CN103792285B - The weld defect rate of target material assembly and in conjunction with the detection method of rate - Google Patents
The weld defect rate of target material assembly and in conjunction with the detection method of rate Download PDFInfo
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- CN103792285B CN103792285B CN201210430415.3A CN201210430415A CN103792285B CN 103792285 B CN103792285 B CN 103792285B CN 201210430415 A CN201210430415 A CN 201210430415A CN 103792285 B CN103792285 B CN 103792285B
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Abstract
The invention provides a kind of weld defect rate of target material assembly and the detection method in conjunction with rate. The wherein detection method of target material assembly weld defect rate, comprising: standard specimen is provided, and the defect area of described standard specimen is known; The defect of standard specimen is detected with supersonic detector, determine testing conditions; Target material assembly is provided; Target material assembly is detected with testing conditions, obtain the area of target material assembly defect; By the defect area of target material assembly, obtain the weld defect rate of target material assembly, wherein, provide standard specimen to comprise: target, backboard are provided; Target and backboard are welded; To the backboard processing of punching after welding, the defect area that the floor space in hole is standard specimen. The present invention also provides a kind of detection method of target material assembly solder bond rate. The standard specimen that adopts the present invention to make makes the follow-up Detection accuracy to target material assembly high, and the making of standard specimen is simple and convenient.
Description
Technical field
The present invention relates to field of semiconductor manufacture, relate in particular to the weld defect rate of target material assembly and in conjunction with rateDetection method.
Background technology
Vacuum sputtering is to be accelerated to fly under the effect of electric field by electronics in the process of substrate to occur with ar atmoCollision, ionizes out a large amount of argon ions and electronics, and electronics flies to substrate, and argon ion is under the effect of electric fieldAccelerate the target on the target material assembly on bombardment sputter base station, sputter a large amount of target atom, be neutralTarget atom (or molecule) be deposited on film forming on substrate, and finally reach the order to substrate surface plated film.
Be in the Chinese patent literature of CN1109512A (open day: October 4 nineteen ninety-five) at publication numberCan also find the more information about vacuum sputtering.
Generally, the making of target material assembly comprises and will meet the target and the back of the body with some strength of sputtering performancePlate is welded. Described backboard can be assembled in sputter base station and play a supporting role at described target material assembly,And have conduction heat effect. In sputter procedure, because the working environment of target material assembly is more severe,If the solder bond degree between target and backboard is poor, will cause target under heating condition, to be out of shape, to openSplit, affect sputter effect, when serious, target can come off mutually with the backboard of combination, can make sputter base stationBecome damage.
Therefore, the weld defect rate to target material assembly and be very necessary in conjunction with the detection of rate. ExistingTarget material assembly weld defect rate and there is limitation in conjunction with the detection method of rate, especially weld defect rate and knotThe accuracy of detection of closing rate is not high, can not reflect well the welding situation of whole target material assembly.
Summary of the invention
The problem that the present invention solves is existing target material assembly weld defect rate and the detection method tool in conjunction with rateHave limitation, especially weld defect rate and not high in conjunction with the accuracy of detection of rate, can not reflect whole wellThe welding situation of target material assembly.
For addressing the above problem, the invention provides a kind of detection method of weld defect rate of target material assembly,Comprise:
The standard specimen of target material assembly is provided, and the defect area of described standard specimen is known;
The defect of described standard specimen is detected with supersonic detector, determine supersonic detector pairThe testing conditions that target material assembly detects;
Target material assembly is provided;
Target material assembly is detected with the described testing conditions of supersonic detector, obtain the defect of target material assemblyArea;
By the defect area of described target material assembly, obtain the weld defect rate of target material assembly;
Wherein, described in, provide the standard specimen of target material assembly to comprise:
Target, backboard are provided;
Described target and backboard are welded;
To the backboard processing of punching after welding, the defect that the floor space in described hole is described standard specimenArea.
Optionally, the degree of depth in described hole exceed the thickness of backboard and for target and back plate thickness and1.25％～5％。
Optionally, described in, be welded as Diffusion Welding or soldering.
Optionally, the quantity in described hole is at least one.
Optionally, in the time that the quantity in hole is one, the floor space in described hole equals standard specimen junction to be weldedLong-pending 2%～10%; When the quantity in hole is while being multiple, the floor space sum in described hole equals standard specimen and treats2%～10% of bonding area.
Optionally, the testing conditions that described definite supersonic detector detects target material assembly comprises:
Determine the theoretical defects value of described standard specimen, described theoretical defects value equals the floor space sum in holeRatio with standard specimen junction area to be welded;
Use supersonic detector to carry out repeated detection to described standard specimen, draw the multiple of standard specimenTest defect value;
From described multiple test defect values, be chosen at theoretical defects value * (1-10%) to theoretical defective value *(1+10%) testing conditions of the test defect of one of them in scope value is as the detection of target material assembly productCondition.
Optionally, the testing conditions that described definite supersonic detector detects target material assembly comprises:
Determine the theoretical defects value of described standard specimen, the area sum that described theoretical defects value equals hole withThe ratio of standard specimen junction area to be welded;
Use supersonic detector to carry out repeated detection to described standard specimen, draw the multiple of standard specimenTest defect value;
From multiple test defect values, choosing the testing conditions of the test defect value that approaches theoretical defects value most doesFor the testing conditions of target material assembly product.
Optionally, described standard specimen is identical with target material assembly material, manufacture craft is identical.
Optionally, described supersonic detector comprises the ultrasonic wave that sends ultrasonic wave and receive ultrasonic reflectionsProbe, the degree of depth that described ultrasonic probe stretches in water is 6mm～10mm.
Optionally, described supersonic detector also comprises and drives the ultrasonic wave that ultrasonic probe moves to visitThe headstock, the distance of described Ultrasound Probe Device and target end face is 50mm～100mm.
The present invention also provides a kind of detection method of solder bond rate of target material assembly, is obtained by said methodThe solder bond rate of the target material assembly that obtains of the weld defect rate of target material assembly, the welding of target material assembly lacksThe solder bond rate of the rate of falling into and target material assembly is added and equals 1.
Compared with prior art, technical scheme of the present invention has the following advantages:
The present invention first detects standard specimen, the detection base using standard specimen as supersonic detectorStandard, obtains the testing conditions of supersonic detector, then by described testing conditions, target material assembly product is enteredRow detect, with respect to radiographic examination (complete) method, can reflect well whole target material assembly defective locations,The quantification results such as defect area size and shape, especially can obtain the higher weld defect rate of the degree of accuracy.In addition, the present invention's processing of punching at the backboard place of standard specimen, can be good at simulating target material assemblyDefect condition, make follow-uply in the testing process of target material assembly, can be detected more accurately essenceDegree. And punch and process that just well to simulate the welding of target material assembly scarce at the backboard of standard specimenFall into, therefore, the preparation method of target sample is simple, easy to operate. Moreover, adopt making of the present inventionThe method of standard specimen than the method for directly obtaining standard specimen from target material assembly, save raw material.
Brief description of the drawings
Fig. 1 is the schematic flow sheet of the weld defect rate detection method of target material assembly of the present invention;
Fig. 2 is the structural representation of the standard specimen of target material assembly;
Fig. 3 is the detection schematic diagram of the employing supersonic detector examination criteria sample of embodiment of the present invention;
Fig. 4 is that definite supersonic detector that the step S22 in Fig. 1 launches in detail carries out target material assemblyThe method flow schematic diagram of the testing conditions detecting.
Detailed description of the invention
Inventor finds through conscientious research and analysis, existing target material assembly weld defect rate and combinationThe detection method of rate has limitation, especially weld defect rate and not high in conjunction with the accuracy of detection of rate, noCan reflect well whole target material assembly welding situation former because:
Detection to target material assembly weld defect rate in prior art, generally adopts radiographic examination (complete) method,Radiographic examination (complete) method refers to and penetrates target material assembly with x ray or gamma-rays, using film as recorded informationLossless detection method. Concrete principle is: in the time of x ray or radiation gamma film, can make film breastSilver halide in agent layer produces latent image. Due to the material of the different densities absorption coefficient difference to ray, shineBe mapped to film ray energy everywhere and also will produce difference, just can be according to the egative film after darkroom disposal everywhereDensity difference is differentiated the defect on target material assembly. Radiographic examination (complete) method to the recall rate of volume type defectHeight, such as pore, slag inclusion, tungsten inclusion, burn, undercut, overlap, pit etc.; And to area-type defectRecall rate lower, such as lack of penetration, incomplete fusion, crackle etc. And, if camera angles is inappropriate,Easily by undetected the defect on target material assembly. In addition, the suitable inspection thinner thickness of radiographic examination (complete) methodTarget material assembly and target material assembly that should not be thicker, because check thick target material assembly to need high-octane ray to establishStandby, and along with the increase of thickness, its inspection sensitivity also can decline.
Inventor, through creative work, has obtained a kind of detection method of weld defect rate of target material assembly,Fig. 1 is the schematic flow sheet of the weld defect rate detection method of target material assembly of the present invention, with reference to figure 1, targetThe detection method of the weld defect rate of material assembly comprises:
Perform step S11, the standard specimen of target material assembly is provided, the defect area of described standard specimen is known,Comprise:
Target, backboard are provided;
Described target and backboard are welded;
To the backboard processing of punching after welding, the defect that the floor space in described hole is described standard specimenArea;
Execution step S12, detects the defect of described standard specimen with supersonic detector, determines superThe testing conditions that sonic analyzer detects target material assembly;
Execution step S13, provides target material assembly;
Execution step S14, detects target material assembly with the described testing conditions of supersonic detector, obtains targetThe defect area of material assembly;
Execution step S15, by the defect area of described target material assembly, obtains the weld defect of target material assemblyRate.
Below in conjunction with accompanying drawing, by specific embodiment, technical scheme of the present invention is carried out clear, completeDescription, obviously, described embodiment is only a part for embodiment of the present invention, and notThat they are whole. According to these embodiment, those of ordinary skill in the art is before without creative workPut obtainable all other embodiments, all belong to protection scope of the present invention.
First, perform step S11, provide the standard specimen of target material assembly, the defect face of described standard specimenLong-pending known, comprising: target, backboard are provided; Described target and backboard are welded; To welding afterThe backboard processing of punching, the defect area that the floor space in described hole is described standard specimen.
With reference to figure 2, in the present embodiment, provide target 41 and the backboard of composition target material assembly standard specimen 4042. Its material is identical with target material assembly product. The cylinder of target 41 and backboard 42 in the present embodiment,The diameter of the standard specimen 40 of follow-up formation is 80mm～100mm, and thickness is 10mm～20mm, instituteTo be such size, be for follow-up to the testing process of standard specimen 40 in, get and grasp with hand-heldFacilitate. The size of standard specimen 40 is too large, can waste raw material on the one hand, on the other hand, and follow-up useHand-held getting and inconvenient operation; The size of standard specimen 40 is too little, weldering that can not actual response target material assemblyConnect defect, make testing result inaccurate. In other embodiment, standard specimen 40 is square body, its limitLength is also 80mm～100mm, and thickness is 10mm～20mm.
Then, target 41 and backboard 42 are welded to the technique of described welding and described target material assemblyTechnique identical, be Diffusion Welding or soldering.
After target 41 and backboard 42 are welded, the processing of punching on the backboard after welding, instituteThe quantity of stating hole 43 can be one or multiple. In the time that the quantity in hole 43 is one, described hole 43Floor space be 2%～10% of standard specimen solder side area; When the quantity in hole 43 is while being multiple, multipleThe floor space sum in hole 43 is 2%～10% of standard specimen solder side area. The degree of depth in hole 43 exceedes the back of the bodyThe thickness of plate and be target and back plate thickness and 1.25%～5%. Backboard after welding carry out punching placeReason, is in order to simulate the weld defect on target material assembly product, and the floor space in described hole is described standard examinationThe defect area of sample. It should be noted that, why on backboard and do not carry out in the sputter face of targetIt is follow-uply the detection of described standard specimen to be carried out smoothly with supersonic detector in order to make that punching is processed,Because described detection is the sputter at the whole target of target material assembly of the ultrasonic wave that sends by ultrasonic probeOn face, propagation realizes. If the floor space sum in the floor space in a hole or multiple holes is too little, noCan accurately react the weld defect of target material assembly product; The floor space in a hole or the bottom surface in multiple holesIf long-pending sum is too large, target 41 does not weld with backboard 42, thereby cannot form standard specimen. SeparatelyIf the degree of depth in hole is too large, affects follow-up supersonic detector the ultrasonic wave of described standard specimen is passed outward,Broadcast, thereby affect accuracy of detection; If the degree of depth in hole is too little, can not well simulate target material assembly productOn weld defect.
It should be noted that, the present embodiment adopts Diffusion Welding to form standard specimen, need to be in Diffusion WeldingAfterwards to the backboard processing of punching, and can not before Diffusion Welding, carry out, otherwise, porose backboardWhile carrying out Diffusion Welding with porose target, the HTHP of Diffusion Welding can make target or backboard formStandard specimen distortion, thereby cannot become the measuring basis of follow-up target material assembly product.
In other embodiments, the preparation method of standard specimen is also applicable to soldering.
Adopt the method production standard sample that punches and process on the backboard after welding, manufacture craft letterSingle, and easy to operate, and can simulate accurately the weld defect of target material assembly, make follow-up targetThe accuracy in detection of material assembly ratio of defects is high.
In other embodiment, welding forms after target material assembly product, can be on described target material assembly productCut the standard specimen of a part of target material assembly product as defective target material assembly, also can implement the present invention,But the method for this production standard sample is relatively wasted raw material.
Then, execution step S12, detects the defect of described standard specimen with supersonic detector,Determine the testing conditions that supersonic detector detects target material assembly.
With reference to figure 3, in the present embodiment, determine the detector bar that supersonic detector detects target material assemblyPart comprises the following steps:
Execution step S121, determines that the theoretical defects value of described standard specimen, theoretical defects value equal holeThe ratio of floor space sum and standard specimen junction area to be welded.
If make a call to a hole on the backboard standard specimen after welding, theoretical defects value equals the bottom surface in holeAmass the ratio with standard specimen junction area to be welded; If beat multiple holes on the backboard after welding, theoreticalDefective value equals the floor space sum in multiple holes and the ratio of standard specimen junction area to be welded. In the present embodiment,On backboard after welding, make a call to a hole, the floor space in hole with the ratio of standard specimen junction area to be welded is2%～10%, for example, be 5%.
Execution step S122, uses supersonic detector to carry out repeated detection to described standard specimen, drawsThe test defect value that standard specimen is multiple.
Frequency is called " ultrasonic wave " higher than the sound wave of 20000Hz, and ultrasonic wave has good directionality, penetrates energyPower is strong, is easy to obtain more concentrated acoustic energy, in features such as water transmission distance. Ultrasound examination is nothingDamage one of detection method, Non-Destructive Testing is not destroy under workpiece prerequisite, checks workpiece gross imperfection or surveyThe general designation of the various technical methods of amount workpiece features. Find through inventor's research and analysis, different materialsTarget material assembly standard specimen, hyperacoustic penetration capacity difference, therefore the ultrasonic frequency of corresponding selection is alsoDifference, for example, if standard specimen is copper or copper product, determines and selects hyperacoustic frequency range at 5MHz～20MHz, for example, 5MHz, 10MHz, 15MHz, 20MHz, wherein, with 15MHz ultrasonic waveThe effect detecting is better; If standard specimen is titanium or titanium alloy material, determines and select hyperacoustic frequencyScope is at 2～8MHz, for example, and 3MHz, 5MHz, 7MHz, wherein, with 5MHz ultrasound examinationEffect better; If standard specimen is aluminium or aluminium target, determines and select hyperacoustic frequency range to exist5MHz～15MHz, for example, 5MHz, 10MHz, 15MHz, wherein, examine with 10MHz ultrasonic waveThe effect of surveying is better.
The detection principle of supersonic detector is: when ultrasonic wave is propagated in detected material, and the sound of materialThe variation of learning characteristic and interior tissue produces certain impact to hyperacoustic propagation, by ultrasonic wave is subject toDetection Knowing material performance and the structural change of influence degree and situation.
Please refer to Fig. 4, standard specimen 40 is placed in water. Supersonic detector comprises ultrasonic probe21, Ultrasound Probe Device 22 and control system (not shown). Ultrasonic probe 21 is super for sendingSound wave and reception ultrasonic reflections, Ultrasound Probe Device 22 is for driving ultrasonic probe 21 to move. ThisInventor's discovery, the degree of depth h1 that ultrasonic probe 21 stretches in water is 6mm～10mm, ultrasonic probeWhen frame 22 is 50mm～100mm apart from the distance h 2 of the target as sputter face in standard specimen 40, imaging is clearClear, accuracy of detection is high.
In the present embodiment, supersonic detector also includes filter (not shown), for ultrasonic wave is enteredRow filtering, disturbs to eliminate outside noise, reaches testing result more accurately. For example, for selectUltrasonic frequency is 15MHz, and the frequency of filter is chosen as 5MHz.
When test, Ultrasound Probe Device 22 is moved in the control system control of supersonic detector, super to driveThe movement of sonic probe 21, makes that ultrasonic wave that ultrasonic probe 21 sends can be at standard specimen 40In the sputter face of whole target, propagate, the step-length that ultrasonic probe moves (comprises horizontal direction and vertically squareTo mobile distance) can regulate according to the size of standard specimen 40. When ultrasonic wave runs into heterogeneous interfaceWhen (as defect), acoustic wave segment can be reflected and be received by ultrasonic probe 21, supersonic detectorControl system can be converted to the signal of telecommunication by the ultrasonic signal of reflection, by analyzing the signal of telecommunication of described conversion,Can obtain the quantification such as size and the shape result of defective locations, defect.
It should be noted that, before use supersonic detector detects described standard specimen at every turn,All need to adjust testing conditions.
Supersonic detector comprises multiple adjustable testing conditions, for example, operating frequency, gain control,Decay is controlled, step-length regulates and sensitivity regulates etc. Wherein most importantly sensitivity regulates, through inventorResearch and analysis are found, for the standard specimen of different materials, different ultrasonic waves can corresponding be set and visitHinder the sensitivity scope of instrument, to guarantee that it detects stability, sensitivity is called again flaw detection sensitivity. For example, rightIn copper or copper alloy standard specimen, sensitivity is controlled in the scope of 55dB～60dB, can improveThe stability of ultrasound examination; For aluminum or aluminum alloy standard specimen, sensitivity is controlled atIn the scope of 17dB～21dB, can improve the stability of ultrasound examination; For titanium or titanium alloy standardSample, is controlled at sensitivity in the scope of 38dB～39dB, can improve the stable of ultrasound examinationProperty. Sensitivity can be finely tuned. After sensitivity is finely tuned, and, on supersonic detectorAfter other correlated condition is adjusted, utilize new testing conditions, described standard specimen is detected.
Execution step S123, from described multiple test defect values, is chosen at theoretical defects value * (1-10%)Extremely the testing conditions of one of them the test defect value in theoretical defective value * (1+10%) scope is as targetThe testing conditions of subassembly product.
For example, theoretical defects value is 5%, is chosen at one of them test defect in 4.5%～5.5% scopeThe testing conditions of value is as the testing conditions of target material assembly product.
It should be noted that, why described theoretical defects value has the deviation of theoretical defective value * 10%, be because ofFor, inventor finds, except theoretical defects value can detect follow-up target material assembly Product jointing more accuratelyRatio of defects. The scope of suitable expansion theoretical defects value also can detect follow-up target material assembly Product jointingRatio of defects, and do not affect precision. Can in subsequent detection, be employed, therefore, obtain tool deviousTheoretical defects value.
In other embodiments, determine the testing conditions bag that supersonic detector detects target material assemblyDraw together the following step, also can implement the present invention. Be specially:
Determine the theoretical defects value of described standard specimen, the area sum that described theoretical defects value equals hole withThe ratio of standard specimen junction area to be welded;
Then, use supersonic detector to carry out repeated detection to described standard specimen, draw standard specimenMultiple test defect values;
Finally, from multiple test defect values, choose the testing conditions that approaches theoretical defects value most as targetThe testing conditions of subassembly product.
It should be noted that, before use supersonic detector detects described standard specimen at every turn,All need to adjust testing conditions.
Determine after the testing conditions that supersonic detector detects target material assembly, execution step S13,Target material assembly is provided.
Material, the welding procedure of target material assembly are identical with material, the welding procedure of standard specimen, described welderingConnecing can be soldering or Diffusion Welding. The present embodiment is Diffusion Welding.
Then, execution step S14, with the described testing conditions of supersonic detector to target material assembly detect,Obtain the defect area of target material assembly.
Concrete detecting step please refer to step S122, and it in water is target material assembly that difference is to be placed on,The ultrasonic wave that ultrasonic probe 21 produces is propagated in target material assembly, to detect the weldering in target material assembly 20Access node closes rate. The frequency of hyperacoustic frequency and filter is according to the difference of standard specimen material and difference.
Finally, execution step S15, by the defect area to described target material assembly, obtains described target groupThe weld defect rate of part.
Can obtain defective locations, defect area and the shape of target material assembly by hyperacoustic testing resultEtc. quantification result. Defect area lacks with the welding that the ratio of target material assembly junction area to be welded is target material assemblyThe rate of falling into.
The present invention, by selecting ultrasonic wave to detect, detects effect fine in the time that flaw size is larger, canJudge the weld defect of target material assembly with the height of the direct back wave receiving from ultrasonic probe; ForTiny defect, by the ultrasonic signal of reflection being converted to the signal of telecommunication and it being analyzed, canObtain position, size and the shape of defect, thereby realize, the weld defect of target material assembly is determinedProperty and quantitative assessment, and, can be as accurate as after decimal point two by detecting the ratio of defects that can calculatePosition. With respect to radiographic examination (complete) method, the present invention not only can detect volume type defect, can also examineMeasure area-type defect. And there is not the undetected problem of the inappropriate defect of bringing of detection angles, in addition,Supersonic detector is in the time detecting target material assembly, and its detection sensitivity is not subject to the thin and thick of target material assemblyImpact. Therefore, adopt supersonic detector to detect and can obtain the weldering that precision is higher target material assemblyConnect ratio of defects, and can reflect well the welding situation of whole target material assembly.
Detection method of the present invention using make standard specimen as detection reference, can obtain more accuratelyThe weld defect rate of target material assembly is higher than the accuracy rate directly with supersonic detector, target material assembly being detected.The preparation method of standard specimen of the present invention is not only simple, easy to operate and can simulate more accurately targetThe weld defect of material assembly, makes the accuracy in detection of follow-up target material assembly ratio of defects high. And, makeThe method of standard specimen than the method for directly obtaining standard specimen from target material assembly, save raw material.
It should be noted that, when having carried out, after the detection of above-mentioned target material assembly, testing conditions being stored to superIn the testing conditions database of sonic analyzer. Again similar target material assembly product is carried out to weld defect in the futureWhen the detection of rate, need to from the testing conditions database of supersonic detector, recall described testing conditions,And then standard specimen is detected, that is, need to adjust the detected parameters of supersonic detector and determine new inspectionSurvey condition. It should be noted that, new testing conditions draws as basis taking stored testing conditions.Therefore, at this moment the parameter of described supersonic detector being adjusted is also to belong to fine setting, prevents due to instrumentThe reasons such as device equipment cause the test defect value of the standard specimen detecting and theoretical defects value deviation larger.Then detect with the testing conditions alignment type target material assembly product after fine setting.
The present invention also provides a kind of detection method of target solder bond rate, the bonding area in target material assemblyWith the ratio of the target material assembly junction area to be welded solder bond rate that is target material assembly. The wherein weldering of target material assemblyThe solder bond rate that connects ratio of defects and target material assembly is added and equals 1. Therefore the detection to target solder bond rateMethod can be with reference to the detection method to target weld defect rate.
Although the present invention with preferred embodiment openly as above, it is not for limiting the present invention, appointsWhat those skilled in the art without departing from the spirit and scope of the present invention, can utilize above-mentioned announcementMethod and technology contents are made possible variation and amendment to technical solution of the present invention, therefore, every not de-From the content of technical solution of the present invention, that according to technical spirit of the present invention, above embodiment is done is anySimple modification, equivalent variations and modification, all belong to the protection domain of technical solution of the present invention.
Claims (9)
1. a detection method for the weld defect rate of target material assembly, is characterized in that, comprising:
The standard specimen of target material assembly is provided, and the defect area of described standard specimen is known;
The defect of described standard specimen is detected with supersonic detector, determine the testing conditions that supersonic detector detects target material assembly;
Target material assembly is provided;
Target material assembly is detected with the described testing conditions of supersonic detector, obtain the defect area of target material assembly;
By the defect area of described target material assembly, obtain the weld defect rate of target material assembly;
Wherein, described in, provide the standard specimen of target material assembly to comprise:
Target, backboard are provided;
Described target and backboard are welded;
To the backboard processing of punch after welding, the defect area that the floor space in described hole is described standard specimen, the degree of depth in described hole exceed the thickness of backboard and be target and back plate thickness and 1.25%～5%;
Wherein, described standard specimen is identical with target material assembly material, manufacture craft is identical.
2. the detection method of the weld defect rate of target material assembly as claimed in claim 1, is characterized in that, described in be welded as Diffusion Welding or soldering.
3. the detection method of the weld defect rate of target material assembly as claimed in claim 1, is characterized in that, the quantity in described hole is at least one.
4. the detection method of the weld defect rate of target material assembly as claimed in claim 3, is characterized in that, in the time that the quantity in hole is one, the floor space in described hole equals 2%～10% of standard specimen area to be welded; When the quantity in hole is while being multiple, the floor space sum in described hole equals 2%～10% of standard specimen area to be welded.
5. the detection method of the weld defect rate of target material assembly as claimed in claim 1, is characterized in that, the testing conditions that described definite supersonic detector detects target material assembly comprises:
Determine the theoretical defects value of described standard specimen, described theoretical defects value equals the floor space sum in hole and the ratio of standard specimen junction area to be welded;
Use supersonic detector to carry out repeated detection to described standard specimen, draw multiple test defect values of standard specimen;
From described multiple test defect values, be chosen at theoretical defects value * (1-10%) to the testing conditions of one of them the test defect value in theoretical defective value * (1+10%) the scope testing conditions as target material assembly product.
6. the detection method of the weld defect rate of target material assembly as claimed in claim 1, is characterized in that, the testing conditions that described definite supersonic detector detects target material assembly comprises:
Determine the theoretical defects value of described standard specimen, described theoretical defects value equals the area sum in hole and the ratio of standard specimen junction area to be welded;
Use supersonic detector to carry out repeated detection to described standard specimen, draw multiple test defect values of standard specimen;
From multiple test defect values, choose the testing conditions of the test defect value that approaches theoretical defects value most as the testing conditions of target material assembly product.
7. the detection method of the weld defect rate of target material assembly as claimed in claim 1, it is characterized in that, described supersonic detector comprises the ultrasonic probe that sends ultrasonic wave and receive ultrasonic reflections, and the degree of depth that described ultrasonic probe stretches in water is 6mm～10mm.
8. the detection method of the weld defect rate of target material assembly as claimed in claim 7, it is characterized in that, described supersonic detector also comprises the Ultrasound Probe Device that drives ultrasonic probe to move, and the distance of described Ultrasound Probe Device and target end face is 50mm～100mm.
9. the detection method of the solder bond rate of a target material assembly, it is characterized in that, the solder bond rate of the target material assembly that the weld defect rate of the target material assembly obtaining according to the arbitrary described detection method of claim 1～8 obtains, the weld defect rate of target material assembly and the solder bond rate of target material assembly are added and equal 1.
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| CN111366639A (en) * | 2020-04-16 | 2020-07-03 | 合肥江丰电子材料有限公司 | Target defect detection method |
| CN111796027A (en) * | 2020-08-10 | 2020-10-20 | 宁波江丰电子材料股份有限公司 | Method for detecting defect rate of welding layer in copper target assembly |
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| JPH10221314A (en) * | 1997-01-31 | 1998-08-21 | Honda Electron Co Ltd | Standard sample for ultrasonic flaw detecting device |
| CN101639461B (en) * | 2009-06-16 | 2011-12-28 | 宁波江丰电子材料有限公司 | Method for detecting targets |
| CN101699278B (en) * | 2009-06-16 | 2011-07-20 | 宁波江丰电子材料有限公司 | Method for testing target |
| CN101639462B (en) * | 2009-06-16 | 2011-12-21 | 宁波江丰电子材料有限公司 | Method for detecting targets |
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