CN111503239A - 一种具有dlc涂层的谐波减速器柔轮 - Google Patents

一种具有dlc涂层的谐波减速器柔轮 Download PDF

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CN111503239A
CN111503239A CN202010337262.2A CN202010337262A CN111503239A CN 111503239 A CN111503239 A CN 111503239A CN 202010337262 A CN202010337262 A CN 202010337262A CN 111503239 A CN111503239 A CN 111503239A
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刘鸣源
黄小明
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Dongguan Guosenke Precision Industry Co ltd
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    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
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    • F16H—GEARING
    • F16H55/00—Elements with teeth or friction surfaces for conveying motion; Worms, pulleys or sheaves for gearing mechanisms
    • F16H55/02—Toothed members; Worms
    • F16H55/17—Toothed wheels

Abstract

本发明涉及一种具有DLC涂层的谐波减速器柔轮，所述谐波减速器柔轮的基体材料表面由内到外，依次分布有过渡层和工作层，所述过渡层内厚度为0.4‑0.6μm，所述过渡层的材料为铬或者钛，所述工作层是厚度为0.8‑3μm，SP2键含量为70％‑95％，SP3键含量为5％‑30％的DLC涂层；所述柔轮具有1200至2500HV的表面硬度，0.1的表面摩擦系数。

Description

一种具有DLC涂层的谐波减速器柔轮
技术领域
本发明涉及一种具有DLC涂层的谐波减速器柔轮。
背景技术
谐波减速机作为小模数高精密传动部件，主要由波发生器(由凸轮和柔性轴承组成)、柔性齿轮、刚性齿轮四个基本构件组成，是一种靠波发生器装配上柔性轴承使柔性齿轮产生可控弹性变形，并与刚性齿轮相啮合来传递运动和动力的齿轮传动，考察的性能指标主要有：弯曲疲劳寿命、接触疲劳寿命、精度保持能力、噪音、震动、传动误差等，其中国内外谐波减速机弯曲疲劳寿命一般8000小时、精度保持能力一般2000h，接触疲劳点蚀失效未做定义。柔性齿轮运动过程中一直处于绕性变形，故而齿轮热处理采用淬火加中高温回火，柔轮硬度36HRC，两齿轮属于软齿面配合，软齿面配合容易出现接触疲劳点蚀、齿面胶合(刮伤)等问题。一般通过材料、热处理、表面处理、设计等方面改善和优化谐波减速机寿命、精度保持、接触疲劳寿命，在材料、热处理工艺、设计等优化定型的情况下，齿轮行业通常采用喷丸强化的表面处理工艺，提高齿轮的弯曲疲劳寿命。
中国公开号：106119775，揭示了可以通过电化学镀层的方式在柔轮的表面镀上一层由碳元素组成的薄膜，更进一步的，该方案只公布了一种关于柔轮的镀层方式，但并没有涉及更深一步的关于各种原子键对柔轮性能的提升，根据本技术试制的产品的，对其的试验情况可参考图1、图2；
图1中图中齿面颜色较深部分为齿轮啮合部位，从图中可以看出，啮合部位无明显的接触痕及磨损，主因是由于涂层的摩擦系数为齿轮基体材料摩擦系数的1/5；
图2中图中齿面颜色较深部分齿轮啮合部位，齿面有明显胶合刮伤现象，刮伤会降低产品的精度，震动和噪音加大；
众所周知，柔轮在工作时，是一个表面形状不断改变的过程，所以镀层的性能对整个谐波减速器的性能有直接的关系。
发明内容
本发明为了解决上述问题而提供的一种具有DLC涂层的谐波减速器柔轮，所述谐波减速器柔轮的基体材料表面由内到外，依次分布有过渡层和工作层，所述过渡层内厚度为0.4-0.6μm，所述过渡层的材料为铬或者钛，所述工作层是厚度为0.8-3μm，键含量为70％-95％，键含量为5％-30％的DLC涂层；
所述柔轮具有1200至2500HV的表面硬度，0.1的表面摩擦系数。
优选的，所述工作层内还掺杂有微量元素可以是硅、钨，所述微量元素占所有掺杂元素的0.08％-0.10％。
本发明的有益效果在于：通过对基体材料进行表面处理，使得柔轮比现有表面处理方式更佳，更适合柔轮这种特殊零部件的涂层，这种涂层具有有耐磨、硬度高等特性，并且具有一定的自润滑特性的特性，进而可以降低产品的摩擦系数，降低产品的温升和噪音，同时由于涂层具有高硬度，故而可以提高产品的耐磨性，齿面抗胶合(刮伤)能力，及产品的传动精度保持能力。
附图说明
图1为根据现有技术制造的涂层柔轮，连续试验运行30天时，对柔轮表面的摄像；
图2为根据现有技术制造的柔轮，连续试验运行30天时，对柔轮表面的摄像；
图3为本发明所涉及的柔轮，连续试验运行100天时，对柔轮表面的摄像，图中齿面啮合颜色轻微，表面涂层颜色清晰可见，未发生涂层脱落与磨损等现象；
图4为本发明所涉及的柔轮，连续试验运行100天时，对柔轮表面的摄像，图中柔轮齿面接触痕很严重，通过轮廓仪检测，发现齿面磨损3-5um。
具体实施方式
为了得到一种具有DLC涂层的谐波减速器柔轮，其特性是基体材料表面由内到外，依次分布有过渡层和工作层，所述过渡层内厚度为0.4-0.6μm，所述过渡层的材料为铬或者钛，所述工作层是厚度为0.8-3μm，SP2键含量为70％-95％，SP3键含量为5％-30％的DLC涂层；所述柔轮具有1200至2500HV的表面硬度，0.1的表面摩擦系数，可以对柔轮采用电弧离子镀进行以下处理，具体步骤如下：
步骤1.工件的清洗
工件在进入真空腔电镀前，要对其进行清洗，除去一些表面杂质，以获得良好的电镀效果，具体清洗步骤可以包括：
(1a).超声波清洗
将工件放入超声波清洗槽中，并配合使用金属清洗液，对工件进行脱脂，并且清洗；
(1b).酸洗
在工件的超声波清洗后，需进行酸洗，以中和残留在工件上的碱液，并且起到一定的活化作用；
(1c).漂洗
利用离子纯净水或蒸馏水对工件进行漂洗，以除去残留酸液。
步骤2.抽真空
将真空腔抽至6.6×10-3Pa。
步骤3.通入高纯度氩气
通入高纯度氩气，使真空度保持在5×10-2pa，对柔轮加偏压至900V；
(3a).氩离子轰击清洗
为了更加光洁的表面，取得更好的加工效果，可提高靶材电极电压至800-1100v，同时给柔轮接入，持续时间15-20min，在此电压下会有两个作用，一是,氩原子会轰击工件表面，使其表面的材料裸的原子掉落，露出新鲜的材料表面，吸附工件表面的残留的空气；二是，提高工件表面的能量，利于后续的电镀加工。
步骤4.沉积过渡层
通入高纯度氩气，使真空度继续保持在5×10-2pa，
(4a).选用铬作为过渡层材料，引入铬元素，材料为铬单质，调节铬靶材电压为200-700V，,对柔轮加偏压至900V,沉积7-40min；
(4b).选用钛作为过渡层材料，引入钛元素，材料可以是钛单质或钛碳合金，调节钛靶材电压为240-700V，对柔轮加偏压至900V,沉积15-50min。
步骤5.沉积工作层
继续通入高纯度氩气和乙炔气体，二者比例为1：1，使真空度继续保持在5×10- 2pa，调节弧流为55A，即可制成SP2含量为70％-95％，SP3键含量为5％-30％的DLC涂层；
为了提升DLC涂层中晶体的接合力，改善膨胀率，可以在步骤5中引入钨元素或者硅元素；
(5a).引入钨元素，材料是钨碳合金，调节弧流电压为50A；
(5b).引入硅元素，材料是二氧化硅，调节弧流电压为50A。
测试结果如下：
试验情况
Figure BDA0002467021080000061
通过图1、图2与图3、图4进行比较，可以明显的发现使用本发明所涉及的产品具有更好的耐磨性、耐刮性。
以上所述实施例，只是本发明的较佳实例，并非来限制本发明的实施范围，故凡依本发明申请专利范围所述的构造、特征及原理所做的等效变化或修饰，均应包括于本发明专利申请范围内。

Claims (2)

1.一种具有DLC涂层的谐波减速器柔轮，其特征在于，所述谐波减速器柔轮的基体材料表面由内到外，依次分布有过渡层和工作层，所述过渡层内厚度为0.4-0.6μm，所述过渡层的材料为铬或者钛，所述工作层是厚度为0.8-3μm，SP2键含量为70％-95％，SP3键含量为5％-30％的DLC涂层；
所述柔轮具有1200至2500HV的表面硬度，0.1的表面摩擦系数。
2.根据权利要求1所述的一种具有DLC涂层的谐波减速器柔轮，其特征在于，所述工作层内还掺杂有微量元素可以是硅、钨，所述微量元素占所有掺杂元素的0.08％-0.10％。
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CN113913587A (zh) * 2021-09-30 2022-01-11 东风商用车有限公司 一种齿轮的表面处理方法及齿轮

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