CN107900838B - A kind of optical mirror plane polissoir - Google Patents
A kind of optical mirror plane polissoir Download PDFInfo
- Publication number
- CN107900838B CN107900838B CN201711170928.4A CN201711170928A CN107900838B CN 107900838 B CN107900838 B CN 107900838B CN 201711170928 A CN201711170928 A CN 201711170928A CN 107900838 B CN107900838 B CN 107900838B
- Authority
- CN
- China
- Prior art keywords
- axis
- platform
- mirror
- roller
- flexible cable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/005—Blocking means, chucks or the like; Alignment devices
- B24B13/0055—Positioning of lenses; Marking of lenses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
- B24B47/04—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by mechanical gearing only
Abstract
The invention discloses a kind of optical mirror plane polissoirs, including body, Wire driven robot device, moving platform, mirror polisher, active support device.Moving platform lifting device is fixed on the rack, and lifts moving platform by Wire driven robot device；Stage+module is mirror-finished on moving platform, by two motors and three toothed belt transmissions, mirror finish platform is enabled to realize the translation of two freedom degrees on moving platform；The ion beam emittance device is connect by three revolute pairs, a connecting-rods with constant lengh, two electric pushrods and three flexural pivots with mirror finish platform, can be realized the rotation of two freedom degrees of ion beam emittance device；It is fixed on the rack using the active support device that full floating supports.The present invention applies mirror surface active support system in optical manufacturing, can be effectively reduced difficulty of processing, shortens the process-cycle.Mixed connection burnishing machine of the invention can be realized biggish processing space, biggish rigidity and lesser accumulated error.
Description
Technical field
The present invention relates to machining manufacturing technology more particularly to a kind of optical mirror plane polissoirs.
Background technique
At present to the polishing of optical mirror plane, especially for the polishing of off-axis aspheric surface mirror surface, traditional optical manufacturing work
Skill such as small abrasive nose, can introduce print-through, edge effect etc. in process, it is difficult to which complete independently is to high-precision, high steepness
The polishing of off-axis aspheric surface mirror surface.Ion beam polishing is the manufacturing process that a kind of certainty is high, stability is good, has higher add
Work efficiency rate and reliability especially have higher convergency factor in the finishing polish stage.
At present when optical manufacturing, mirror surface mainly uses rigid support, and difficulty of processing is big, and processing efficiency is low.It is propped up using active
Support technology can be effectively reduced difficulty of processing, shorten the process-cycle.Traditional active support supports and floats using fixed
The mode that support phase combines, will lead to situations such as local stress is excessive wherein being fixedly supported in process.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the present invention provides a kind of optical mirror plane polissoir,
By using ion beam polishing mode, cooperation can be effectively improved processing efficiency, be improved processing reliably with active support system
Property, reduce difficulty of processing, realize efficient, high-precision optical mirror plane polishing.
Technical solution: to achieve the above object, the technical solution adopted by the present invention are as follows:
A kind of optical mirror plane polissoir, including body, active support device, four Wire driven robot devices, moving platform and
Mirror-finish equipment；
The body includes bottom platform, four support columns and a top platform, and it is flat that four support columns are supported on bottom
Between platform and four angles of top platform, the quadrangular shape processing space with Z axis for vertical short transverse is formed；
The active support device setting is fixed in quadrangular shape processing space, and with bottom platform, polished mirror surface
It is placed on active support device, the vertical central axis of quadrangular shape processing space, active support device and polished mirror surface
Point-blank；
Four Wire driven robot devices are mounted on four angles of top platform, dynamic flat by four flexible cable controls of folding and unfolding
The translation of platform in the Z-axis direction；
The moving platform includes Z axis slide unit, and Z axis slide unit includes two Z axis sliding blocks, piece biography of installation on each Z axis sliding block
Moving axis A, two transmission shaft A are located in same level and position is parallel, and pass through the synchronous band connection of two Y-axis, one of Z
It is provided with Y-axis servo motor, Y-axis retarder and synchronous pulley A on axis sliding block, passes through a synchronous pulley A driving wherein transmission
Axis A rotation drives another transmission shaft A to rotate synchronously by Y-axis synchronous belt；It is led between two Z axis sliding blocks by two Y-axis
Bar is fixed, and two Y-axis guide rods are located in same level and position is parallel, and a Y-axis slide unit is equipped on every Y-axis guide rod,
Two Y-axis slide units are fixedly connected with two Y-axis synchronous belts respectively, drive Y-axis slide unit synchronizing moving by Y-axis synchronous belt；Each Y
A piece transmission shaft B is installed, two transmission shaft B are located in same level and position is parallel, and pass through X-axis synchronous belt on axis slide unit
It connects, is provided with X-axis servo motor, X-axis retarder and synchronous pulley B on one of Y-axis slide unit, is driven by synchronous pulley B
A dynamic wherein transmission shaft B rotation, drives another transmission shaft B to rotate synchronously by X-axis synchronous belt；Between two Y-axis slide units
It is fixed by two X-axis guide rods, two X-axis guide rods are located in same level and position is parallel, install on every X-axis guide rod
One X-axis slide block；
The mirror finish equipment includes ion beam emittance device, mirror finish platform and adjustment mechanism, ion beam emittance device
It is mounted on the lower section of mirror finish platform by adjusting mechanism, the launch angle of ion beam emittance device is adjusted by adjusting mechanism；
The upper surface of mirror finish platform is fixed with two X-axis slide blocks, while being fixedly connected with X-axis synchronous belt, and X-axis synchronous belt band is passed through
Index glass face polished land synchronizing moving.
Preferably, the adjustment mechanism includes a connecting-rods with constant lengh and two electric pushrods, in the following table of mirror finish platform
Face is evenly arranged there are three flexural pivot, is evenly arranged in the side of ion beam emittance device there are three key seat, a connecting-rods with constant lengh and two
The upper end of electric pushrod is connect with three flexural pivots respectively, the lower end of a connecting-rods with constant lengh and two electric pushrods pass through respectively pin shaft with
Three key seat connections.
Preferably, four Angle Positions of corresponding four support columns of the moving platform are each provided with one group of roller bar-roller machine
Structure, roller and roller bar in same group are mounted in the same installation axle, and roller is located at outside；Support column is set along Z-direction
T-slot is set, roller bar-roller mechanism is mounted in T-slot, and can be moved back and forth along T-slot；Four flexible cables respectively connect one
A roller controls the movement of moving platform in the Z-axis direction by the folding and unfolding that four Wire driven robot devices control flexible cable.
Preferably, there are four flexible cable pilot holes, four flexible cable pilot holes to be located at four for setting on the top platform
The surface of roller bar；The Wire driven robot device includes guide rod, driving support platform, movable slider and leadscrew-nut mechanism, is led
Bar is fixed on top platform by guide rod supports frame, and support platform and movable slider is driven to be installed on guide rod and can be opposite
Guide rod moves back and forth, and is equipped with servo motor, retarder and shaft coupling in driving support platform；Leadscrew-nut mechanism includes solid
Determine nut and lead screw, fixture nut is fixed on top platform, and one end of lead screw passes through shaft coupling, retarder and servo motor
Output end is connected, and the other end of lead screw is connected by bearing with movable slider, and one end of flexible cable is fixedly connected with lead screw, flexible cable it is another
One end passes through corresponding flexible cable pilot hole and the roller bar of underface connects.
Preferably, the active support device includes actively supporting body and force actuator, the number of force actuator
Integral multiple is arranged in using Hindle/Whiffletree type multi-point support mode and is actively supported on body, passes through power promoters
Support polished mirror surface.
The utility model has the advantages that optical mirror plane polissoir provided by the invention, compared with the existing technology, have the advantage that 1,
1, mirror finish equipment both can be realized the translation in three directions of x, y, z on moving platform, further through one two turns
Dynamic parallel institution realizes the rotation of two freedom degrees of ion beam emittance device, ensure that biggish working space and arbitrarily from
Beamlet incident angle can guarantee that mirror polisher can reach any position of mirror surface, and always with optimal incidence angle
Degree is polished, and processing efficiency and processing quality are improved；
2, ion beam polishing is the manufacturing process that a kind of certainty is high, stability is good, have higher processing efficiency with can
By property, especially there is higher convergency factor in the finishing polish stage；
3, difficulty of processing can be effectively reduced using active support technology, shortens the process-cycle；Actively support is using complete floating
Dynamic support, avoids situations such as local stress is excessive, more suitable for using in processing.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Fig. 2 is Wire driven robot apparatus structure schematic diagram；
Fig. 3 is moving platform structural schematic diagram；
Fig. 4 is mirror finish device structure schematic diagram；
Fig. 5 is the force actuator arrangement schematic diagram of active support device.
Specific embodiment
The present invention will be further explained with reference to the accompanying drawing.
It is as shown in Figure 1 a kind of optical mirror plane polissoir, including body, active support device, four Wire driven robot dresses
Set, moving platform and mirror finish equipment.
The body includes that 1, four support column 2 of bottom platform and a top platform 3, four support columns 2 are supported on bottom
Between portion's platform 1 and four angles of top platform 3, the quadrangular shape processing space with Z axis for vertical short transverse is formed.
The active support device is arranged in quadrangular shape processing space, and fixed with bottom platform 1, polished mirror surface
22 are placed on active support device, the vertical center of quadrangular shape processing space, active support device and polished mirror surface 22
Axis is point-blank.The active support device includes actively supporting body 24 and force actuator 23, force actuator 23
Number is 12, is evenly arranged in and actively supports on body 24, supports polished mirror surface 22 by power promoters 23.This case uses
Situations such as local stress when the active support device of full floating support can be to avoid processing is excessive, can more easily adjust
The pose of polished mirror surface 22, is more suitably applied to optical machining system.
As shown in Fig. 2, four Wire driven robot devices are mounted on four angles of top platform 3, pass through folding and unfolding four
Flexible cable 25 controls the translation of moving platform in the Z-axis direction.Flexible cable pilot hole 26 there are four settings on the top platform 3, four
Flexible cable pilot hole 26 is located at the surface of four roller bars 29；The Wire driven robot device includes guide rod 10, driving support
Platform 6, movable slider 11 and leadscrew-nut mechanism, guide rod 10 are fixed on top platform 3 by guide rod supports frame 12, driving support
Platform 6 and movable slider 11 are installed on guide rod 10 and can move back and forth with respect to guide rod 10, install in driving support platform 6
There are servo motor 4, retarder 5 and shaft coupling 7；Leadscrew-nut mechanism includes fixture nut 8 and lead screw 9, and fixture nut 8 is fixed on
On top platform 3, one end of lead screw 9 is connected by shaft coupling 7, retarder 5 with the output end of servo motor 4, lead screw 9 it is another
End is connected by bearing 27 with movable slider 11, and one end of flexible cable 25 is fixedly connected with lead screw 9, the other end of flexible cable 25 across pair
The flexible cable pilot hole 26 answered is connect with the roller bar 29 of underface.
The servo motor 4 and retarder 5 of the band brake retainer drive the lead screw 9 to do to revolve by the shaft coupling 7
Transhipment is dynamic.Because the fixture nut 8 is fixed on the top platform 3, lead screw 9 not only made rotating motion, but also with
Servo motor 4, retarder 5, shaft coupling 7, driving platform 6, bearing 27, the movable slider 11 of the band brake retainer are used as one
It is whole to be translatable along described two closed slides 10；One end of the flexible cable 25 is fixed on the lead screw 9, therefore, described
Flexible cable 25 can be along spiral wound on the lead screw 9, and can guarantee the flexible cable part not being wound on the lead screw 9
It is able to maintain constant relative to the position of the top platform 3, the flexible cable 25 is oriented to by the flexible cable always
Hole 26 lifts the roller bar 29 vertically.
Above structure scheme can be realized the flexible cable 25 always along the spiral wound on the lead screw 9, guarantee each
The radius of winding is identical, therefore can guarantee that the lead screw 9 often turns an angle, and the flexible cable 25 will rise one accordingly
Fixed distance can guarantee the precision of control in this way；The Wire driven robot device is distributed on 3 four angles of the top platform,
Four roller bars 29 on the moving platform are lifted by four flexible cables 25, realize the moving platform in z-axis side
Upward translation；Four Wire driven robots can be realized the lifting of relatively large load, and work efficiency is high；Four roller bars, 29 He
On the one hand four cooperations of roller 30 can limit the shaking of moving platform in four T-slots of four support columns 2, another
Aspect, since roller is that have certain fault-tolerance made of flexible material, may be implemented in four motors not to be absolute synchronization
In the case where still be able to smoothly lift moving platform.
As shown in figure 3, the moving platform includes Z axis slide unit 13, Z axis slide unit 13 includes two Z axis sliding blocks 21, each Z axis
A piece transmission shaft A35 is installed, two transmission shaft A35 are located in same level and position is parallel, and pass through two Y on sliding block 21
Axis synchronous belt 14 connects, and is provided with Y-axis servo motor 32, Y axis retarder 33 and synchronous pulley on one of Z axis sliding block 21
A34 drives another transmission shaft by Y-axis synchronous belt 14 by a synchronous pulley A34 driving wherein transmission shaft A35 rotation
A35 is rotated synchronously；Fixed by two Y-axis guide rods 15 between two Z axis sliding blocks 21, two Y-axis guide rods 15 are located at same level
On face and position is parallel, is equipped with a Y-axis slide unit 31 on every Y-axis guide rod 15, two Y-axis slide units 31 respectively with two Y-axis
Synchronous belt 14 is fixedly connected, and drives 31 synchronizing moving of Y-axis slide unit by Y axis synchronous belt 14；One is installed on each Y-axis slide unit 31
Root transmission shaft B, two transmission shaft B are located in same level and position is parallel, and pass through the synchronous band connection of X-axis, one of Y
It is provided with X-axis servo motor 17, X-axis retarder 18 and synchronous pulley B on axis slide unit 31, passes through synchronous pulley B driving wherein one
Root transmission shaft B rotation drives another transmission shaft B to rotate synchronously by X-axis synchronous belt；Pass through two between two Y-axis slide units 31
Root X-axis guide rod 20 is fixed, and two X-axis guide rods 20 are located in same level and position is parallel, install one on every X-axis guide rod 20
A X-axis slide block.The program makes to mirror-finish the translation that platform 19 realizes X-direction and Y-direction on moving platform, passes through synchronous belt
Transmission, may be implemented the transmission of relatively large load, while high-precision control also may be implemented.
Four Angle Positions of corresponding four support columns 2 of the moving platform are each provided with one group of roller bar-roller mechanism, same
Roller 30 and roller bar 29 in group are mounted in the same installation axle, and roller 30 is located at outside；Support column 2 is set along Z axis direction
T-slot is set, roller bar-roller mechanism is mounted in T-slot, and can be moved back and forth along T-slot；Four flexible cables 25 respectively connect
One roller controls the movement of moving platform in the Z-axis direction by the folding and unfolding that four Wire driven robot devices control flexible cable 25.
As shown in figure 4, the mirror finish equipment includes ion beam emittance device 36, mirror finish platform 19 and adjustment machine
Structure, ion beam emittance device 36 are mounted on the lower section of mirror finish platform 19 by adjusting mechanism, adjust ion by adjusting mechanism
The launch angle of beam transmitter 36；Mirror finish platform 19 upper surface fixed with two X-axis slide blocks, while with X-axis synchronous belt
It is fixedly connected, mirror finish 19 synchronizing moving of platform is driven by X-axis synchronous belt；The adjustment mechanism includes a connecting-rods with constant lengh 37
With two electric pushrods 39, it is evenly arranged in the lower surface of mirror finish platform 19 there are three flexural pivot 40, in ion beam emittance device
36 side is evenly arranged there are three key seat, the upper end of a connecting-rods with constant lengh 37 and two electric pushrods 39 respectively with three flexural pivots
The lower end of 40 connections, a connecting-rods with constant lengh 37 and two electric pushrods 39 passes through pin shaft 38 respectively and connect with three key seats.Ion beam
Transmitter 36 is connect with a connecting-rods with constant lengh 37 and two electric pushrods 39 respectively by the revolute pair that three pins 38 are constituted；It is described
Connecting-rods with constant lengh 37 and two electric pushrods are connect by three flexural pivots with mirror finish platform 19；Above structure scheme, constitutes one
A parallel institution realizes the rotation of two freedom degrees of ion beam emittance device 36, can be by adjusting ion beam emittance device 36
Position, so that ion beam emittance device 36 is remained maximum work relative to the incident angle at any point on mirror surface 22 to be processed
Make the angle of efficiency.
The above is only a preferred embodiment of the present invention, it should be pointed out that: for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (5)
1. a kind of optical mirror plane polissoir, it is characterised in that: including body, active support device, four Wire driven robot devices,
Moving platform and mirror finish equipment；
The body includes bottom platform (1), four support columns (2) and a top platform (3), four support column (2) supports
Between bottom platform (1) and four angles of top platform (3), is formed and processed with the quadrangular shape that Z axis is vertical short transverse
Space；
The active support device is arranged in quadrangular shape processing space, and fixed with bottom platform (1), polished mirror surface
(22) be placed on active support device, quadrangular shape processing space, active support device and polished mirror surface (22) it is vertical
Central axis is point-blank；
Four Wire driven robot devices are mounted on four angles of top platform (3), pass through four flexible cable (25) controls of folding and unfolding
The translation of moving platform in the Z-axis direction；
The moving platform includes Z axis slide unit (13), and Z axis slide unit (13) includes two Z axis sliding blocks (21), each Z axis sliding block (21)
A piece transmission shaft A (35) of upper installation, two transmission shaft A (35) are located in same level and position is parallel, and pass through two Y-axis
Synchronous belt (14) connection, be provided on one of Z axis sliding block (21) Y-axis servo motor (32), Y-axis retarder (33) with it is synchronous
Belt wheel A (34) is driven by synchronous pulley A (34) driving wherein transmission shaft A (35) rotation by Y-axis synchronous belt (14)
Another transmission shaft A (35) rotates synchronously；It is fixed by two Y-axis guide rods (15) between two Z axis sliding blocks (21), two Y-axis
Guide rod (15) is located in same level and position is parallel, is equipped with a Y-axis slide unit (31) on every Y-axis guide rod (15), and two
A Y-axis slide unit (31) is fixedly connected with two Y-axis synchronous belts (14) respectively, drives Y-axis slide unit (31) by Y-axis synchronous belt (14)
Synchronizing moving；A piece transmission shaft B is installed, two transmission shaft B are located in same level and position is flat on each Y-axis slide unit (31)
Row, and band connection is synchronized by X-axis, X-axis servo motor (17), X-axis retarder are provided on one of Y-axis slide unit (31)
(18) and synchronous pulley B, by a synchronous pulley B driving wherein transmission shaft B rotation, another is driven by X-axis synchronous belt
Transmission shaft B is rotated synchronously；It is fixed by two X-axis guide rods (20) between two Y-axis slide units (31), two X-axis guide rod (20) positions
It is parallel in same level and position, an X-axis slide block is installed on every X-axis guide rod (20)；
The mirror finish equipment includes ion beam emittance device (36), mirror finish platform (19) and adjustment mechanism, ion beam hair
Emitter (36) is mounted on the lower section of mirror finish platform (19) by adjusting mechanism, adjusts ion beam emittance device by adjusting mechanism
(36) launch angle；The upper surface of mirror finish platform (19) is fixed with two X-axis slide blocks, while being fixed with X-axis synchronous belt
Connection drives mirror finish platform (19) synchronizing moving by X-axis synchronous belt.
2. optical mirror plane polissoir according to claim 1, it is characterised in that: the adjustment mechanism includes a fixed length
Bar (37) He Lianggen electric pushrod (39) is evenly arranged in the lower surface of mirror finish platform (19) there are three flexural pivot (40),
The side of ion beam emittance device (36) is evenly arranged there are three key seat, connecting-rods with constant lengh (37) He Lianggen electric pushrod (39) it is upper
End is connect with three flexural pivots (40) respectively, and the lower end of connecting-rods with constant lengh (37) He Lianggen electric pushrod (39) passes through pin shaft respectively
(38) it is connect with three key seats.
3. optical mirror plane polissoir according to claim 1, it is characterised in that: corresponding four support columns of the moving platform
(2) four Angle Positions are each provided with one group of roller bar-roller mechanism, roller (30) and roller bar (29) installation in same group
In the same installation axle, roller (30) is located at outside；T-slot, roller bar-roller mechanism is arranged along Z-direction in support column (2)
It is mounted in T-slot, and can be moved back and forth along T-slot；Four flexible cables (25) respectively connect a roller, pass through four flexible cables
Driving device controls the movement of the folding and unfolding control moving platform of flexible cable (25) in the Z-axis direction.
4. optical mirror plane polissoir according to claim 1, it is characterised in that: be provided on the top platform (3)
Four flexible cable pilot holes (26), four flexible cable pilot holes (26) are located at the surface of four roller bars (29)；The flexible cable
Driving device includes guide rod (10), driving support platform (6), movable slider (11) and leadscrew-nut mechanism, and guide rod (10) is by leading
Bar support frame (12) is fixed on top platform (3), and support platform (6) and movable slider (11) is driven to be installed on guide rod (10)
And can be moved back and forth with respect to guide rod (10), servo motor (4), retarder (5) and connection are installed in driving support platform (6)
Axis device (7)；Leadscrew-nut mechanism includes fixture nut (8) and lead screw (9), and fixture nut (8) is fixed on top platform (3),
One end of lead screw (9) is connected by shaft coupling (7), retarder (5) with the output end of servo motor (4), the other end of lead screw (9)
It is connected by bearing (27) with movable slider (11), one end of flexible cable (25) is fixedly connected with lead screw (9), the other end of flexible cable (25)
It is connect across corresponding flexible cable pilot hole (26) with the roller bar (29) of underface.
5. optical mirror plane polissoir according to claim 1, it is characterised in that: the active support device includes actively
Support body (24) and force actuator (23), the integral multiple that the number of force actuator (23) is 3, using Hindle/
Whiffletree type multi-point support mode, which is arranged in, actively to be supported on body (24), is supported by power promoters (23) polished
Mirror surface (22).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711170928.4A CN107900838B (en) | 2017-11-22 | 2017-11-22 | A kind of optical mirror plane polissoir |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711170928.4A CN107900838B (en) | 2017-11-22 | 2017-11-22 | A kind of optical mirror plane polissoir |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN107900838A CN107900838A (en) | 2018-04-13 |
| CN107900838B true CN107900838B (en) | 2019-08-06 |
Family
ID=61846985
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711170928.4A Expired - Fee Related CN107900838B (en) | 2017-11-22 | 2017-11-22 | A kind of optical mirror plane polissoir |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN107900838B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109454635B (en) * | 2018-10-15 | 2020-09-25 | 山东中衡光电科技有限公司 | Steel wire flexible cable parallel mirror surface machining device based on lever principle |
| CN112571245B (en) * | 2020-12-07 | 2022-12-02 | 温州大学激光与光电智能制造研究院 | Polishing device for surface of steel plate |
| FR3121377B1 (en) * | 2021-04-06 | 2023-02-24 | Safran Reosc | ISOSTATIC PRECISION MECHANICAL POSITIONING DEVICE WITHOUT INDUCED MECHANICAL STRESS |
| CN113695991A (en) * | 2021-09-07 | 2021-11-26 | 成都极致智造科技有限公司 | Ion beam polishing device for optical element |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CS259474B1 (en) * | 1986-06-04 | 1988-10-14 | Oldrich Brabec | Device for space motion's induction |
| CN105417149B (en) * | 2015-12-28 | 2017-09-22 | 青岛汇智智能系统工程有限公司 | A kind of framework robot |
| CN205831721U (en) * | 2016-05-18 | 2016-12-28 | 浙江理工大学 | A kind of detachable automatic window-cleaning device |
| CN106182763A (en) * | 2016-06-30 | 2016-12-07 | 合肥卡星数控设备有限公司 | A kind of 3D printing device of stable movement |
| CN106112977B (en) * | 2016-07-21 | 2018-09-25 | 华中科技大学无锡研究院 | A kind of submissive polishing Serial-Parallel Type robot technique platform of curved surface class workpiece |
| CN106643473A (en) * | 2016-12-27 | 2017-05-10 | 河北工业大学 | Automatic flatness detection device and method |
| CN107175560A (en) * | 2017-06-08 | 2017-09-19 | 中国矿业大学 | A kind of optical fabrication equipment |
-
2017
- 2017-11-22 CN CN201711170928.4A patent/CN107900838B/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| CN107900838A (en) | 2018-04-13 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107900838B (en) | A kind of optical mirror plane polissoir | |
| CN106670945B (en) | six-spindle polishing machine | |
| CN109227322B (en) | Multi-degree-of-freedom robot for polishing | |
| CN207578134U (en) | Ceramic mobile phone shell polishing machine | |
| CN100448628C (en) | Mechanical flexibility space buttjunction platform | |
| CN106378620A (en) | Modular automatic pick-up fitting device based on air flotation technology | |
| CN109759924B (en) | Double-gantry single-beam movable combined machining tool | |
| CN107855791B (en) | A kind of multi-parallel flexible cable formula optical fabrication device | |
| CN109822438B (en) | Porous polishing polisher | |
| CN111300251A (en) | Free-form surface grinding and polishing device for micro-miniature special-shaped precision parts | |
| CN109623588B (en) | Four-axis servo polishing machine | |
| CN109333197A (en) | A kind of efficient grinding device of structural lumber | |
| CN103317425B (en) | A kind of small-sized revolving body polishing machine | |
| CN106181438A (en) | A kind of back axle machining tool | |
| CN111037323B (en) | Machining intelligence positioner | |
| CN113246045A (en) | Automatic clamping and positioning device for aircraft skin | |
| CN111716330A (en) | Synchronous parallel side 6-freedom branched chain leg and 6-freedom parallel posture adjusting platform thereof | |
| CN218987930U (en) | Novel feeding and discharging device in synchronization | |
| CN207289198U (en) | A kind of double end asynchronous excitation cutting machine | |
| CN112404469A (en) | Lathe automatic feeder for machining | |
| CN114538010A (en) | Gripping device and gripping method in machining area | |
| CN108453520A (en) | Five-axis NC Machining Center for producing aluminium section bar | |
| CN210189316U (en) | Roller fine grinder for spherical bearing | |
| CN113814894A (en) | Bidirectional clamping type grinding device for manufacturing elevator components | |
| CN1106911C (en) | Multifunctional regulating platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20190806 Termination date: 20211122 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |