CN111812203A - Ultrasonic detection method for cobalt target welded product - Google Patents

Ultrasonic detection method for cobalt target welded product Download PDF

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Publication number
CN111812203A
CN111812203A CN202010796935.0A CN202010796935A CN111812203A CN 111812203 A CN111812203 A CN 111812203A CN 202010796935 A CN202010796935 A CN 202010796935A CN 111812203 A CN111812203 A CN 111812203A
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cobalt target
flaw detection
immersion type
water immersion
ultrasonic flaw
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姚力军
边逸军
潘杰
王学泽
雷宇
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Ningbo Jiangfeng Electronic Material Co Ltd
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Ningbo Jiangfeng Electronic Material Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/04—Analysing solids
    • G01N29/043—Analysing solids in the interior, e.g. by shear waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/32—Polishing; Etching
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/26—Arrangements for orientation or scanning by relative movement of the head and the sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/28—Details, e.g. general constructional or apparatus details providing acoustic coupling, e.g. water
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/30—Arrangements for calibrating or comparing, e.g. with standard objects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/32—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/023—Solids
    • G01N2291/0234—Metals, e.g. steel
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/028—Material parameters
    • G01N2291/0289—Internal structure, e.g. defects, grain size, texture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/10—Number of transducers
    • G01N2291/101—Number of transducers one transducer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/26—Scanned objects
    • G01N2291/267—Welds

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  • Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)

Abstract

The invention provides a method for ultrasonic detection of a cobalt target welding product, which comprises the steps of polishing the surface of the cobalt target welding product, and then carrying out water immersion type ultrasonic flaw detection on the cobalt target welding product, wherein the surface roughness of the cobalt target can be reduced after the surface treatment is carried out on the cobalt target, the influence of the cobalt target on the ultrasonic flaw detection is reduced, and the detection effect is improved; and the step length and the frequency of the ultrasonic probe are further matched, the detection efficiency is improved, and the welding effect of the cobalt target can be well determined.

Description

Ultrasonic detection method for cobalt target welded product
Technical Field
The invention relates to the technical field of sputtering target preparation, relates to a flaw detection method of a target, and particularly relates to an ultrasonic detection method of a cobalt target welded product.
Background
In the semiconductor industry, a target assembly is composed of a target material that meets sputtering performance and a backing plate that can be bonded to the target material and has a certain strength. The backing plate can play a supporting role in assembling the target assembly to a sputtering base station and has the function of conducting heat. For example, cobalt (Co) metal may be used as the target material, and copper or copper alloy material with sufficient strength and high thermal and electrical conductivity may be used as the backing plate to form the target assembly.
During the sputtering process, the target assembly is in a severe working environment. For example, the target assembly is located at a high ambient temperature, such as 300 ℃ to 600 ℃; in addition, one side of the target assembly is forced to cool by cooling water, and the other side is at 10-9Pa, thereby forming a large pressure difference at opposite sides of the target assembly; furthermore, the target assembly is in a high-voltage electric field and a magnetic field and is bombarded by various particles. In such a harsh environment, if the bonding strength between the target and the backing plate in the target assembly is poor, the target assembly deforms and cracks under the heated condition and falls off from the bonded backing plate, so that the sputtering cannot achieve the uniform sputtering effect, and the sputtering base station may be damaged.
Therefore, the prior art has conducted much research on the welding of the cobalt target and the copper target backing plate.
CN102366856A discloses a welding method of a cobalt target assembly, which includes: providing a cobalt target blank and a copper back plate, and additionally arranging an intermediate layer between the cobalt target blank and the copper back plate; placing the cobalt target blank, the middle layer and the copper back plate in a vacuum sheath to enable the middle layer to be located between the cobalt target blank and the copper back plate, and placing the vacuum sheath in welding equipment; welding materials to be welded together by using a hot isostatic pressing process to form a cobalt target assembly; and after welding, cooling, and removing the vacuum sheath to obtain the cobalt target assembly. The middle layer is additionally arranged between the cobalt target blank and the copper back plate, and the cobalt target blank and the copper back plate are welded together by utilizing the hot isostatic pressing process, so that large-area welding can be realized, and the surface can be prevented from being oxidized in the welding process.
The following steps are repeated: CN111136360A discloses a brazing method of a cobalt target and a copper backing plate; CN103894720A discloses a welding method of a high-purity cobalt target blank and a back plate, and the like.
Although the prior art is improved in various aspects aiming at the cobalt target welding method, the welding effect directly influences the sputtering process, so that the welded product welded by the cobalt target needs to be detected to determine whether the welded product is qualified.
In the prior art, tensile tests are generally adopted to detect the tensile strength of a welded product so as to judge whether the welding of the cobalt target welded product is good, but the method belongs to destructive tests, and the tensile tests can detect the tensile strength of an experimental part and cannot well reflect the welding condition of the whole target.
Therefore, it is necessary to develop a method for detecting a cobalt target welded product capable of detecting the welding condition as a whole without damaging the product.
Disclosure of Invention
In view of the problems in the prior art, the invention provides an ultrasonic detection method for a cobalt target welded product, which reduces surface stains and surface roughness by polishing the surface of the cobalt target welded product, and improves the effect of ultrasonic flaw detection; and further select the ultrasonic probe and the step length of specific frequency, can ensure defect detection effect and detection efficiency simultaneously.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a method for ultrasonic detection of a cobalt target welded product, which comprises the following steps:
(1) carrying out surface polishing treatment on the cobalt target welding product;
(2) placing the polished cobalt target welding product in water, and carrying out water immersion type ultrasonic flaw detection on the cobalt target welding product; the frequency of the ultrasonic probe used for the water immersion type ultrasonic flaw detection is 1-12 MHz.
Compared with the original welding strength detection method by tensile experiment, the ultrasonic detection method for the cobalt target welding product provided by the invention has no damage to the sample, can detect the welding state in the cobalt target welding seam, and can obtain whether the defect rate of the cobalt target welding is qualified or not by calculation, and is convenient to detect and high in efficiency.
In addition, the invention carries out water immersion type ultrasonic flaw detection after the surface of the cobalt target welding product is polished, and the inventor finds that the detection accuracy is improved by detecting the welding product after the surface of the cobalt target welding product is polished although the ultrasonic detection mainly detects the internal defects of the sample to be detected.
The water immersion type ultrasonic flaw detection adopted by the invention is a mode that a sample is placed in water, a water layer with a certain thickness is arranged between a probe and the sample to be detected, and sound waves firstly pass through the water layer and then are incident to the surface of a cobalt target welded product to be detected, so that the influence of environmental factors (such as air) on a detection result is reduced.
The principle of ultrasonic flaw detection is based on the fact that when ultrasonic waves encounter a heterogeneous interface in the propagation process, part of the sound waves are reflected and received by a probe. The method has good detection effect when large-area welding and large defect size are carried out, and the interface quality can be directly judged from the height of the reflected wave by using a conventional probe; very fine defects can be detected, and qualitative and quantitative evaluation can be carried out on the welding quality.
The frequency of the ultrasonic probe used in the water immersion type ultrasonic flaw detection in the step (2) is 1-12 MHz, and may be 1MHz, 2MHz, 3MHz, 4MHz, 5MHz, 6MHz, 7MHz, 8MHz, 9MHz, 10MHz, 11MHz, or 12MHz, for example.
Aiming at the detection of a cobalt target welding product, a probe with the frequency of 1-12 MHz is specially selected, and compared with the ultrasonic probe in the conventional ultrasonic flaw detection which is selected to be 15-30 MHz, the probe with the frequency of 1-12 MHz can better detect a large-area welding seam and detect a larger defect.
Preferably, the roughness of the surface of the cobalt target weldment after the polishing treatment in step (1) is Ra < 1.5 μm, and may be, for example, 1.4 μm, 1.35 μm, 1.3 μm, 1.25 μm, 1.2 μm, 1.15 μm, 1.1 μm, 0.8 μm, 0.6 μm, 0.5 μm, or the like.
The roughness of the surface of the cobalt target welded product after polishing treatment is preferably controlled within the range of Ra 0.5-1.5 mu m, and the cobalt target welded product has higher sensitivity under the condition of adopting a specific frequency probe.
Preferably, the frequency of the ultrasonic probe used for the water immersion type ultrasonic flaw detection in the step (2) is 5 MHz.
Preferably, the frequency of the filter used in the water immersion type ultrasonic flaw detection in the step (2) is 1 to 12MHz, for example, 1MHz, 2MHz, 3MHz, 4MHz, 5MHz, 6MHz, 7MHz, 8MHz, 9MHz, 10MHz, or the like, and preferably 5 MHz.
Preferably, the frequency of the filter used for the water immersion type ultrasonic flaw detection is the same as that of the ultrasonic probe.
The frequency of the filter is preferably the same as that of the ultrasonic probe, so that the external noise interference is eliminated, and a more accurate detection result is achieved.
Preferably, the polished cobalt target welded product in the step (2) is placed in water and then the upper surface of the cobalt target is wiped.
In the invention, preferably, the surface of the cobalt target is wiped after the cobalt target is put into water, so that air bubbles on the surface of the cobalt target are removed, and the influence of the air bubbles on ultrasonic flaw detection is reduced.
Preferably, the ultrasonic probe used for the water immersion type ultrasonic flaw detection is inserted into water for detection.
Preferably, the ultrasonic probe after being inserted into water is subjected to surface wiping treatment.
The invention also preferably performs wiping treatment on the surface of the ultrasonic probe extending into water, removes surface bubbles and improves the detection effect.
Preferably, the wiping process is wiping the surface of the cobalt target weldment with a wiping cloth.
Preferably, the step size of the water immersion type ultrasonic flaw detection in the step (2) is 0.5-2.8 mm, and may be, for example, 0.5mm, 0.8mm, 1.0mm, 1.2mm, 1.5mm, 1.8mm, 2.0mm, 2.2mm, 2.5mm, 2.8mm, or the like.
Preferably, the step length of the water immersion type ultrasonic flaw detection in the step (2) is adjusted according to the size of the cobalt target welded product.
Preferably, the diameter of the cobalt target welded product in the step (2) is 50-240 mm, such as 50mm, 60mm, 70mm, 80mm, 100mm, 120mm, 150mm, 180mm, 200mm, 220mm or 240mm, and the step size of the water immersion ultrasonic flaw detection is 0.2-0.9 mm, such as 0.2mm, 0.3mm, 0.4mm, 0.5mm, 0.6mm, 0.7mm, 0.8mm or 0.9mm, and preferably 0.5 mm.
Preferably, the diameter of the cobalt target welded product is 250-350 mm, such as 250mm, 260mm, 270mm, 280mm, 290mm, 300mm, 310mm, 320mm, 330mm, 340mm or 350mm, and the step size of the water immersion ultrasonic flaw detection is 1.0-1.5 mm, such as 1.0mm, 1.1mm, 1.2mm, 1.3mm, 1.4mm or 1.5mm, and preferably 1.0 mm.
Preferably, the diameter of the cobalt target welded product is 360-500 mm, for example, 360mm, 370mm, 380mm, 400mm, 420mm, 450mm, 480mm or 500mm, etc., and the step size of the water immersion type ultrasonic flaw detection is 1.2-2.0 mm, for example, 1.2mm, 1.3mm, 1.4mm, 1.5mm, 1.8mm or 2.0mm, etc., preferably 1.5 mm.
Preferably, the diameter of the cobalt target welded product is 1 to 4m, for example, 1m, 1.2m, 1.5m, 1.8m, 2m, 2.2m, 2.5m, 2.8m, 3m, 3.2m, 3.5m, 3.8m, or 4m, and the step size of the water immersion ultrasonic flaw detection is 2.0 to 2.8mm, for example, 2.0mm, 2.1mm, 2.2mm, 2.3mm, 2.4mm, 2.5mm, 2.6mm, 2.7mm, or 2.8mm, and preferably 2.5 mm.
The invention selects different step lengths for cobalt target welding products with different sizes, and can simultaneously ensure the detection efficiency and the detection precision.
Preferably, the focal length of the ultrasonic probe used in the water immersion type ultrasonic flaw detection in the step (2) is 90 to 110mm, for example, 90mm, 92mm, 93mm, 95mm, 97mm, 100mm, 101mm, 101.6mm, 102mm, 102.5mm, 103mm, 105mm, 106mm, or 110mm, and preferably 101 to 102 mm.
Preferably, the distance between the ultrasonic probe used for the water immersion type ultrasonic flaw detection in the step (2) and the detection upper surface of the cobalt target welded product is 50-65 mm, and may be, for example, 50mm, 51mm, 52mm, 53mm, 54mm, 55mm, 56mm, 57mm, 58mm, 59mm, 60mm, 61mm, 62mm, 63mm, 64mm, 65mm, or the like.
As a preferred technical scheme of the invention, the method comprises the following steps:
(1) the surface of the cobalt target welding product is polished to ensure that the roughness Ra of the surface of the cobalt target welding product is less than 1.5 mu m;
(2) after the cobalt target welding product after polishing treatment is placed in water, wiping the upper surface of the cobalt target welding product, extending an ultrasonic probe used for water immersion type ultrasonic flaw detection into the water for detection, wiping the surface of the ultrasonic probe extending into the water, and then performing water immersion type ultrasonic flaw detection on the cobalt target welding product;
the frequency of the ultrasonic probe used for water immersion type ultrasonic flaw detection is 1-12 MHz, the frequency of the filter is 1-12 MHz, the step length is 0.5-2.8 mm, the focal length of the ultrasonic probe is 90-110 mm, and the distance between the ultrasonic probe used for water immersion type ultrasonic flaw detection and the upper surface of the copper target assembly is 50-65 mm.
Preferably, the step (2) further comprises calculating the defect rate of the cobalt target welded product.
Preferably, the calculation in step (2) comprises a 3sigma calculation.
Preferably, in the step (2), water immersion type ultrasonic flaw detection and defect rate calculation are firstly carried out on the cobalt target welded product of the standard sample, and then the water immersion type ultrasonic flaw detection and defect rate calculation are carried out on the cobalt target welded product of the sample to be detected after the defect rate is determined to be in a preset range, so as to judge whether the sample to be detected is qualified.
Preferably, the preset range is 1.84-2.15%.
The water immersion type ultrasonic flaw detection method comprises the steps of firstly carrying out water immersion type ultrasonic flaw detection on a cobalt target welding product of a standard sample, obtaining defect rate data of the standard sample through calculation, judging whether the defect rate data is in a preset range, adjusting parameters of an ultrasonic flaw detection instrument if the defect rate data is not in the preset range, repeatedly detecting the standard sample, carrying out water immersion type ultrasonic flaw detection on a sample to be detected after the defect rate is determined to be in the preset range, and judging whether the sample meets the welding requirement through calculating the defect rate.
The preset range is 1.84-2.15%, because the cobalt target and the copper target have certain defects in the welding process originally, the preset range is set to be 1.84-2.15%, whether the welding of the cobalt target welding product is qualified or not can be judged more conveniently, and the welding product can be detected better by adjusting the parameters of the ultrasonic flaw detection instrument by taking the preset range as a standard.
Compared with the prior art, the invention has at least the following beneficial effects:
(1) the ultrasonic detection method for the cobalt target welding product can realize the detection of a large-area welding seam without damaging a sample to be detected, can better obtain the evaluation of the position, size and shape of a welding defect, and improves the objectivity of quality detection after welding;
(2) the ultrasonic detection method for the cobalt target welding product provided by the invention has the advantages that the surface is polished and then detected, so that the detection accuracy is improved;
(3) the method for ultrasonic detection of the cobalt target welding product combines selection of the probe, the filter and the step length with specific frequency, can give consideration to both detection efficiency and detection effect aiming at the cobalt target welding products with different sizes, and has great industrial application value.
Drawings
FIG. 1 is a schematic view of the ultrasonic testing method for cobalt target welding products provided by the invention.
FIG. 2 is a detection chart and a calculation chart of water immersion type ultrasonic flaw detection of a standard sample in example 1 of the present invention.
FIG. 3 is a detection chart and a calculation chart of five-group water immersion type ultrasonic flaw detection of a standard sample in example 1 of the present invention.
In the figure: 1-an ultrasonic probe; 2-a probe frame; 3-a sample; 4-water.
Detailed Description
The technical scheme of the invention is further explained by the specific implementation mode in combination with the attached drawings.
The present invention is described in further detail below. The following examples are merely illustrative of the present invention and do not represent or limit the scope of the claims, which are defined by the claims.
The method for detecting the cobalt target welded product by ultrasonic waves is shown in figure 1, in the method, a sample 3 is placed in water 4, an ultrasonic probe 1 is placed on a probe frame 2 and extends into the water 4, the distance between the upper surface of the sample 3 and the probe frame 2 is h, and the h is 50-65 mm; the ultrasonic probe 1 transmits ultrasonic waves into the sample 3 with the water 4 as a medium and reflects the ultrasonic waves to be received by the ultrasonic probe 1, thereby detecting large-area welding and defect size.
First, an embodiment
Example 1
The embodiment provides a method for ultrasonic detection of a cobalt target welded product, which comprises the following steps:
(1) the cobalt target welded product (cobalt-copper welding, the diameter of the cobalt target is 400mm) is subjected to surface polishing treatment, so that the roughness of the surface of the cobalt target welded product is 0.5 mu m;
(2) after the cobalt target welding product after polishing treatment is placed in water, wiping the upper surface of a cobalt target, extending an ultrasonic probe used for water immersion type ultrasonic flaw detection into the water for detection, wiping the surface of the ultrasonic probe extending into the water, and then performing water immersion type ultrasonic flaw detection on the cobalt target welding product;
the frequency of the ultrasonic probe used for water immersion type ultrasonic flaw detection is 5MHz, the frequency of the filter is 5MHz, the step length is 1.5mm, the focal length of the ultrasonic probe is 101.6mm, and the distance between the ultrasonic probe used for water immersion type ultrasonic flaw detection and the upper surface of the cobalt target welded product is 55 mm.
Example 2
The embodiment provides a method for ultrasonic detection of a cobalt target welding product, which comprises the following steps:
(1) the cobalt target welded product (cobalt-copper welding, the diameter of the cobalt target is 100mm) is subjected to surface polishing treatment, so that the roughness of the surface of the cobalt target welded product is 1.4 mu m;
(2) after the cobalt target welding product after polishing treatment is placed in water, wiping the upper surface of a cobalt target, extending an ultrasonic probe used for water immersion type ultrasonic flaw detection into the water for detection, wiping the surface of the ultrasonic probe extending into the water, and then performing water immersion type ultrasonic flaw detection on the cobalt target welding product;
the frequency of the ultrasonic probe for water immersion type ultrasonic flaw detection is 10MHz, the frequency of the filter is 10MHz, the step length is 0.5mm, the focal length of the ultrasonic probe is 101mm, and the distance between the ultrasonic probe for water immersion type ultrasonic flaw detection and the upper surface of a cobalt target welded product is 50 mm.
Example 3
The embodiment provides a method for ultrasonic detection of a cobalt target welding product, which comprises the following steps:
(1) the surface of a cobalt target welded product (cobalt-copper welding, the diameter of a cobalt target is 3m) is subjected to surface polishing treatment, so that the roughness of the surface of the cobalt target welded product is 1.0 mu m;
(2) after the cobalt target welding product after polishing treatment is placed in water, wiping the upper surface of a cobalt target, extending an ultrasonic probe used for water immersion type ultrasonic flaw detection into the water for detection, wiping the surface of the ultrasonic probe extending into the water, and then performing water immersion type ultrasonic flaw detection on the cobalt target welding product;
the frequency of the ultrasonic probe for water immersion type ultrasonic flaw detection is 2MHz, the frequency of the filter is 2MHz, the step length is 2.5mm, the focal length of the ultrasonic probe is 98mm, and the distance between the ultrasonic probe for water immersion type ultrasonic flaw detection and the upper surface of a cobalt target welded product is 65 mm.
Example 4
This example provides a method for ultrasonic testing of a cobalt target weldment, which is the same as example 1 except that the step size in step (2) is 1.0 mm.
Example 5
This example provides a method for ultrasonic testing of a cobalt target weldment, which is the same as example 1 except that the step size in step (2) is 2.3 mm.
Example 6
This example provides a method for ultrasonic testing of a cobalt target welded article, which is the same as that of example 1 except that the frequency of the ultrasonic probe in step (2) is 5MHz and the frequency of the filter is 9 MHz.
Example 7
This example provides a method for ultrasonic testing of a cobalt target welded article, which is the same as in example 1 except that the upper surface of the cobalt target is not wiped in step (2).
Example 8
This example provides a method for ultrasonic testing of a cobalt target welded article, which is the same as in example 1 except that the ultrasonic probe that has been immersed in water is not wiped in step (2).
Example 9
This example provides a method for ultrasonic testing of a cobalt target weldment, which is the same as in example 1 except that the roughness of the surface of the cobalt target weldment in step (1) is 2.5 μm.
Second, comparative example
Comparative example 1
This comparative example provides a method for ultrasonic testing of a cobalt target weldment of a cobalt target, which is the same as in example 1 except that the cobalt target weldment (cobalt-copper welding, cobalt target diameter 400mm) is not subjected to surface polishing in step (1).
Comparative example 2
This comparative example provides a method for ultrasonic testing of a cobalt target weldment, which is the same as example 1 except that the ultrasonic probe in step (2) has a frequency of 15MHz and the filter has a frequency of 15 MHz.
When the sample to be detected is detected in the embodiment and the comparative example, the standard sample is detected to determine that the defect rate of the standard sample is within the preset range, and then the sample to be detected is detected, wherein the defect rate of the standard sample is within the preset range of 1.84-2.15%, and the defect rate and the qualification rate of the sample are determined by comparing the standard sample with the sample to be detected.
Third, test results
Taking example 1 as an example, a standard sample ultrasonic detection and calculation graph is shown in fig. 2, and an ultrasonic detection graph and a calculation result graph of 5 groups of standard samples are shown in fig. 3, wherein the calculation is performed by using a 3sigma method. In the figure, the upper row is a detection diagram, the lower row is a calculation diagram, and A-E represent different sample numbers.
The calculated defect rates are shown in table 1.
TABLE 1
Figure BDA0002625975770000111
Figure BDA0002625975770000121
As can be seen from Table 1, the ultrasonic detection method for the cobalt target welded product provided by the invention can better detect the welding condition of the cobalt target welded product and quantify the defect rate through calculation, thereby improving the objectivity and reliability of quality inspection.
It can be seen from the comprehensive examples 1 and 4-5 that, for a cobalt target welded product with a diameter of 400mm, the step length selected in example 1 is 1.5mm, the time consumption is 7.5min, and the detection effect is good; in example 4, the step length is 1.0mm, the time consumption is 10.5min, the time consumption is obviously longer than that in example 1, and the detection efficiency is greatly reduced; and the step length in the embodiment 5 is 2.3mm, so that the defect rate of the welding line cannot be detected well and accurately, and therefore, the method can give consideration to both the detection efficiency and the detection effect by selecting the specific step length according to the cobalt target welding product with the specific size.
By combining the embodiment 1, the embodiment 6 and the comparative example 2, it can be seen that in the comparative example 2, the frequency of the ultrasonic probe is adjusted to 15MHz, and the same filter frequency is selected at the same time, but the frequency is too high, the near-field area is long, the medium attenuation is large, and the flaw detection is not facilitated; in embodiment 6, although the original frequency of the ultrasonic probe is maintained, the frequency of the filter is higher than that of the ultrasonic probe, so that the obtained detection result is fuzzy, the interference is large, and the detection result is inaccurate.
It can be seen from the combination of the embodiment 1 and the embodiments 7 to 8 that in the embodiments 7 to 8, the surface of the cobalt target or the ultrasonic probe extending into the water is not wiped, and the bubbles remaining on the surface reduce the effect of ultrasonic flaw detection and cause serious interference, thereby indicating that the wiping treatment step is added in the invention to improve the detection effect.
By combining example 1 with comparative example 1 and example 9, it can be seen that the roughness of the cobalt target weldment surface is 0.5 μm after polishing treatment in example 1, compared with the roughness of 2.5 μm in example 9 and the roughness of no polishing treatment in comparative example 1, the defect point with the diameter of 0.5mm can be detected in example 1, while the defect point with the diameter of 1.0mm can be detected in example 9, and the defect point with the diameter of 1.0mm can be detected in comparative example 1, thereby showing that the invention improves the detection accuracy by adding the step of polishing treatment to the cobalt target weldment surface.
In conclusion, the cobalt target welding product ultrasonic detection method provided by the invention polishes the surface of the cobalt target welding product and then carries out water immersion type ultrasonic flaw detection on the cobalt target welding product, so that the surface roughness of the cobalt target welding product can be reduced, the influence of the cobalt target welding product on the ultrasonic flaw detection can be reduced, and the detection effect can be improved; and the step length, the frequency of the ultrasonic probe and the frequency of the filter are further matched, the detection efficiency is improved, and the welding effect of the cobalt target can be well determined.
The applicant declares that the present invention illustrates the detailed structural features of the present invention through the above embodiments, but the present invention is not limited to the above detailed structural features, that is, it does not mean that the present invention must be implemented depending on the above detailed structural features. It should be understood by those skilled in the art that any modifications of the present invention, equivalent substitutions of selected components of the present invention, additions of auxiliary components, selection of specific modes, etc., are within the scope and disclosure of the present invention.

Claims (10)

1. A method for ultrasonic testing of a cobalt target weldment, comprising the steps of:
(1) carrying out surface polishing treatment on the cobalt target welding product;
(2) placing the polished cobalt target welding product in water, and carrying out water immersion type ultrasonic flaw detection on the cobalt target welding product; the frequency of the ultrasonic probe used for the water immersion type ultrasonic flaw detection is 1-12 MHz.
2. The method of claim 1, wherein the roughness Ra of the surface of the cobalt target weldment after the polishing treatment in step (1) is < 1.5 μm.
3. The method according to claim 1 or 2, wherein the frequency of the ultrasonic probe used for the water immersion type ultrasonic flaw detection in the step (2) is 5 MHz.
4. The method according to any one of claims 1 to 3, wherein the frequency of the filter used for the water immersion type ultrasonic flaw detection in the step (2) is 1 to 12MHz, preferably 5 MHz;
preferably, the frequency of the filter used for the water immersion type ultrasonic flaw detection is the same as that of the ultrasonic probe.
5. The method according to any one of claims 1 to 4, wherein the polished cobalt target weldment obtained in the step (2) is placed in water and then the upper surface of the cobalt target is wiped;
preferably, the ultrasonic probe used for the water immersion type ultrasonic flaw detection is extended into water for detection;
preferably, the ultrasonic probe after being inserted into water is subjected to surface wiping treatment.
6. The method according to any one of claims 1 to 5, wherein the step size of the water immersion type ultrasonic flaw detection in the step (2) is 0.5 to 2.8 mm.
7. The method according to claim 6, wherein the diameter of the cobalt target welded product in the step (2) is 50-240 mm, and the step size of the water immersion type ultrasonic flaw detection is 0.2-0.9 mm, preferably 0.5 mm;
preferably, the diameter of the cobalt target welded product is 250-350 mm, and the step length of the water immersion type ultrasonic flaw detection is 1.0-1.5 mm, preferably 1.0 mm;
preferably, the diameter of the cobalt target welded product is 360-500 mm, and the step length of the water immersion type ultrasonic flaw detection is 1.2-2.0 mm, preferably 1.5 mm;
preferably, the diameter of the cobalt target welding product is 1-4 m, and the step length of the water immersion type ultrasonic flaw detection is 2.0-2.8 mm, preferably 2.5 mm.
8. The method according to any one of claims 1 to 7, wherein the focal length of the ultrasonic probe used in the water immersion type ultrasonic flaw detection in the step (2) is 90 to 110mm, preferably 101 to 102 mm.
9. The method according to any one of claims 1 to 8, wherein the distance between the probe holder and the detection upper surface of the cobalt target welded product in the water immersion type ultrasonic flaw detection in the step (2) is 50 to 65 mm.
10. A method according to any one of claims 1 to 9, characterized in that the method comprises the steps of:
(1) the surface of the cobalt target welding product is polished to ensure that the roughness Ra of the surface of the cobalt target welding product is less than 1.5 mu m;
(2) after the cobalt target welding product after polishing treatment is placed in water, wiping the upper surface of the cobalt target welding product, extending an ultrasonic probe used for water immersion type ultrasonic flaw detection into the water for detection, wiping the surface of the ultrasonic probe extending into the water, and then performing water immersion type ultrasonic flaw detection on the cobalt target welding product;
the frequency of the ultrasonic probe used for water immersion type ultrasonic flaw detection is 1-12 MHz, the frequency of the filter is 1-12 MHz, the step length is 0.5-2.8 mm, the focal length of the ultrasonic probe is 90-110 mm, and the distance between the ultrasonic probe used for water immersion type ultrasonic flaw detection and the upper surface of the copper target assembly is 50-65 mm.
CN202010796935.0A 2020-08-10 2020-08-10 Ultrasonic detection method for cobalt target welded product Pending CN111812203A (en)

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