CN209598453U - A kind of laser cutting device - Google Patents
A kind of laser cutting device Download PDFInfo
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- CN209598453U CN209598453U CN201920259058.6U CN201920259058U CN209598453U CN 209598453 U CN209598453 U CN 209598453U CN 201920259058 U CN201920259058 U CN 201920259058U CN 209598453 U CN209598453 U CN 209598453U
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- workpiece
- microscope carrier
- workpiece stage
- supporting plate
- laser cutting
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Abstract
The utility model discloses a kind of laser cutting device, including body, body is equipped with microscope carrier supporting plate and cutting work station for support workpiece stage;Cutting mechanism, cutting mechanism include that laser cutting head and microscope carrier supporting plate actuator, workpiece stage are installed on body;Microscope carrier supporting plate actuator for driving microscope carrier supporting plate to move along the length direction of body is used to that microscope carrier supporting plate to be driven to move along the width direction of body;Cutting work station is located on the motion profile of microscope carrier supporting plate;Laser cutting head is mounted on body and is located above cutting work station;Laser cutting head can be moved along the short transverse of body.The laser cutting device of the utility model, after being cut automatically, operating efficiency is high.
Description
Technical field
The utility model relates to technical field of mechanical processing more particularly to a kind of laser cutting devices.
Background technique
Currently, for pcb board before not dispatching from the factory, multiple pcb boards are all that monolith connects together in PCB production process, need
It is cut, being cut is single pcb board, then is adjacent to high temperature membrane paper, then be delivered to next station and added
Work.But the process equipment operating efficiency of existing pcb board is lower.
Utility model content
It for overcome the deficiencies in the prior art, can the purpose of this utility model is to provide a kind of laser cutting device
Automatically after being cut, operating efficiency is high.
The purpose of this utility model is implemented with the following technical solutions:
A kind of laser cutting device, including,
Body, body are equipped with microscope carrier supporting plate and cutting work station for support workpiece stage;
Cutting mechanism, cutting mechanism include that laser cutting head and microscope carrier supporting plate actuator, workpiece stage are installed on body
On;Microscope carrier supporting plate actuator is used to drive microscope carrier supporting plate along machine for driving microscope carrier supporting plate to move along the length direction of body
The width direction of body moves;Cutting work station is located on the motion profile of microscope carrier supporting plate;Laser cutting head is mounted on body and position
Above cutting work station;Laser cutting head can be moved along the short transverse of body.
Preferably, which further includes workpiece stage circulation mechanism, and workpiece stage circulation mechanism includes first
Workpiece stage manipulator, second workpiece microscope carrier manipulator, the first workpiece stage conveying assembly and second workpiece microscope carrier conveying group
Part;The starting point of first workpiece stage conveying assembly and the end of second workpiece microscope carrier conveying assembly are arranged side by side and are connected
In the side of cutting work station;The end of first workpiece stage conveying assembly and the starting point of second workpiece microscope carrier conveying assembly are side by side
Setting;First workpiece stage manipulator is for clamping the workpiece stage of microscope carrier supporting plate to the starting of the first workpiece stage conveying assembly
The workpiece stage of the end of second workpiece microscope carrier conveying assembly is held and is used to clamp to microscope carrier supporting plate;Second workpiece microscope carrier manipulator
For clamping the workpiece stage of the first workpiece stage conveying assembly end to the starting point of second workpiece microscope carrier conveying assembly.
Preferably, the first workpiece stage manipulator include the first electronic slide unit, the second electronic slide unit and pickup folder, first
Electronic slide unit is arranged along the length direction of body;It is connected with mounting rack on the slide unit of first electronic slide unit, mounting rack is along body
Width direction extends;Second electronic slide unit is set to the extension of the width direction on mounting rack and along body;The pickup folder installation
In on the slide unit of the second electronic slide unit and for clamping workpiece stage.
Preferably, pickup folder includes that clamping frame, clamping bar and clamping frame drive cylinder, the cylinder body of clamping frame driving cylinder
It is mounted on clamping frame;The piston rod bottom end of clamping frame driving cylinder is connected with mounting plate;The two sides of mounting plate are equipped with described
Bar is clamped, the bottom end for clamping bar is equipped with limited block;The two sides of the workpiece stage are equipped with limit hole;Limit hole includes the first hole section
With the second hole section;First hole section and the second hole section are mutually communicated;The aperture of first hole section is greater than the outer diameter of limited block for limit
Block passes through;The aperture of second hole section is less than the outer diameter of limited block.
Preferably, the structure of second workpiece microscope carrier manipulator is identical as the structure of the first workpiece stage manipulator.
Preferably, mounting rack is equipped with camera, vacuum chuck and vacuum chuck actuator, and camera is used for workpiece
The end face of microscope carrier is shot and sends the first picture signal;Vacuum chuck actuator is used to be driven according to the first picture signal true
Suction disk is moved along the short transverse of body.
Preferably, body is equipped with leftover pieces recycling frame and defective product recycling frame, and leftover pieces recycle frame and defective products
Recycling frame is respectively positioned on the motion profile of vacuum chuck.
Preferably, which further includes workpiece feeding mechanism, and workpiece feeding mechanism includes workpiece feeding machinery
Hand and job stacking frame, job stacking frame are equipped with job stacking plate and job stacking plate actuator, and job stacking plate drives
Moving part is for driving job stacking plate to move along the short transverse of job stacking frame;Workpiece feeding manipulator is for clamping workpiece heap
On the workpiece to the workpiece stage of microscope carrier supporting plate of folded frame top end face.
Preferably, two microscope carrier supporting plates and two microscope carrier supporting plate actuators, two microscope carrier supporting plate drivings are set on body
Part corresponds the lower section for driving two microscope carrier supporting plates to move to laser cutting head along the length direction and width direction of body.
Compared with prior art, the utility model has the beneficial effects that: its workpiece can be placed on microscope carrier by workpiece stage
On supporting plate, microscope carrier supporting plate is driven to move to cutter along the length direction and width direction of body by microscope carrier supporting plate actuator
Position, laser cutting head can move carry out cutting operation along the short transverse of body, and the degree of automation is higher, and improve operation effect
Rate.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model;
Fig. 2 is the partial structural diagram of the cutting mechanism of the utility model;
Fig. 3 is the structural schematic diagram of the laser cutting head of the cutting mechanism of the utility model;
Fig. 4 is the structural schematic diagram of the workpiece stage circulation mechanism of the utility model;
Fig. 5 is the partial structural diagram of the first workpiece stage manipulator of the utility model;
Fig. 6 is the partial structural diagram of the first workpiece stage manipulator of the utility model;
Fig. 7 is the structural schematic diagram of the workpiece feeding mechanism of the utility model.
In figure: 10, body;20, cutting mechanism;21, workpiece stage;211, the first hole section;212, the second hole section;22, swash
Light cutting head;221, laser cutting head actuator;23, the first microscope carrier supporting plate linear motor;24, the second microscope carrier supporting plate straight-line electric
Machine;40, workpiece stage circulation mechanism;41, the first workpiece stage conveying assembly;42, second workpiece microscope carrier conveying assembly;43,
One workpiece stage manipulator;431, the first electronic slide unit;432, the second electronic slide unit;433, frame is clamped;434, clamping frame driving
Cylinder;435, bar is clamped;436, plate is clamped;437, camera;438, vacuum chuck;439, vacuum chuck actuator;44, second
Workpiece stage manipulator;50, workpiece feeding mechanism;51, workpiece feeding manipulator;52, job stacking frame;53, job stacking plate;
54, job stacking plate actuator.
Specific embodiment
In the following, being described further in conjunction with attached drawing and specific embodiment to the utility model:
A kind of laser cutting device as shown in figs. 1-7, including body 10 and cutting mechanism 20, cutting mechanism 20 are installed
On body 10, microscope carrier supporting plate, cutting work station are equipped on body 10, microscope carrier supporting plate is used for support workpiece stage 21.
Specific cutting mechanism 20 includes laser cutting head 22, workpiece stage 21, microscope carrier supporting plate actuator, by workpiece stage 21
It is installed on body 10;Microscope carrier supporting plate actuator is used for band for driving microscope carrier supporting plate to move along the length direction of body 10
Dynamic load platform supporting plate is moved along the width direction of body 10, and cutting work station is located on the motion profile of workpiece stage 21.Laser cutting
First 22 are mounted on body 10 and are located above cutting work station;Laser cutting head 22 can be moved along the short transverse of body 10;I.e.
Under the drive of microscope carrier supporting plate, the workpiece stage 21 on microscope carrier supporting plate can be moved to along the length direction and width direction of body 10
The lower section of laser cutting head 22.
When on the basis of the said structure, using the laser cutting device of the utility model, by taking workpiece is PCB whole plate as an example,
Workpiece stage 21 can be placed on microscope carrier supporting plate, hereafter PCB whole plate is placed in workpiece stage 21, starting microscope carrier supporting plate drives
Moving part, under the drive of microscope carrier supporting plate actuator, workpiece stage 21 on microscope carrier supporting plate can along body 10 length direction or
Width direction movement, i.e. progress position adjustment can first pass through the PCB whole plate in microscope carrier supporting plate actuator drive workpiece stage 21
Long side moves to the lower section of laser cutting head 22, moves microscope carrier supporting plate along the length direction of body 10, that is, is cut by laser
First 22 can be cut along the length direction of PCB whole plate, are moved microscope carrier supporting plate along the width direction of body 10, are made PCB
Next position of whole plate width direction moves to the lower section of laser cutting head 22, then makes microscope carrier supporting plate along the length of body 10 again
Direction movement is spent, repeatedly, completes the cutting of PCB whole plate in the movement of length direction and width direction by microscope carrier supporting plate.
Certainly, it should be noted that microscope carrier supporting plate actuator includes the first microscope carrier supporting plate linear motor 23 in the present embodiment
And the second microscope carrier supporting plate linear motor 24, the first microscope carrier supporting plate linear motor 23 and the second microscope carrier supporting plate linear motor 24 are
Linear motor in the prior art is selected, the first microscope carrier supporting plate linear motor 23 is arranged along the width direction of body 10, and second carries
Platform supporting plate linear motor 24 is arranged along the length direction of body 10, and in the power output end of the second microscope carrier supporting plate linear motor 24
Fixed mounting plate installs the first above-mentioned microscope carrier supporting plate linear motor 23 on a mounting board, and above-mentioned microscope carrier supporting plate is mounted on
The power output end of one microscope carrier supporting plate motor, in this way, the first microscope carrier supporting plate linear motor 23 of starting and the second microscope carrier supporting plate
Linear motor 24 can drive microscope carrier supporting plate to move along the length direction and width direction of body 10.
Certainly, other linear motion output machines such as lead screw transmission mechanism, slide unit motor also can be selected in microscope carrier supporting plate actuator
The combination of structure is realized.
Preferably, which further includes workpiece stage circulation mechanism 40, and workpiece stage circulation mechanism 40 includes
First workpiece stage manipulator 43, second workpiece microscope carrier manipulator 44, the first workpiece stage conveying assembly 41 and second workpiece
Microscope carrier conveying assembly 42.The starting point of specific first workpiece stage conveying assembly 41 and second workpiece microscope carrier conveying assembly 42
End is arranged side by side along the width direction of body 10, and linking is in the side of cutting work station.Meanwhile first workpiece stage conveying
The end of component 41 and the starting point of second workpiece microscope carrier conveying assembly 42 are arranged side by side along the width direction of body 10.
First workpiece stage manipulator 43 is used to clamp 21 to the first workpiece stage conveying group of workpiece stage of microscope carrier supporting plate
The workpiece stage 21 of the starting point of part 41 and the end for clamping second workpiece microscope carrier conveying assembly 42 is to microscope carrier supporting plate;Second
Workpiece stage manipulator 44 is used to clamp the workpiece stage 21 of 41 end of the first workpiece stage conveying assembly to second workpiece microscope carrier
The starting point of conveying assembly 42.
In the present embodiment, two microscope carrier supporting plates and two microscope carrier supporting plate actuators, two microscope carriers are set on body 10
Supporting plate actuator, which corresponds, drives two microscope carrier supporting plates to move to laser cutting along the length direction and width direction of body 10
First 22 lower section carries out cutting operation.
And in this structure basis, after the completion of cutting operation, it can be clamped wherein by the first workpiece stage manipulator 43
Then the starting point of 21 to the first workpiece stage conveying assembly 41 of workpiece stage on one microscope carrier supporting plate starts the first workpiece load
By 41 conveying workpieces microscope carrier 21 to next process of platform conveying assembly, next process is to give PCB patch in the present embodiment, on body 10
Chip machinery hand clamp the workpiece of the workpiece stage 21 in the conveying end face of the first workpiece stage conveying assembly 41 to body 10
Patch station carry out patch.Workpiece in the workpiece stage 21 of the conveying end face of the first workpiece stage conveying assembly 41 into
During row transfer, the PCB whole plate on body 10 in the workpiece stage 21 of another microscope carrier supporting plate is carrying out cutting operation, such as
Efficiency can be improved in this.
And after the workpiece transfer in the workpiece stage 21 of the conveying end face in the first workpiece stage conveying assembly 41 finishes,
First workpiece stage conveying assembly 41 can transport to empty workpiece stage 21 to end, at this point, second workpiece microscope carrier manipulator 44
The workpiece stage 21 of 41 end of the first workpiece stage conveying assembly can be clamped to the starting point of second workpiece microscope carrier conveying assembly 42
The circulation conveying of workpiece stage 21 is carried out, and at this point, the first workpiece stage manipulator 43 can be by workpiece on next microscope carrier supporting plate
On 21 to the first workpiece stage conveying assembly 41 of microscope carrier.Workpiece stage 21 is delivered to end in second workpiece microscope carrier conveying assembly 42
When end, the first workpiece stage manipulator 43 can clamp the empty workpiece stage 21 of 41 end of the first workpiece stage conveying assembly to empty
On microscope carrier supporting plate, the feeding of workpiece is carried out, repeatedly, cutting operation is constantly carried out, improves working efficiency.
Certainly, only have on one group of the case where in microscope carrier supporting plate and microscope carrier supporting plate actuator, above-mentioned work microscope carrier can also follow
The empty work microscope carrier of ring conveying carries out duplicate loading and unloading operation, and efficiency equally also can be improved.
Preferably, the first workpiece stage manipulator 43 includes the first electronic slide unit 431, the second electronic slide unit 432 and folder
Pickup, the first electronic slide unit 431 are arranged along the length direction of body 10;Installation is connected on the slide unit of first electronic slide unit 431
Frame, mounting rack extend along the width direction of body 10;Second electronic slide unit 432 is set on mounting rack and along the width of body 10
Direction extends, and pickup folder is installed on the slide unit of the second electronic slide unit 432 and is used to clamp workpiece stage 21.In this way, can lead to
Crossing the first electronic slide unit 431 drives pickup folder to move along the length direction of body 10, and drives folder by the second electronic slide unit 432
Pickup is moved along the width direction of body 10, i.e., pickup folder can all around move to the top of microscope carrier supporting plate, carries out workpiece
The clamping of microscope carrier 21.
Further, pickup folder includes that clamping frame 433, clamping bar 435 and clamping frame drive cylinder 434, frame is clamped
The cylinder body of driving cylinder 434 is mounted on clamping frame 433;The piston rod bottom end of clamping frame driving cylinder 434 is connected with mounting plate;
The two sides of mounting plate are equipped with the clamping bar 435, and the bottom end of clamping bar 435 is equipped with limited block;The two sides of workpiece stage 21 are set
There is limit hole;Limit hole includes the first hole section 211 and the second hole section 212;First hole section 211 and the second hole section 212 are mutually communicated;
The aperture of first hole section 211 is greater than the outer diameter of limited block so that limited block passes through;The aperture of second hole section 212 is less than limited block
Outer diameter.
In this structure basis, when carrying out workpiece holding, clamping 433 edge of frame can be driven by the first electronic slide unit 431
The top of the length direction Moving Workpieces microscope carrier 21 of body 10 makes the volume of pickup folder low side limit the first hole of block alignment limit hole
Section 211, then driving clamping plate 436 to move downward in clamping 433 cylinder of frame makes clamping bar 435 pass through the first hole section 211, hereafter
Clamping frame 433 is driven to move along the length direction of body 10 by the first electronic slide unit 431, limited block can be along workpiece stage 21
Length direction slide into the lower section of the second hole section 212, since the outer diameter of limited block is greater than the internal diameter of the first hole section 211, thus
When clamping frame driving cylinder 434 drives clamping frame 433 to move upwards, limited block can be connected to the lower section of workpiece stage 21, will
Workpiece stage 21 clamps.
And when putting down workpiece stage 21, clamping frame 433 can be driven along the length of body 10 by the first electronic slide unit 431
Degree direction back moves, and limited block is made to move to the lower section of the first hole section 211 again, and clamping frame driving cylinder 434 drives clamping
Bar 435, which moves upwards, to be detached from workpiece stage 21.
Certainly, pneumatic-finger or Suction cup assembly in the prior art can be selected also to realize in pickup folder.
Preferably, the structure of second workpiece microscope carrier manipulator 44 is identical as the structure of the first workpiece stage manipulator 43, tool
In this not go into detail for body operating process and operating principle.
Preferably, camera 437, vacuum chuck 438 and vacuum chuck actuator 439, tool can be equipped on mounting rack
Body camera 437 is for shooting the end face of workpiece stage 21 and sending the first picture signal;Vacuum chuck actuator 439
For driving vacuum chuck 438 to move along the short transverse of body 10 according to the first picture signal.In the actual operation process,
The cutting of pcb board inevitably will appear defective products, thus workpiece stage 21 is being transferred to the first workpiece stage conveying group
It after part 41, before carrying out patch operation, can be shot by the end face of 437 workpiece stage 21 of camera, send the first figure
Piece signal, if can drive 438 component of vacuum chuck in vacuum chuck when the signal defective products of the first picture signal transmitting
Moved downward under the drive of part 439, draw workpiece stage 21 on defective products, avoid later period chip machinery hand clamp defective products into
Row patch, yield and quality is higher out.
More particularly, leftover pieces recycling frame and defective product recycling frame can be equipped on body 10, leftover pieces recycle frame
And defective product recycling frame is respectively positioned on the motion profile of vacuum chuck 438, in this way, the pcb board in workpiece stage 21 occurs
After defective products, the defective product recycling frame that vacuum chuck 438 can draw defective products movement is recycled.In addition, in practical operation
In the process, PCB whole plate cutting will necessarily have leftover pieces, can move to corner by 438 component absorbing corner material of vacuum chuck
On material recycling frame, leftover pieces are recycled, workpiece stage 21 can be cleared up, avoids influencing cutting next time
Operation.
Preferably, which further includes workpiece feeding mechanism 50, and workpiece feeding mechanism 50 includes workpiece feeding
Manipulator 51 and job stacking frame 52, job stacking frame 52 are equipped with job stacking plate 53 and job stacking plate actuator
54, job stacking plate actuator 54 is for driving job stacking plate 53 to move along the short transverse of job stacking frame 52;On workpiece
Material manipulator 51 is for clamping the workpiece of 52 top end face of job stacking frame to the workpiece stage 21 of microscope carrier supporting plate.In this way, into
When row feeding, multiple PCB whole plates can be stacked on the job stacking plate 53 of job stacking frame 52 in advance, are carrying out workpiece feeding
When, job stacking plate 53 can be driven to push away upwards in turn by job stacking plate actuator 54, PCB whole plate gradually be released, then
Workpiece feeding manipulator 51 is successively shifted.
Certainly, the vacuum chuck actuator 439 in the present embodiment and the optional electricity consumption of the second vacuum chuck actuator 439
Slide unit or the linear motion output mechanism in the prior art such as lead screw transmission mechanism or cylinder are moved to realize.And on above-mentioned workpiece
The single-shaft mechanical arm combination that articulated robot or different directions setting in the prior art also can be selected in material manipulator 51 is realized.
In addition, the prior art can be selected in the first workpiece stage conveying assembly 41, second workpiece microscope carrier conveying assembly 42 in the present embodiment
In belt conveyor realize.
It will be apparent to those skilled in the art that can make various other according to the above description of the technical scheme and ideas
Corresponding change and deformation, and all these changes and deformation all should belong to the protection of the utility model claims
Within the scope of.
Claims (9)
1. a kind of laser cutting device, which is characterized in that including,
Body, body are equipped with microscope carrier supporting plate and cutting work station for support workpiece stage;
Cutting mechanism, cutting mechanism include that laser cutting head and microscope carrier supporting plate actuator, workpiece stage are installed on body;It carries
Platform supporting plate actuator is used to drive microscope carrier supporting plate along the width of body for driving microscope carrier supporting plate to move along the length direction of body
Spend direction movement;Cutting work station is located on the motion profile of microscope carrier supporting plate;Laser cutting head is mounted on body and is located at cutting
Above station;Laser cutting head can be moved along the short transverse of body.
2. laser cutting device as described in claim 1, which is characterized in that the laser cutting device further includes that workpiece stage is followed
Ring mechanism, workpiece stage circulation mechanism include the first workpiece stage manipulator, second workpiece microscope carrier manipulator, the first workpiece stage
Conveying assembly and second workpiece microscope carrier conveying assembly;The starting point of first workpiece stage conveying assembly and second workpiece microscope carrier
The end of conveying assembly is arranged side by side and linking is in the side of cutting work station;The end of first workpiece stage conveying assembly and the
The starting point of two workpiece stage conveying assemblies is arranged side by side;The workpiece that first workpiece stage manipulator is used to clamp microscope carrier supporting plate carries
Platform is to the starting point of the first workpiece stage conveying assembly and the workpiece of the end for clamping second workpiece microscope carrier conveying assembly carries
Platform is to microscope carrier supporting plate;Second workpiece microscope carrier manipulator is used to clamp the workpiece stage of the first workpiece stage conveying assembly end to the
The starting point of two workpiece stage conveying assemblies.
3. laser cutting device as claimed in claim 2, which is characterized in that the first workpiece stage manipulator includes first electronic
Slide unit, the second electronic slide unit and pickup folder, the first electronic slide unit are arranged along the length direction of body;The cunning of first electronic slide unit
Mounting rack is connected on platform, mounting rack extends along the width direction of body;Second electronic slide unit is set on mounting rack and along machine
The width direction of body extends;The pickup folder is installed on the slide unit of the second electronic slide unit and for clamping workpiece stage.
4. laser cutting device as claimed in claim 3, which is characterized in that pickup folder includes clamping frame, clamping bar and folder
Frame is taken to drive cylinder, the cylinder body of clamping frame driving cylinder is mounted on clamping frame;The piston rod bottom end for clamping frame driving cylinder is solid
It is connected to mounting plate;The two sides of mounting plate are equipped with the clamping bar, and the bottom end for clamping bar is equipped with limited block;The workpiece stage
Two sides are equipped with limit hole;Limit hole includes the first hole section and the second hole section;First hole section and the second hole section are mutually communicated;First hole
The aperture of section is greater than the outer diameter of limited block so that limited block passes through;The aperture of second hole section is less than the outer diameter of limited block.
5. laser cutting device as described in claim 3 or 4, which is characterized in that the structure of second workpiece microscope carrier manipulator with
The structure of first workpiece stage manipulator is identical.
6. laser cutting device as claimed in claim 3, which is characterized in that mounting rack be equipped with camera, vacuum chuck with
And vacuum chuck actuator, camera is for shooting the end face of workpiece stage and sending the first picture signal;Vacuum is inhaled
Dish driving part is used to drive vacuum chuck to move along the short transverse of body according to the first picture signal.
7. laser cutting device as claimed in claim 6, which is characterized in that body is equipped with leftover pieces recycling frame and bad
Product recycle frame, and leftover pieces recycling frame and defective product recycling frame are respectively positioned on the motion profile of vacuum chuck.
8. laser cutting device as described in claim 1, which is characterized in that the laser cutting device further includes workpiece feeding machine
Structure, workpiece feeding mechanism include workpiece feeding manipulator and job stacking frame, job stacking frame be equipped with job stacking plate with
And job stacking plate actuator, job stacking plate actuator are used to that job stacking plate to be driven to transport along the short transverse of job stacking frame
It is dynamic;Workpiece feeding manipulator is for clamping the workpiece of job stacking frame top end face to the workpiece stage of microscope carrier supporting plate.
9. laser cutting device as described in claim 1, which is characterized in that two microscope carrier supporting plates and two are arranged on body
Microscope carrier supporting plate actuator, two microscope carrier supporting plate actuators correspond the length direction and width that drive two microscope carrier supporting plates along body
Degree direction moves to the lower section of laser cutting head.
Priority Applications (1)
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CN201920259058.6U CN209598453U (en) | 2019-02-28 | 2019-02-28 | A kind of laser cutting device |
Applications Claiming Priority (1)
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CN201920259058.6U CN209598453U (en) | 2019-02-28 | 2019-02-28 | A kind of laser cutting device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111266743A (en) * | 2020-02-21 | 2020-06-12 | 上海精测半导体技术有限公司 | Panel cutting equipment microscope carrier replacing device and panel cutting equipment |
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2019
- 2019-02-28 CN CN201920259058.6U patent/CN209598453U/en active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111266743A (en) * | 2020-02-21 | 2020-06-12 | 上海精测半导体技术有限公司 | Panel cutting equipment microscope carrier replacing device and panel cutting equipment |
CN111266743B (en) * | 2020-02-21 | 2021-09-24 | 上海精测半导体技术有限公司 | Panel cutting equipment microscope carrier replacing device and panel cutting equipment |
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