CN111377246A - Material conveying device and system - Google Patents

Material conveying device and system Download PDF

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Publication number
CN111377246A
CN111377246A CN201811627145.9A CN201811627145A CN111377246A CN 111377246 A CN111377246 A CN 111377246A CN 201811627145 A CN201811627145 A CN 201811627145A CN 111377246 A CN111377246 A CN 111377246A
Authority
CN
China
Prior art keywords
conveying
unit
horizontal
working area
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811627145.9A
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Chinese (zh)
Inventor
王继明
朱岳彬
廖飞红
张飞
王理华
卢彧文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Micro Electronics Equipment Co Ltd
Original Assignee
Shanghai Micro Electronics Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to CN201811627145.9A priority Critical patent/CN111377246A/en
Publication of CN111377246A publication Critical patent/CN111377246A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00Non-mechanical conveyors not otherwise provided for
    • B65G54/02Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00Non-mechanical conveyors not otherwise provided for
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0214Articles of special size, shape or weigh
    • B65G2201/022Flat

Abstract

The invention provides a material conveying device and a system, wherein the material conveying device comprises: the device comprises a transmission unit and a position adjusting unit fixed below the transmission unit; the conveying unit is used for giving an upward supporting force and a horizontal first-direction thrust to the materials so that the materials are conveyed in a suspension state; the position adjusting unit is used for enabling the transmission unit to do vertical movement and/or horizontal second direction movement, and the horizontal second direction is perpendicular to the horizontal first direction. The material conveying device enables the materials to be always kept in a suspension state in the conveying process, so that the materials can be prevented from being crushed and polluted; meanwhile, the position of the material can be adjusted by enabling the transmission unit to do vertical movement and/or horizontal movement in a second direction through the position adjusting unit, so that the problem that the existing material transmission system is low in positioning accuracy and can be eccentric can be solved.

Description

Material conveying device and system
Technical Field
The invention relates to the technical field of photoetching equipment, in particular to a material conveying device and a material conveying system.
Background
In the field of photolithography, a plurality of processes, such as cleaning, coating, exposure, development, etc., are required to be performed during the processing of a substrate, and the substrate is transferred between the processes through a material transfer system. The existing material transmission system mostly adopts a contact type transmission method, can pollute materials, realizes the handing-over and pre-alignment of the substrate through a vacuum adsorption device, an air floatation conveying table, a rotary clamping mechanism and the like, has the defects of long exposure waiting time, low positioning precision, low working efficiency, fragile substrate and the like, can face the risk of fragments in the transmission process, and can pollute the materials simultaneously.
In addition, when the material is conveyed to the bearing table through the material conveying system for exposure, the relatively high yield can be achieved only when the bearing table is fully arranged as much as possible. However, in actual production, the material may exist as a whole plate material or a half plate material, the whole plate material has a relatively large area, and generally, the area size matches the size of the bearing surface of the bearing table, so the bearing table can be fully arranged by the existing material transmission system, and the half plate material can only be transmitted to the near-end working area of the bearing table by the existing material transmission system, but cannot be transmitted to the far-end working area of the bearing table, so the bearing table cannot be fully arranged, and therefore, the yield is greatly influenced.
Disclosure of Invention
The invention aims to provide a material conveying device and a material conveying system, which are used for solving the problems that the existing material conveying system is low in positioning accuracy, materials are eccentric, the materials have a fragment risk and are easy to be polluted.
In order to solve the technical problem, the invention provides a material conveying device, which comprises a conveying unit and a position adjusting unit fixed below the conveying unit;
the conveying unit is used for giving an upward supporting force and a horizontal first-direction thrust to the materials so that the materials are conveyed in a suspension state;
the position adjusting unit is used for enabling the transmission unit to do vertical movement and/or horizontal second direction movement, and the horizontal second direction is perpendicular to the horizontal first direction.
Optionally, in the material conveying device, the conveying unit includes a vibrating plate and two ultrasonic units fixed below two ends of the vibrating plate, respectively, the vibrating plate is used for bearing the material, the two ultrasonic units respectively send and receive ultrasonic waves to form an air film between the vibrating plate and the material, and the air film enables the material to be conveyed in a suspended state by giving an upward supporting force to the material and a horizontal pushing force in a first direction.
Optionally, in the material conveying device, the position adjusting unit includes two sets of vertical moving assemblies and two sets of horizontal moving assemblies; each ultrasonic unit corresponds to one group of the vertical motion assembly and one group of the horizontal motion assembly respectively; the ultrasonic unit realizes vertical movement through the vertical movement assembly; and, effecting movement in a horizontal second direction by the horizontal movement assembly.
Optionally, in the material conveying device, the vertical movement assembly includes a connecting plate, a spring assembly vertically fixed on the connecting plate, and a first linear motor fixed on the connecting plate, and the horizontal movement assembly includes the connecting plate, a slide rail fixed below the connecting plate, and a second linear motor fixed on the connecting plate; the connecting plate is fixed below the ultrasonic unit through the spring assembly, the ultrasonic unit is driven to move vertically under the action of the first linear motor, and the ultrasonic unit is driven to move along the sliding rail in a horizontal second direction under the action of the second linear motor.
A material transfer system, comprising: the bearing platform and the material conveying device are arranged on the bearing platform;
the bearing table is used for bearing the materials transmitted by the material transmission device;
the bearing table is provided with an opening, and a transmission unit of the material transmission device can move vertically through the opening.
Optionally, in the material conveying system, the upper surface of the bearing table is divided into a first working area and a second working area; the number of the material conveying devices is at least 2, and the material conveying devices respectively comprise a first material conveying device and a second material conveying device; the materials are conveyed to the first working area in a suspension state under the action of the first material conveying device; or the materials are sequentially kept in a suspension state under the action of the first material conveying device and the second material conveying device and are conveyed to the second working area through the first working area.
Optionally, in the material conveying system, a part of the first material conveying device is disposed outside the carrying table, and another part of the first material conveying device is disposed inside the carrying table and below the first working area; the second material conveying device is arranged in the bearing table, one part of the second material conveying device is positioned below the first working area, and the other part of the second material conveying device is positioned below the second working area.
Optionally, in the material conveying system, the material conveying system further includes a limiting assembly for limiting movement of the material.
Optionally, in the material conveying system, the number of the limiting assemblies is 4, two of the limiting assemblies are arranged at a junction of the first working area and the second working area and used for limiting movement of the material in the first working area, and the other two of the limiting assemblies are arranged at an edge of the second working area far away from the first working area and used for limiting movement of the material in the second working area.
Optionally, in the material conveying system, the limiting assembly includes a cylinder and a limiting block; the limiting block can move vertically under the action of the air cylinder, and when the limiting block rises above the bearing table, the limiting block plays a role in limiting the movement of materials.
In the material conveying device and system provided by the invention, the system comprises a bearing platform and the material conveying device, and the material conveying device comprises: the device comprises a transmission unit and a position adjusting unit fixed below the transmission unit; the conveying unit is used for giving an upward supporting force and a horizontal first-direction thrust to the materials so that the materials are conveyed in a suspension state; the position adjusting unit is used for enabling the transmission unit to do vertical movement and/or horizontal second direction movement, and the horizontal second direction is perpendicular to the horizontal first direction. The material conveying device enables the materials to be always kept in a suspension state in the conveying process, so that the materials can be prevented from being crushed and polluted; meanwhile, the position of the material can be adjusted by enabling the transmission unit to do vertical movement and/or horizontal movement in a second direction through the position adjusting unit, so that the problem that the existing material transmission system is low in positioning accuracy and can be eccentric can be solved.
Furthermore, in the material conveying system, the number of the material conveying devices is at least 2, and the material conveying system comprises a first material conveying device and a second material conveying device, wherein one part of the first material conveying device is arranged outside the bearing table, the other part of the first material conveying device is arranged in the bearing table, the second material conveying device is arranged in the bearing table, the whole plate material is conveyed through the first material conveying device, and the two half plate materials are conveyed through the first material conveying device and the second material conveying device, so that the same bearing table can be fully arranged no matter the half plate material or the whole plate material is conveyed, namely the material conveying system provided by the invention solves the problem that the bearing table cannot be fully arranged through the existing material conveying system for conveying the half plate material.
Drawings
Fig. 1 is a schematic structural diagram of a material conveying device provided in an embodiment of the present invention;
FIG. 2 is a schematic structural diagram of a material transfer system according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of another configuration of a material transfer system according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a limiting assembly according to an embodiment of the present invention.
Wherein the reference numerals are as follows:
1-a material conveying device; 11-a transmission unit; 12-a position adjustment unit; 111-a vibrating plate; 112-an ultrasound unit; 121-connecting plate; 122-a spring assembly; 123-a first linear motor; 124-sliding rails; 125-a second linear motor; 2-a bearing platform; 21-opening; 2 a-a first working area; 2 b-a second working area; 1 a-a first material transfer device; 1 b-a second material transfer device; 3-a limiting component; 31-a cylinder; 32-a limiting block.
Detailed Description
The material conveying device and system according to the present invention will be described in detail with reference to the accompanying drawings and specific embodiments. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention. Further, the structures illustrated in the drawings are often part of actual structures. In particular, the drawings may have different emphasis points and may sometimes be scaled differently.
Referring to fig. 1, the present embodiment provides a material conveying device 1. The material conveying device 1 comprises a conveying unit 11 and a position adjusting unit 12 fixed below the conveying unit 11; the conveying unit 11 is used for giving an upward supporting force and a horizontal first-direction thrust to the materials so that the materials are conveyed in a suspension state; the position adjusting unit 12 is configured to make the transmission unit 11 perform a vertical movement and/or a horizontal movement in a second direction, where the second direction is perpendicular to the first direction.
The position adjusting unit 12 is used for enabling the transmission unit 11 to move vertically and horizontally in a second direction; the conveying unit 11 is used for giving an upward supporting force and a horizontal pushing force in a first direction to the materials so that the materials are conveyed in a suspension state, and the position of the conveyed materials is adjusted through the position adjusting unit 12.
The material conveying device 1 enables the materials to be always kept in a suspension state in the conveying process, so that the materials can be prevented from being crushed and polluted; meanwhile, when the conveying unit 11 moves in the horizontal second direction under the action of the position adjusting unit 12, the position of the material in the horizontal second direction is adjusted accordingly, so that the problem that the material is eccentric due to low positioning accuracy of the conventional material conveying system can be solved.
Specifically, the transmission unit 11 includes a vibration plate 111 and two ultrasonic units 112 respectively fixed below two ends of the vibration plate 111, the vibration plate 111 is used for bearing the material, the two ultrasonic units 112 respectively transmit and receive ultrasonic waves to form an air film between the vibration plate 111 and the material, and the air film enables the material to be transmitted in a suspended state by giving an upward supporting force to the material and a horizontal first-direction thrust force. The ultrasonic unit 112 may include a piezoelectric transducer, an amplitude transformer, a guide rail, a slider, a driving power supply, and the like, and the working principle thereof is as follows: the frequency characteristics of the two ultrasonic units 112 are consistent, when the piezoelectric inverse effect of the piezoelectric transducer generates a longitudinal wave, the amplitude transformer further amplifies the amplitude and transmits the amplified amplitude to the vibration plate 111, and flexural vibration with the same frequency is excited on the vibration plate 111; in order to prevent standing waves from being formed, the two piezoelectric transducers are respectively used as an ultrasonic transmitting end and an ultrasonic receiving end, the piezoelectric transducers at the ultrasonic transmitting end generate longitudinal simple harmonic vibration and drive the contact points of the vibrating plate 111 to do simple harmonic vibration together, and therefore material transmission is achieved.
Correspondingly, the position adjusting unit 12 includes two sets of vertical moving components and two sets of horizontal moving components; each of the ultrasonic units 112 corresponds to one set of the vertical motion components and one set of the horizontal motion components; the ultrasonic unit 112 realizes vertical movement through the vertical movement component; and, effecting movement in a horizontal second direction by the horizontal movement assembly.
Further, the vertical motion assembly comprises a connecting plate 121, a first linear motor 123 vertically fixed on the connecting plate 121, a spring assembly 122 and a first linear motor 123 fixed on the connecting plate, and the horizontal motion assembly comprises the connecting plate 121, a slide rail 124 fixed below the connecting plate 121 and a second linear motor 125 fixed on the connecting plate 121; the connecting plate 121 is fixed below the ultrasonic unit 112 through the spring assembly 122, and drives the ultrasonic unit 112 to vertically move under the action of the first linear motor 123 and drives the ultrasonic unit 112 to horizontally move along the slide rail 124 in a second direction under the action of the second linear motor 125.
In addition, referring to fig. 2 and with reference to fig. 3, on the basis of the material conveying device 1, the embodiment provides a material conveying system, which includes: a carrier table 2 and a material transfer device 1 as described above. The bearing table 2 is used for bearing the materials transmitted by the material transmission device 1; the carrier 2 has an opening 21, and the conveying unit 11 of the material conveying device 1 can move vertically through the opening 21.
Specifically, when the material transportation starts, the vibration plate 111 is lifted above the susceptor 2 through the opening 21 by the position adjusting unit 12, and when the material transportation ends, the vibration plate 111 is returned to the initial position through the opening 21 by the position adjusting unit 12 so that the material is placed on the susceptor 2.
Referring to fig. 3 specifically, the upper surface of the carrier 2 is divided into a first working area 2a and a second working area 2b, the first working area 2a is relatively close to the feeding area, and the second working area 2b is relatively far from the feeding area; the number of the material conveying devices 1 is at least 2, and the material conveying devices are divided into a first material conveying device 1a relatively close to the feeding area and a second material conveying device 1b relatively far away from the feeding area according to the arrangement positions; the materials are conveyed to the first working area 2a in a suspension state under the action of the first material conveying device 1 a; or, the materials are sequentially kept in a suspension state under the action of the first material conveying device 1a and the second material conveying device 1b and are conveyed to the second working area 2b through the first working area 2a, so that half plates or whole plates are connected.
Generally, the number of the first material conveying device 1a and the second material conveying device 1b is kept equal, and the specific number of the first material conveying device 1a and the second material conveying device 1b can be selected according to the size of the materials. Fig. 3 shows a case that the number of the first material conveying device 1a and the second material conveying device 1b is 2, and the 2 first material conveying devices 1a and the 2 second material conveying devices 1b are respectively arranged in parallel along the vertical direction of the conveying direction, and are suitable for slightly larger materials; for relatively small materials, the transmission can be realized through the first material transmission device 1a and the second material transmission device 1 b.
The specific arrangement positions of the first material conveying device 1a and the second material conveying device 1b are as follows:
one part of the first material conveying device 1a is arranged in a feeding area outside the bearing table 2, and the other part of the first material conveying device 1a is arranged in the bearing table 2 and is located below the first working area 2a, that is, one ultrasonic unit 112 of the first material conveying device 1a is located outside the bearing table 2, and the other ultrasonic unit 112 is located below the first working area 2 a; the second material conveying device 1b is disposed in the bearing table 2, and a part of the second material conveying device is located below the first working area 2a, and another part of the second material conveying device is located below the second working area 2b, that is, one ultrasonic unit 112 of the second material conveying device 1b is located below the first working area 2a, and the other ultrasonic unit 112 is located below the second working area 2 b.
Present material transmission system transmission half board material can't arrange the plummer full, and this embodiment is through right plummer 2 divides to through reasonable arrangement material transmission device 1's position makes and is all can arrange the plummer full by the transmission material no matter be whole board material or half board material. For the half-plate materials, specifically, half-plate materials are transferred to the second working area 2b through the first material transfer device 1a and the second material transfer device 1b, and then the other half-plate materials are transferred to the first working area 2a through the first material transfer device 1a, so that the loading platform can be fully arranged.
The principle of the cooperative work of the first material conveying device 1a and the second material conveying device 1b is as follows: during feeding, the ultrasonic units 112 outside the bearing table 2 are ultrasonic transmitting ends, the ultrasonic units 112 inside the bearing table 2 are ultrasonic receiving ends, and vice versa during feeding. That is, different from the half-plate material being transported by one material transporting device 1, two ultrasonic units 112 of the material transporting device 1 are respectively an ultrasonic transmitting end and an ultrasonic receiving end: for the whole plate material, during the loading, both the two ultrasonic units 112 of the second material transmission device 1b are ultrasonic receiving ends, and during the unloading, both the two ultrasonic units 112 of the second material transmission device 1b are ultrasonic transmitting ends.
Preferably, the material conveying system in this embodiment further includes a limiting component 3 for limiting the movement of the material. Therefore, the situation that materials are conveyed to the appointed position on the bearing table 2 through the material conveying device 1 and then can continue to move towards the conveying direction due to the action of inertia can be avoided, and the accuracy of the placing position is further improved.
And further preferably, the number of the limiting assemblies 3 is 4, two of the limiting assemblies 3 are arranged at the junction of the first working area 2a and the second working area 2b and used for limiting the movement of the material in the first working area 2a, and the other two limiting assemblies 3 are arranged at the edge of the second working area 2b far away from the first working area 2a and used for limiting the movement of the material in the second working area 2 b. Referring to fig. 4, the limiting assembly 3 includes a cylinder 31 and a limiting block 32; the limiting block 32 can move vertically under the action of the air cylinder 31, and when the limiting block 32 rises above the bearing platform 2, the limiting block plays a role in limiting the movement of materials.
In conclusion, the material conveying device and the material conveying system provided by the invention can realize non-contact type material conveying, and improve the processing quality of products; the eccentric adjustment of the materials can be continuously carried out with the transmission process, so that the time is saved, and the yield is improved; the half-block materials can be handed over, and the method is suitable for more market demands.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.

Claims (10)

1. The material conveying device is characterized by comprising a conveying unit and a position adjusting unit fixed below the conveying unit;
the conveying unit is used for giving an upward supporting force and a horizontal first-direction thrust to the materials so that the materials are conveyed in a suspension state;
the position adjusting unit is used for enabling the transmission unit to do vertical movement and/or horizontal second direction movement, and the horizontal second direction is perpendicular to the horizontal first direction.
2. The material transporting device as claimed in claim 1, wherein the transporting unit includes a vibrating plate for carrying the material and two ultrasonic units fixed below both ends of the vibrating plate, respectively, the two ultrasonic units forming an air film between the vibrating plate and the material by transmitting and receiving ultrasonic waves, respectively, the air film causing the material to be transported in a suspended state by giving an upward supporting force to the material and a horizontal first-direction pushing force.
3. The material transfer device of claim 2, wherein the position adjustment unit comprises two sets of vertical motion components and two sets of horizontal motion components; each ultrasonic unit corresponds to one group of the vertical motion assembly and one group of the horizontal motion assembly respectively; the ultrasonic unit realizes vertical movement through the vertical movement assembly; and, effecting movement in a horizontal second direction by the horizontal movement assembly.
4. The material transfer device of claim 3, wherein the vertical motion assembly comprises a connecting plate, a spring assembly vertically fixed on the connecting plate, and a first linear motor fixed on the connecting plate, and the horizontal motion assembly comprises the connecting plate, a slide rail fixed below the connecting plate, and a second linear motor fixed on the connecting plate; the connecting plate is fixed below the ultrasonic unit through the spring assembly, the ultrasonic unit is driven to move vertically under the action of the first linear motor, and the ultrasonic unit is driven to move along the sliding rail in a horizontal second direction under the action of the second linear motor.
5. A material transfer system, comprising: a bearing platform and a material conveying device according to any one of claims 1-4;
the bearing table is used for bearing the materials transmitted by the material transmission device;
the bearing table is provided with an opening, and a transmission unit of the material transmission device can move vertically through the opening.
6. The material transfer system of claim 5, wherein the upper surface of the carrier is divided into a first work area and a second work area; the number of the material conveying devices is at least 2, and the material conveying devices respectively comprise a first material conveying device and a second material conveying device; the materials are conveyed to the first working area in a suspension state under the action of the first material conveying device; or the materials are sequentially kept in a suspension state under the action of the first material conveying device and the second material conveying device and are conveyed to the second working area through the first working area.
7. The material transfer system of claim 6, wherein a portion of the first material transfer device is disposed outside the susceptor, and another portion of the first material transfer device is disposed inside the susceptor and below the first working area; the second material conveying device is arranged in the bearing table, one part of the second material conveying device is positioned below the first working area, and the other part of the second material conveying device is positioned below the second working area.
8. The material transfer system as in claim 7, further comprising a limit stop assembly for limiting movement of the material.
9. The material conveying system of claim 8, wherein the number of the limiting assemblies is 4, two of the limiting assemblies are arranged at the junction of the first working area and the second working area and used for limiting the movement of the material in the first working area, and the other two limiting assemblies are arranged at the edge of the second working area far away from the first working area and used for limiting the movement of the material in the second working area.
10. The material transfer system of claim 9, wherein the stop assembly comprises a cylinder and a stop; the limiting block can move vertically under the action of the air cylinder, and when the limiting block rises above the bearing table, the limiting block plays a role in limiting the movement of materials.
CN201811627145.9A 2018-12-28 2018-12-28 Material conveying device and system Pending CN111377246A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811627145.9A CN111377246A (en) 2018-12-28 2018-12-28 Material conveying device and system

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201811627145.9A CN111377246A (en) 2018-12-28 2018-12-28 Material conveying device and system
TW108147408A TW202041451A (en) 2018-12-28 2019-12-24 Material transmission device and system
KR1020190176589A KR20200083331A (en) 2018-12-28 2019-12-27 Material transfer device and system

Publications (1)

Publication Number Publication Date
CN111377246A true CN111377246A (en) 2020-07-07

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CN (1) CN111377246A (en)
TW (1) TW202041451A (en)

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JP2007214539A (en) * 2006-02-09 2007-08-23 Au Optronics Corp Substrate transporting device
CN101428708A (en) * 2008-12-15 2009-05-13 友达光电股份有限公司 Substrate shifting apparatus and method
CN104085691A (en) * 2014-07-30 2014-10-08 华东理工大学 Ultrasonic suspension conveying device
CN104749895A (en) * 2013-12-30 2015-07-01 上海微电子装备有限公司 Double air floatation large-scale substrate transmission apparatus
CN105151780A (en) * 2015-08-28 2015-12-16 武汉华星光电技术有限公司 Ultrasonic conveying device
CN206232115U (en) * 2016-12-02 2017-06-09 无锡特恒科技有限公司 Thin plate grabbing device
CN206634750U (en) * 2017-03-29 2017-11-14 福建省世高自动化设备有限公司 Optical check transmission mechanism
CN207046435U (en) * 2017-01-19 2018-02-27 中山市雅博玻璃制品有限公司 A kind of automatic blanking device of glass
CN107934368A (en) * 2016-10-12 2018-04-20 神讯电脑(昆山)有限公司 Track senses feed device

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1502535A (en) * 2002-08-09 2004-06-09 株式会社丰田自动织机 Electricity discharge and goods taking, stripping charge suppressing method and device, goods taking and receiving device
JP2007214539A (en) * 2006-02-09 2007-08-23 Au Optronics Corp Substrate transporting device
CN101428708A (en) * 2008-12-15 2009-05-13 友达光电股份有限公司 Substrate shifting apparatus and method
CN104749895A (en) * 2013-12-30 2015-07-01 上海微电子装备有限公司 Double air floatation large-scale substrate transmission apparatus
CN104085691A (en) * 2014-07-30 2014-10-08 华东理工大学 Ultrasonic suspension conveying device
CN105151780A (en) * 2015-08-28 2015-12-16 武汉华星光电技术有限公司 Ultrasonic conveying device
CN107934368A (en) * 2016-10-12 2018-04-20 神讯电脑(昆山)有限公司 Track senses feed device
CN206232115U (en) * 2016-12-02 2017-06-09 无锡特恒科技有限公司 Thin plate grabbing device
CN207046435U (en) * 2017-01-19 2018-02-27 中山市雅博玻璃制品有限公司 A kind of automatic blanking device of glass
CN206634750U (en) * 2017-03-29 2017-11-14 福建省世高自动化设备有限公司 Optical check transmission mechanism

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KR20200083331A (en) 2020-07-08
TW202041451A (en) 2020-11-16

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