CN111710655B - Display panel based on biological identification technology, manufacturing method thereof and display device - Google Patents

Display panel based on biological identification technology, manufacturing method thereof and display device Download PDF

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CN111710655B
CN111710655B CN202010557447.4A CN202010557447A CN111710655B CN 111710655 B CN111710655 B CN 111710655B CN 202010557447 A CN202010557447 A CN 202010557447A CN 111710655 B CN111710655 B CN 111710655B
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pixel unit
light
sensing
layer
driving
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CN111710655A (en
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杜晓松
周文斌
郭丰
李高敏
孙剑
高裕弟
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Kunshan Mengxian Electronic Technology Co ltd
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Kunshan Mengxian Electronic Technology Co ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/12Fingerprints or palmprints
    • G06V40/13Sensors therefor
    • G06V40/1318Sensors therefor using electro-optical elements or layers, e.g. electroluminescent sensing
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06VIMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V40/00Recognition of biometric, human-related or animal-related patterns in image or video data
    • G06V40/10Human or animal bodies, e.g. vehicle occupants or pedestrians; Body parts, e.g. hands
    • G06V40/18Eye characteristics, e.g. of the iris
    • G06V40/19Sensors therefor
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/33Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3114Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed the device being a chip scale package, e.g. CSP
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/15Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission
    • H01L27/153Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars
    • H01L27/156Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components having potential barriers, specially adapted for light emission in a repetitive configuration, e.g. LED bars two-dimensional arrays
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    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/60OLEDs integrated with inorganic light-sensitive elements, e.g. with inorganic solar cells or inorganic photodiodes
    • H10K59/65OLEDs integrated with inorganic image sensors

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Abstract

The embodiment of the invention discloses a display panel based on a biological recognition technology, a manufacturing method thereof and a display device. The display panel comprises a driving backboard, wherein the driving backboard comprises a plurality of through holes and a plurality of bonding pads in one-to-one correspondence with the through holes; the pixels are positioned on one side of the bonding pad, which is far away from the driving backboard, and comprise sensing pixel units and light-emitting display pixel units; the sensing pixel unit is used for sensing the signal light with the identification information and outputting a sensing signal; the light-emitting display pixel unit is used for emitting light according to the received signal for driving the backboard, and the signal received by the light-emitting display pixel is associated with the sensing signal; the sensing pixel unit comprises a protective layer and an image sensing layer which are sequentially arranged on the bonding pad; the protective layer includes a first opening exposing a portion of the pad to communicate the pad and the image sensing layer. The technical scheme of the embodiment of the invention improves the biological recognition effect and the display effect of the display panel and improves the unlocking efficiency of the electronic product.

Description

Display panel based on biological identification technology, manufacturing method thereof and display device
Technical Field
The embodiment of the invention relates to the technical field of display, in particular to a display panel of a biological recognition technology, a preparation method of the display panel and a display device.
Background
With the continuous development of display technology, the application range of display panels is wider and wider, and the requirements of people on the display panels are higher and higher. For example, electronic products that are unlocked by biometric technology.
However, the existing display panel has the problem of poor biological recognition effect, the unlocking efficiency of the electronic product is reduced, and the user experience is influenced.
Disclosure of Invention
The embodiment of the invention provides a display panel based on a biological identification technology, a manufacturing method thereof and a display device, which are used for improving the biological identification effect and the display effect of the display panel and improving the unlocking efficiency of an electronic product.
In a first aspect, an embodiment of the present invention provides a display panel based on biometric technology, including:
the driving back plate comprises a plurality of through holes and a plurality of bonding pads in one-to-one correspondence with the through holes;
the plurality of pixels are positioned on one side of the bonding pad, which is far away from the driving backboard, and each pixel comprises a sensing pixel unit and a light-emitting display pixel unit; the sensing pixel unit is used for sensing the signal light with the identification information and outputting a sensing signal; the light-emitting display pixel unit is used for emitting light according to the received signal of the driving backboard, and the signal received by the light-emitting display pixel is associated with the sensing signal;
the sensing pixel unit comprises a protective layer and an image sensing layer which are sequentially arranged on the bonding pad; the protective layer includes a first opening exposing a portion of the pad to communicate the pad and the image sensing layer.
Optionally, the sensing pixel unit further includes:
the first insulating layer is positioned on one side, far away from the driving back plate, of the image sensing layer and comprises a second opening, and the second opening exposes part of the image sensing layer; the projection of the first opening on the driving back plate is staggered with the projection of the second opening on the driving back plate;
and the sensing electrode is positioned on one side of the first insulating layer, which is far away from the driving back plate, and is in contact with the image sensing layer through the second opening.
Optionally, the light-emitting display pixel unit includes:
the pixel structure comprises a red sub-pixel unit, a green sub-pixel unit and a blue sub-pixel unit; the light emitting color of the light emitting layer in the red sub-pixel unit is red, the light emitting color of the light emitting layer in the green sub-pixel unit is green, and the light emitting color of the light emitting layer in the blue sub-pixel unit is blue;
each sub-pixel unit further comprises a first display electrode, a first semiconductor layer, a second semiconductor layer and a second display electrode; the first semiconductor layer is located the luminescent layer is kept away from one side of the driving backboard, the first display electrode is located the first semiconductor layer is kept away from one side of the driving backboard, the second semiconductor layer is located the luminescent layer is close to one side of the driving backboard, the second display electrode is located the second semiconductor layer is close to one side of the driving backboard, and the second display electrode is in contact with the bonding pad.
Optionally, the red sub-pixel units, the green sub-pixel units, the blue sub-pixel units and the sensing pixel units are arranged in a shape of Chinese character 'tian';
red sub-pixel units in the four pixels are adjacently arranged and arranged in a field shape; green sub-pixel units in the four pixels are adjacently arranged and arranged in a field shape; blue sub-pixel units in the four pixels are adjacently arranged and arranged in a field shape; the sensing pixel units in the four pixels are adjacently arranged and arranged in a field shape.
Optionally, the display panel further includes:
the second insulating layer is positioned on one side, away from the driving backboard, of the sensing pixel unit and the light-emitting display pixel unit; the second insulating layer comprises a third opening, a fourth opening and a groove, the third opening exposes a part of the sensing electrode of the sensing pixel unit, and the fourth opening exposes a part of the first display electrode of the light-emitting display pixel unit; the vertical projection of the groove on the driving back plate is positioned between the vertical projections of the adjacent light-emitting display pixel units on the driving back plate.
Optionally, the display panel further includes: the public electrode is positioned on one side, far away from the driving backboard, of the second insulating layer, and covers the second insulating layer; the common electrode is in contact with the sensing electrode of the sensing pixel unit through the third opening, and is in contact with the first display electrode of the light-emitting display pixel unit through the fourth opening.
Optionally, the display panel further includes: the third insulating layer is positioned on one side, far away from the driving backboard, of the common electrode, and covers the common electrode.
Optionally, the sensing pixel unit further includes a lens, the lens is located on a side of the third insulating layer away from the driving backplane, and a projection of the lens on the driving backplane is at least partially overlapped with a projection of the image sensing layer on the driving backplane.
In a second aspect, an embodiment of the present invention provides a display device based on biometric technology, including the display panel based on biometric technology according to any one of the first aspect.
Optionally, the display device further includes a prism unit, and the prism unit is configured to change a propagation direction of light received and/or emitted by the display panel to perform human-computer interaction.
In a third aspect, an embodiment of the present invention provides a method for manufacturing a display panel based on a biometric identification technology, including:
providing a driving backboard and a light-emitting display pixel unit substrate; the driving back plate comprises a plurality of through holes and a plurality of bonding pads in one-to-one correspondence with the through holes, and the light-emitting display pixel unit substrate comprises a plurality of light-emitting display pixel units;
respectively bonding the sub-pixel units with different colors with the driving backboard by adopting a mass transfer technology;
manufacturing sensing pixel units among the light-emitting display pixel units, wherein at least one light-emitting display pixel unit and at least one light-emitting display pixel unit form a pixel; the manufacturing of the sensing pixel unit comprises the steps of sequentially forming a protective layer, an image sensing layer and a sensing electrode on the bonding pad; the protective layer includes a first opening exposing a portion of the pad to communicate the pad and the image sensing layer.
According to the display panel based on the biological identification technology, the side, away from the driving backboard, of the bonding pad is provided with the plurality of pixels, and the pixels comprise sensing pixel units and light-emitting display pixel units; the sensing pixel unit is used for sensing the signal light with the identification information and outputting a sensing signal; the light-emitting display pixel unit is used for emitting light according to the received signal for driving the backboard, and the signal received by the light-emitting display pixel is associated with the sensing signal; the sensing pixel unit comprises a protective layer and an image sensing layer which are sequentially arranged on the bonding pad; the protective layer includes a first opening exposing a portion of the pad to communicate the pad and the image sensing layer. According to the technical scheme provided by the embodiment of the invention, the sensing pixel unit senses the signal light with the identification information and outputs the sensing signal, and the sensing pixel unit blocks the oxidation of water and oxygen on the bonding pad between the image sensing layer and the driving back plate through the protective layer, so that the accuracy of the sensing signal output by the sensing pixel unit is improved, the biological identification effect of the display panel is improved, and the unlocking efficiency of an electronic product is improved. And the signals received by the light-emitting display pixels are associated with the sensing signals, so that the accuracy of the sensing signals output by the sensing pixel units is improved, and the display effect of the display panel is also ensured.
Drawings
Fig. 1 is a schematic structural diagram of a display panel based on biometric identification technology according to an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of another display panel based on biometric identification technology according to an embodiment of the present invention;
fig. 3 is a schematic top view of a display panel based on biometric identification technology according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of another display panel based on biometric identification technology according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of another display panel based on biometric identification technology according to an embodiment of the present invention;
FIG. 6 is a schematic structural diagram of a display device based on biometric identification technology according to an embodiment of the present invention;
FIG. 7 is a light path diagram of the display device shown in FIG. 6;
fig. 8 is a schematic flowchart of a method for manufacturing a display panel based on biometric identification technology according to an embodiment of the present invention;
fig. 9-10 are schematic structural diagrams of display panels formed at various steps of a method for manufacturing a display panel based on biometric identification technology according to an embodiment of the present invention;
fig. 11 is a schematic flow chart of another method for manufacturing a display panel based on biometric identification technology according to an embodiment of the present invention;
fig. 12-13 are schematic structural diagrams of a portion of a display panel formed in another method for manufacturing a display panel based on biometric technology according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
The embodiment of the invention provides a display panel based on a biological identification technology, and the display panel can be suitable for display equipment such as AR/VR and the like. The display panel may be an Organic Light-Emitting Diode (OLED) display panel, a Micro Light-Emitting Diode (Micro LED) display panel, a Quantum Dot Light-Emitting Diode (QLED) display panel, or the like.
Fig. 1 is a schematic structural diagram of a display panel based on biometric identification technology according to an embodiment of the present invention, and referring to fig. 1, the display panel includes:
the driving backplane 10, the driving backplane 10 includes a plurality of vias 11 and a plurality of pads 12 corresponding to the plurality of vias 11 one to one.
A plurality of pixels 20 located on a side of the pad 12 away from the driving backplane 10, the pixels 20 including a sensing pixel unit 22 and a light emitting display pixel unit 21; the sensing pixel unit 22 is used for sensing the signal light with the identification information and outputting a sensing signal; the light-emitting display pixel unit 21 is configured to emit light according to a received signal for driving the backplane 10, and the signal received by the light-emitting display pixel unit 21 is associated with the sensing signal.
The sensing pixel unit 22 includes a protection layer 221 and an image sensing layer 222 sequentially disposed on the pad 12; the protective layer 221 includes a first opening 2211, and the first opening 2211 exposes a portion of the pad 12 to communicate the pad 12 with the image sensing layer 222.
Specifically, the driving backplane 10 is provided with a plurality of regularly distributed vias 11, a plurality of pads 12 may be formed on the driving backplane 10 through a self-alignment process, the pads 12 are arranged in one-to-one correspondence with the vias 11, and the pads 12 are in contact with the vias 11. The substrate of the driving backplate 10 is a silicon substrate. A plurality of pixels 20 are disposed on a side of the pad 12 away from the driving backplane 10, and each pixel 20 includes a sensing pixel unit 22 and a light-emitting display pixel unit 21. The sensing pixel unit 22 includes a protection layer 221 and an image sensing layer 222 sequentially disposed on the pad 12, wherein the protection layer 221 includes a first opening 2211, the first opening 2211 exposes a portion of the pad 12, and the image sensing layer 222 is in communication with the pad 12 through the first opening 2211. The material of the protective layer 221 may be silicon nitride, and the material of the image sensing layer 222 may include at least one of amorphous silicon (a-Si), poly-silicon (p-Si), and reduced graphene oxide, for example. According to the technical scheme provided by the embodiment of the invention, the sensing pixel unit senses the signal light with the identification information and outputs the sensing signal to perform biological identification according to the sensing signal, so that the biological identification effect of the display panel is improved.
The pad 12 in contact with the sensing pixel unit 22 may be regarded as an anode of the sensing pixel unit 22, which is a composite type transparent conductive film. The transparent conductive film includes a pair of indium tin oxide films and a silver film between the pair of indium tin oxide films, or includes a pair of indium tin oxide films and an aluminum film between the pair of indium tin oxide films. The vias 11 are filled with a conductive material to electrically connect the sensing pixel units 22 to the driving backplane 10. The protective layer 221 is arranged between the bonding pad 12 and the image sensing layer 222, and the communication between the image sensing layer 222 and the bonding pad 12 is realized through the opening of the protective layer 221, so that the oxidation of water and oxygen to the bonding pad 12 between the image sensing layer 222 and the driving backboard 10 can be blocked, the accuracy of sensing signals output by the sensing pixel units is improved, the biological identification effect of the display panel is improved, signals received by the luminous display pixels are related to the sensing signals, and the display effect of the display panel is ensured.
The identification information may include fingerprint information and/or iris information, and the display panel performs biometric identification for unlocking according to the fingerprint information or iris information. The signal light carrying the fingerprint information is emitted to the image sensing layer 222, thereby causing a change in the resistance of the image sensing layer 222, which in turn causes a change in the current in the circuit. The changed current is the sensing signal, and then the back plate 10 is driven to convert into the corresponding fingerprint image information according to the sensing signal. Or, signal light carrying iris information is emitted to the image sensing layer 222, so that the resistance of the image sensing layer 222 changes, and further the current in the circuit changes, and further the driving back plate 10 converts the sensing signal into corresponding iris image information according to the current generation, so as to output a signal to drive the light-emitting display pixel unit 21 to emit light, thereby realizing iris unlocking. The driving backplane 10 is a film structure capable of providing driving signals for the display panel and playing roles of buffering, protecting or supporting. The driving backplane 10 is provided with a driving circuit, such as a pixel driving circuit or a CMOS driving circuit, which can output signals to drive the light-emitting display pixel unit 21 to emit light.
The iris information comes from the eyeball, the sensing pixel unit 22 can be used for receiving signal light carrying the iris information of the eyeball to unlock, and the sensing pixel unit 22 can also sense light reflected by each position of the eyeball to determine pupil position information and eye movement data of the human eye in real time. The sensing pixel unit 22 can output signals based on the pupil position information and the eye movement data, the driving chip or the driving backplane 10 can determine the display data according to the signals output by the sensing pixel unit 22 to drive the sub-pixel units to emit light, and the display panel displays images. Human-computer interaction can be carried out according to the pupil position and the eye movement condition of the human eyes, for example, when the human eyes are detected to move up and down, confirmation (YES) is indicated; when the left-right movement of the human eyes is detected, Negative (NO) is indicated; as another example, when a low-frequency blinking motion is detected, a confirmation (YES) is indicated; negative (NO) when high frequency blinking motion is detected; when the human eyes are detected to move up and down, page turning up and down is indicated; when the human eyes are detected to move left and right, the system indicates to turn pages left and right or select an up-down menu, and the like. Therefore, the embodiment of the invention can replace traditional interaction processes such as touch control, mouse or keyboard input and the like according to the pupil position and the eye movement condition of human eyes, so that the human-computer interaction is more intelligent.
According to the technical scheme provided by the embodiment of the invention, the sensing pixel unit senses the signal light with the identification information and outputs the sensing signal, so that the biological identification effect of the display panel is favorably improved, and the unlocking efficiency of the electronic product is improved. And the sensing pixel unit blocks oxidation of water and oxygen to a bonding pad between the image sensing layer and the driving back plate through the protective layer, so that the accuracy of sensing signals output by the sensing pixel unit is improved, the biological recognition effect of the display panel is improved, and the unlocking efficiency of electronic products is improved. And the signals received by the light-emitting display pixels are associated with the sensing signals, so that the accuracy of the sensing signals output by the sensing pixel units is improved, and the display effect of the display panel is also ensured.
Optionally, fig. 2 is a schematic structural diagram of another display panel based on biometric technology according to an embodiment of the present invention, and referring to fig. 2, the sensing pixel unit further includes:
a first insulating layer 223 on a side of the image sensing layer 222 away from the driving backplane 10, the first insulating layer 223 including a second opening 2231, the second opening 2231 exposing a portion of the image sensing layer 222; the projection of the first opening 2211 on the driving back plate 10 is offset from the projection of the second opening 2231 on the driving back plate 10;
and a sensing electrode 224 located on a side of the first insulating layer 223 far from the driving backplane 10 and contacting the image sensing layer 222 through the second opening 2231.
Specifically, the side of the image sensing layer 222 away from the driving backplate 10 is covered with a first insulating layer 223, and the side of the first insulating layer 223 away from the driving backplate 10 is covered with a sensing electrode 224. The first insulating layer 223 includes a second opening 2231 and exposes a portion of the image sensing layer 222, and the sensing electrode 224 contacts the image sensing layer 222 through the second opening 2231. The sensing electrode 224 may be a cathode, and the material of the cathode may be an ITO transparent electrode, a magnesium-silver alloy, or aluminum, for example. The first insulating layer 223 is a Thin-Film Encapsulation (TFE) layer, which may be made of an organic Film, an inorganic Film, or an inorganic Film stacked on the organic Film. A first insulating layer 223 is disposed between the sensing electrode 224 and the image sensing layer 222, and connection is made through a second opening 2231 of the first insulating layer 223. The projection of the first opening 2211 on the driving back plate 10 is offset from the projection of the second opening 2231 on the driving back plate 10.
Optionally, fig. 3 is a schematic top view of a display panel based on biometric identification technology according to an embodiment of the present invention, and referring to fig. 3 and in conjunction with fig. 2, the light-emitting display pixel unit 21 includes:
a red sub-pixel unit R, a green sub-pixel unit G and a blue sub-pixel unit B; the emission color of the emission layer 211 in the red sub-pixel unit R is red, the emission color of the emission layer 211 in the green sub-pixel unit G is green, and the emission color of the emission layer 211 in the blue sub-pixel unit B is blue.
Wherein each sub-pixel unit further comprises a first display electrode 212, a first semiconductor layer 213, a second semiconductor layer 214, and a second display electrode 215; the first semiconductor layer 213 is located on the side of the light emitting layer 211 away from the driving back plate 10, the first display electrode 212 is located on the side of the first semiconductor layer 213 away from the driving back plate 10, the second semiconductor layer 214 is located on the side of the light emitting layer 211 close to the driving back plate 10, the second display electrode 215 is located on the side of the second semiconductor layer 214 close to the driving back plate 10, and the second display electrode 215 is in contact with the pad 12.
Specifically, the light-emitting display pixel unit 21 includes a red sub-pixel unit R, a green sub-pixel unit G, and a blue sub-pixel unit B, and the sub-pixel units are Micro light-emitting diodes (Micro LEDs), and compared with other types of sub-pixel units, the size of the Micro LEDs can be reduced to micron level, and the Micro LEDs are self-emitting displays as organic LEDs, and have good material stability, long service life, and better application prospects. Accordingly, the red sub-pixel unit R is for emitting red light, the green sub-pixel unit R is for emitting green light, and the blue sub-pixel unit B is for emitting blue light. The sub-pixel cell further includes a first display electrode 212, a first semiconductor layer 213, a second semiconductor layer 214, and a second display electrode 215. The first semiconductor layer 213 is located on a side of the light emitting layer 211 away from the driving backplane 10, and the material of the first semiconductor layer 213 may be, for example, N-type gallium nitride (N-GaN). The first display electrode 212 is located on a side of the first semiconductor layer 213 away from the driving backplane 10, and the first display electrode 212 may be a cathode N-pad, for example. The second semiconductor layer 214 is located on the side of the light emitting layer 211 close to the driving backplane 10, and the material of the second semiconductor layer 214 may be P-type gallium nitride (P-GaN), for example. The material of the light-emitting layer 211 may be, for example, a Multiple Quantum Well (MQW). The second display electrode 215 is located on one side of the second semiconductor layer 214 close to the driving backplane 10, the second display electrode 215 may be, for example, an anode P-pad, the second display electrode 215 is in contact with the pad 12, and the driving backplane 10 provides a driving current or a driving voltage to the sub-pixel unit through the second display electrode 215.
Optionally, with reference to fig. 3, the red sub-pixel unit R, the green sub-pixel unit G, the blue sub-pixel unit B, and the sensing pixel unit S are arranged in a shape of a Chinese character 'tian';
red sub-pixel units R in the four pixels are adjacently arranged and arranged in a field shape; green sub-pixel units G in the four pixels are adjacently arranged and arranged in a field shape; blue sub-pixel units B in the four pixels are adjacently arranged and arranged in a field shape; the sensing pixel units S in the four pixels are adjacently arranged and arranged in a field shape.
Specifically, the red sub-pixel unit R, the green sub-pixel unit G, the blue sub-pixel unit B and the sensing pixel unit S are located on the same plane, the red sub-pixel unit R, the green sub-pixel unit G, the blue sub-pixel unit B and the sensing pixel unit S are arranged in a field shape, four sub-pixel units with the same color are arranged in a concentrated manner, and four sensing pixel units S are arranged in a concentrated manner. The field-shaped structure is in array arrangement, which is beneficial to the compactness of pixels and improves the display effect of the pixels. In the manufacturing process of the display panel, a bulk transfer technology may be adopted to place the sub-pixel units of different colors on the driving backplane 10, and then the sub-pixel units and the driving backplane 10 are bonded together by a low-temperature vacuum bonding process.
Optionally, fig. 4 is a schematic structural diagram of another display panel based on biometric identification technology according to an embodiment of the present invention, and referring to fig. 4, the display panel further includes:
a second insulating layer 50, wherein the second insulating layer 50 is positioned on one side of the sensing pixel unit 22 and the light-emitting display pixel unit 21 away from the driving backboard 10; the second insulating layer 50 includes a third opening 51, a fourth opening 52 and a groove 53, the third opening 51 exposes a portion of the sensing electrode 224 of the sensing pixel unit 22, and the fourth opening 52 exposes a portion of the first display electrode 212 of the light-emitting display pixel unit 21; the vertical projection of the recess 53 on the driving backplane 10 is located between the vertical projections of adjacent emissive display pixel units 21 on the driving backplane 10.
Specifically, the sensing electrode 224 of the sensing pixel unit 22 is exposed to contact with the common cathode through the third opening 51 of the second insulating layer 50, and the first display electrode 213 of the light-emitting display pixel unit 21 is exposed to contact with the common cathode through the fourth opening 52 of the second insulating layer 50. The provision of the second insulating layer 50 realizes protection and insulation of the first display electrode 212, the first semiconductor layer 214, the light emitting layer 211, the second semiconductor layer 213, and the second display electrode 215. The second insulating layer 50 is illustratively a Thin-Film Encapsulation (TFE) layer, and the material of the TFE layer may be an organic Film, an inorganic Film, or a stack of inorganic films on an organic Film.
Optionally, with continuing reference to fig. 4, the display panel further includes: the common electrode 60 is positioned on one side of the second insulating layer far away from the driving back plate 10, and the common electrode 60 covers the second insulating layer; the common electrode 60 is in contact with the sensing electrode 224 of the sensing pixel unit 22 through the third opening 51, and in contact with the first display electrode 212 of the light emitting display pixel unit 21 through the fourth opening 52.
Specifically, the common electrode 60 is in contact with the first display electrode 212 of the light-emitting display pixel unit 21 through the third opening 51, and is in contact with the sensing electrode 224 of the sensing pixel unit 22 through the fourth opening 52. The common electrode 60 is a common cathode for each sub-pixel cell and the sensing pixel cell 22. The material of the common electrode 60 may be, for example, an ITO transparent electrode, a magnesium silver alloy, or aluminum (Al). In addition, the second insulating layer 50 between the sub-pixel units and the sensing pixel unit 22 includes the grooves 53, and the bottom surfaces of the grooves 53 are not higher than the light emitting layer 211 in each sub-pixel unit, the common electrode 60 covers the side walls and the bottom surface of the grooves 53, and the common electrode 60 can also be used to prevent crosstalk between different sub-pixel units and crosstalk between the sub-pixel units and the sensing pixel unit 22.
Optionally, fig. 5 is a schematic structural diagram of another display panel based on biometric technology according to an embodiment of the present invention, and referring to fig. 5, the display panel further includes: and a third insulating layer 70, wherein the third insulating layer 70 is positioned on one side of the common electrode 60 far away from the driving back plate 10, and the third insulating layer 70 covers the common electrode 60. The common electrode 60 covers the first opening 2211, the second opening 2231 and the groove to form a new groove, and the third insulating layer 70 is disposed to cover the common electrode 60 to protect the common electrode 60 and planarize the common electrode. The third insulating layer 70 is illustratively a Thin-Film Encapsulation (TFE) layer, which may be made of an organic Film, an inorganic Film, or a stack of inorganic films on an organic Film.
Optionally, with continued reference to fig. 5, the sensing pixel units 22 further include a Lens 225, the Lens 225 is located on a side of the third insulating layer 70 away from the driving backplane 10, wherein the Lens 225 may be a Micro Lens (Micro Lens), one Lens is correspondingly disposed on each sensing pixel unit 22, and a projection of the Lens on the driving backplane 10 at least partially coincides with a projection of the image sensing layer 222 on the driving backplane 10. A micro-mirror is disposed over the light-sensing area of the pixel 20, and the light-sensing area is determined by the surface area of the micro-lens. Therefore, the aperture opening ratio is improved in specification while the size of a single pixel is considered, and the light sensitivity is greatly improved. The fingerprint information or iris information can be accurately identified, and the display effect and the human-computer interaction performance of the display panel are improved.
Optionally, with continued reference to fig. 5, the display panel further includes a glass encapsulation layer 100; the glass sealing layer 100 is adhered to the side of the third insulating layer 70 away from the driving back plate 10 by the adhesive layer 90. The adhesive layer 90 may be a UV adhesive, which is also called a shadowless adhesive, a photosensitive adhesive or an ultraviolet light curing adhesive, and the UV adhesive is cured by ultraviolet light irradiation, so that the glass encapsulation layer is bonded on one side of the third insulating layer 70 away from the driving backplane 10. The curing speed is high, and the curing can be completed within several seconds to dozens of seconds, so that the production rate of the display panel is improved.
The embodiment of the invention also provides a display device based on the biometric identification technology, which comprises the display panel based on the biometric identification technology in any embodiment.
Specifically, the display device may be, for example, AR glasses or VR glasses. The technical principle and the generated effect are similar, and the detailed description is omitted.
Optionally, fig. 6 is a schematic structural diagram of a display device based on a biometric technology according to an embodiment of the present invention, fig. 7 is a light path diagram of the display device shown in fig. 6, and referring to fig. 6-7, exemplarily, the display device in fig. 8 is an AR glasses, the display device further includes a prism unit 1, and the prism unit 1 is configured to change a propagation direction of light received and/or emitted by the display panel to perform human-computer interaction. The waveguide structure formed by the prism unit 1 can realize a 30-40 degree angle of view on glass within 3mm, and the thickness is thin and light, so that the waveguide structure can be combined with AR glasses. The AR glasses produced based on the AR optical structure have lighter and thinner volume, are closer to normal-vision glasses or sunglasses than AR glasses on the world in appearance, have larger angle of view of AR display pictures under the same volume, and have simple process and low cost.
The embodiment of the present invention further provides a method for manufacturing a display panel based on a biometric identification technology, fig. 8 is a schematic flow chart of the method for manufacturing a display panel based on a biometric identification technology according to the embodiment of the present invention, and fig. 9 to 11 are schematic structural diagrams of the display panel formed in each step by the method for manufacturing a display panel based on a biometric identification technology according to the embodiment of the present invention; referring to fig. 8-11, the method includes:
s110, providing a driving backboard and a light-emitting display pixel unit substrate; the driving backboard comprises a plurality of through holes and a plurality of bonding pads in one-to-one correspondence with the through holes, and the light-emitting display pixel unit substrate comprises a plurality of light-emitting display pixel units.
Specifically, referring to fig. 9, a driving backplane 10 is provided and a plurality of regularly distributed vias 11 are formed on the driving backplane 10, and a plurality of pads 12 may be formed on the driving backplane through a self-alignment process, such that the pads 12 and the vias 11 are arranged in a one-to-one correspondence, and the pads 12 are in contact with the vias 11. The driving backplane 10 is a film structure capable of providing driving signals for the display panel and playing roles of buffering, protection or support. The driving backplane 10 is provided with a driving circuit, such as a pixel driving circuit or a CMOS driving circuit, which can output signals to drive the light-emitting display pixel units to emit light. A light-emitting display pixel unit substrate is provided, which comprises a plurality of light-emitting display pixel units. The light-emitting display pixel unit substrate comprises a red light display pixel unit substrate 1R corresponding to the red sub-pixel unit 21R, a green light display pixel unit substrate 1G corresponding to the green sub-pixel unit 21G and a blue light display pixel unit substrate 1B corresponding to the blue sub-pixel unit 21B. The light-emitting layer 211 in the red sub-pixel unit 21R emits light of a red color, the light-emitting layer 211 in the green sub-pixel unit 21G emits light of a green color, and the light-emitting layer 211 in the blue sub-pixel unit 21B emits light of a blue color. Each sub-pixel unit further includes a first display electrode 212 (e.g., cathode N-pad), a first semiconductor layer 213 (e.g., N-GaN), a second semiconductor layer 214 (e.g., P-GaN), and a second display electrode 215 (e.g., anode P-pad).
And S120, respectively bonding the sub-pixel units with different colors with the driving backboard by adopting a mass transfer technology.
Specifically, referring to fig. 10, the red sub-pixel unit, the green sub-pixel unit, and the blue sub-pixel unit are placed on the pad 12 of the driving backplane 10 by using a bulk transfer technique, and each sub-pixel unit is bonded to the driving backplane 10 by using a low-temperature vacuum bonding process, so as to electrically connect the driving backplane 10 and each sub-pixel unit.
S130, manufacturing sensing pixel units among the plurality of light-emitting display pixel units, wherein at least one light-emitting display pixel unit and at least one light-emitting display pixel unit form a pixel; the manufacturing of the sensing pixel unit comprises the steps of sequentially forming a protective layer, an image sensing layer and a sensing electrode on a bonding pad; the protective layer includes a first opening exposing a portion of the pad to communicate the pad and the image sensing layer.
Specifically, referring to fig. 1, the pad 12 in contact with the sensing pixel unit 22 may be regarded as an anode of the image sensing unit, which is a composite type transparent conductive film. The transparent conductive film includes a pair of indium tin oxide films and a silver film between the pair of indium tin oxide films, or includes a pair of indium tin oxide films and an aluminum film between the pair of indium tin oxide films. The vias 11 are filled with a conductive material to electrically connect the sensing pixel units 22 to the driving backplane 10. The protective layer 221 is provided between the pad 12 and the image sensing layer 222, and the communication of the image sensing layer 222 with the pad 12 through the first opening 2211 is achieved through the first opening 2211 of the protective layer 221. The protection layer 221 prevents oxidation of water and oxygen to the bonding pad 12 between the image sensing layer 222 and the driving backplane 10, which is beneficial to improving accuracy of sensing signals output by the sensing pixel units and improving biological identification effect of the display panel. The material of the protective layer 221 may be silicon nitride, and the material of the image sensing layer may include at least one of amorphous silicon (a-Si), poly-silicon (p-Si), and reduced graphene oxide, for example. The signal light carrying the fingerprint information or the signal light carrying the iris information is emitted to the image sensing layer, so that the resistance of the image sensing layer 222 changes, further the current in the circuit changes, further the driving back plate 10 converts the sensing signal into corresponding fingerprint image information or iris image information according to the current generation, and the output signal drives the light-emitting display pixel unit to emit light, thereby realizing unlocking.
Fig. 11 is a schematic flow chart of a method for manufacturing another display panel based on biometric identification technology according to an embodiment of the present invention, and fig. 12 to 13 are schematic structural diagrams of a portion of the display panel formed in the method for manufacturing another display panel based on biometric identification technology according to an embodiment of the present invention, and referring to fig. 11 to 13, with reference to fig. 2, 4 and 5, the method includes:
s210, providing a driving back plate and a light-emitting display pixel unit substrate; the driving backboard comprises a plurality of through holes and a plurality of bonding pads in one-to-one correspondence with the through holes, and the light-emitting display pixel unit substrate comprises a plurality of light-emitting display pixel units.
And S220, respectively bonding the sub-pixel units with different colors with the driving backboard by adopting a mass transfer technology.
S230, manufacturing sensing pixel units among the plurality of light-emitting display pixel units, wherein at least one light-emitting display pixel unit and at least one light-emitting display pixel unit form a pixel; the manufacturing method of the sensing pixel unit comprises the steps of forming a protective layer, an image sensing layer and a sensing electrode on a bonding pad in sequence; the protective layer includes a first opening exposing a portion of the pad to communicate the pad and the image sensing layer.
It should be noted that steps S210 to S230 are identical to steps S110 to S130, and are not described herein again.
S240, sequentially forming a first insulating layer and a sensing electrode on one side, far away from the driving backboard, of the image sensing layer, wherein the first insulating layer comprises a second opening, and the second opening exposes part of the image sensing layer; the projection of the first opening on the driving back plate is staggered with the projection of the second opening on the driving back plate; the sensing electrode is in contact with the image sensing layer through the second opening.
Specifically, referring to fig. 2, the first insulating layer 223 includes a second opening 2231 and exposes a portion of the image sensing layer 222, and the sensing electrode 224 contacts the image sensing layer through the second opening 2231. The sensing electrode 224 may be a cathode, and the material of the cathode may be an ITO transparent electrode, a magnesium-silver alloy, or aluminum, for example. The first insulating layer 224 is a Thin-Film Encapsulation (TFE) layer, which may be made of an organic Film, an inorganic Film, or an inorganic Film stacked on an organic Film. A first insulating layer 223 is disposed between the sensing electrode 224 and the image sensing layer 222, and is connected through a second opening 2231 of the first insulating layer 223, wherein a projection of the first opening 2211 on the driving backplane 10 is offset from a projection of the second opening 2231 on the driving backplane 10.
S250, forming a second insulating layer on one side, away from the driving backboard, of the sensing pixel unit and the light-emitting display pixel unit; the second insulating layer comprises a third opening, a fourth opening and a groove, wherein the third opening exposes part of the sensing electrode of the sensing pixel unit, and the fourth opening exposes part of the first display electrode of the luminous display pixel unit; the vertical projection of the groove on the driving back plate is positioned between the vertical projections of the adjacent light-emitting display pixel units on the driving back plate.
Specifically, referring to fig. 12, the sensing electrode 224 exposing a portion of the sensing pixel unit 22 is used to contact the common cathode through the third opening 31 of the second insulating layer 50, and the first display electrode 212 exposing the light-emitting display pixel unit 21 is used to contact the common cathode through the fourth opening 52 of the second insulating layer 50. And further comprises a groove 53, wherein the vertical projection of the groove 53 on the driving back plate 10 is positioned between the vertical projections of the adjacent luminous display pixel units 21 on the driving back plate 10. The provision of the second insulating layer 50 realizes protection and insulation of the first display electrode 212, the first semiconductor layer 213, the light emitting layer 211, the second semiconductor layer 214, and the second display electrode 215. The second insulating layer 50 is illustratively a Thin-Film Encapsulation (TFE) layer, and the material of the TFE layer may be an organic Film, an inorganic Film, or a stack of inorganic films on an organic Film.
S260, forming a common electrode on one side, far away from the driving back plate, of the second insulating layer, wherein the common electrode covers the second insulating layer; the common electrode is in contact with the sensing electrode of the sensing pixel unit through the third opening and in contact with the first display electrode of the light-emitting display pixel unit through the fourth opening.
Specifically, referring to fig. 4, the common electrode 60 is in contact with the first display electrode 212 of the light emitting display pixel unit 21 through the third opening 51, and is in contact with the sensing electrode 224 of the sensing pixel unit 22 through the fourth opening 52. The common electrode 60 is a common cathode for each sub-pixel cell and the sensing pixel cell 22. The material of the common electrode 60 may be, for example, an ITO transparent electrode, a magnesium silver alloy, aluminum (Al), or the like. In addition, the second insulating layer 50 between the sub-pixel units and the sensing pixel unit 22 includes the grooves 53, and the bottom surfaces of the grooves 53 are not higher than the light emitting layer 211 in each sub-pixel unit, and the common electrode covers the side walls and the bottom surface of the grooves 53, and the common electrode 60 can also be used to prevent crosstalk between different sub-pixel units and crosstalk between the sub-pixel units and the image sensing unit.
And S270, forming a third insulating layer on one side of the common electrode, which is far away from the driving back plate, wherein the third insulating layer covers the common electrode.
Specifically, referring to fig. 13, a new groove is formed at a position where the common electrode 60 covers the third opening 51, the fourth opening 52, and the groove 53. The third insulating layer 70 is disposed to cover the common electrode 60, which can protect the common electrode 60 and planarize the common electrode. The third insulating layer 70 is illustratively a Thin-Film Encapsulation (TFE) layer, which may be made of an organic Film, an inorganic Film, or a stack of inorganic films on an organic Film.
And S280, arranging a lens on one side of the third insulating layer far away from the driving backboard.
Specifically, referring to fig. 5, the lenses 225 may be Micro lenses (Micro Lens), one Lens 225 is disposed for each sensing pixel unit 22, and a projection of the Lens 225 on the driving backplane 10 at least partially coincides with a projection of the image sensing layer 223 on the driving backplane 10. A micro lens is disposed above the photosensitive area of the pixel, and the photosensitive area is determined by the surface area of the micro lens. Therefore, the aperture opening ratio is improved in specification while the size of a single pixel is considered, and the light sensitivity is greatly improved. The fingerprint information or iris information can be accurately identified, and the display effect and the human-computer interaction performance of the display panel are improved.
And S290, adhering a glass packaging layer to one side, far away from the driving back plate, of the third insulating layer through an adhesive layer.
Specifically, with reference to fig. 5, the adhesive layer 90 may be a UV adhesive, which is also called a shadowless adhesive, a photosensitive adhesive or an ultraviolet curing adhesive, and the UV adhesive is cured by ultraviolet light irradiation, so that the glass package layer 100 is adhered to a side of the third insulating layer 70 away from the driving back plate 10. The curing speed is high, and the curing can be completed within several seconds to dozens of seconds, so that the production rate of the display panel is improved.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.

Claims (10)

1. A display panel based on biometric identification technology, comprising:
the driving back plate comprises a plurality of through holes and a plurality of bonding pads in one-to-one correspondence with the through holes;
the plurality of pixels are positioned on one side of the bonding pad, which is far away from the driving backboard, and each pixel comprises a sensing pixel unit and a light-emitting display pixel unit; the sensing pixel unit is used for sensing the signal light with the identification information and outputting a sensing signal; the light-emitting display pixel unit is used for emitting light according to the received signal of the driving backboard, and the signal received by the light-emitting display pixel is associated with the sensing signal;
the sensing pixel unit comprises a protective layer and an image sensing layer which are sequentially arranged on the bonding pad; the protective layer comprises a first opening, and the first opening exposes a part of the bonding pad to communicate the bonding pad and the image sensing layer;
the second insulating layer is positioned on one side, away from the driving backboard, of the sensing pixel unit and the light-emitting display pixel unit; the second insulating layer comprises a third opening, a fourth opening and a groove, the third opening exposes a part of the sensing electrode of the sensing pixel unit, and the fourth opening exposes a part of the first display electrode of the light-emitting display pixel unit; the vertical projection of the groove on the driving back plate is positioned between the vertical projections of the adjacent light-emitting display pixel units on the driving back plate.
2. The biometric technology based display panel of claim 1, wherein the sensing pixel unit further comprises:
the first insulating layer is positioned on one side, far away from the driving back plate, of the image sensing layer and comprises a second opening, and the second opening exposes part of the image sensing layer; the projection of the first opening on the driving back plate is staggered with the projection of the second opening on the driving back plate;
and the sensing electrode is positioned on one side of the first insulating layer, which is far away from the driving back plate, and is in contact with the image sensing layer through the second opening.
3. The biometric technology-based display panel of claim 1, wherein the light-emitting display pixel unit comprises:
the pixel structure comprises a red sub-pixel unit, a green sub-pixel unit and a blue sub-pixel unit; the light-emitting color of the light-emitting layer in the red sub-pixel unit is red, the light-emitting color of the light-emitting layer in the green sub-pixel unit is green, and the light-emitting color of the light-emitting layer in the blue sub-pixel unit is blue;
each sub-pixel unit further comprises a first display electrode, a first semiconductor layer, a second semiconductor layer and a second display electrode; the first semiconductor layer is located on one side, away from the driving backboard, of the light emitting layer, the first display electrode is located on one side, away from the driving backboard, of the first semiconductor layer, the second semiconductor layer is located on one side, close to the driving backboard, of the light emitting layer, the second display electrode is located on one side, close to the driving backboard, of the second semiconductor layer, and the second display electrode is in contact with the bonding pad.
4. The biometric technology based display panel of claim 3, wherein the red, green, blue and sensing pixel cells are arranged in a checkerboard pattern;
red sub-pixel units in the four pixels are adjacently arranged and arranged in a field shape; green sub-pixel units in the four pixels are adjacently arranged and arranged in a field shape; blue sub-pixel units in the four pixels are adjacently arranged and arranged in a Chinese character 'tian' -shaped manner; the sensing pixel units in the four pixels are adjacently arranged and arranged in a field shape.
5. The biometric technology-based display panel according to claim 1, further comprising: the common electrode is positioned on one side, far away from the driving back plate, of the second insulating layer, and covers the second insulating layer; the common electrode is in contact with the sensing electrode of the sensing pixel unit through the third opening, and is in contact with the first display electrode of the light-emitting display pixel unit through the fourth opening.
6. The biometric technology-based display panel according to claim 5, further comprising: the third insulating layer is positioned on one side, far away from the driving backboard, of the common electrode, and covers the common electrode.
7. The biometric technology based display panel of claim 6, wherein the sensing pixel unit further comprises a lens located on a side of the third insulating layer away from the driving backplane, a projection of the lens on the driving backplane at least partially coinciding with a projection of the image sensing layer on the driving backplane.
8. A display device based on biometric technology, comprising the display panel based on biometric technology according to any one of claims 1 to 7.
9. The display device based on biometric technology according to claim 8, further comprising a prism unit for changing the propagation direction of the light received and/or emitted by the display panel for human-computer interaction.
10. A method for preparing a display panel based on a biological identification technology is characterized by comprising the following steps:
providing a driving back plate and a light-emitting display pixel unit substrate; the driving back plate comprises a plurality of through holes and a plurality of bonding pads in one-to-one correspondence with the through holes, and the light-emitting display pixel unit substrate comprises a plurality of light-emitting display pixel units;
respectively bonding the sub-pixel units with different colors with the driving backboard by adopting a mass transfer technology;
manufacturing sensing pixel units among the light-emitting display pixel units, wherein at least one light-emitting display pixel unit and at least one light-emitting display pixel unit form a pixel; the manufacturing of the sensing pixel unit comprises the steps of sequentially forming a protective layer, an image sensing layer and a sensing electrode on the bonding pad; the protective layer comprises a first opening, and the first opening exposes a part of the bonding pad to communicate the bonding pad and the image sensing layer;
forming a second insulating layer on one side of the sensing pixel unit and the light-emitting display pixel unit away from the driving backboard; the second insulating layer comprises a third opening, a fourth opening and a groove, wherein the third opening exposes part of the sensing electrode of the sensing pixel unit, and the fourth opening exposes part of the first display electrode of the luminous display pixel unit; the vertical projection of the groove on the driving back plate is positioned between the vertical projections of the adjacent light-emitting display pixel units on the driving back plate.
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