CN101699278A - Method for testing target - Google Patents
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- CN101699278A CN101699278A CN200910148987A CN200910148987A CN101699278A CN 101699278 A CN101699278 A CN 101699278A CN 200910148987 A CN200910148987 A CN 200910148987A CN 200910148987 A CN200910148987 A CN 200910148987A CN 101699278 A CN101699278 A CN 101699278A
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- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000012360 testing method Methods 0.000 title abstract description 8
- 238000003466 welding Methods 0.000 claims abstract description 53
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 40
- 239000010936 titanium Substances 0.000 claims abstract description 40
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 40
- 229910001069 Ti alloy Inorganic materials 0.000 claims abstract description 4
- 230000007547 defect Effects 0.000 claims description 69
- 239000000523 sample Substances 0.000 claims description 52
- 238000002604 ultrasonography Methods 0.000 claims description 43
- 238000009792 diffusion process Methods 0.000 claims description 38
- 238000001514 detection method Methods 0.000 claims description 20
- 230000035945 sensitivity Effects 0.000 claims description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 9
- 238000001914 filtration Methods 0.000 claims description 3
- 238000007689 inspection Methods 0.000 abstract description 3
- 230000002950 deficient Effects 0.000 description 10
- 239000000463 material Substances 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000002474 experimental method Methods 0.000 description 3
- 238000009659 non-destructive testing Methods 0.000 description 3
- 230000035515 penetration Effects 0.000 description 3
- 238000011002 quantification Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000011156 evaluation Methods 0.000 description 2
- 230000000644 propagated effect Effects 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- UQZIWOQVLUASCR-UHFFFAOYSA-N alumane;titanium Chemical compound [AlH3].[Ti] UQZIWOQVLUASCR-UHFFFAOYSA-N 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000021615 conjugation Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000012372 quality testing Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000013077 target material Substances 0.000 description 1
- 238000009864 tensile test Methods 0.000 description 1
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- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
The invention discloses a method for testing a target, which comprises: providing a diffusion-welded target which is titanium or titanium alloy; and testing the target by ultrasonic waves, wherein the frequency of the ultrasonic waves is 2 to 8MHz. The method for testing the target avoids damaging the target and can improve the objectivity and reliability of the inspection of welding quality.
Description
Technical field
The present invention relates to field of semiconductor manufacture, relate in particular to method for detecting targets.
Background technology
Generally, the making of target comprises that the target that will meet sputtering performance combines with the backboard with certain intensity.Described backboard can be assembled in the sputter base station at described target material assembly and play a supporting role, and has the effect of conduction heat.In sputter procedure, because the working environment of target is more abominable, if the conjugation between target and the backboard is relatively poor, to cause target under heating condition, to be out of shape, to ftracture and come off mutually with the backboard of combination, make sputter can't reach the sputter effect of uniform, also may cause damage simultaneously the sputter base station.
Select a kind of effective welding manner can make target and backboard realize reliable connection; diffusion welding (DB; Diffusion Bording) is a kind of welding manner of routine; it is that two welded parts are pressed on together; place vacuum or protective atmosphere to heat; make two face of weld atom generation phase counterdiffusion realize a kind of Solid-phase welding method of metallurgical binding; be particularly useful for the metal connection that foreign material connects and is difficult to carry out melting welding; be applied to a plurality of advanced technologies field, comprised electronics, semiconductor applications.
It is very necessary that target after the welding is carried out the welding quality detection.Existing that the target after the diffusion welding (for example titanium target) is detected employing is stretching experiment (Tensile test), and it is by the size of the tensile strength of target sample being inferred whether product welds the good detection means.This detection method is a kind of destructive experiment, and destroying product will inevitably increase cost; And this detection method has limitation because by stretching experiment can only the test experience position tensile strength, can not reflect the welding situation of whole target well.
Promote along with using constantly, how to detect and estimate the quality of diffusion weld interface, become an important topic in present Non-Destructive Testing field.Because the thickness of Diffusion Welding layer is very little, also has weak joint defect sometimes, the difficulty of Non-Destructive Testing is quite big.Existing a kind of lossless detection method to the titanium target after the diffusion welding is that radiographic inspection detects, its principle is different to the ray energy attenuation degree with the internal defects medium according to tested workpiece, and cause strength difference after ray sees through workpiece, defective can be shown on egative film or the X-ray TV screen realizing.Radiographic inspection resembles very difficulty of the very tiny like this defective of diffusion welding to detection.
Summary of the invention
The problem that the present invention solves provides a kind of method for detecting targets, and it is that nondestructive examination detects, and can improve the reliability and the objectivity of diffusion welding quality testing simultaneously.
For addressing the above problem, the invention provides a kind of method for detecting targets, comprising:
Target after the diffusion welding is provided, and described target is titanium or titanium alloy;
Described target is carried out ultrasound examination, and wherein, described frequency of ultrasonic is 2～8MHz.
Optionally, described frequency of ultrasonic is 5MHz.
Optionally, described target being carried out ultrasound examination is with ultra-sonic defect detector described target to be detected.
Optionally, described target is being carried out also comprising before the ultrasound examination: detect with the standard sample of ultra-sonic defect detector to described target.
Optionally, the described standard sample of described target the detection with ultra-sonic defect detector comprises: the ratio of defects of calculating the standard sample of described target; When exceeding preset range, the ratio of defects of calculating gained adjusts the sensitivity of ultra-sonic defect detector.
Optionally, the preset range of the ratio of defects of described standard sample is set at 3～5%, and the sensitivity of described ultra-sonic defect detector is 38～39dB.
Optionally, described ultrasound examination is to be medium with water.
Optionally, described ultra-sonic defect detector comprises the ultrasonic probe that sends ultrasound wave and receive ultrasonic reflections, and the degree of depth that described ultrasonic probe stretches in the water is 6～10mm.
Optionally, described ultra-sonic defect detector also comprises the filtrator that described ultrasound wave is carried out filtering, and the frequency of described filtrator is 2MHz.
Optionally, described ultra-sonic defect detector also comprises the Ultrasound Probe Device that the drive ultrasonic probe moves, and the distance of described Ultrasound Probe Device and target end face is 95mm.
Compared with prior art, technique scheme has the following advantages: need not to destroy the titanium target, by analysis to ultrasonic signal feature and diffusion welding defect characteristic, can obtain the quantification result directly perceived of defective locations, size and the shape evaluation of diffusion welding welding, thereby improved objectivity and reliability that the diffusion welding welding quality detects, and reduced omission and flase drop problem that the diffusion welding weld defects detects.
Description of drawings
Fig. 1 is the basic flow sheet of embodiment of the present invention method for detecting targets;
Fig. 2 is the process flow diagram of embodiment of the invention method for detecting targets;
Fig. 3 is the electron scanning figure of standard sample of the titanium target of the embodiment of the invention;
Fig. 4 is the detection synoptic diagram of embodiment of the invention method for detecting targets.
Embodiment
Titanium target after embodiment of the present invention adopts ultrasound wave to diffusion welding detects, ultrasound examination is that a kind of nondestructive examination detects, by defective locations, size and the shape etc. that can obtain the diffusion welding quality of connection to the analysis of ultrasonic signal feature result directly perceived.
Fig. 1 is the basic flow sheet of embodiment of the present invention method for detecting targets, and described method comprises:
Step S11 provides the target after the diffusion welding, and described target is titanium or titanium alloy;
Step S12 carries out ultrasound examination to described target, and wherein, described frequency of ultrasonic is 2～8MHz.
The sound wave that frequency is higher than 20000Hz is called " ultrasound wave ", and ultrasound wave has good directionality, and penetration capacity is strong, is easy to obtain concentrated acoustic energy, in characteristics such as water transmission distance.Ultrasound examination is one of lossless detection method, and Non-Destructive Testing is not destroy under the prerequisite, checks the general designation of the various technical methods of workpiece gross imperfection or measuring workpieces feature.Find through inventor's research and analysis, different welding manners, the target of different materials, hyperacoustic penetration capacity are then different, so the ultrasonic frequency of corresponding selection is also different, at the titanium target after the diffusion welding, determine to select the frequency of ultrasonic scope at 2～8MHz, for example, 3MHz, 5MHz, 7MHz, wherein, preferable with the effect of 5MHz ultrasound examination.
In step S12, can use ultra-sonic defect detector that described target is detected.Ultra-sonic defect detector is the instrument that the method for utilization Ultrasonic Detection detects, its principle is: when ultrasound wave is propagated in detected material, the acoustic characteristic of material and the variation of interior tissue produce certain influence to hyperacoustic propagation, understand material property and structural change by the detection to ultrasound wave degree of susceptibility and situation.
When practical application, be operated under the stable status for guaranteeing ultra-sonic defect detector, before described target is detected, need elder generation that the standard sample of described target is carried out ultrasound examination, comprising: the ratio of defects of calculating the standard sample of described target; When exceeding preset range, the ratio of defects of calculating gained adjusts the controlled variable of ultra-sonic defect detector, for example sensitivity.
Because the propagation distance of ultrasound wave in water be far away, so ultrasound examination can be medium with water, to reduce the influence of environmental factor (for example air) to testing result.
Fig. 2 is the process flow diagram of embodiment of the invention method for detecting targets, in the present embodiment, uses ultra-sonic defect detector that the standard sample of titanium target is detected earlier, if detected ratio of defects exceeds preset range, then adjusts the controlled variable of ultra-sonic defect detector; Do not exceed preset range if detect the ratio of defects that obtains, then the titanium target after the diffusion welding is carried out ultrasound examination.
With reference to figure 2, the present embodiment method for detecting targets comprises the steps:
Step S21 provides the standard sample of titanium target.
Step S22 uses ultra-sonic defect detector that the standard sample of described titanium target is detected, and wherein, ultrasonic frequency is chosen as 5MHz.
Step S23, the ratio of defects of the standard sample of the detected described titanium target of calculating ultra-sonic defect detector.
Step S24 judges that whether the described ratio of defects that calculates surpasses preset range, if execution in step S25 then, execution in step S26 then if not.
Step S25, the controlled variable of adjustment ultra-sonic defect detector, then execution in step S22.
Step S26 provides the titanium target after the diffusion welding.
Step S27, the titanium target after using ultra-sonic defect detector to described diffusion welding detects, and wherein, ultrasonic frequency is chosen as 5MHz.
Step S28, according to the ultrasound examination result, the welding quality of assessment titanium target face of weld.
Be elaborated below in conjunction with Fig. 3 and 4 pairs of each steps shown in Figure 2.
Step S21 provides the standard sample of titanium target.Please refer to Fig. 3, it is a kind of synoptic diagram of standard sample of titanium target, and it may enhancing weld design at the titanium target that adopts the diffusion welding mode to weld, and wherein, standard sample 31 has weld defects 31a.The standard sample 31 of titanium target with the diffusion after the titanium target have identical performance.
Step S22 uses ultra-sonic defect detector that the standard sample of described titanium target is detected, and wherein, ultrasonic frequency is chosen as 5MHz.Please refer to Fig. 4, it is the synoptic diagram that the target detection thing is detected with ultra-sonic defect detector.
As shown in Figure 4, target detection thing 40, the standard sample of titanium target promptly shown in Figure 3 is placed in the water, and weld defects faces up.Ultra-sonic defect detector comprises ultrasonic probe 41, Ultrasound Probe Device 42 and control system (not shown).Ultrasonic probe 41 is used to send ultrasound wave and receives ultrasonic reflections, and Ultrasound Probe Device 42 is used to drive ultrasonic probe 41 and moves.In the present embodiment, the degree of depth h1 that ultrasonic probe 41 stretches in the water is 6～10mm, and Ultrasound Probe Device 42 is 95mm apart from the distance h 2 of target detection thing 40 end faces.
Consider the penetration capacity of the titanium target after ultrasound wave is to diffusion welding, in the present embodiment, the frequency of operation of ultra-sonic defect detector is chosen as 5MHz.Generally, ultra-sonic defect detector also includes filtrator, is used for ultrasound wave is carried out filtering, disturbs to eliminate outside noise, reaches testing result more accurately.In the present embodiment, be 5MHz at the ultrasonic frequency of selecting, the frequency of filtrator is chosen as 2MHz.
During test, the control system of ultra-sonic defect detector is controlled mobile Ultrasound Probe Device 42, to drive moving of ultrasonic probe 41, the ultrasound wave that makes ultrasonic probe 41 send can be propagated on the whole surface of target detection thing 40, and the step-length that ultrasonic probe moves (comprising the distance that horizontal direction and vertical direction move) can be regulated according to the size of target detection thing 40.When ultrasound wave runs into heterogeneous interface (as weld defects), acoustic wave segment can be reflected and be received by ultrasonic probe 41, the control system of ultra-sonic defect detector can be converted to electric signal with the ultrasonic signal of reflection, by analyzing described electrical signal converted, can obtain quantification results such as defective locations, size and shape.
Step S23, the ratio of defects of the standard sample of the detected described titanium target of calculating ultra-sonic defect detector.Wherein, ratio of defects=defect area/target detection object plane long-pending (%).Specifically, among Fig. 4, the area (%) of area/standard sample 31 of the ratio of defects=defective 31a of standard sample 31.
Step S24 judges that whether the described ratio of defects that calculates surpasses preset range, if execution in step S25 then, execution in step S26 then if not.In the present embodiment, the preset range of the ratio of defects of standard sample 31 is set at 3～5%.If the ratio of defects of the standard sample 31 that calculates illustrates that ultra-sonic defect detector is in stable duty, then execution in step S26 in 3～5%.Otherwise, execution in step S25 then.
Step S25, the controlled variable of adjustment ultra-sonic defect detector, then execution in step S22.Ultra-sonic defect detector comprises a plurality of adjustable controlled variable, and for example, frequency of operation, gain control, decay control, step-length are regulated and sensitivity is regulated or the like.Find through inventor's research and analysis, at the target of different materials and different welding manners, the sensitivity scope of different ultra-sonic defect detectors can corresponding be set, detect stability to guarantee it, sensitivity is called flaw detection sensitivity again.In the present embodiment, at diffusion welding and titanium target, sensitivity is controlled in the scope of 38～39dB, can improves the stability of ultrasound examination, sensitivity can be finely tuned.After sensitivity is finely tuned, continue execution in step S22, the standard sample to described titanium target detects and calculates ratio of defects again.
Step S26 provides the titanium target after the diffusion welding.The backboard (for example aluminium backboard) that titanium target after the described diffusion welding comprises the titanium target and combines with it.
Step S27, the titanium target after using ultra-sonic defect detector to described diffusion welding detects, and wherein, ultrasonic frequency is chosen as 5MHz.Detect with step S22 basic identical to the titanium target after the described diffusion welding, different is, target detection thing 40 among Fig. 4 is the titanium target after the diffusion welding, the ultrasound wave that ultrasonic probe 41 produces at the face of weld of titanium target (for example, titanium-aluminium diffusion layer) propagates, to detect the Diffusion Welding quality of titanium target.
Step S28, according to the ultrasound examination result, the welding quality of assessment titanium target face of weld.Select for use the ultrasonic of 5MHz to detect, it is fine to detect effect when large tracts of land diffusion welding welding and flaw size are big, can be directly judges interface quality from the height of the reflection wave of ultrasonic probe reception; For tiny defective, ultrasonic signal by will reflection is converted to electric signal and it is analyzed, can obtain position, size and the shape of defective, thereby realize qualitative and quantitative assessment to the welding quality quality, and, can calculate 0.00% defective (ratio of defects that calculates can be as accurate as 2 significant digits) by detecting.
In sum, titanium target after the foregoing description adopts ultrasound wave to diffusion welding carries out welding quality and detects, it need not to destroy the titanium target, by analysis to ultrasonic signal feature and diffusion welding defect characteristic, can obtain the quantification result directly perceived of defective locations, size and the shape evaluation of diffusion welding welding, thereby improved objectivity and reliability that the diffusion welding welding quality detects, and reduced omission and flase drop problem that the diffusion welding weld defects detects.
Though the present invention discloses as above with preferred embodiment, the present invention is defined in this.Any those skilled in the art without departing from the spirit and scope of the present invention, all can do various changes and modification, so protection scope of the present invention should be as the criterion with claim institute restricted portion.
Claims (10)
1. a method for detecting targets is characterized in that, comprising:
Target after the diffusion welding is provided, and described target is titanium or titanium alloy;
Described target is carried out ultrasound examination, and wherein, described frequency of ultrasonic is 2～8MHz.
2. method for detecting targets as claimed in claim 1 is characterized in that, described frequency of ultrasonic is 5MHz.
3. method for detecting targets as claimed in claim 2 is characterized in that, it is with ultra-sonic defect detector described target to be detected that described target is carried out ultrasound examination.
4. method for detecting targets as claimed in claim 3 is characterized in that, described target is being carried out also comprising before the ultrasound examination: detect with the standard sample of ultra-sonic defect detector to described target.
5. method for detecting targets as claimed in claim 4 is characterized in that, the described standard sample of described target the detection with ultra-sonic defect detector comprises: the ratio of defects of calculating the standard sample of described target; When exceeding preset range, the ratio of defects of calculating gained adjusts the sensitivity of ultra-sonic defect detector.
6. method for detecting targets as claimed in claim 5 is characterized in that the preset range of the ratio of defects of described standard sample is set at 3～5%, and the sensitivity of described ultra-sonic defect detector is 38～39dB.
7. method for detecting targets as claimed in claim 3 is characterized in that, described ultrasound examination is to be medium with water.
8. method for detecting targets as claimed in claim 7 is characterized in that, described ultra-sonic defect detector comprises the ultrasonic probe that sends ultrasound wave and receive ultrasonic reflections, and the degree of depth that described ultrasonic probe stretches in the water is 6～10mm.
9. method for detecting targets as claimed in claim 7 is characterized in that described ultra-sonic defect detector also comprises the filtrator that described ultrasound wave is carried out filtering, and the frequency of described filtrator is 2MHz.
10. method for detecting targets as claimed in claim 7 is characterized in that, described ultra-sonic defect detector also comprises the Ultrasound Probe Device that the drive ultrasonic probe moves, and the distance of described Ultrasound Probe Device and target end face is 95mm.
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| CN2009101489870A CN101699278B (en) | 2009-06-16 | 2009-06-16 | Method for testing target |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102759578A (en) * | 2011-04-28 | 2012-10-31 | 光洋应用材料科技股份有限公司 | Sputtering target detection mechanism |
| CN102854244A (en) * | 2012-08-02 | 2013-01-02 | 攀枝花云钛实业有限公司 | Flaw detection method for titanium and titanium alloys by water film method |
| CN103792286A (en) * | 2012-11-01 | 2014-05-14 | 宁波江丰电子材料有限公司 | Detection methods of welding defect rate and binding rate of target assembly |
| CN103792285A (en) * | 2012-11-01 | 2014-05-14 | 宁波江丰电子材料有限公司 | Method for detecting welding defect rate and binding rate of target assembly |
| CN111337572A (en) * | 2020-03-20 | 2020-06-26 | 宁波江丰电子材料股份有限公司 | Water immersion type ultrasonic flaw detection method for molybdenum target blank |
| CN111366639A (en) * | 2020-04-16 | 2020-07-03 | 合肥江丰电子材料有限公司 | Target defect detection method |
| CN111812202A (en) * | 2020-08-10 | 2020-10-23 | 宁波江丰电子材料股份有限公司 | Method for detecting welding seam of welding type molybdenum target by utilizing ultrasonic waves |
| CN115356493A (en) * | 2022-07-14 | 2022-11-18 | 深圳模德宝科技有限公司 | Target detection method, device, equipment and storage medium |
-
2009
- 2009-06-16 CN CN2009101489870A patent/CN101699278B/en active Active
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102759578A (en) * | 2011-04-28 | 2012-10-31 | 光洋应用材料科技股份有限公司 | Sputtering target detection mechanism |
| CN102759578B (en) * | 2011-04-28 | 2015-03-18 | 光洋应用材料科技股份有限公司 | Sputtering target detection mechanism |
| CN102854244A (en) * | 2012-08-02 | 2013-01-02 | 攀枝花云钛实业有限公司 | Flaw detection method for titanium and titanium alloys by water film method |
| CN103792286A (en) * | 2012-11-01 | 2014-05-14 | 宁波江丰电子材料有限公司 | Detection methods of welding defect rate and binding rate of target assembly |
| CN103792285A (en) * | 2012-11-01 | 2014-05-14 | 宁波江丰电子材料有限公司 | Method for detecting welding defect rate and binding rate of target assembly |
| CN111337572A (en) * | 2020-03-20 | 2020-06-26 | 宁波江丰电子材料股份有限公司 | Water immersion type ultrasonic flaw detection method for molybdenum target blank |
| CN111366639A (en) * | 2020-04-16 | 2020-07-03 | 合肥江丰电子材料有限公司 | Target defect detection method |
| CN111812202A (en) * | 2020-08-10 | 2020-10-23 | 宁波江丰电子材料股份有限公司 | Method for detecting welding seam of welding type molybdenum target by utilizing ultrasonic waves |
| CN115356493A (en) * | 2022-07-14 | 2022-11-18 | 深圳模德宝科技有限公司 | Target detection method, device, equipment and storage medium |
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Denomination of invention: Method for detecting targets Effective date of registration: 20180320 Granted publication date: 20110720 Pledgee: Bank of China Limited by Share Ltd Yuyao branch Pledgor: NINGBO JIANGFENG ELECTRONIC MATERIAL CO., LTD. Registration number: 2018330000064 |
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Date of cancellation: 20200825 Granted publication date: 20110720 Pledgee: Bank of China Limited by Share Ltd. Yuyao branch Pledgor: KONFOONG MATERIALS INTERNATIONAL Co.,Ltd. Registration number: 2018330000064 |
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Denomination of invention: Detection method of target Effective date of registration: 20200908 Granted publication date: 20110720 Pledgee: Bank of China Limited by Share Ltd. Yuyao branch Pledgor: KONFOONG MATERIALS INTERNATIONAL Co.,Ltd. Registration number: Y2020330000675 |