the transmission screw rod is arranged between the two second guide rails.
8. The workpiece carrier device of claim 6, wherein two pairs of the coupling assemblies comprise the drive mechanism, and an included angle exists between the extending directions of the second rails corresponding to the two pairs of the coupling assemblies.
9. The workpiece carrier device of claim 8, wherein the included angle is 90 degrees.
10. A curing apparatus, comprising a workpiece carrying device and a curing device, wherein the curing device is used for carrying out a curing process on a display screen carried on the workpiece carrying device, and is characterized in that the workpiece carrying device is the workpiece carrying device according to any one of claims 1 to 9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010504199.7A CN111653516B (en) | 2020-06-05 | 2020-06-05 | Workpiece bearing device and curing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010504199.7A CN111653516B (en) | 2020-06-05 | 2020-06-05 | Workpiece bearing device and curing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111653516A true CN111653516A (en) | 2020-09-11 |
| CN111653516B CN111653516B (en) | 2024-01-05 |
Family
ID=72348781
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010504199.7A Active CN111653516B (en) | 2020-06-05 | 2020-06-05 | Workpiece bearing device and curing equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111653516B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207177244U (en) * | 2017-08-16 | 2018-04-03 | 中国石油天然气股份有限公司 | Job platform |
| CN108109672A (en) * | 2018-02-06 | 2018-06-01 | 京东方科技集团股份有限公司 | Adjusting apparatus and load bearing equipment |
| CN208118657U (en) * | 2018-03-23 | 2018-11-20 | 深圳市领创精密机械有限公司 | A kind of alignment system of multi-functional true hollow panel |
| CN208196710U (en) * | 2018-04-16 | 2018-12-07 | 中国石油天然气股份有限公司 | Mechanical scanning |
| CN109732299A (en) * | 2019-01-09 | 2019-05-10 | 深圳福瑞特自动化有限公司 | Position adjusting mechanism and positioning device |
| CN110948328A (en) * | 2019-11-28 | 2020-04-03 | 北京微纳精密机械有限公司 | High-precision one-dimensional angle adjusting workbench |
-
2020
- 2020-06-05 CN CN202010504199.7A patent/CN111653516B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207177244U (en) * | 2017-08-16 | 2018-04-03 | 中国石油天然气股份有限公司 | Job platform |
| CN108109672A (en) * | 2018-02-06 | 2018-06-01 | 京东方科技集团股份有限公司 | Adjusting apparatus and load bearing equipment |
| CN208118657U (en) * | 2018-03-23 | 2018-11-20 | 深圳市领创精密机械有限公司 | A kind of alignment system of multi-functional true hollow panel |
| CN208196710U (en) * | 2018-04-16 | 2018-12-07 | 中国石油天然气股份有限公司 | Mechanical scanning |
| CN109732299A (en) * | 2019-01-09 | 2019-05-10 | 深圳福瑞特自动化有限公司 | Position adjusting mechanism and positioning device |
| CN110948328A (en) * | 2019-11-28 | 2020-04-03 | 北京微纳精密机械有限公司 | High-precision one-dimensional angle adjusting workbench |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111653516B (en) | 2024-01-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR101523551B1 (en) | Operating table with multiple degrees of freedom | |
| US6974297B2 (en) | Industrial robot | |
| JP5490650B2 (en) | Positioning table | |
| CN100448627C (en) | Six degree of freedom buttjunction platform | |
| CN101327587A (en) | Articulated robot | |
| CN100448628C (en) | Mechanical flexibility space buttjunction platform | |
| CN107900838B (en) | A kind of optical mirror plane polissoir | |
| CN107472863A (en) | It is capable of the conveying mechanism of rotational workpieces automatically | |
| CN112605604B (en) | Adjusting device for profile cutting and fillet welding | |
| WO2000034100A9 (en) | Method and apparatus for transferring a carriage assembly between rails | |
| CN111653516A (en) | Workpiece bearing device and curing equipment | |
| CN112540434A (en) | Optical pitching adjusting device | |
| CN209623716U (en) | A kind of auxiliary conditioning unit of stay-supported measuring system | |
| CN206327062U (en) | A kind of efficient five axles engraving machine | |
| CN112309493B (en) | Manual coordinate adjusting platform | |
| CN108328333B (en) | Rotary workbench and panel detection device | |
| CN107265071A (en) | A kind of material carries streamline | |
| CN113733560A (en) | Mode-switchable composite manufacturing equipment and working method thereof | |
| US5013016A (en) | Positioning table | |
| CN1106911C (en) | Multifunctional regulating platform | |
| CN114248241B (en) | Six-degree-of-freedom satellite control moment gyro mounting equipment | |
| JPH04159040A (en) | Positioning mechanism for table | |
| CN219426758U (en) | Platform leveling and aligning device | |
| CN215515601U (en) | Conveying device | |
| CN215145892U (en) | Working platform capable of achieving translational and oblique combined linkage |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |