CN111366639A - Target defect detection method - Google Patents
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- CN111366639A CN111366639A CN202010300117.7A CN202010300117A CN111366639A CN 111366639 A CN111366639 A CN 111366639A CN 202010300117 A CN202010300117 A CN 202010300117A CN 111366639 A CN111366639 A CN 111366639A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
- G01N29/265—Arrangements for orientation or scanning by relative movement of the head and the sensor by moving the sensor relative to a stationary material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/28—Details, e.g. general constructional or apparatus details providing acoustic coupling, e.g. water
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/34—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor
- G01N29/348—Generating the ultrasonic, sonic or infrasonic waves, e.g. electronic circuits specially adapted therefor with frequency characteristics, e.g. single frequency signals, chirp signals
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/023—Solids
- G01N2291/0234—Metals, e.g. steel
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/028—Material parameters
- G01N2291/0289—Internal structure, e.g. defects, grain size, texture
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Abstract
The invention provides a target defect detection method, which comprises the following steps: after the target material assembly is assembled, detecting the target material assembly by using an ultrasonic flaw detector; wherein, the detection condition is the detection condition of the standard component corresponding to the target component. The method detects the defects in the target assembly through the ultrasonic flaw detector, can quickly adjust detection parameters aiming at different types of targets, improves the speed and the accuracy of target detection, and can reduce the detection time by about 50 percent; the method is simple to operate, convenient and quick, and low in equipment and operation cost.
Description
Technical Field
The invention belongs to the technical field of target preparation, and relates to a target defect detection method.
Background
In recent years, with the continuous expansion of the market demand for flat panel displays, the demand for producing the required target material is correspondingly expanded, the production process of the target material mainly comprises the working procedures of metallurgical sintering, hot rolling treatment, annealing treatment, subsequent processing and the like, and because the assembly process of the target material assembly needs the steps of welding and the like, in order to ensure the stable use of the target material in the sputtering process, the detection is required to be carried out in advance, and the detection is carried out on possible internal foreign matters or defects so as to ensure the yield of the target material.
The existing detection technology of the target material needs longer time, so that the production efficiency of the product is low, the turnover speed is slow, and the requirement of the current total production amount is difficult to meet, so that the problem of how to improve the detection rate of the target material is needed to be solved at present. The ultrasonic flaw detection is to judge whether the surface and the inside of a detected workpiece have defects by using echoes at different heights generated when ultrasonic waves enter dielectric layers with different sound velocities, and has the advantages of high flaw detection sensitivity, short period, low cost, high efficiency and the like. However, due to the variety of target types, the detection parameters for a specific type of target are often difficult to determine, which affects both the detection accuracy and the detection rate.
CN 103792285A discloses a method for detecting the welding defect rate and the bonding rate of a target assembly, which comprises the steps of providing a standard sample, detecting the standard sample by an ultrasonic flaw detector, and determining the detection condition; providing a target assembly, detecting the target assembly by adopting the detection conditions to obtain the defect area of the target assembly, and further calculating to obtain the welding defect rate; the standard sample of the target assembly comprises a target and a back plate, the target and the back plate are welded, and the welded back plate is subjected to punching treatment; the method has the advantages that the detection of the defects of the target assembly is greatly influenced by the target, the preparation work of the required standard sample is complicated, the detection time is long, and the detection efficiency is low.
CN 107941920a discloses a water immersion type electromagnetic shielding ultrasonic flaw detector, which comprises an ultrasonic probe, an electromagnetic shielding device, an ultrasonic flaw detector, and a signal cable, wherein the ultrasonic flaw detector is provided with a sound wave interface, the front end of the signal cable is connected with the ultrasonic probe, the rear end of the signal cable is connected with the ultrasonic interface, and the electromagnetic shielding device covers the surface of the signal cable; the device mainly reduces clutter interference through the setting of electromagnetic shield equipment, helps the improvement of detection accuracy, but does not relate to the regulation of ultrasonic flaw detector detection parameter and the selection of probe.
In summary, for the detection of the target defects, it is also necessary to be able to quickly obtain appropriate detection parameters for targets of different materials and types, so as to improve the detection efficiency and the detection accuracy, thereby improving the production efficiency and the yield of products.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a target material defect detection method, which detects the defects in a target material assembly through an ultrasonic flaw detector, correspondingly adjusts detection parameters aiming at different types of target materials, has high detection speed and high accuracy and improves the turnover rate of product detection.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a target defect detection method, which comprises the following steps:
after the target material assembly is assembled, detecting the target material assembly by using an ultrasonic flaw detector;
wherein, the detection condition is the detection condition of the standard component corresponding to the target component.
In the invention, the detection of the target assembly is based on the corresponding standard component, and the target assembly is compared with the standard component and adopts the same detection conditions, thereby being more beneficial to obtaining an accurate detection result and avoiding the influence of other factors; the ultrasonic flaw detector is a commonly used instrument for detecting the defects or damages of the target material, mainly utilizes the propagation difference characteristics of ultrasonic waves in different media to detect the defects inside the target material and obtain the shapes and sizes of the defects, and has the advantages of convenient and quick detection process, accurate and efficient detection result.
The following technical solutions are preferred technical solutions of the present invention, but not limited to the technical solutions provided by the present invention, and technical objects and advantageous effects of the present invention can be better achieved and achieved by the following technical solutions.
As a preferred technical solution of the present invention, the target assembly includes a target and a backing plate, and the target and the backing plate are assembled by welding.
Preferably, the target material comprises any one of Al target material, Cu target material, Mo target material, Ti target material or MoNb alloy target material or a combination of at least two of them, typical but non-limiting examples of the combination are: the combination of an Al target and a Cu target, the combination of a Cu target and a Mo target, the combination of an Al target and a MoNb alloy target, the combination of a Mo target, a Ti target and a MoNb alloy target and the like.
In the invention, the target needs to be combined with the back plate before use, a welding mode is usually adopted, and due to different material types of the target, the back plate and the welding flux, the welding part is easy to have defects, or foreign matters or poor contact can influence the sputtering of the target, so the target needs to be detected after assembly.
The types of the target mainly comprise a metal target, an alloy target and a ceramic target, while the liquid crystal display is an important application field of the target, and the types of the target mainly comprise the metal target and the alloy target.
As a preferred technical solution of the present invention, before the target assembly is detected, the standard component is detected.
Preferably, the standard component is made of the same material and prepared by the same process as the target component.
The material and preparation process of the standard component are the same as those of the target to be detected, so that the influence of other factors on the target detection can be effectively avoided, the most appropriate detection condition is determined, and the target defect detection accuracy is improved.
As a preferable technical scheme of the invention, the defect area of the standard component is known, and a theoretical defect value is obtained.
Preferably, the test conditions when the standard is subjected to a plurality of tests with an ultrasonic flaw detector to obtain a plurality of test flaw values and the test flaw values within ± 0.5% of the theoretical flaw value are selected as the target assembly test conditions, such as-0.5%, -0.4%, -0.3%, -0.2%, -0.1%, 0, 0.1%, 0.2%, 0.3%, 0.4%, or 0.5%, but not limited to the recited values, and other values not recited in the range of values are also applicable.
In the invention, the ultrasonic flaw detector needs to work in a relatively stable state, and meanwhile, in order to improve the detection rate, the required detection parameters need to be determined in advance, the theoretical defect value is calculated through the defect area of the standard part, the control parameters of the ultrasonic flaw detector are adjusted to ensure that the test defect value is within a certain deviation range of the theoretical defect value, the detection parameters are used as the initial parameters of the target material to be detected, and the target material to be detected is adjusted in a small amplitude.
As a preferable technical scheme of the invention, when the target assembly is detected, water is used as a medium.
In the invention, because the ultrasonic wave has long propagation distance in water, the influence of environmental factors, such as air, on the detection result can be reduced by taking water as a medium.
Preferably, the target assembly is immersed in water for a distance of 75 to 105mm, such as 75mm, 80mm, 85mm, 90mm, 95mm, 100mm, or 105mm, but not limited to the recited values, and other values not recited within the range of values are equally applicable.
In the invention, the determination of the target immersion distance needs to be determined according to the target material and thickness, and can be basically calculated according to the water distance (mm) which is 101.6-material sound velocity/water sound velocity × material thickness, wherein the material sound velocity and the water sound velocity respectively refer to the propagation velocity of ultrasonic waves in the target material and water.
In the invention, the water distance refers to the distance from the probe to the surface of the target, the selection of the water distance has important influence on the accuracy of target defect detection, and if the water distance is too large, the defect cannot be detected or the detected defect is too small; if the water distance is too small, the undetected defects are too large, and the accuracy of the detection result is affected.
As a preferable technical solution of the present invention, the ultrasonic flaw detector includes an ultrasonic probe, and the ultrasonic probe is located above the target assembly.
Preferably, the ultrasonic probe is immersed in water at a distance of 35 to 55mm, for example 35mm, 40mm, 45mm, 50mm or 55mm, but not limited to the recited values, and other values not recited in the range of the values are also applicable.
Preferably, the moving speed of the ultrasonic probe is 300-500 mm/s, such as 300mm/s, 330mm/s, 350mm/s, 380mm/s, 400mm/s, 450mm/s, 480mm/s or 500mm/s, but not limited to the enumerated values, and other non-enumerated values in the numerical range are also applicable.
In the invention, because the sizes of the standard part and the target product are possibly different, the moving speed of the probe is possibly different when the standard part and the target product are detected, and the probe is mainly adjusted according to the requirement under the conditions of the running stability of the instrument and the abrasion of the machine caused by short-distance quick movement.
As a preferable technical scheme of the present invention, the ultrasonic flaw detector further includes an ultrasonic probe support, and the ultrasonic probe support is located above the water surface and drives the ultrasonic probe to move laterally.
In a preferred embodiment of the present invention, the frequency of the ultrasonic probe used in the detection by the ultrasonic flaw detector is 5 to 10MHz, for example, 5MHz, 6MHz, 7MHz, 8MHz, 9MHz, or 10MHz, but the present invention is not limited to the above-mentioned values, and other values not listed in the above-mentioned range of values are also applicable.
In a preferred embodiment of the present invention, the sensitivity of the ultrasonic flaw detector is 35 to 45dB, for example, 35dB, 36dB, 37dB, 38dB, 40dB, 42dB, 44dB, or 45dB, when the ultrasonic flaw detector detects the ultrasonic flaw, but the sensitivity is not limited to the above-mentioned values, and other values not listed in the above-mentioned range of values are also applicable.
In the invention, the ultrasonic frequencies are different, the penetration capacities of the ultrasonic waves are also different, and the required ultrasonic frequencies are adjusted according to different target materials and different welding modes; and according to the selection of factors such as the type of the target material, the type of the probe, the water distance and the like, the sensitivity is adjusted during specific detection so as to achieve the best detection effect, if the sensitivity is too high, the defect measurement value is larger, even the whole target material is defaulted as a defect, and if the sensitivity is too low, the target material defect is difficult to detect.
As a preferred technical scheme of the invention, the method comprises the following steps:
(1) selecting a standard part which has the same material and preparation process as the target material component to be detected, and detecting by using an ultrasonic flaw detector; the defect area of the standard component is known, and a theoretical defect value is obtained; detecting the standard part for multiple times by using an ultrasonic flaw detector to obtain multiple test defect values, and selecting the detection condition when the test defect value has a deviation of +/-0.5% from the theoretical defect value as the detection condition of the target assembly;
(2) detecting the target material component to be detected by adopting the detection conditions in the step (1); during detection, water is used as a medium, and the target material assembly is immersed in the water for a distance of 75-105 mm; the ultrasonic flaw detector comprises an ultrasonic probe and an ultrasonic probe support, the distance of the ultrasonic probe immersed in water is 35-55 mm, the moving speed is 300-500 mm/s, the frequency of the ultrasonic probe is 5-10 MHz, and the sensitivity of the ultrasonic flaw detector is 35-45 dB.
Compared with the prior art, the invention has the following beneficial effects:
(1) the method detects the defects in the target assembly through the ultrasonic flaw detector, can quickly adjust detection parameters aiming at different types of targets, improves the speed and the accuracy of target detection, and can reduce the detection time by about 50 percent;
(2) the method of the invention has the advantages of simple operation, convenience and rapidness, and low equipment and operation cost.
Detailed Description
In order to better illustrate the present invention and facilitate the understanding of the technical solutions of the present invention, the present invention is further described in detail below. However, the following examples are only simple examples of the present invention and do not represent or limit the scope of the present invention, which is defined by the claims.
The invention provides a method for detecting defects of a target material, which comprises the following steps:
after the target material assembly is assembled, detecting the target material assembly by using an ultrasonic flaw detector;
wherein, the detection condition is the detection condition of the standard component corresponding to the target component.
The following are typical but non-limiting examples of the invention:
example 1:
the embodiment provides a method for detecting defects of an Al target, which comprises the following steps:
(1) selecting a standard part which has the same material and preparation process as the Al target component to be detected, and detecting by using an ultrasonic flaw detector; obtaining a theoretical defect value by knowing the defect area of the standard part, detecting the standard part for multiple times to obtain a plurality of test defect values, and selecting the detection condition when the test defect value with the deviation of +/-0.5% from the theoretical defect value is selected as the detection condition of the Al target component;
(2) detecting the Al target assembly to be detected by adopting the detection conditions in the step (1); wherein, water is used as a medium during detection, and the distance of the target assembly immersed in the water is 75 mm; the ultrasonic flaw detector comprises an ultrasonic probe and an ultrasonic probe support, the type of the ultrasonic probe is KJ-433, the distance of the ultrasonic probe immersed in water is 36mm, namely the water distance is 39mm, the moving speed is 500mm/s, the frequency of the ultrasonic probe is 5MHz, and the sensitivity of the ultrasonic flaw detector is 35 dB.
In this embodiment, the detection time of the Al target is only 30min, and the detection accuracy can reach 99.98%.
Example 2:
the embodiment provides a method for detecting defects of a Mo target, which comprises the following steps:
(1) selecting a standard part which is the same as the Mo target material component to be detected in material and preparation process, and detecting by using an ultrasonic flaw detector; obtaining a theoretical defect value by knowing the defect area of the standard part, detecting the standard part for multiple times to obtain a plurality of test defect values, and selecting the test defect value with the deviation of +/-0.4% from the theoretical defect value as the detection condition of the Mo target assembly;
(2) detecting the Mo target material component to be detected by adopting the detection conditions in the step (1); wherein, water is used as a medium during detection, and the distance of the target material assembly immersed in the water is 80 mm; the ultrasonic flaw detector comprises an ultrasonic probe and an ultrasonic probe support, the type of the ultrasonic probe is KJ-433, the distance of the ultrasonic probe immersed in water is 44.1mm, namely the water distance is 35.9mm, the moving speed is 500mm/s, the frequency of the ultrasonic probe is 6MHz, and the sensitivity of the ultrasonic flaw detector is 43.5 dB.
In this embodiment, the Mo target detection time is only 30min, and the detection accuracy can reach 99.98%.
Example 3:
the embodiment provides a method for detecting defects of a MoNb alloy target, which comprises the following steps:
(1) selecting a standard part which is the same as the MoNb alloy target component to be detected in material and preparation process, and detecting by using an ultrasonic flaw detector; obtaining a theoretical defect value by knowing the defect area of the standard part, detecting the standard part for multiple times to obtain a plurality of test defect values, and selecting the test defect value with the deviation of +/-0.3% from the theoretical defect value as the detection condition of the MoNb alloy target assembly;
(2) detecting the MoNb alloy target assembly to be detected by adopting the detection conditions in the step (1); wherein, water is used as a medium during detection, and the distance of the target material assembly immersed in the water is 85 mm; the ultrasonic flaw detector comprises an ultrasonic probe and an ultrasonic probe support, the type of the ultrasonic probe is KJ-433, the distance of the ultrasonic probe immersed in water is 49.1mm, namely the water distance is 35.9mm, the moving speed is 450mm/s, the frequency of the ultrasonic probe is 8MHz, and the sensitivity of the ultrasonic flaw detector is 45 dB.
In the embodiment, the detection time of the MoNb alloy target is only 35min, and the detection accuracy can reach 99.99%.
Example 4:
the embodiment provides a method for detecting defects of a Cu target, which comprises the following steps:
(1) selecting a standard part which is the same as the Cu target component to be detected in material and preparation process, and detecting by using an ultrasonic flaw detector; obtaining a theoretical defect value by knowing the defect area of the standard part, detecting the standard part for multiple times to obtain a plurality of test defect values, and selecting the test defect value with the deviation of +/-0.1% from the theoretical defect value as the detection condition of the Cu target assembly;
(2) detecting the Cu target assembly to be detected by adopting the detection conditions in the step (1); wherein, water is used as a medium during detection, and the distance of the target assembly immersed in the water is 100 mm; the ultrasonic flaw detector comprises an ultrasonic probe and an ultrasonic probe bracket, wherein the model of the ultrasonic probe is 17I1011HX, the distance of the ultrasonic probe immersed in water is 47mm, namely, the water distance is 53mm, the moving speed is 400mm/s, the frequency of the ultrasonic probe is 10MHz, and the sensitivity of the ultrasonic flaw detector is 35 dB.
In this embodiment, the detection time of the Cu target is only 38min, and the detection accuracy can reach 99.98%.
Example 5:
the present embodiment provides a method for detecting Al target defects, which is as described in embodiment 1, except that: and (3) in the step (2), the target assembly is immersed in the water for a distance of 70 mm.
In this embodiment, because the depth of the target assembly is reduced, that is, the water distance during detection is small, the ultrasonic flaw detector cannot detect or can only detect some defects under the same test conditions, the detection result has a deviation of about 4.5% (within 1% of the internal control requirement deviation value) compared with the detection result of embodiment 1, the detection result has a serious deviation, and the detection conditions do not meet the detection standard.
Example 6:
the present example provides a method for detecting Cu target defects, which is described with reference to the method of example 4, except that: and (3) in the step (2), the target assembly is immersed in the water for a distance of 108 mm.
In this embodiment, because the depth of the target assembly is large, that is, the water distance is large during target detection, so that the defects cannot be accurately identified by the ultrasonic flaw detector under the same test conditions, some defects can only be detected, the detection result is about 2% different from the detection result of embodiment 4 (the deviation value of the internal control requirement is within 1%), the deviation of the detection result is large, and the detection conditions do not meet the detection requirements.
According to the embodiment, the defects in the target assembly are detected by the ultrasonic flaw detector, the detection parameters can be quickly adjusted according to different types of targets, the target detection speed and accuracy are improved, and the detection time can be reduced by about 50%; the method is simple to operate, convenient and quick, and low in equipment and operation cost.
The applicant states that the present invention is illustrated in detail by the above examples, but the present invention is not limited to the above detailed methods, i.e. it is not meant that the present invention must rely on the above detailed methods for its implementation. It will be apparent to those skilled in the art that any modifications to the present invention, equivalents of the method of the present invention and additions of ancillary steps, selection of specific means, etc., are within the scope and disclosure of the present invention.
Claims (10)
1. A method for detecting defects of a target material is characterized by comprising the following steps:
after the target material assembly is assembled, detecting the target material assembly by using an ultrasonic flaw detector;
wherein, the detection condition is the detection condition of the standard component corresponding to the target component.
2. The method of claim 1, wherein the target assembly comprises a target and a backing plate assembled by welding;
preferably, the target comprises any one of or a combination of at least two of an Al target, a Cu target, a Mo target, a Ti target, or a MoNb alloy target.
3. The method according to claim 1 or 2, wherein before the target assembly is inspected, a standard component is inspected;
preferably, the standard component is made of the same material and prepared by the same process as the target component.
4. The method for detecting the target defects according to claim 3, wherein the defect area of the standard component is known, and a theoretical defect value is obtained;
preferably, the standard part is subjected to multiple detections by an ultrasonic flaw detector to obtain multiple test defect values, and the detection condition when the test defect value with the deviation of +/-0.5% from the theoretical defect value is selected as the detection condition of the target assembly.
5. The method for detecting the target defects according to any one of claims 1 to 4, wherein the target assembly is detected by using water as a medium;
preferably, the target assembly is immersed in water for a distance of 75-105 mm.
6. The method for detecting the target defects according to any one of claims 1 to 5, wherein the ultrasonic flaw detector comprises an ultrasonic probe, and the ultrasonic probe is positioned above the target assembly;
preferably, the ultrasonic probe is immersed in water for a distance of 35-55 mm;
preferably, the moving speed of the ultrasonic probe is 300-500 mm/s.
7. The method for detecting the target defects according to claim 6, wherein the ultrasonic flaw detector further comprises an ultrasonic probe holder, and the ultrasonic probe holder is located above the water surface and drives the ultrasonic probe to move transversely.
8. The method for detecting the target defects according to any one of claims 1 to 7, wherein the ultrasonic probe used for detection by the ultrasonic flaw detector has a frequency of 5 to 10 MHz.
9. The method for detecting the target defects according to any one of claims 1 to 8, wherein the sensitivity of the ultrasonic flaw detector is 35 to 45dB when the ultrasonic flaw detector detects the target defects.
10. The method for detecting defects in a target according to any one of claims 1 to 9, comprising the steps of:
(1) selecting a standard part which has the same material and preparation process as the target material component to be detected, and detecting by using an ultrasonic flaw detector; the defect area of the standard component is known, and a theoretical defect value is obtained; detecting the standard part for multiple times by using an ultrasonic flaw detector to obtain multiple test defect values, and selecting the detection condition when the test defect value has a deviation of +/-5% from the theoretical defect value as the detection condition of the target assembly;
(2) detecting the target material component to be detected by adopting the detection conditions in the step (1); during detection, water is used as a medium, and the target material assembly is immersed in the water for a distance of 75-105 mm; the ultrasonic flaw detector comprises an ultrasonic probe and an ultrasonic probe support, the distance of the ultrasonic probe immersed in water is 35-55 mm, the moving speed is 300-500 mm/s, the frequency of the ultrasonic probe is 5-10 MHz, and the sensitivity of the ultrasonic flaw detector is 35-45 dB.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111812203A (en) * | 2020-08-10 | 2020-10-23 | 宁波江丰电子材料股份有限公司 | Ultrasonic detection method for cobalt target welded product |
| CN111812202A (en) * | 2020-08-10 | 2020-10-23 | 宁波江丰电子材料股份有限公司 | Method for detecting welding seam of welding type molybdenum target by utilizing ultrasonic waves |
| CN115356493A (en) * | 2022-07-14 | 2022-11-18 | 深圳模德宝科技有限公司 | Target detection method, device, equipment and storage medium |
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| CN103792286A (en) * | 2012-11-01 | 2014-05-14 | 宁波江丰电子材料有限公司 | Detection methods of welding defect rate and binding rate of target assembly |
| CN103792285A (en) * | 2012-11-01 | 2014-05-14 | 宁波江丰电子材料有限公司 | Method for detecting welding defect rate and binding rate of target assembly |
| KR20190119952A (en) * | 2018-04-13 | 2019-10-23 | 주식회사 포스코 | Ultrasonic testing method |
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| CN111812203A (en) * | 2020-08-10 | 2020-10-23 | 宁波江丰电子材料股份有限公司 | Ultrasonic detection method for cobalt target welded product |
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