CN105151780A - Ultrasonic conveying device - Google Patents

Ultrasonic conveying device Download PDF

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Publication number
CN105151780A
CN105151780A CN201510545816.7A CN201510545816A CN105151780A CN 105151780 A CN105151780 A CN 105151780A CN 201510545816 A CN201510545816 A CN 201510545816A CN 105151780 A CN105151780 A CN 105151780A
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CN
China
Prior art keywords
adsorbing mechanism
oscillating plate
ultrasonic
ultrasonic generator
belt conveyor
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Application number
CN201510545816.7A
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Chinese (zh)
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CN105151780B (en
Inventor
熊燕军
徐先华
徐彬
钱师宏
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Wuhan China Star Optoelectronics Technology Co Ltd
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Wuhan China Star Optoelectronics Technology Co Ltd
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Priority to CN201510545816.7A priority Critical patent/CN105151780B/en
Publication of CN105151780A publication Critical patent/CN105151780A/en
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Publication of CN105151780B publication Critical patent/CN105151780B/en
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Abstract

The invention discloses an ultrasonic conveying device. The ultrasonic conveying device comprises an ultrasonic generation device, a vibrating plate and an adsorption mechanism, wherein the vibrating plate comprises a first surface and a second surface which are arranged oppositely; the ultrasonic generation device is arranged to be close to the first surface; a conveyed object is arranged on the second surface; the ultrasonic generation device is used for emitting ultrasonic waves; the ultrasonic waves are continuously emitted between the vibrating plate and the conveyed object to generate acoustic radiation pressure for lifting the conveyed object, and the conveyed object and the second surface are made to be separated; the adsorption mechanism is arranged close to at least one side of the vibrating plate or arranged opposite to the second surface, and the adsorption mechanism is used for adsorbing and driving the conveyed object to move in the conveying direction. In this way, it is ensured that the conveyed object does not directly make contact with the conveying device, and the conveying device is prevented from being polluted or scratched.

Description

A kind of super sonic conveyer
Technical field
The present invention relates to mechanical transfer field, particularly relate to a kind of super sonic conveyer.
Background technology
The load mode of existing industry belt conveyor mainly adopts drum modes, be motor driving gear as flowing mode, gear driven gangbar, universal driving shaft is by gear or magnetic flowing mode, drive each axle, and the cylinder on axle rotates whereby, the glass on cylinder is driven to move forward or backward (utilizing friction of rolling).
Owing to there is contact and friction, and in order to ensure the amount of bow of glass, the general contact point of glass can be more, particularly glass size be altered to by original 0.5mm thickness after 0.3mm, glass size become greater to more than G10 by G8.Cylinder surface friction coefficient and hardness matching are not good, or surface exist damage, dirty, planeness not good when, easily occur single-point scratch, pollution or depressed phenomenon, have influence on product quality and produce line operation.
For reducing glass substrate contact and friction, industry has part to adopt air-flotation type transmission apparatus, particularly applies to minimal thickness and large-size substrate, glass, for adopting CDA cleaning, floats, in basic no touch frictionless situation by start principle, use belt conveyor at periphery, promote glass and advance.Although this mode is changed original contact and transmitted the risk that fragmentation easily occurs to scratch, owing to using CDA in a large number, annual operating and maintenance cost is higher.And due to whole needs use pore, if single air-hole blockage, or multiple air-hole blockage, need to carry out investigating and cleaning, comparatively complicated, comparatively unfavorable to production.
Summary of the invention
The technical matters that the present invention mainly solves is to provide a kind of super sonic conveyer, can ensure that being transmitted object does not directly contact grass-hopper, prevents by conveyer pollution, scratch.
For solving the problems of the technologies described above, the technical scheme that the present invention adopts is: provide a kind of super sonic conveyer, this conveyer comprises ultrasonic generator, oscillating plate and adsorbing mechanism; Oscillating plate comprises the first surface and second surface that are oppositely arranged, and ultrasonic generator is arranged near first surface, is placed on second surface by transmission object; Ultrasonic generator is used for sending super sonic, and super sonic constantly reflects at oscillating plate and to be transmitted between object and produces and be enough to lift the acoustic radiation pressure by transmitting object, makes to be transmitted object with second surface to be separated; Adsorbing mechanism arranges near at least one side of oscillating plate or is oppositely arranged with second surface, is moved by transmission object for adsorbing and driving along direction of transfer.
Wherein, ultrasonic generator comprises interconnective ultrasonic generator and ultrasonic vibrator; Ultrasonic generator is used for common ac signal to be converted into high-frequency ac electric signal; Ultrasonic vibrator is used for high-frequency ac electric signal to be converted into super sonic.
Wherein, ultrasonic vibrator comprises ultrasonic transducer and ultrasonic variable amplitude bar; Ultrasonic transducer is used for high-frequency ac electric signal to be converted into super sonic; The super sonic adjusted through amplitude for adjusting hypracoustic amplitude, and sends by ultrasonic variable amplitude bar.
Wherein, the output frequency of ultrasonic generator and the natural frequency of ultrasonic transducer consistent.
Wherein, adsorbing mechanism is arranged near at least one side of oscillating plate, comprises belt conveyor and is arranged at the multiple adsorption bars on belt conveyor; Each adsorption bar all extends and is transmitted the side of object, to adsorb by transmission object, and drives under the effect of belt conveyor and is moved along direction of transfer by transmission object.
Wherein, adsorbing mechanism and second surface are oppositely arranged, by transmission object between belt conveyor and oscillating plate; Adsorbing mechanism comprises belt conveyor and is arranged at the multiple adsorption bars on belt conveyor, and multiple adsorption bar is arranged on belt conveyor, and each adsorption bar all extends near being transmitted object, and each adsorption bar all with by the surface of transmitting object is separated.
Wherein, conveyer comprises multiple ultrasonic generator, and multiple ultrasonic generator is evenly arranged near the first surface of oscillating plate; Wherein, the hypracoustic frequency of multiple ultrasonic generator generation is identical.
Wherein, adsorbing mechanism comprises the first adsorbing mechanism and the second adsorbing mechanism; First adsorbing mechanism and the second adsorbing mechanism comprise a belt conveyor respectively and are arranged at the multiple adsorption bars on belt conveyor; Wherein, the first adsorbing mechanism and the second adsorbing mechanism lay respectively at the both sides that oscillating plate is different from first and second surface.
Wherein, the second surface of oscillating plate is also provided with well-distributed bump rubber, for reducing pressure when contacting and being transmitted object.
Wherein, by transmission object be glass.
The invention has the beneficial effects as follows: the situation being different from prior art, the invention discloses super sonic conveyer and comprise ultrasonic generator, oscillating plate and adsorbing mechanism; Oscillating plate comprises the first surface and second surface that are oppositely arranged, and ultrasonic generator is arranged near first surface, is placed on second surface by transmission object; Ultrasonic generator is used for sending super sonic, and super sonic constantly reflects at oscillating plate and to be transmitted between object and produces and be enough to lift the acoustic radiation pressure by transmitting object, makes to be transmitted object with second surface to be separated; Adsorbing mechanism arranges near at least one side of oscillating plate or is oppositely arranged with second surface, is moved by transmission object for adsorbing and driving along direction of transfer.By the way, can make super sonic oscillating plate and by transmission object between vibrate back and forth to produce and lift this and transmitted the pressure of object, ensure that being transmitted object does not directly contact grass-hopper, prevent from being polluted by conveyer, scratch.
Accompanying drawing explanation
Fig. 1 is the structural representation of super sonic conveyer first embodiment of the present invention;
Fig. 2 is the lateral plan of super sonic conveyer in super sonic conveyer first embodiment of the present invention;
Fig. 3 is that the structure of super sonic conveyer second embodiment of the present invention splits schematic diagram;
Fig. 4 be in super sonic conveyer second embodiment of the present invention ultrasonic amplitude with transmitted the coordinate relation schematic diagram of object floating distance;
Fig. 5 is the structural representation of super sonic conveyer the 3rd embodiment of the present invention;
Fig. 6 is the structural representation of super sonic conveyer the 4th embodiment of the present invention.
Detailed description of the invention
By describing technology contents of the present invention, structural attitude in detail, being realized object and effect, below in conjunction with drawings and Examples, the present invention is described in detail.
Consult Fig. 1 and Fig. 2, Fig. 1 is the structural representation of super sonic conveyer first embodiment of the present invention, and Fig. 2 is the lateral plan of super sonic conveyer in super sonic conveyer first embodiment of the present invention.
This conveyer comprises ultrasonic generator 110, oscillating plate 120 and adsorbing mechanism 130 (Fig. 2 does not show); Oscillating plate 120 comprises the first surface and second surface that are oppositely arranged, and ultrasonic generator 110 is arranged near first surface, is placed on second surface by transmission object 140; Ultrasonic generator 110 is for sending super sonic, and super sonic constantly reflects at oscillating plate 120 and to be transmitted between object 140 and produces and be enough to lift the acoustic radiation pressure by transmitting object 140, makes to be transmitted object 140 with second surface to be separated; Adsorbing mechanism 130 arranges near at least one side of oscillating plate or is oppositely arranged with second surface, is moved by transmission object 140 for adsorbing and driving along direction of transfer.
Wherein, between ultrasonic generator 110 and oscillating plate 120, oscillating plate 120 and to be transmitted between object 140 be all that the acoustic radiation pressure vibrating generation back and forth by super sonic acts on, there is no direct contact.The Main Function of ultrasonic generator 110 is mechanical energy by electric energy conversion, produces super sonic by mechanical vibration.
Adsorbing mechanism 130 is arranged near at least one side of oscillating plate 120, and adsorbing mechanism 130 is that sorption contacts with transmitting between object 140, and by adsorption affinity effect, adsorbing mechanism 140 adsorbs and drives and transmitted object 140 and move along direction of transfer.Wherein, owing to being transmitted the normally frivolous object of object 140, the area of its side is less, therefore adsorbing mechanism 130 with transmitted object 140 and can be contacted, further, adsorbing mechanism 130 with is transmitted the contact aside of object 140, also can not to by the upper and lower surface of transmission object 140.
Optionally, adsorbing mechanism 130 comprises closed endless conveyor, and namely adsorbing mechanism 130 is around elliptical orbit circulation rotating, and it can comprise the structures such as driving engine, connecting rod, gear and transmission shaft, repeats no more here.
By transmission object 140 be generally frivolous block object, such as glass, display panel, plank or paper etc.
The principle of present embodiment is as follows: electric energy conversion is mechanical energy by ultrasonic generator 110, then by vibration, mechanical energy is converted to sound wave, when running into obstacle in sound wave transport process, can reflect, when sound wave is when being transmitted roundtrip between object 140 and oscillating plate 120, original acoustic wave energy is converted to acoustic radiation pressure once more, thus forms acoustic levitation power, to lift by transmission object 140.Be different from prior art, the conveyer of present embodiment comprises ultrasonic generator, oscillating plate and adsorbing mechanism; Oscillating plate comprises the first surface and second surface that are oppositely arranged, and ultrasonic generator is arranged near first surface, is placed on second surface by transmission object; Ultrasonic generator is used for sending super sonic, and super sonic constantly reflects at oscillating plate and to be transmitted between object and produces and be enough to lift the acoustic radiation pressure by transmitting object, makes to be transmitted object with second surface to be separated; Adsorbing mechanism arranges near at least one side of oscillating plate or is oppositely arranged with second surface, is moved by transmission object for adsorbing and driving along direction of transfer.By the way, can make super sonic oscillating plate and by transmission object between vibrate back and forth to produce and lift this and transmitted the pressure of object, ensure that being transmitted object does not directly contact grass-hopper, prevent from being polluted by conveyer, scratch.
Consult Fig. 3, the structure of super sonic conveyer second embodiment of the present invention splits schematic diagram, and this conveyer comprises ultrasonic generator 310, oscillating plate 320 and adsorbing mechanism (not shown); Oscillating plate 320 comprises the first surface and second surface that are oppositely arranged, and ultrasonic generator 310 is arranged near first surface, is placed on second surface by transmission object 330; Ultrasonic generator 310 is for sending super sonic, and super sonic constantly reflects at oscillating plate 320 and to be transmitted between object 330 and produces and be enough to lift the acoustic radiation pressure by transmitting object, makes to be transmitted object 330 with second surface to be separated; Adsorbing mechanism arranges near at least one side of oscillating plate 320 or is oppositely arranged with second surface, is moved by transmission object 330 for adsorbing and driving along direction of transfer.
Wherein, ultrasonic generator 310 comprises interconnective ultrasonic generator 311 and ultrasonic vibrator 312; Ultrasonic generator 311 is for being converted into high-frequency ac electric signal by common ac signal; Ultrasonic vibrator 312 is for being converted into super sonic by high-frequency ac electric signal.
Wherein, ultrasonic vibrator 312 comprises ultrasonic transducer 3121 and ultrasonic variable amplitude bar 3122; Ultrasonic transducer 3121 is for being converted into super sonic by high-frequency ac electric signal; The super sonic adjusted through amplitude for adjusting hypracoustic amplitude, and sends by ultrasonic variable amplitude bar 3122.
Optionally, ultrasonic variable amplitude bar 3122 can also be used for changing hypracoustic amplitude according to being adjusted by the weight transmitting object 330.Particularly, when heavier by transmission object 330, the hypracoustic amplitude that ultrasonic variable amplitude bar 3122 will produce ultrasonic transducer 3121 tunes up, and when lighter by transmission object 330, the hypracoustic amplitude that ultrasonic variable amplitude bar 3122 will produce ultrasonic transducer 3121 is turned down.
Consult Fig. 4, in super sonic conveyer second embodiment of the present invention ultrasonic amplitude with transmitted the coordinate relation schematic diagram of object floating distance, wherein, the hypracoustic amplitude that ultrasonic generator 310 produces can affect acoustic radiation pressure (i.e. lift force), and then the distance that impact is floated by transmission object 330.As can be seen from Figure 4, by transmission object floating distance and ultrasonic amplitude substantially linearly positive correlation.
In a general case, the output frequency of ultrasonic generator 311 is consistent with the natural frequency of ultrasonic transducer 312, to produce resonance.
In other embodiments, conveyer can comprise multiple ultrasonic generator, and multiple ultrasonic generator is evenly arranged near the first surface of oscillating plate; Wherein, the frequency of multiple ultrasonic generator is identical.Operationally, multiple ultrasonic generator is opened simultaneously, to make the oscillation frequency of oscillating plate 320 various piece identical.
Consult Fig. 5, the structural representation of super sonic conveyer the 3rd embodiment of the present invention, this conveyer comprises ultrasonic generator 510, oscillating plate 520 and adsorbing mechanism 530; Oscillating plate 520 comprises the first surface and second surface that are oppositely arranged, and ultrasonic generator 510 is arranged near first surface, is placed on second surface by transmission object 540; Ultrasonic generator 510 is for sending super sonic, and super sonic constantly reflects at oscillating plate 520 and to be transmitted between object 540 and produces and be enough to lift the acoustic radiation pressure by transmitting object 540, makes to be transmitted object 540 with second surface to be separated; Adsorbing mechanism 530 is arranged near at least one side of oscillating plate, is moved by transmission object 540 for adsorbing and driving along direction of transfer.
Wherein, adsorbing mechanism 530 is arranged near at least one side of oscillating plate 520, comprises belt conveyor 531 and is arranged at the multiple adsorption bars 532 on belt conveyor 531; Each adsorption bar 532 all extends and is transmitted the side of object 540, to adsorb by transmission object 540, and drives under the effect of belt conveyor 531 and is moved along direction of transfer by transmission object 540.Wherein, owing to being transmitted the normally frivolous object of object 540, the area of its side is less, therefore adsorption bar 532 with transmitted object 540 and can be contacted, further, adsorption bar 532 with is transmitted the contact aside of object 540, also can not to by the upper and lower surface of transmission object 540.
Optionally, adsorbing mechanism 530 comprises independently the first adsorbing mechanism and the second adsorbing mechanism, and the first adsorbing mechanism and the second adsorbing mechanism adsorbing mechanism 530 all with above-mentioned is identical; First adsorbing mechanism and the second adsorbing mechanism comprise a belt conveyor respectively and are arranged at the multiple adsorption bars on belt conveyor; Wherein, the first adsorbing mechanism and the second adsorbing mechanism lay respectively at the both sides that oscillating plate 520 is different from first and second surface, the left and right sides namely in Fig. 5.
In concrete implementation process, the adsorption bar of the first adsorbing mechanism and the second adsorbing mechanism all extends by the both sides of transmitting object 540 respectively, to adsorb by transmission object, and drives under the effect of belt conveyor and is moved along direction of transfer by transmission object.Understandable, the first adsorbing mechanism is equal with the transfer rate of the belt conveyor of the second adsorbing mechanism, and the suction of adsorption bar is identical.
Consult Fig. 6, the structural representation of super sonic conveyer the 4th embodiment of the present invention, this conveyer comprises ultrasonic generator 610, oscillating plate 620 and adsorbing mechanism 630; Oscillating plate 620 comprises the first surface and second surface that are oppositely arranged, and ultrasonic generator 610 is arranged near first surface, is placed on second surface by transmission object 640; Ultrasonic generator 610 is for sending super sonic, and super sonic constantly reflects at oscillating plate 620 and to be transmitted between object 640 and produces and be enough to lift the acoustic radiation pressure by transmitting object 640, makes to be transmitted object 640 with second surface to be separated; Adsorbing mechanism 630 is oppositely arranged near the second surface of oscillating plate, is moved by transmission object 640 for adsorbing and driving along direction of transfer.
Adsorbing mechanism 630 and second surface are oppositely arranged, by transmission object 640 between belt conveyor and oscillating plate; Adsorbing mechanism 630 comprises belt conveyor and is arranged at the multiple adsorption bars on belt conveyor, and multiple adsorption bar is arranged on belt conveyor, and each adsorption bar all extends near being transmitted object 640, and each adsorption bar all with by the surface of transmitting object 640 is separated.
In specific implementation process, because adsorbing mechanism 630 and oscillating plate 620 second surface are oppositely arranged, and by transmission object 640 between adsorbing mechanism 630 and oscillating plate 620.When being frivolous article (such as glass) by transmission object 640; because the area of absorption is larger; adsorption bar on adsorbing mechanism 630 need not directly contact by transmission object 640, also can play protection to by the upper and lower major surfaces transmitting object 640 simultaneously.
Optionally, the second surface of oscillating plate 620 can also be arranged well-distributed bump rubber (not shown), for reducing pressure when contacting and being transmitted object 640.Particularly, in transport process, if run into breakdown of machinery or power-off, lift force suddenly disappears, and by the direct contact vibration plate 620 of transmission object 640 meeting, by the bump rubber arranged, can be good at reducing contact, alleviates by the damage transmitting object 640.Wherein, buffering can be the material that cotton, foam or rubber etc. are softer soon.
Be different from prior art, the super sonic conveyer of present embodiment comprises ultrasonic generator, oscillating plate and adsorbing mechanism; Oscillating plate comprises the first surface and second surface that are oppositely arranged, and ultrasonic generator is arranged near first surface, is placed on second surface by transmission object; Ultrasonic generator is used for sending super sonic, and super sonic constantly reflects at oscillating plate and to be transmitted between object and produces and be enough to lift the acoustic radiation pressure by transmitting object, makes to be transmitted object with second surface to be separated; Adsorbing mechanism is oppositely arranged near the second surface of oscillating plate, is moved by transmission object for adsorbing and driving along direction of transfer.By the way, can make super sonic oscillating plate and by transmission object between vibrate back and forth to produce and lift this and transmitted the pressure of object, ensure that being transmitted object does not directly contact grass-hopper, prevent from being polluted by conveyer, scratch.
The foregoing is only embodiments of the present invention; not thereby the scope of the claims of the present invention is limited; every utilize specification sheets of the present invention and accompanying drawing content to do equivalent structure or equivalent flow process conversion; or be directly or indirectly used in other relevant technical fields, be all in like manner included in scope of patent protection of the present invention.

Claims (10)

1. a super sonic conveyer, is characterized in that, described conveyer comprises ultrasonic generator, oscillating plate and adsorbing mechanism;
Described oscillating plate comprises the first surface and second surface that are oppositely arranged, and described ultrasonic generator is arranged near described first surface, is placed on described second surface by transmission object;
Described ultrasonic generator is used for sending super sonic, and described super sonic constantly reflect at described oscillating plate and to be transmitted between object and produces and be enough to lift the described acoustic radiation pressure of object that transmitted, and makes describedly to be transmitted object and be separated with described second surface;
Described adsorbing mechanism arranges near at least one side of described oscillating plate or is oppositely arranged with described second surface, is describedly transmitted object for adsorb and driving and moves along direction of transfer.
2. device according to claim 1, is characterized in that, described ultrasonic generator comprises interconnective ultrasonic generator and ultrasonic vibrator;
Described ultrasonic generator is used for common ac signal to be converted into high-frequency ac electric signal;
Described ultrasonic vibrator is used for described high-frequency ac electric signal to be converted into super sonic.
3. device according to claim 2, is characterized in that, described ultrasonic vibrator comprises ultrasonic transducer and ultrasonic variable amplitude bar;
Described ultrasonic transducer is used for described high-frequency ac electric signal to be converted into super sonic;
The described super sonic adjusted through amplitude for adjusting described hypracoustic amplitude, and sends by described ultrasonic variable amplitude bar.
4. device according to claim 3, is characterized in that, the output frequency of described ultrasonic generator is consistent with the natural frequency of described ultrasonic transducer.
5. device according to claim 1, is characterized in that, described adsorbing mechanism is arranged near at least one side of described oscillating plate, comprises belt conveyor and is arranged at the multiple adsorption bars on described belt conveyor;
Adsorption bar described in each all extends and is describedly transmitted the side of object, described by transmission object to adsorb, and drives under the effect of described belt conveyor and describedly to be moved along direction of transfer by transmission object.
6. device according to claim 1, is characterized in that, described adsorbing mechanism and described second surface are oppositely arranged, described by transmission object between described belt conveyor and described oscillating plate;
Described adsorbing mechanism comprises belt conveyor and is arranged at the multiple adsorption bars on described belt conveyor, described multiple adsorption bar is arranged on described belt conveyor, each adsorption bar all extends near described by transmission object, and each adsorption bar is all separated by the surface of transmitting object with described.
7. device according to claim 1, is characterized in that, described conveyer comprises multiple ultrasonic generator, and described multiple ultrasonic generator is evenly arranged near the first surface of described oscillating plate;
Wherein, the hypracoustic frequency of described multiple ultrasonic generator generation is identical.
8. device according to claim 1, is characterized in that, described adsorbing mechanism comprises the first adsorbing mechanism and the second adsorbing mechanism;
Described first adsorbing mechanism and the second adsorbing mechanism comprise a belt conveyor respectively and are arranged at the multiple adsorption bars on described belt conveyor;
Wherein, described first adsorbing mechanism and the second adsorbing mechanism lay respectively at the both sides that described oscillating plate is different from first and second surface described.
9. device according to claim 1, is characterized in that, the second surface of described oscillating plate is also provided with well-distributed bump rubber, for described by reduction pressure during transmission object in contact.
10. device according to claim 1, is characterized in that, described is glass by transmission object.
CN201510545816.7A 2015-08-28 2015-08-28 A kind of ultrasonic delivery device Active CN105151780B (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105607311A (en) * 2016-01-04 2016-05-25 京东方科技集团股份有限公司 Corner warping device and using method thereof
WO2016120439A1 (en) * 2015-01-30 2016-08-04 Zbv-Automation Gmbh Acoustic separating device
CN107200226A (en) * 2017-05-23 2017-09-26 东莞市盛合超声波科技有限公司 A kind of ultrasonic wave conveying device
CN107660196A (en) * 2017-08-07 2018-02-02 大族激光科技产业集团股份有限公司 Non-contact handling device
CN107818938A (en) * 2016-09-13 2018-03-20 台湾积体电路制造股份有限公司 Delivery system and the method for transporting machine component
CN110730753A (en) * 2017-06-14 2020-01-24 韩国生产技术研究院 Ultrasonic levitation module and object levitation device using ultrasonic waves
CN111377246A (en) * 2018-12-28 2020-07-07 上海微电子装备(集团)股份有限公司 Material conveying device and system

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03139180A (en) * 1989-10-23 1991-06-13 Brother Ind Ltd Ultrasonic levitating unit
JP2004067371A (en) * 2002-08-09 2004-03-04 Toyota Industries Corp Object levitating device and load taking device
CN1642833A (en) * 2002-03-11 2005-07-20 株式会社Iai Ultrasonic levitation device
JP2006049493A (en) * 2004-08-03 2006-02-16 Dainippon Screen Mfg Co Ltd Substrate conveying module, apparatus and method of conveying substrate using the same
CN1762088A (en) * 2003-03-17 2006-04-19 株式会社Iai Ultrasonic float-up device
JP2006230148A (en) * 2005-02-21 2006-08-31 Iai:Kk Ultrasonic levitation device
JP2006247641A (en) * 2005-02-14 2006-09-21 Iai:Kk Ultrasonic levitation device
CN101211756A (en) * 2006-12-27 2008-07-02 东京毅力科创株式会社 Substrate processing device
CN101815661A (en) * 2007-07-27 2010-08-25 株式会社Ihi Floating transfer apparatus, and treating system having the floating transfer apparatus
JP2011062068A (en) * 2009-05-14 2011-03-24 Tokyo Institute Of Technology Contactless conveyance device, contactless conveyance method, and contactless conveyance system
CN202935948U (en) * 2012-08-15 2013-05-15 吉林大学 Ultrasonic wave and air floatation mixed non-contact automatic conveying device
WO2013125303A1 (en) * 2012-02-20 2013-08-29 日本電気硝子株式会社 Glass plate transfer apparatus and glass plate transfer method
CN103579062A (en) * 2012-07-18 2014-02-12 东丽工程株式会社 Substrate conveying device
CN103832826A (en) * 2012-11-20 2014-06-04 东丽工程株式会社 Heat treatment apparatus with levitation and transportation
CN104085691A (en) * 2014-07-30 2014-10-08 华东理工大学 Ultrasonic suspension conveying device
CN104822613A (en) * 2013-02-26 2015-08-05 株式会社Ihi Transfer apparatus

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03139180A (en) * 1989-10-23 1991-06-13 Brother Ind Ltd Ultrasonic levitating unit
CN1642833A (en) * 2002-03-11 2005-07-20 株式会社Iai Ultrasonic levitation device
JP2004067371A (en) * 2002-08-09 2004-03-04 Toyota Industries Corp Object levitating device and load taking device
CN1762088A (en) * 2003-03-17 2006-04-19 株式会社Iai Ultrasonic float-up device
JP2006049493A (en) * 2004-08-03 2006-02-16 Dainippon Screen Mfg Co Ltd Substrate conveying module, apparatus and method of conveying substrate using the same
JP2006247641A (en) * 2005-02-14 2006-09-21 Iai:Kk Ultrasonic levitation device
JP2006230148A (en) * 2005-02-21 2006-08-31 Iai:Kk Ultrasonic levitation device
CN101211756A (en) * 2006-12-27 2008-07-02 东京毅力科创株式会社 Substrate processing device
CN101815661A (en) * 2007-07-27 2010-08-25 株式会社Ihi Floating transfer apparatus, and treating system having the floating transfer apparatus
JP2011062068A (en) * 2009-05-14 2011-03-24 Tokyo Institute Of Technology Contactless conveyance device, contactless conveyance method, and contactless conveyance system
WO2013125303A1 (en) * 2012-02-20 2013-08-29 日本電気硝子株式会社 Glass plate transfer apparatus and glass plate transfer method
CN103579062A (en) * 2012-07-18 2014-02-12 东丽工程株式会社 Substrate conveying device
CN202935948U (en) * 2012-08-15 2013-05-15 吉林大学 Ultrasonic wave and air floatation mixed non-contact automatic conveying device
CN103832826A (en) * 2012-11-20 2014-06-04 东丽工程株式会社 Heat treatment apparatus with levitation and transportation
CN104822613A (en) * 2013-02-26 2015-08-05 株式会社Ihi Transfer apparatus
CN104085691A (en) * 2014-07-30 2014-10-08 华东理工大学 Ultrasonic suspension conveying device

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016120439A1 (en) * 2015-01-30 2016-08-04 Zbv-Automation Gmbh Acoustic separating device
CN107257715A (en) * 2015-01-30 2017-10-17 Zbv-自动化有限公司 Acoustically separated device
CN107257715B (en) * 2015-01-30 2019-07-05 Zbv-自动化有限公司 Acoustically separated device
US10228575B2 (en) * 2016-01-04 2019-03-12 Boe Technology Group Co., Ltd. Separating apparatus and separating method
CN105607311B (en) * 2016-01-04 2020-06-02 京东方科技集团股份有限公司 Angle raising device and using method thereof
US20180011350A1 (en) * 2016-01-04 2018-01-11 Boe Technology Group Co., Ltd. Separating apparatus and separating method
CN105607311A (en) * 2016-01-04 2016-05-25 京东方科技集团股份有限公司 Corner warping device and using method thereof
CN107818938A (en) * 2016-09-13 2018-03-20 台湾积体电路制造股份有限公司 Delivery system and the method for transporting machine component
CN107818938B (en) * 2016-09-13 2021-07-30 台湾积体电路制造股份有限公司 Transport system and method for transporting processing elements
CN107200226A (en) * 2017-05-23 2017-09-26 东莞市盛合超声波科技有限公司 A kind of ultrasonic wave conveying device
CN110730753A (en) * 2017-06-14 2020-01-24 韩国生产技术研究院 Ultrasonic levitation module and object levitation device using ultrasonic waves
CN107660196A (en) * 2017-08-07 2018-02-02 大族激光科技产业集团股份有限公司 Non-contact handling device
US11345553B2 (en) 2017-08-07 2022-05-31 Han's Laser Technology Industry Group Co., Ltd. Non-contact transporting apparatus
CN111377246A (en) * 2018-12-28 2020-07-07 上海微电子装备(集团)股份有限公司 Material conveying device and system

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