CN111580269A - Display panel based on eyeball tracking technology, preparation method thereof and display device - Google Patents

Display panel based on eyeball tracking technology, preparation method thereof and display device Download PDF

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Publication number
CN111580269A
CN111580269A CN202010511872.XA CN202010511872A CN111580269A CN 111580269 A CN111580269 A CN 111580269A CN 202010511872 A CN202010511872 A CN 202010511872A CN 111580269 A CN111580269 A CN 111580269A
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sub
layer
pixel
image sensing
display panel
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杜晓松
周文斌
李高敏
朱晓庆
孙剑
高裕弟
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Kunshan Mengxian Electronic Technology Co ltd
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Kunshan Mengxian Electronic Technology Co ltd
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0093—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 with means for monitoring data relating to the user, e.g. head-tracking, eye-tracking
    • G—PHYSICS
    • G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
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    • H—ELECTRICITY
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    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
    • H01L27/153—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
    • H01L27/156—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
    • H—ELECTRICITY
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    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/12—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof structurally associated with, e.g. formed in or on a common substrate with, one or more electric light sources, e.g. electroluminescent light sources, and electrically or optically coupled thereto
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    • H01L31/184—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
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    • H01L31/184—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP
    • H01L31/1856—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof the active layers comprising only AIIIBV compounds, e.g. GaAs, InP comprising nitride compounds, e.g. GaN
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    • H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
    • H01L33/62—Arrangements for conducting electric current to or from the semiconductor body, e.g. lead-frames, wire-bonds or solder balls
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    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/1201—Manufacture or treatment
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    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
    • H10K59/353—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels characterised by the geometrical arrangement of the RGB subpixels
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Abstract

The embodiment of the invention discloses a display panel based on an eyeball tracking technology, a preparation method thereof and a display device. The display panel includes: a plurality of pixels including a sub-pixel unit and an image sensing unit; wherein at least part of the sub-pixel units comprise a light emitting layer and a color conversion layer for converting light emitted by the light emitting layer into different colors; the image sensing unit is used for eyeball tracking; driving a back plate to bear the plurality of pixels; the driving back plate is used for receiving an eyeball tracking signal of the image sensing unit and driving the sub-pixel units to emit light, and the sub-pixel units are configured to emit light according to a target tracked by the image sensing unit. Compared with the prior art, the embodiment of the invention improves the eyeball tracking effect and the display effect of the display panel.

Description

Display panel based on eyeball tracking technology, preparation method thereof and display device
Technical Field
The embodiment of the invention relates to the technical field of display, in particular to a display panel based on an eyeball tracking technology, a preparation method of the display panel and a display device.
Background
With the continuous development of display technology, the application range of display panels is wider and wider, and the requirements of people on the display panels are higher and higher. For example, the display panel is applied to products such as mobile phones, computers, tablet computers, electronic books, information query machines, wearable devices and the like.
The wearable device includes a Virtual Reality device (VR), an Augmented Reality device (AR), and the like. Compare in ordinary display device, display device such as AR/VR has multiple advantage, has played very big effect in the aspect of the sense of user's promotion immersion, can fall to the ground in national economy life conscientiously. However, the existing display panel has a problem of poor eyeball tracking effect, and the application of the existing display panel to display equipment such as AR/VR is easy to cause user dizziness, which affects user experience.
Disclosure of Invention
The embodiment of the invention provides a display panel based on an eyeball tracking technology, a preparation method thereof and a display device, so as to improve the eyeball tracking effect and the display effect of the display panel.
In order to achieve the technical purpose, the embodiment of the invention provides the following technical scheme:
a display panel based on eye tracking technology, comprising:
a plurality of pixels including a sub-pixel unit and an image sensing unit; wherein at least part of the sub-pixel units comprise a light emitting layer and a color conversion layer for converting light emitted by the light emitting layer into different colors; the image sensing unit is used for eyeball tracking;
a driving backplane carrying the plurality of pixels; the driving back plate is used for receiving an eyeball tracking signal of the image sensing unit and driving the sub-pixel units to emit light, and the sub-pixel units are configured to emit light according to a target tracked by the image sensing unit.
Furthermore, the number of the sub-pixel units in one pixel is three, the number of the image sensing units is one, and the three sub-pixel units and one image sensing unit are arranged in a field shape.
Further, the pixel includes: the pixel structure comprises a red sub-pixel unit, a green sub-pixel unit, a blue sub-pixel unit and an image sensing unit; the light emitting layers in the red sub-pixel unit, the green sub-pixel unit and the blue sub-pixel unit emit blue light, the color conversion layer of the red sub-pixel unit comprises red quantum dots, and the color conversion layer of the green sub-pixel unit comprises green quantum dots;
red sub-pixel units in the four pixels are adjacently arranged and arranged in a field shape; green sub-pixel units in the four pixels are adjacently arranged and arranged in a field shape; blue sub-pixel units in the four pixels are adjacently arranged and arranged in a field shape; the image sensing units in the four pixels are adjacently arranged and arranged in a field shape.
Further, the driving back plate comprises a plurality of through holes, and the image sensing unit covers at least one through hole;
the image sensing unit comprises a first sensing electrode, an image sensing layer, a second sensing electrode and an intermediate insulating layer, wherein the first sensing electrode is positioned on one side of the driving backboard and is in contact with the via hole; the image sensing layer is positioned on one side of the first sensing electrode, which is far away from the driving back plate; the second sensing electrode is positioned on one side of the image sensing layer far away from the driving back plate; the middle insulating layer is located on one side, far away from the driving back plate, of the second sensing electrode, and comprises a first opening, and a part of the second sensing electrode is exposed out of the first opening.
Further, the image sensing unit further comprises a lens, and the lens is located on one side of the second sensing electrode, which is far away from the driving back plate.
Further, the image sensing layer includes at least one of amorphous silicon, polycrystalline silicon, and reduced graphene oxide.
Further, the sub-pixel unit covers at least one via hole; the sub-pixel unit further comprises a first semiconductor layer, a second semiconductor layer and a display electrode;
the first semiconductor layer is located on one side, away from the driving backboard, of the light emitting layer, the second semiconductor layer is located on one side, close to the driving backboard, of the light emitting layer, the display electrode is located on one side, close to the driving backboard, of the second semiconductor layer, and the display electrode is in contact with the via hole;
the display panel further includes: the first isolation layer is positioned on one side, away from the driving back plate, of the first semiconductor layer and covers the first semiconductor layer, the light emitting layer, the second semiconductor layer and the side wall of the display electrode; the first isolation layer comprises a second opening, and the second opening exposes a part of the first semiconductor layer.
Further, the display panel further comprises a common electrode, the common electrode is located on one side of the first isolation layer away from the driving back plate, and the common electrode covers the first isolation layer and the middle insulation layer; the common electrode is in contact with the second sensing electrode of the image sensing unit through the first opening, and is in contact with the first semiconductor layer of the sub-pixel unit through the second opening.
Further, the display panel further includes:
the pixel definition layer is positioned on one side of the common electrode, which is far away from the driving backboard; the pixel definition layer comprises a first groove and a second groove, the first groove is overlapped with the projection of the light emitting layer on the driving back plate, and the color conversion layer is positioned in the first groove; the vertical projection of the second groove on the driving back plate is positioned between the vertical projections of the adjacent sub-pixel units on the driving back plate;
the second isolation layer is positioned on one side, far away from the driving back plate, of the pixel definition layer, and covers the color conversion layer and the second groove.
Correspondingly, the invention also provides a display device based on the eyeball tracking technology, which comprises: the display panel based on eye tracking technology according to any embodiment of the invention.
Correspondingly, the invention also provides a preparation method of the display panel based on the eyeball tracking technology, which comprises the following steps:
providing a driving back plate and a sub-pixel unit substrate; wherein the sub-pixel unit substrate includes a light emitting layer;
bonding the driving back plate and the sub-pixel unit substrate;
patterning the sub-pixel unit substrate to form a plurality of sub-pixel units; reserving positions of image sensing units among the sub-pixel units;
and manufacturing an image sensing unit at a reserved position, wherein at least one sub-pixel unit and at least one image sensing unit form a pixel.
According to the embodiment of the invention, the pixels comprise the sub-pixel units and the image sensing units, and the image sensing units are used as part of the pixels and can be distributed at various positions on the display panel, so that the image sensing units can be over against human eyes, and the eyeball tracking accuracy is improved. And the sub-pixel units in the embodiment of the invention are configured to emit light according to the eyeball tracking of the image sensing unit, and the display image can be adjusted in real time according to the eyeball motion. Therefore, compared with the prior art, the embodiment of the invention improves the eyeball tracking effect, is beneficial to biological identification and IPD interpupillary distance adjustment, optimizes the display effect of the display device when being applied to display equipment such as AR/VR and the like, is beneficial to relieving the phenomenon of dizziness of a user, improves the rendering efficiency of the display panel, improves the immersion of the user and enhances the man-machine interaction performance of the display device.
Drawings
Fig. 1 is a schematic cross-sectional view illustrating a display panel based on an eye tracking technology according to an embodiment of the present invention;
fig. 2 is a schematic cross-sectional view illustrating another display panel based on eye tracking technology according to an embodiment of the present invention;
fig. 3 is a schematic top view of a display panel based on an eye tracking technology according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a display device based on an eye tracking technology according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of a display panel formed in each step by the method for manufacturing a display panel based on the eye tracking technology according to the embodiment of the present invention;
fig. 6 is a schematic structural diagram of a display panel formed in steps S210-S230 according to another display panel manufacturing method based on eye tracking technology provided in the embodiment of the present invention;
fig. 7 is a schematic structural diagram of a display panel formed in S240-S270 according to another method for manufacturing a display panel based on an eye tracking technology in an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a display panel formed in S280-S2a0 according to another method for manufacturing a display panel based on an eye tracking technology provided in the embodiment of the present invention;
fig. 9 is a schematic structural diagram of a display panel formed in S2B0-S2D0 according to another method for manufacturing a display panel based on an eye tracking technology provided in an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
The embodiment of the invention provides a display panel based on an eyeball tracking technology, which can be suitable for display equipment such as AR/VR (augmented reality/virtual reality) equipment. The display panel may be an Organic Light-Emitting Diode (OLED) display panel, a Micro Light-Emitting Diode (Micro LED) display panel, a Quantum Dot Light-Emitting Diode (QLED) display panel, or the like.
Fig. 1 is a schematic cross-sectional view illustrating a display panel based on an eye tracking technology according to an embodiment of the present invention. Referring to fig. 1, the display panel based on the eye tracking technology includes a driving backplate 10 and a plurality of pixels 20 (a specific structure of one pixel 20 is exemplarily output in fig. 1) on the driving backplate 10. The pixel 20 includes a sub-pixel unit 210 and an image sensing unit 220. At least a portion of the sub-pixel cells 210 include a light emitting layer 211 and a color conversion layer 212. Illustratively, the first and second sub-pixel units 210 from left to right in fig. 1 include a light emitting layer 211 and a color conversion layer 212, and the third sub-pixel unit 210 includes the light emitting layer 211 but does not include the color conversion layer 212. The color conversion layer 212 is used for converting light emitted by the light emitting layer 211 into different colors, so as to realize full-color display of pixels; the image sensing unit 220 is used for eye tracking. The driving backplane 10 carries a plurality of pixels 20; the driving backplane 10 is configured to receive an eye tracking signal of the image sensing unit 220 and drive the sub-pixel unit 210 to emit light, and the sub-pixel unit 210 is configured to emit light according to a target tracked by the image sensing unit 220.
The pixel 20 includes a sub-pixel unit 210 and an image sensing unit 220, that is, the image sensing unit 220 as a part of the pixel 20 may be distributed at various positions on the display panel. The driving backplane 10 refers to a film structure that can provide driving signals for the display panel and play roles of buffering, protecting, supporting, and the like. The driving backplane 10 may be, for example, a silicon-based backplane, and a driving circuit, such as a pixel driving circuit or a CMOS driving circuit, is disposed in the driving backplane 10 for driving the sub-pixel units 210 to emit light. In the embodiment of the present invention, optionally, the driving backplane 10 is further configured to receive an eye tracking signal of the image sensing unit 220, so that the sub-pixel unit 210 can emit light according to a target tracked by the image sensing unit 220.
For example, the display panel works in such a way that external ambient light (e.g., natural light, light or panel light) is irradiated onto an eyeball that is watching a picture, and the eyeball reflects the light to the image sensing unit 220. The image sensing unit 220 can sense light reflected from each position of an eyeball to determine pupil position information and eye movement data of the human eye in real time. The image sensing unit 220 can output signals based on the pupil position information and the eye movement data, and the driving chip or the driving back plate 10 can determine the display data according to the signals output by the image sensing unit 220 to drive the sub-pixel units 210 to emit light, so that the display panel displays images. And the image displayed by the display panel can be adjusted in real time according to the pupil position and the eye movement condition of human eyes.
In the embodiment of the present invention, the pixel 20 includes the sub-pixel unit 210 and the image sensing unit 220, and the image sensing unit 220 as a part of the pixel 20 may be distributed at each position on the display panel, so that the image sensing unit 220 can directly face the human eyes, which is beneficial to improving the accuracy of eye tracking. And the sub-pixel unit 210 in the embodiment of the present invention is configured to emit light according to the eye tracking of the image sensing unit 220, and can adjust the display image in real time according to the eye movement. Therefore, compared with the prior art, the embodiment of the invention improves the eyeball tracking effect, is beneficial to biological identification and IPD interpupillary distance adjustment, optimizes the display effect of the display device when being applied to display equipment such as AR/VR and the like, is beneficial to relieving the phenomenon of dizziness of a user, improves the rendering efficiency of the display panel, improves the immersion of the user and enhances the man-machine interaction performance of the display device.
In addition to the above embodiments, there are various arrangements of the film layer structures of the sub-pixel unit 210 and the image sensing unit 220, and the following description will be made of some arrangements thereof, but the present invention is not limited thereto.
With continued reference to fig. 1, in one embodiment of the present invention, optionally, the driving backplane 10 includes a plurality of vias 11, and the image sensing unit 220 covers at least one via 11. The image sensing unit 220 includes a first sensing electrode 221, an image sensing layer 222, a second sensing electrode 223, and an intermediate insulating layer 224.
The first sensing electrode 221 is located on one side of the driving backplane 10, the first sensing electrode 221 contacts the via hole 11, and the via hole 11 is filled with a conductive material, so as to electrically connect the first sensing electrode 221 and the driving backplane 10. The first sensing electrode 221 may be, for example, an anode, and the anode may have a single-layer structure or a multi-layer structure, and exemplarily, the anode has a three-layer structure of a metal oxide layer, a metal layer and a metal oxide layer, wherein the material of the first layer and the third layer may be, for example, Indium Tin Oxide (ITO), Indium Zinc Oxide (IZO), Aluminum Zinc Oxide (AZO), or a combination thereof, and the metal layer may be, for example, silver, copper, or a combination thereof.
The image sensing layer 222 is located on the side of the first sensing electrode 221 away from the driving backplane 10. The image sensing layer 222 is a photosensitive structure in the image sensing unit 220, and the image sensing layer 222 may include, for example, at least one of amorphous silicon (a-Si), poly-silicon (p-Si), and reduced graphene oxide.
The second sensing electrode 223 is located on a side of the image sensing layer 222 away from the driving backplane 10. The second sensing electrode 223 may be a cathode, and the material of the cathode may be an ITO transparent electrode, a magnesium silver alloy, or aluminum, for example.
The intermediate insulating layer 224 is located on a side of the second sensing electrode 223 away from the driving backplane 10, and the intermediate insulating layer 224 includes a first opening exposing a portion of the second sensing electrode 223. The intermediate insulating layer 224 serves as protection and insulation, and the second sensing electrode 223 exposed by the first opening thereof is used to contact the cathode, providing a conductive path for the image sensing unit 220.
Fig. 2 is a schematic cross-sectional view of another display panel based on eye tracking technology according to an embodiment of the invention. Referring to fig. 2, in an embodiment of the present invention, optionally, the image sensing unit 220 further includes a lens 225, and the lens 225 is located on a side of the second sensing electrode 223 far away from the driving back plate 10. The lens 225 can converge light reflected by human eyes to the image sensing layer 222, so that the illumination intensity of the image sensing layer 222 is enhanced, and the sensing precision is improved.
Alternatively, the lenses 225 are Micro lenses (Micro Lens), and one Lens 225 or a plurality of lenses 225 are disposed corresponding to each image sensing unit 220. Thus, a micro-lens array is formed in the display panel to collect light rays reflected by the eyeballs in all directions, which is helpful for accurately identifying the position information and the motion information of the eyeballs, so that the pixels 20 perform light emitting display according to the position information and the motion information of the eyeballs, and the display effect and the human-computer interaction performance of the display panel are facilitated to be optimized.
With reference to fig. 1 and fig. 2, in an embodiment of the present invention, optionally, the sub-pixel unit 210 is a micro light emitting diode, and the sub-pixel unit 210 covers at least one via hole 11; the sub-pixel cell 210 further includes a first semiconductor layer 214, a second semiconductor layer 213, and a display electrode 215. The first semiconductor layer 214 is located on a side of the light emitting layer 211 away from the driving backplane 10, and the material of the first semiconductor layer 214 may be, for example, N-type gallium nitride (N-GaN). The second semiconductor layer 213 is located on a side of the light-emitting layer 211 close to the driving backplane 10, and the material of the second semiconductor layer 213 may be P-type gallium nitride (P-GaN), for example. The material of the light-emitting layer 211 may be, for example, a Multiple Quantum Well (MQW). The display electrode 215 is located on one side of the second semiconductor layer 213 close to the driving backplane 10, the display electrode 215 is in contact with the via hole 11, and the driving backplane 10 provides a driving current or a driving voltage to the sub-pixel unit 210 through the display electrode 215. The material of the display electrode 215 may be, for example, an anode, and the material of the anode may be, for example, a bonding metal.
The display panel further includes a first isolation layer 230, and a material of the first isolation layer 230 may be, for example, aluminum oxide (Al)2O3). The first isolation layer 230 is located on the first semiconductorThe body layer 214 is away from the driving backplane 10 and covers the sidewalls of the first semiconductor layer 214, the light emitting layer 211, the second semiconductor layer 213 and the display electrode 215 to protect the first semiconductor layer 214, the light emitting layer 211, the second semiconductor layer 213 and the display electrode 215. The first isolation layer 230 includes a second opening exposing a portion of the first semiconductor layer 214, the exposed first semiconductor layer 214 for contacting the cathode to provide a conductive path for the sub-pixel unit 210.
In an embodiment of the present invention, with reference to fig. 1 and fig. 2, optionally, the display panel further includes a common electrode 240, the common electrode 240 is located on a side of the first isolation layer 230 away from the driving backplane 10, and the common electrode 240 covers the first isolation layer 230 and the intermediate insulation layer 224; the common electrode 240 contacts the second sensing electrode 223 of the image sensing unit 220 through the first opening, and contacts the first semiconductor layer 214 of the sub-pixel unit 210 through the second opening. The common electrode 240 is a common cathode of each sub-pixel unit 210 and the image sensing unit 220, and simultaneously provides a common voltage for each sub-pixel unit 210 and the image sensing unit 220. The material of the common electrode 240 may be, for example, an ITO transparent electrode, a magnesium silver alloy, or aluminum (Al), and the common electrode 240 also serves to prevent crosstalk between different sub-pixel units 210 and crosstalk between the sub-pixel units 210 and the image sensing unit 220.
In one embodiment of the present invention, with reference to fig. 1 and 2, the display panel optionally further includes a pixel defining layer 250 and a second isolation layer 260. Wherein, the pixel defining layer 250 is located on one side of the common electrode 240 away from the driving backplane 10; the pixel defining layer 250 comprises a first groove and a second groove, the first groove overlaps with the projection of the light emitting layer 211 on the driving back plate 10, and the color conversion layer 212 is located in the first groove; the vertical projection of the second groove on the driving backplane 10 is located between the vertical projections of the adjacent sub-pixel units 210 on the driving backplane 10; the second isolation layer 260 is located on a side of the pixel defining layer 250 away from the driving backplane 10, and the second isolation layer 260 covers the color conversion layer 212 and the second groove. Illustratively, the pixel definition layer 250 is a Thin-Film Encapsulation (TFE) layer, which may be made of an organic Thin FilmA membrane, an inorganic thin film, or an organic thin film on which an inorganic thin film is stacked. The material of the second isolation layer 260 may be, for example, aluminum oxide (Al)2O3) The second isolation layer 260 covers the color conversion layer 212 and protects the color conversion layer 212.
In an embodiment of the present invention, with reference to fig. 1 and fig. 2, the display panel optionally further includes a crosstalk prevention layer 270, where the crosstalk prevention layer 270 is located in the second groove and covers the bottom and the sidewalls of the second groove. The material of the crosstalk prevention layer 270 may be, for example, aluminum (Al), etc., for preventing crosstalk between different sub-pixel units 210.
With reference to fig. 1 and fig. 2, in an embodiment of the present invention, the display panel optionally further includes a glue layer 30 and a cover plate 40, and the cover plate 40 encapsulates the display panel through the glue layer 30. Wherein, the glue layer 30 can be a UV glue, also called photosensitive glue or ultraviolet light curing glue; the cover plate 40 may be a glass cover plate.
On the basis of the above embodiments, there are optionally various arrangements of the sub-pixel unit 210 and the image sensing unit 220, and in the following embodiments, specific arrangements thereof are further defined.
Fig. 3 is a schematic top view of a display panel based on an eye tracking technology according to an embodiment of the present invention. Referring to fig. 3, in an embodiment of the present invention, optionally, the number of the sub-pixel units in one pixel 20 is three, the number of the image sensing units is one, and the three sub-pixel units and one image sensing unit are arranged in a field shape to form a square. In the display panel, the field-shaped structures are arranged in an array, so that the compactness of the pixels 20 is facilitated, and the display effect of the pixels 20 is improved. Preferably, the areas of the four sub-pixel units are the same, so that the arrangement of the pixel 20 is more compact, and the control of the light emitting brightness of the sub-pixel units and the color displayed by the pixel 20 is facilitated.
With continued reference to fig. 3, optionally, the pixel 20 includes: a red sub-pixel unit R, a green sub-pixel unit G, a blue sub-pixel unit B and an image sensing unit S; the light emitting layers in the red, green and blue sub-pixel units R, G and B emit blue light, the color conversion layer of the red sub-pixel unit R includes red quantum dots, and the color conversion layer of the green sub-pixel unit G includes green quantum dots. Then, the red sub-pixel unit R emits red light, the green sub-pixel unit G emits green light, and the blue sub-pixel unit B emits blue light. The image sensing unit S does not emit light and may be provided in a transparent or semi-transparent structure, approximately seen as a white sub-pixel unit.
The color conversion layer comprising the red quantum dots is a red filter layer, and the color conversion layer comprising the green quantum dots is a green filter layer. The principle of quantum dots as the filter layer is that when the quantum dots are stimulated by electricity or light, monochromatic light with different colors can be emitted according to the diameters of the quantum dots. Therefore, blue light emitted by the light emitting layer can be converted into red light through the red quantum dots, blue light emitted by the light emitting layer can be converted into green light through the green quantum dots, the light emitting layer can also directly emit the blue light outwards, and the display panel can realize red, green and blue three-color display.
In the region 91, the red sub-pixel units R in the four pixels 20 are adjacently arranged and arranged in a field shape; in the region 92, the green sub-pixel units G in the four pixels 20 are adjacently arranged and arranged in a field shape; in the region 93, the blue sub-pixel units B in the four pixels 20 are adjacently arranged and arranged in a field shape; in the region 94, the image sensing units S in the four pixels 20 are arranged adjacently in a matrix arrangement. In this way, the four sub-pixel units with the same color are arranged in a centralized manner, and in the manufacturing process of the display panel, the red quantum dots in the four red sub-pixel units R can be formed in one-time printing, and the green quantum dots in the four green sub-pixel units G can be formed in one-time printing. Compared with the prior art that the red quantum dots in the red sub-pixel unit R and the green quantum dots in the green sub-pixel unit G need to be printed one by one, the pixel 20 arrangement provided by the embodiment can increase the number of sub-pixel units in a unit area and increase the number of pixels 20 in the unit area under the conditions of reducing printing precision and improving printing speed, and the pixel 20 arrangement mode can be applied to a micro-display device to realize real RGB three-color display larger than 1000 ppi.
With continued reference to fig. 3, optionally, two pixels 20 adjacent in the column direction are arranged in mirror image, such as a first row of fifth column pixels 20 and a second row of fifth column pixels 20 adjacent in the column direction and arranged in mirror image with respect to the row direction. Two pixels 20 adjacent in the row direction are arranged in a mirror image, for example, the first row, the fourth column of pixels 20 and the first row, the fifth column of pixels 20 are adjacent in the row direction and arranged in a mirror image with respect to the column direction. The first row and fourth column of pixels 20, the first row and fifth column of pixels 20, the second row and fourth column of pixels 20 and the second row and fifth column of pixels 20 are diagonally arranged, and the four pixels 20 are arranged in a field shape. So arranged, it is advantageous that sub-pixel units of the same color are adjacently arranged, thereby increasing the number of pixels 20 per unit area; and real RGB three-color display can be realized.
On the basis of the above-described embodiments, the pixels 20 provided with the image sensing units S may be arranged over the entire display panel; or the pixels 20 provided with the sensing units of the pixels 20 are arranged only in a partial area on the display panel, which may be, for example, an area facing the eyeball.
The embodiment of the invention also provides a display device based on the eyeball tracking technology, and the display device can be AR glasses or VR glasses and the like. Fig. 4 is a schematic structural diagram of a display device based on an eye tracking technology according to an embodiment of the present invention. Referring to fig. 4, the display device includes the display panel 1 based on the eye tracking technology according to any embodiment of the present invention, and the technical principle and the resulting effect are similar and will not be described again.
The embodiment of the invention also provides a preparation method of the display panel based on the eyeball tracking technology, and the preparation method is suitable for preparing the display panel based on the eyeball tracking technology provided by any embodiment of the invention. Fig. 5 is a schematic structural diagram of a display panel formed in each step by the method for manufacturing a display panel based on the eye tracking technology according to the embodiment of the present invention. Referring to fig. 5, the preparation method includes the steps of:
and S110, providing the driving back plate 10 and the sub-pixel unit substrate.
Here, the structure of the sub-pixel unit substrate may include, for example, a base 216 (e.g., silicon or sapphire), a first semiconductor layer 214 (e.g., N-type gallium nitride, N-GaN), a light emitting layer 211 (e.g., multi-quantum well layer, MQW), a second semiconductor layer 213 (e.g., P-type gallium nitride, P-GaN), and a display electrode 215. The driving backplane 10 may be, for example, a silicon-based backplane, and the driving backplane 10 is provided with a driving circuit, such as a pixel driving circuit or a CMOS driving circuit, for driving the sub-pixel units to emit light, and the driving backplane 10 includes vias 11 and a bonding metal layer 12.
And S120, bonding the driving backboard 10 and the sub-pixel unit substrate.
The bonding metal layer 12 of the driving backplane 10 is used for bonding with the display electrode 215 of the sub-pixel unit substrate, so as to electrically connect the driving backplane 10 and the sub-pixel unit substrate. Optionally, after bonding the driving backplane 10 and the sub-pixel unit substrate, peeling off the base 216 of the sub-pixel unit substrate is further included.
S130, patterning the sub-pixel unit substrate to form a plurality of sub-pixel units 210; the positions of the image sensing units 220 are reserved between the sub-pixel units 210.
The process of patterning the sub-pixel unit substrate may be, for example, an alignment etching process, in which unnecessary portions of the sub-pixel unit substrate are etched away.
S140, fabricating an image sensing unit 220 at the reserved position, wherein at least one sub-pixel unit 210 and at least one image sensing unit 220 form one pixel.
Among other processes, the image sensing unit 220 may be, for example, sequentially growing and patterning a first sensing electrode 221 (e.g., an anode), an image sensing layer 222 (e.g., a-Si, p-Si, or reduced graphene oxide), and a second sensing electrode 223 (e.g., ITO) at a reserved position.
According to the embodiment of the invention, the positions of the image sensing units 220 are reserved among the sub-pixel units 210, the image sensing units 220 are manufactured at the reserved positions, at least one sub-pixel unit 210 and at least one image sensing unit 220 form a pixel, so that the image sensing units 220 as a part of the pixel can be distributed at each position on the display panel, and the formed image sensing units 220 in the display panel can be over against human eyes, thereby being beneficial to improving the accuracy of eyeball tracking. The sub-pixel unit 210 in the embodiment of the present invention can emit light according to the eye tracking of the image sensing unit 220, and can adjust the display image in real time according to the eye movement. Therefore, compared with the prior art, the embodiment of the invention improves the eyeball tracking effect, is beneficial to biological identification and IPD interpupillary distance adjustment, optimizes the display effect of the display device when being applied to AR/VR display equipment, is beneficial to relieving the phenomenon of dizziness of a user, improves the rendering efficiency of the display panel, improves the immersion of the user and enhances the man-machine interaction performance of the display device.
Fig. 6 is a schematic structural diagram of a display panel formed in steps S210-S230 according to another display panel manufacturing method based on eye tracking technology provided in the embodiment of the present invention; fig. 7 is a schematic structural diagram of a display panel formed in S240-S270 according to another method for manufacturing a display panel based on an eye tracking technology in an embodiment of the present invention; fig. 8 is a schematic structural diagram of a display panel formed in S280-S2a0 according to another method for manufacturing a display panel based on an eye tracking technology provided in the embodiment of the present invention; fig. 9 is a schematic structural diagram of a display panel formed in S2B0-S2D0 according to another method for manufacturing a display panel based on an eye tracking technology provided in an embodiment of the present invention. Referring to fig. 6 to 9, the preparation method includes the steps of:
s210, providing the driving backboard 10 and the sub-pixel unit substrate.
Here, the structure of the sub-pixel unit substrate may include, for example, a base 216 (e.g., silicon or sapphire), a first semiconductor layer 214 (e.g., N-type gallium nitride, N-GaN), a light emitting layer 211 (e.g., multi-quantum well layer, MQW), a second semiconductor layer 213 (e.g., P-type gallium nitride, P-GaN), and a display electrode 215. The driving backplane 10 may be, for example, a silicon-based backplane, and the driving backplane 10 is provided with a driving circuit, such as a pixel driving circuit or a CMOS driving circuit, for driving the sub-pixel units to emit light, and the driving backplane 10 includes vias 11 and a bonding metal layer 12.
And S220, bonding the driving backboard 10 and the sub-pixel unit substrate.
The bonding metal layer 12 of the driving backplane 10 is used for bonding with the display electrode 215 of the sub-pixel unit substrate, so as to electrically connect the driving backplane 10 and the sub-pixel unit substrate.
And S230, stripping the base 216 of the pixel 20 unit substrate.
Alternatively, if the substrate 216 is a sapphire substrate, laser lift-off may be used to lift off the sapphire substrate; if the substrate 216 is a silicon substrate, the silicon substrate may be stripped using a wet etch.
S240, patterning the sub-pixel unit substrate to form a plurality of sub-pixel units 210; the positions of the image sensing units 220 are reserved between the sub-pixel units 210.
The process of patterning the sub-pixel unit substrate may be, for example, an alignment etching process, in which unnecessary portions of the sub-pixel unit substrate are etched away.
S250, a first isolation layer 230 is formed on the plurality of sub-pixel units 210.
The material of the first isolation layer 230 may be, for example, aluminum oxide (Al)2O3). The first isolation layer 230 is located on a side of the first semiconductor layer 214 away from the driving backplane 10, and covers sidewalls of the first semiconductor layer 214, the light emitting layer 211, the second semiconductor layer 213, and the display electrode 215, so as to protect the first semiconductor layer 214, the light emitting layer 211, the second semiconductor layer 213, and the display electrode 215. The first isolation layer 230 includes a second opening 2301, the second opening 2301 exposes a portion of the first semiconductor layer 214, and the exposed first semiconductor layer 214 is used to contact the cathode and provide a conductive path for the sub-pixel unit 210. Illustratively, the first isolation layer 230 is formed by first forming a first isolation material layer on the plurality of sub-pixel units 210; the first spacer material layer is then patterned to form second openings 2301.
S260, fabricating the image sensing unit 220 at the reserved position, wherein the at least one sub-pixel unit 210 and the at least one image sensing unit 220 form one pixel.
Among the processes of the image sensing unit 220 may be, for example, sequentially growing and patterning a first sensing electrode 221 (e.g., an anode), an image sensing layer 222 (e.g., a-Si, p-Si, or reduced graphene oxide), a second sensing electrode 223 (e.g., ITO), and an intermediate insulating layer 224 at a reserved position. The intermediate insulating layer 224 includes a first opening 2241, and the first opening 2241 exposes a portion of the second sensing electrode 223. The intermediate insulating layer 224 serves as protection and insulation, and the second sensing electrode 223 exposed by the first opening 2241 thereof is used to contact the cathode, providing a conductive path for the image sensing unit 220.
S270, the common electrode 240 is formed on the first isolation layer 230 and the intermediate insulation layer 224.
The common electrode 240 contacts the second sensing electrode 223 of the image sensing unit 220 through the first opening 2241, and contacts the first semiconductor layer 214 of the sub-pixel unit 210 through the second opening 2301. The common electrode 240 is a common cathode of each of the sub-pixel units 210 and the image sensing unit 220, and simultaneously supplies a common voltage to each of the sub-pixel units 210 and the image sensing unit 220. The material of the common electrode 240 may be, for example, an ITO transparent electrode, a magnesium silver alloy, or aluminum (Al), and the common electrode 240 also serves to prevent crosstalk between different sub-pixel units 210 and crosstalk between the sub-pixel units 210 and the image sensing unit 220. Illustratively, the common electrode 240 may be vapor-plated on the first isolation layer 230 and the intermediate insulation layer 224 using an Open mask.
S280, growing a pixel defining layer 250 on the common electrode 240; and the pixel defining layer 250 is patterned to form a first groove 251 and a second groove 252.
The pixel defining layer 250 may be a Thin-Film Encapsulation (TFE) layer, and the material of the TFE layer may be an organic Film, an inorganic Film, or an inorganic Film stacked on an organic Film. The first groove 251 overlaps with the projection of the light emitting layer 211 on the driving back plate 10, and the first groove 251 is used for accommodating a color conversion layer; the vertical projection of the second recess 252 on the driving backplane 10 is located between the vertical projections of the adjacent sub-pixel units 210 on the driving backplane 10.
And S290, forming red quantum dots or green quantum dots in the first groove 251.
The color conversion layer 212 including the red quantum dots is a red filter layer, and the color conversion layer 212 including the green quantum dots is a green filter layer. The principle of quantum dots as the filter layer is that when the quantum dots are stimulated by electricity or light, monochromatic light with different colors can be emitted according to the diameters of the quantum dots. Accordingly, blue light emitted from the light emitting layer 211 may be converted into red light by the red quantum dots, and blue light emitted from the light emitting layer may be converted into green light by the green quantum dots. The color conversion layer of the red sub-pixel unit correspondingly comprises red quantum dots, and the color conversion layer of the green sub-pixel unit correspondingly comprises green quantum dots. Then, the red sub-pixel unit emits red light, the green sub-pixel unit emits green light, and the blue sub-pixel unit emits blue light, so that the display panel realizes three-color display of red, green and blue. Illustratively, red and green quantum dots are printed using electrofluids.
S2a0, a second isolation layer 260 and a crosstalk prevention layer 270 are sequentially formed on the pixel defining layer 250.
Wherein the second isolation layer 260 and the crosstalk prevention layer 270 cover the red quantum dots, the green quantum dots, the bottom and the sidewalls of the second groove 252. The material of the second isolation layer 260 may be, for example, aluminum oxide (Al)2O3) The second isolation layer 260 covers the color conversion layer 212 and protects the color conversion layer 212. The material of the crosstalk prevention layer 270 may be, for example, aluminum (Al), etc. for preventing crosstalk between different sub-pixel units 210. Illustratively, the second isolation layer 260 and the crosstalk prevention layer 270 may be sequentially evaporated on the pixel defining layer 250 using an Open mask.
S2B0, etching the crosstalk prevention layer 270, and leaving the portion located in the second recess 252.
In this embodiment, a yellow light process and a Reactive Ion Etching (RIE) process may be adopted to etch away the unwanted portion of the crosstalk prevention layer 270, so as to prevent the crosstalk prevention layer 270 from shielding the light emitting side of the sub-pixel unit 210.
S2C0, a lens 225 is formed on the image sensing unit 220.
The lens 225 can converge light reflected by human eyes to the image sensing layer 222, so that the illumination intensity of the image sensing layer 222 is enhanced, and the sensing precision is improved. Alternatively, the lenses 225 are Micro lenses (Micro Lens), and one Lens 225 or a plurality of lenses 225 are disposed corresponding to each image sensing unit 220. Thus, a micro-lens array is formed in the display panel to collect light rays reflected by the eyeballs in all directions, which is helpful for accurately identifying the position information and the motion information of the eyeballs, so that the pixels 20 perform light emitting display according to the position information and the motion information of the eyeballs, and the display effect and the human-computer interaction performance of the display panel are facilitated to be optimized.
And S2D0, completing the packaging of the glue layer 30 and the cover plate 40.
Wherein, the glue layer 30 can be a UV glue, also called photosensitive glue or ultraviolet light curing glue; the cover plate 40 may be a glass cover plate 40; the cover plate 40 encapsulates the display panel by the glue layer 30.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims (11)

1. A display panel based on eye tracking technology, comprising:
a plurality of pixels including a sub-pixel unit and an image sensing unit; wherein at least part of the sub-pixel units comprise a light emitting layer and a color conversion layer for converting light emitted by the light emitting layer into different colors; the image sensing unit is used for eyeball tracking;
a driving backplane carrying the plurality of pixels; the driving back plate is used for receiving an eyeball tracking signal of the image sensing unit and driving the sub-pixel units to emit light, and the sub-pixel units are configured to emit light according to a target tracked by the image sensing unit.
2. The display panel according to claim 1, wherein the number of the sub-pixel units in one pixel is three, the number of the image sensing units is one, and three sub-pixel units and one image sensing unit are arranged in a field-shaped manner.
3. The eye tracking technology-based display panel according to claim 2, wherein the pixels comprise: the pixel structure comprises a red sub-pixel unit, a green sub-pixel unit, a blue sub-pixel unit and an image sensing unit; the light emitting layers in the red sub-pixel unit, the green sub-pixel unit and the blue sub-pixel unit emit blue light, the color conversion layer of the red sub-pixel unit comprises red quantum dots, and the color conversion layer of the green sub-pixel unit comprises green quantum dots;
red sub-pixel units in the four pixels are adjacently arranged and arranged in a field shape; green sub-pixel units in the four pixels are adjacently arranged and arranged in a field shape; blue sub-pixel units in the four pixels are adjacently arranged and arranged in a field shape; the image sensing units in the four pixels are adjacently arranged and arranged in a field shape.
4. The display panel based on eye tracking technology according to claim 1,
the driving back plate comprises a plurality of through holes, and the image sensing unit covers at least one through hole;
the image sensing unit comprises a first sensing electrode, an image sensing layer, a second sensing electrode and an intermediate insulating layer, wherein the first sensing electrode is positioned on one side of the driving backboard and is in contact with the via hole; the image sensing layer is positioned on one side of the first sensing electrode, which is far away from the driving back plate; the second sensing electrode is positioned on one side of the image sensing layer far away from the driving back plate; the middle insulating layer is located on one side, far away from the driving back plate, of the second sensing electrode, and comprises a first opening, and a part of the second sensing electrode is exposed out of the first opening.
5. The display panel based on eye tracking technology of claim 4, wherein the image sensing unit further comprises a lens located on a side of the second sensing electrode away from the driving back plate.
6. The eyeball tracking technology-based display panel of claim 4, wherein the image sensing layer comprises at least one of amorphous silicon, polycrystalline silicon and reduced graphene oxide.
7. The eyeball tracking technology-based display panel of claim 4, wherein the sub-pixel unit covers at least one of the via holes; the sub-pixel unit further comprises a first semiconductor layer, a second semiconductor layer and a display electrode;
the first semiconductor layer is located on one side, away from the driving backboard, of the light emitting layer, the second semiconductor layer is located on one side, close to the driving backboard, of the light emitting layer, the display electrode is located on one side, close to the driving backboard, of the second semiconductor layer, and the display electrode is in contact with the via hole;
the display panel further includes: the first isolation layer is positioned on one side, away from the driving back plate, of the first semiconductor layer and covers the first semiconductor layer, the light emitting layer, the second semiconductor layer and the side wall of the display electrode; the first isolation layer comprises a second opening, and the second opening exposes a part of the first semiconductor layer.
8. The display panel based on the eyeball tracking technology of claim 7, further comprising a common electrode, wherein the common electrode is located on a side of the first isolation layer away from the driving back plate, and the common electrode covers the first isolation layer and the intermediate insulation layer; the common electrode is in contact with the second sensing electrode of the image sensing unit through the first opening, and is in contact with the first semiconductor layer of the sub-pixel unit through the second opening.
9. The eyeball tracking technology-based display panel of claim 8, further comprising:
the pixel definition layer is positioned on one side of the common electrode, which is far away from the driving backboard; the pixel definition layer comprises a first groove and a second groove, the first groove is overlapped with the projection of the light emitting layer on the driving back plate, and the color conversion layer is positioned in the first groove; the vertical projection of the second groove on the driving back plate is positioned between the vertical projections of the adjacent sub-pixel units on the driving back plate;
the second isolation layer is positioned on one side, far away from the driving back plate, of the pixel definition layer, and covers the color conversion layer and the second groove.
10. A display device based on eye tracking technology, comprising: an eye tracking technology based display panel according to any one of claims 1 to 9.
11. A method for manufacturing a display panel based on an eyeball tracking technology is characterized by comprising the following steps:
providing a driving back plate and a sub-pixel unit substrate; wherein the sub-pixel unit substrate includes a light emitting layer;
bonding the driving back plate and the sub-pixel unit substrate;
patterning the sub-pixel unit substrate to form a plurality of sub-pixel units; reserving positions of image sensing units among the sub-pixel units;
and manufacturing an image sensing unit at a reserved position, wherein at least one sub-pixel unit and at least one image sensing unit form a pixel.
CN202010511872.XA 2020-06-08 2020-06-08 Display panel based on eyeball tracking technology, preparation method thereof and display device Pending CN111580269A (en)

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