CN111653516B - Workpiece bearing device and curing equipment - Google Patents
Workpiece bearing device and curing equipment Download PDFInfo
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- CN111653516B CN111653516B CN202010504199.7A CN202010504199A CN111653516B CN 111653516 B CN111653516 B CN 111653516B CN 202010504199 A CN202010504199 A CN 202010504199A CN 111653516 B CN111653516 B CN 111653516B
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- 238000004519 manufacturing process Methods 0.000 claims abstract description 7
- 239000004065 semiconductor Substances 0.000 claims abstract description 5
- 230000000712 assembly Effects 0.000 claims description 43
- 238000000429 assembly Methods 0.000 claims description 43
- 230000007246 mechanism Effects 0.000 claims description 39
- 230000005540 biological transmission Effects 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 14
- 230000008569 process Effects 0.000 claims description 14
- 230000008878 coupling Effects 0.000 claims description 6
- 238000010168 coupling process Methods 0.000 claims description 6
- 238000005859 coupling reaction Methods 0.000 claims description 6
- 230000033001 locomotion Effects 0.000 description 17
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68764—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating caroussel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
Abstract
The invention provides a workpiece bearing device which is used for bearing a workpiece to be machined and adjusting the position in the manufacturing process of a semiconductor device, and comprises a workbench, a support frame and a plurality of connecting components; the workbench is used for bearing a workpiece to be machined; a plurality of connecting components are arranged between the support frame and the workbench, and the connecting components are used for driving the workbench to translate and/or rotate relative to the support frame. The workpiece bearing device provided by the invention can stably adjust the position of the workbench on the premise of ensuring the levelness of the workbench, so that the relative positions of a workpiece waiting and supporting frame and a processing device on a display screen on the workbench can be flexibly and stably adjusted. The invention also provides curing equipment.
Description
Technical Field
The present invention relates to the field of semiconductor devices, and in particular, to a workpiece carrying device and a curing apparatus including the same.
Background
In the production process of workpieces such as a display screen, the display screen is often required to be placed on a workbench corresponding to each process for a plurality of times, and the display screen is taken down and conveyed to the next process after the process is finished. However, in the prior art, in order to ensure the alignment of the display screen and the process equipment, the adjustment of the height, levelness and horizontal direction position of the workbench is often required by a plurality of moving mechanisms such as a lifting device, an air cylinder and the like after the display screen is placed. However, the adjustment process needs to coordinate the sequential movement of a plurality of different types of movement mechanisms, so that the feeding amount of each movement mechanism is difficult to determine at one time, the adjustment operation is excessively complicated, and the adjustment efficiency is low; in addition, mechanical vibration generated during the adjustment of the following movement mechanism is easy to cause the position of the adjusted movement mechanism to deviate, and the adjustment precision is low; in addition, when the workbench is fixed, the position lock of all the motion mechanisms is difficult to ensure, and the overall stability of the equipment is poor.
Therefore, how to provide a workpiece carrying device capable of stably and efficiently adjusting the position of a workbench is a technical problem to be solved in the art.
Disclosure of Invention
The invention aims to provide a workpiece bearing device and curing equipment capable of stably and efficiently adjusting the position of a workbench.
In order to achieve the above object, as one aspect of the present invention, there is provided a workpiece carrying apparatus for carrying a workpiece to be machined and performing positional adjustment in a semiconductor device manufacturing process, the workpiece carrying apparatus including a table, a support frame, and a plurality of connection members; wherein,
the workbench is used for bearing a workpiece to be machined;
a plurality of connecting components are arranged between the support frame and the workbench, and the connecting components are used for driving the workbench to translate and/or rotate relative to the support frame.
Optionally, the connecting component comprises at least one first guide rail fixedly arranged on the workbench and at least one second guide rail fixedly arranged on the supporting frame, each first guide rail corresponds to at least one second guide rail in position, and the first guide rail and the corresponding second guide rail are arranged in a crossing manner;
the connecting assembly further comprises a first steering piece and a second steering piece which are mutually hinged, wherein the first steering piece is connected with the first guide rail and can slide along the first guide rail, and the second steering piece is connected with the second guide rail and can slide along the second guide rail.
Optionally, the first steering member is connected with the second steering member through a spherical hinge, and the first steering member can rotate relative to the second steering member.
Optionally, the connecting assembly further comprises a hinge ball, the first steering member and the second steering member are both provided with hinge holes, and two ends of the hinge ball are respectively arranged in the hinge holes of the first steering member and the second steering member.
Optionally, the plurality of coupling assembling sets up in pairs, every pair coupling assembling all symmetry sets up the both sides of support frame central point put, and every pair first guide rail in the coupling assembling sets up in the syntropy, every pair second guide rail in the coupling assembling sets up in the syntropy.
Optionally, at least one pair of the connection assemblies further comprises a driving mechanism for driving the second steering member in the corresponding connection assembly to move along the corresponding second guide rail.
Optionally, the driving mechanism comprises a driving block, a motor and a transmission screw;
the motor is arranged on the supporting frame and is used for driving the transmission screw rod to rotate;
the driving block is fixedly connected with the corresponding second steering piece, the driving block is provided with a driving threaded hole, and the transmission screw rod is arranged in the driving threaded hole in a matching way; two guide rail through holes are further formed in the driving block, two second guide rails corresponding to the driving mechanism are respectively arranged in the two guide rail through holes in a matching mode, the transmission screw rod and the second guide rails are arranged in the same direction, and the transmission screw rod is arranged between the two second guide rails.
Optionally, the two pairs of connecting components include the driving mechanism, and an included angle exists between extending directions of the second guide rails corresponding to the two pairs of connecting components.
Optionally, the included angle is 90 degrees.
As a second aspect of the present invention, there is provided a curing apparatus including a workpiece carrying device and a curing device for performing a curing process on a display screen carried on the workpiece carrying device, the workpiece carrying device being the aforementioned workpiece carrying device.
In the workpiece bearing device and the curing equipment provided by the invention, the connecting component not only can support the workbench and uniformly share the load on the workbench, but also can allow the workbench to translate and/or rotate relative to the support frame, so that the position of the workbench can be stably adjusted on the premise of ensuring the levelness of the workbench, and the relative positions between the workpiece such as a display screen on the workbench and the processing device can be flexibly adjusted.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate the invention and together with the description serve to explain, without limitation, the invention. In the drawings:
FIG. 1 is a top view of a workpiece carrier provided in an embodiment of the invention;
FIG. 2 is a schematic view of one configuration of a connection assembly in a workpiece carrier provided in accordance with an embodiment of the present invention;
FIG. 3 is a schematic view of another configuration of a connection assembly in a workpiece carrier provided in accordance with an embodiment of the present invention;
FIGS. 4-7 are schematic views of an embodiment of a workpiece carrying device for adjusting a position of a workpiece according to the present invention;
fig. 8 to 11 are schematic views of another embodiment of the workpiece carrying device for adjusting the position of a workpiece according to the present invention.
Description of the reference numerals
100: work table 200: supporting frame
300: the connection assembly 311: first guide rail
312: second rail 320: steering mechanism
321: first steering member 322: second steering member
330: driving mechanism 331: driving block
332: motor 333: transmission screw
400: display screen
Detailed Description
The following describes specific embodiments of the present invention in detail with reference to the drawings. It should be understood that the detailed description and specific examples, while indicating and illustrating the invention, are not intended to limit the invention.
In order to solve the above-mentioned technical problem, as an aspect of the present invention, a workpiece carrying apparatus is provided for carrying a workpiece to be processed and performing position adjustment of the workpiece to be processed (e.g., a display screen 400) in a semiconductor device manufacturing process. As shown in fig. 1, the workpiece carrying device includes a workbench 100, a support frame 200 and a plurality of connection assemblies 300, wherein the workbench 100 is used for carrying a workpiece to be processed, the support frame 200 is provided with the plurality of connection assemblies 300 between the support frame 100 and the support workbench 100, and the connection assemblies 300 are used for driving the workbench 100 to translate and/or rotate relative to the support frame 200.
In the workpiece carrying device provided by the invention, the supporting frame 200 is connected with the workbench 100 through the plurality of connecting assemblies 300, and the connecting assemblies 300 not only can support the workbench 100 and uniformly share the load (such as the weight of the display screen 400) on the workbench 100, but also can allow the workbench 100 to translate and/or rotate relative to the supporting frame 200, so that the position of the workbench 100 can be stably adjusted on the premise of ensuring the levelness of the workbench 100, and further, the relative positions between the workpiece such as the display screen on the workbench 100 and the processing device can be flexibly and stably adjusted, and the efficiency and the accuracy of adjusting the position of a workpiece to be processed are improved.
In order to ensure the uniformity of the load on the connection assembly 300 and the stability of the table 100 when the table 100 moves relative to the support frame 200, as a preferred embodiment of the present invention, as shown in fig. 1 and 3, the connection assembly 300 includes at least one first rail 311 fixedly disposed on the table 100 and at least one second rail 312 fixedly disposed on the support frame 200, each first rail 311 corresponds to at least one second rail 312 in position, and the first rail 311 is disposed to cross the corresponding second rail 312.
The linkage assembly 300 further includes a steering mechanism 320, the steering mechanism 320 including a first steering member 321 and a second steering member 322 that are hinged to each other, the first steering member 321 being coupled to the first rail 311 and movable along the first rail 311, and the second steering member 322 being coupled to the second rail 312 and movable along the second rail 312.
Fig. 3 is a schematic diagram of a structure of a connection assembly 300 according to an embodiment of the present invention, in order to facilitate visual understanding of the structure of the connection assembly 300, the table 100 is shown as transparent (the pattern shown by the dashed box) in fig. 1, and the table 100 is not shown in fig. 3. As shown in fig. 3, the fixing members on both sides of the first rail 311 are used to fix the first rail 311 to the table 100, and the hatched portion of the fixing members is a region for fixedly connecting with the table 100, and similarly, the fixing members on both sides of the second rail 312 fix the second rail 312 to the support frame 200.
In the embodiment of the present invention, the connection assembly 300 includes a first rail 311, a second rail 312, and a steering mechanism 320, where the steering mechanism 320 can move along the first rail 311 or along the second rail 312, so as to allow the table 100 and the support frame 200 to slide relatively in a horizontal direction. For example, when the first guide rail 311 and the second guide rail 312 are distributed on the table 100 and the support frame 200 as shown in fig. 1, the table 100 and the support frame 200 can be moved by the same distance relative to each other only by moving the steering mechanisms 320 by the same distance in a certain direction on the first guide rail 311 and/or the second guide rail 312 disposed in the same direction.
Also, in the embodiment of the present invention, the steering mechanism 320 includes the first steering member 321 and the second steering member 322 that move along the two rails, respectively, so that the first rail 311 and the second rail 312 can move relatively along the horizontal plane, but also can rotate relatively, thereby allowing the table 100 to rotate on the supporting surface of the supporting frame 200. When the table 100 rotates on the support frame 200 along the horizontal plane, the first guide rail 311 and the second guide rail 312 distributed at each position are moved and rotated relative to each other, the moving distance of which is directly related to the distance between the connecting assembly 300 and the rotation center of the table 100, and the rotation angle of which is the same as the rotation angle of the table 100 relative to the support frame 200.
In the embodiment of the present invention, the relative movement and rotation between the workbench 100 and the support frame 200 can be realized only by the horizontal sliding between the steering mechanism 320 and the guide rail in the connecting assembly 300 and the horizontal twisting of the steering mechanism 320 itself, so that the stability of the workbench 100 is improved. In addition, in the embodiment of the invention, the movable connection between the workbench 100 and the support frame 200 is realized through the plurality of connecting components 300, so that the stability of the relative distance between the workbench 100 and the support frame 200 is ensured, the levelness of the workbench 100 is further improved, the time for adjusting the levelness of the workbench 100 is saved, and the production efficiency is further improved.
It should be noted that the distribution of the plurality of first guide rails 311 and the plurality of second guide rails 312 is not particularly limited, and only a more attractive arrangement mode is adopted in fig. 1, and even if the arrangement mode of the first guide rails 311 and the second guide rails 312 is different from that of fig. 1 (for example, the plurality of first guide rails 311 are arranged in different directions, and the plurality of second guide rails 311 are arranged in different directions), the structure provided by the embodiment of the invention can also realize the relative movement and rotation between the workbench 100 and the support frame 200 along the horizontal plane.
The connection form between the first steering member 321 and the second steering member 322 in the steering mechanism 320 is not particularly limited in the present invention, and for example, the first steering member 321 may be rotatably connected to the second steering member 322 by a bearing or a sliding sleeve member. In order to further improve the levelness of the workbench 100, preferably, the first steering member 321 is in spherical hinge connection with the second steering member 322, and the first steering member 321 can rotate relative to the second steering member 322, so that a certain inclination between the first steering member 321 and the second steering member 322 can be allowed, and the phenomenon that the workbench 100 jumps along the height direction when the first steering member 321 and the second steering member 322 relatively rotate due to the manufacturing error of the first steering member 321 and the second steering member 322 and the like is avoided, thereby improving the levelness and stability of the workbench 100.
The present invention does not specifically limit how to implement the spherical hinge connection between the first steering member 321 and the second steering member 322, for example, one of the first steering member 321 and the second steering member 322 may be connected with a ball member, and the other one is formed with a ball hinge seat, so that the spherical hinge connection is implemented by the cooperation between the ball member and the ball hinge seat.
In order to simplify the structure of the apparatus, when the support frame 200 is positioned below the table 100, it is preferable that the steering mechanism 320 further includes a hinge ball, and hinge holes are formed in both the first and second steering members 321 and 322, and both ends of the hinge ball are respectively disposed in the hinge holes of the first and second steering members 321 and 322, so that the hinge ball is restricted in the hinge holes of the first and second steering members 321 and 322 by gravity.
In order to improve the uniformity of the stress of the first steering member 321 and the second steering member 322, it is preferable that, as shown in fig. 3, the first steering member 321 and the second steering member 322 are both disk-shaped, and the circular surface of the first steering member 321 is disposed opposite to the circular surface of the second steering member 322.
The distribution of the connection assemblies 300 in the workpiece carrying device is not particularly limited, for example, in order to improve the uniformity of the load born by each connection assembly 300 and the accuracy of controlling the displacement and the rotation feeding amount of the workbench, preferably, as shown in fig. 4, a plurality of connection assemblies 300 are arranged in pairs, each pair of connection assemblies 300 is symmetrically arranged at two sides of the central position (such as the geometric center) of the support frame 200, and the first guide rails 311 in each pair of connection assemblies 300 are arranged in the same direction, and the second guide rails 312 in each pair of connection assemblies 300 are arranged in the same direction.
In the embodiment of the invention, the plurality of pairs of connecting assemblies 300 are symmetrically arranged by taking the central position of the supporting frame 200 as the symmetrical center, so that the uniformity of bearing load of each connecting assembly 300 is improved, and the first guide rail 311 and the second guide rail 312 in each pair of connecting assemblies 300 are arranged in the same direction, so that when the connecting assemblies 300 move along the guide rails, the friction force between each pair of connecting assemblies 300 and the corresponding guide rail is the same, and the error of the rotation angle of the workbench 100 caused by different stress when each pair of connecting assemblies 300 move is avoided, and the accuracy of controlling the displacement and the rotation feeding amount of the workbench is further improved.
To achieve automatic adjustment of the relative position between the table 100 and the support frame 200, as shown in fig. 1 to 2, preferably, at least one pair of the connection assemblies 300 further includes a driving mechanism 330, where the driving mechanism 330 is used to drive the second steering member 322 in the corresponding connection assembly 300 to move along the corresponding second guide rail 312 of the connection assembly 300, so that the steering mechanism 320 pushes the first guide rail 311 to move along a direction intersecting with the extending direction of the first guide rail 311, and thus pushes the table 100 to translate or rotate.
The present invention is not particularly limited as to how the driving mechanism 330 drives the second steering member 322 to move, for example, the second steering member 322 may be pulled by a drag rope, or a rack gear coupled to the second steering member 322 may be driven to move by a gear.
To improve the accuracy of controlling the movement of the table 100, it is preferable that the driving mechanism 330 includes a driving block 331, a motor 332, and a driving screw 333, and the motor 332 is disposed on the support frame 200 and is used to drive the driving screw 333 to rotate, as shown in fig. 1 and 2. The driving block 331 is fixedly connected with the corresponding second steering member 322, and a driving threaded hole is formed in the driving block 331, and the driving screw 333 is arranged in the driving threaded hole in a matching manner.
Two guide rail through holes are further formed in the driving block 331, two second guide rails 312 corresponding to the driving mechanism 330 are respectively matched and arranged in the two guide rail through holes of the driving block 331, the transmission screw 333 and the second guide rails 312 are arranged in the same direction, and the transmission screw 333 is arranged between the two second guide rails 312 corresponding to the two guide rail through holes.
In the embodiment of the invention, the driving block 331 is driven by the driving screw 333 to improve the accuracy of controlling the position of the driving block 331, thereby improving the accuracy of controlling the movement of the workbench 100.
Also, in the embodiment of the present invention, two guide rail through holes are formed in the driving block 331, and the driving screw 333 is disposed between two second guide rails 312 corresponding to the two guide rail through holes. The driving screw 333 is disposed between the two second guide rails 312 disposed in the same direction, so that when the driving screw 333 applies a driving force to the driving block 331, the driving block 331 will not receive excessive torque, and the smoothness of the movement of the driving block 331 on the guide rails is improved.
In order to simplify the structure of the apparatus while simultaneously implementing the automatic adjustment of the position and angle of the table 100, it is preferable that, as shown in fig. 1, the two pairs of connection assemblies 300 include a driving mechanism 330, and an included angle exists between the extending directions of the second guide rails 312 corresponding to the two pairs of connection assemblies 300.
In the embodiment of the present invention, the relative movement and rotation of the table 100 and the support frame 200 in the horizontal plane direction can be realized only by two pairs of the connection assemblies 300 having the driving mechanisms 330 disposed along different directions.
In order to control the distance and direction of movement of the table 100 relative to the support frame 200, preferably, as shown in fig. 1, an included angle between the second guide rails 312 corresponding to the two pairs of connection assemblies 300 is 90 degrees, so that when the table 100 is controlled to move relative to the support frame 200, the distance and direction of movement can be orthogonally decomposed into the feeding amounts of the steering mechanism 320 along the second guide rails 312 in different directions, thereby improving the convenience of movement of the table 100.
For ease of understanding by those skilled in the art, two reference embodiments are provided below for the case where two pairs of connection assemblies 300 have drive mechanisms 330:
embodiment one:
as shown in fig. 4, the workpiece carrying device includes two pairs of connecting assemblies 300 having driving mechanisms 330, wherein for convenience of distinction, transmission assemblies such as a motor and a screw in one pair of driving mechanisms 330 are respectively denoted as an assembly a and an assembly B, transmission assemblies such as a motor and a screw in the other pair of driving mechanisms 330 are respectively denoted as an assembly C and an assembly D, wherein the assembly a and the second guide rail 312 corresponding to the assembly B are disposed in the same direction, and the assembly C and the second guide rail 312 corresponding to the assembly D are disposed in the same direction.
Fig. 4 shows a case where a positional deviation occurs when the display screen 400 is placed on the table 100, and as shown in the drawing, the display screen 400 is placed to the left, and in order to align the display screen 400 with a corresponding process device (e.g., a curing device), the display screen 400 needs to be moved to the right.
As shown in fig. 5, the components a and B simultaneously push the first guide rail 311 to the right (as shown by the arrow in the drawing), so that the workbench 100 translates to the right until reaching the position shown in fig. 6 and 7, at this time, as shown in fig. 7, the display screen 400 moves to the right along with the workbench 100, so as to achieve alignment between the display screen 400 and the support frame 200 and corresponding process devices.
Embodiment two:
as shown in fig. 8, in a case where an angular deviation occurs when the display screen 400 is placed on the table 100, the display screen 400 is placed at an angle that is deviated clockwise as shown in the drawing, and in order to align the display screen 400 with the corresponding process apparatus, it is necessary to rotate the display screen 400 in a counterclockwise direction.
As shown in fig. 9, the components a and B push the corresponding first guide rails 311 in opposite directions (as shown by arrows in the drawing), so that a counterclockwise moment is applied to the table 100, and in order to improve the pushing effect, the components C and D may push the corresponding first guide rails 311 in opposite directions, so that the table 100 rotates counterclockwise until reaching the positions shown in fig. 10 and 11, at this time, as shown in fig. 11, the display screen 400 also rotates counterclockwise along with the table 100, so as to align the display screen 400 with the support frame 200 and the corresponding process device.
In addition, the above structure provided in the embodiment of the present invention may also adjust the position of the workbench 100 along other tracks. For example, one pair of linkage assemblies 300 may be caused to drive the second rail 312 in the same direction to translate the table 100, and the other pair of linkage assemblies 300 may be caused to drive the second rail 312 in the opposite direction to rotate the table 100, thereby effecting both translation and rotation of the table 100.
In addition, the track of the translational motion of the worktable 100 driven by the connection assemblies 300 is not limited to the setting direction of the second guide rail 312, for example, a pair of connection assemblies 300 can drive the second guide rail 312 along a first direction, and another pair of connection assemblies 300 can drive the second guide rail 312 along a second direction, so that the worktable 100 can travel along a certain direction between the first direction and the second direction under the driving of two groups of connection assemblies 300, and the translational direction and the travel rate of the worktable 100 can be adjusted by adjusting the speed ratio of the movement of the second guide rail 312 driven by the two groups of connection assemblies 300. Therefore, the workpiece carrying device provided by the embodiment of the invention can align the workpiece with the support frame 200 and the corresponding process device stably and efficiently within the allowable range of the length of the guide rail no matter what angle the workpiece (such as the display screen 400) is placed on the workbench 100.
The distribution of the connection assemblies 300 in the workpiece carrying device is not particularly limited, so long as the workpiece carrying device can ensure that the load on the workbench 100 is carried uniformly, for example, as shown in fig. 4, the workpiece carrying device can comprise 6 pairs (12) of connection assemblies 300.
As a second aspect of the present invention, there is provided a curing apparatus including a workpiece carrying device and a curing device for performing a curing process on a display screen carried on the workpiece carrying device, the workpiece carrying device being the workpiece carrying device described in the foregoing embodiment.
In the display screen curing apparatus provided by the invention, the connecting assembly 300 not only can support the workbench 100 and uniformly share the load on the workbench 100, but also can allow the workbench 100 to translate and/or rotate relative to the support frame 200, so that the position of the workbench 100 can be stably adjusted on the premise of ensuring the levelness of the workbench 100, and further, the relative positions between the workpieces such as a display screen on the workbench 100 and a process system can be flexibly adjusted.
It is to be understood that the above embodiments are merely illustrative of the application of the principles of the present invention, but not in limitation thereof. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the invention, and are also considered to be within the scope of the invention.
Claims (9)
1. The workpiece bearing device is used for bearing a workpiece to be machined and adjusting the position in the manufacturing process of the semiconductor device and is characterized by comprising a workbench, a support frame and a plurality of connecting assemblies; wherein,
the workbench is used for bearing a workpiece to be machined;
a plurality of connecting components are arranged between the support frame and the workbench, and the connecting components are used for driving the workbench to translate and/or rotate relative to the support frame;
the connecting assembly comprises at least one first guide rail fixedly arranged on the workbench and at least one second guide rail fixedly arranged on the supporting frame, each first guide rail corresponds to at least one second guide rail in position, and the first guide rail and the corresponding second guide rail are arranged in a crossing manner;
the connecting assembly further comprises a first steering piece and a second steering piece which are mutually hinged, wherein the first steering piece is connected with the first guide rail and can slide along the first guide rail, and the second steering piece is connected with the second guide rail and can slide along the second guide rail.
2. The workpiece carrying device of claim 1, wherein the first steering member and the second steering member are connected by a ball joint, and the first steering member is rotatable relative to the second steering member.
3. The workpiece carrier of claim 2, wherein the connecting assembly further comprises a hinge ball, the first steering member and the second steering member each have a hinge hole formed therein, and both ends of the hinge ball are disposed in the hinge holes of the first steering member and the second steering member, respectively.
4. A workpiece carrying device as claimed in any one of claims 1 to 3, in which a plurality of said connection assemblies are arranged in pairs, each pair of said connection assemblies being symmetrically arranged on either side of the centre of said support frame, and the first guide rails of each pair of said connection assemblies being arranged in the same direction, and the second guide rails of each pair of said connection assemblies being arranged in the same direction.
5. The workpiece carrier of claim 4, wherein at least one pair of the coupling assemblies further comprises a drive mechanism for driving the second steering members of the corresponding coupling assemblies along the respective second guide rails.
6. The workpiece carrier of claim 5, wherein the drive mechanism comprises a drive block, a motor, and a drive screw;
the motor is arranged on the supporting frame and is used for driving the transmission screw rod to rotate;
the driving block is fixedly connected with the corresponding second steering piece, the driving block is provided with a driving threaded hole, and the transmission screw rod is arranged in the driving threaded hole in a matching way; two guide rail through holes are further formed in the driving block, two second guide rails corresponding to the driving mechanism are respectively arranged in the two guide rail through holes in a matching mode, the transmission screw rod and the second guide rails are arranged in the same direction, and the transmission screw rod is arranged between the two second guide rails.
7. The workpiece carrier of claim 5, wherein two pairs of the connecting assemblies comprise the driving mechanism, and an included angle exists between extending directions of the second guide rails corresponding to the two pairs of the connecting assemblies.
8. The workpiece carrier of claim 7, wherein the included angle is 90 degrees.
9. A curing apparatus comprising a workpiece carrying device and a curing device for performing a curing process on a display screen carried on the workpiece carrying device, wherein the workpiece carrying device is the workpiece carrying device according to any one of claims 1 to 8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010504199.7A CN111653516B (en) | 2020-06-05 | 2020-06-05 | Workpiece bearing device and curing equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010504199.7A CN111653516B (en) | 2020-06-05 | 2020-06-05 | Workpiece bearing device and curing equipment |
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| CN111653516A CN111653516A (en) | 2020-09-11 |
| CN111653516B true CN111653516B (en) | 2024-01-05 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207177244U (en) * | 2017-08-16 | 2018-04-03 | 中国石油天然气股份有限公司 | Job platform |
| CN108109672A (en) * | 2018-02-06 | 2018-06-01 | 京东方科技集团股份有限公司 | Adjusting apparatus and load bearing equipment |
| CN208118657U (en) * | 2018-03-23 | 2018-11-20 | 深圳市领创精密机械有限公司 | A kind of alignment system of multi-functional true hollow panel |
| CN208196710U (en) * | 2018-04-16 | 2018-12-07 | 中国石油天然气股份有限公司 | Mechanical scanning |
| CN109732299A (en) * | 2019-01-09 | 2019-05-10 | 深圳福瑞特自动化有限公司 | Position adjusting mechanism and positioning device |
| CN110948328A (en) * | 2019-11-28 | 2020-04-03 | 北京微纳精密机械有限公司 | High-precision one-dimensional angle adjusting workbench |
-
2020
- 2020-06-05 CN CN202010504199.7A patent/CN111653516B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN207177244U (en) * | 2017-08-16 | 2018-04-03 | 中国石油天然气股份有限公司 | Job platform |
| CN108109672A (en) * | 2018-02-06 | 2018-06-01 | 京东方科技集团股份有限公司 | Adjusting apparatus and load bearing equipment |
| CN208118657U (en) * | 2018-03-23 | 2018-11-20 | 深圳市领创精密机械有限公司 | A kind of alignment system of multi-functional true hollow panel |
| CN208196710U (en) * | 2018-04-16 | 2018-12-07 | 中国石油天然气股份有限公司 | Mechanical scanning |
| CN109732299A (en) * | 2019-01-09 | 2019-05-10 | 深圳福瑞特自动化有限公司 | Position adjusting mechanism and positioning device |
| CN110948328A (en) * | 2019-11-28 | 2020-04-03 | 北京微纳精密机械有限公司 | High-precision one-dimensional angle adjusting workbench |
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