CN111504524A - Pressure sensor based on ceramic glass micro-melting process - Google Patents
Pressure sensor based on ceramic glass micro-melting process Download PDFInfo
- Publication number
- CN111504524A CN111504524A CN201910097303.2A CN201910097303A CN111504524A CN 111504524 A CN111504524 A CN 111504524A CN 201910097303 A CN201910097303 A CN 201910097303A CN 111504524 A CN111504524 A CN 111504524A
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- China
- Prior art keywords
- melting process
- glass micro
- pressure sensor
- ceramic
- sensor based
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a pressure sensor based on a ceramic glass micro-melting process, which comprises a pressure measuring port, a chip, a diaphragm, a signal processing circuit board and an electric connection assembly, wherein the chip is connected with the signal processing circuit board in a bonding manner.
Description
Technical Field
The invention belongs to the field of sensitive components, and particularly relates to a pressure sensor for a glass micro-melting process.
Background
① is made by ceramic piezoresistance technology, so the precision is low, the stability is poor, ② pressure sensor uses metal pressure diaphragm, when measuring small range pressure, the deformation of metal diaphragm is small because of large modulus of metal material, so the precision of sensor is low under low pressure.
Disclosure of Invention
Aiming at the problems, the invention provides a pressure sensor based on a ceramic glass micro-melting process, wherein the diaphragm is a ceramic diaphragm, and the chip is connected with the ceramic diaphragm through the glass micro-melting process. The deformation of the ceramic diaphragm is large, so that the precision of the sensor at low pressure can be improved, and the processing cost can be reduced.
In order to achieve the purpose, the technical scheme of the invention is as follows:
the pressure sensor based on the ceramic glass micro-melting process is characterized in that the diaphragm is a ceramic diaphragm, and the chip is connected with the ceramic diaphragm through the glass micro-melting process.
Preferably, the glass micro-melting process is to sinter the chip on the ceramic chip through glass cement.
Preferably, the ceramic diaphragm is fixed to a metal base.
Preferably, the pressure measuring port is connected with the port to be measured in a sealing mode.
Preferably, the signal processing circuit board is a flexible circuit board or a rigid circuit board.
Compared with the prior art, the pressure sensor has the advantages that ① adopts the pressure sensor of the glass micro-melting process, the pressure sensor has the advantages of high overall precision, good stability and the like, ② adopts the ceramic diaphragm, the deformation amount is large, and the precision of the sensor at low pressure can be improved.
Drawings
Fig. 1 shows a pressure sensor based on a ceramic glass micro-melting process according to the present invention.
Fig. 2 is an enlarged view of the sensing element of the present invention.
In the figure: 1-pressure measuring port, 2-chip, 3-diaphragm, 4-signal processing circuit board, 5-electric connection component, 6-ceramic diaphragm, 7-glass cement and 8-metal base.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
The pressure sensor based on the ceramic glass micro-melting process is characterized in that the diaphragm (3) is a ceramic diaphragm (6), and the chip (2) is connected with the ceramic diaphragm (6) through the glass micro-melting process.
The glass micro-melting process is that the chip (2) is sintered on the ceramic membrane (6) through glass cement (7).
The ceramic diaphragm (6) is fixed on the metal base (8).
And the pressure measuring port (1) is connected with the port to be measured in a sealing way.
The signal processing circuit board (4) is a flexible circuit board or a hard circuit board.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and their concepts should be equivalent or changed within the technical scope of the present invention.
Claims (5)
1. The pressure sensor based on the ceramic glass micro-melting process is characterized in that the diaphragm (3) is a ceramic diaphragm (6), and the chip (2) is connected with the ceramic diaphragm (6) through the glass micro-melting process.
2. The pressure sensor based on the ceramic glass micro-melting process is characterized in that the glass micro-melting process is that the chip (2) is sintered on the ceramic diaphragm (6) through glass cement (7).
3. The pressure sensor based on the ceramic glass micro-melting process as claimed in claim 1, wherein the ceramic diaphragm (6) is fixed on a metal base (8).
4. The pressure sensor based on the ceramic glass micro-melting process is characterized in that the pressure measuring port (1) is connected with the port to be measured in a sealing mode.
5. The pressure sensor based on the ceramic glass micro-melting process as claimed in claim 1, wherein the signal processing circuit board (4) is a flexible circuit board or a rigid circuit board.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910097303.2A CN111504524A (en) | 2019-01-31 | 2019-01-31 | Pressure sensor based on ceramic glass micro-melting process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910097303.2A CN111504524A (en) | 2019-01-31 | 2019-01-31 | Pressure sensor based on ceramic glass micro-melting process |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111504524A true CN111504524A (en) | 2020-08-07 |
Family
ID=71870823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910097303.2A Pending CN111504524A (en) | 2019-01-31 | 2019-01-31 | Pressure sensor based on ceramic glass micro-melting process |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111504524A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112563145A (en) * | 2020-11-26 | 2021-03-26 | 娄底市安地亚斯电子陶瓷有限公司 | Preparation method of ceramic circuit of automobile preparation pressure strain gauge |
-
2019
- 2019-01-31 CN CN201910097303.2A patent/CN111504524A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112563145A (en) * | 2020-11-26 | 2021-03-26 | 娄底市安地亚斯电子陶瓷有限公司 | Preparation method of ceramic circuit of automobile preparation pressure strain gauge |
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