CN111351566B - Vibration sensor with monitoring function and vibration signal monitoring method thereof - Google Patents

Abstract

A vibration sensor with monitoring function comprises a substrate, a micro-electromechanical vibration sensing chip and a special application integrated circuit chip. The micro-electromechanical vibration sensing chip is arranged on the substrate and used for sensing the vibration born by the object to be tested so as to generate a plurality of vibration signals. The application specific integrated circuit chip is arranged on the substrate and electrically connected to the micro-electromechanical vibration sensing chip, and comprises a sampling module, a conversion module and an analysis module. The sampling module receives the vibration signals, converts the vibration signals into digital signals, and filters the digital signals to generate a plurality of time domain data. The conversion module converts the time domain data into frequency domain data according to a preset quantity value. The analysis module executes a comparison program to compare the frequency domain data with a preset frequency spectrum feature table and sends out a notification signal according to a comparison result of the comparison program. The invention further provides a vibration signal monitoring method.

Description

Vibration sensor with monitoring function and vibration signal monitoring method thereof

technical field

The invention relates to a vibration sensor, in particular to a vibration sensor with monitoring function. The invention also relates to a vibration signal monitoring method of the vibration sensor.

Background technique

Sensors are important devices for smart machinery and smart manufacturing. Among them, the vibration sensor can detect the vibration signal of the object under test, such as machine tool, motor, ball screw and feeding device, etc. The state data of the object under test can be obtained by analyzing the above vibration signals.

Since the vibration signal needs to undergo complicated signal conversion and signal analysis, the existing vibration sensors cannot directly analyze the frequency domain data obtained from the vibration signal. These vibration signals need to be transmitted to the monitoring machine outside the vibration sensor, and then the microcontroller inside the monitoring machine uses signal analysis software to perform signal conversion and signal analysis to obtain information about the vibration state of the object under test, so it is extremely inefficient .

In addition, because the existing monitoring machines that execute signal analysis software are too bulky, it is extremely difficult to integrate with existing vibration sensors, and it is not easy to apply to related application fields of intelligent machinery and intelligent manufacturing.

In order to meet different monitoring requirements, multiple vibration sensors may need to be installed on the object under test, and a higher sampling frequency and a wider frequency domain monitoring range are required, so a large amount of data needs to be transmitted. Therefore, when the existing vibration sensor transmits the vibration signal to the monitoring machine outside the vibration sensor, it is easy to cause data loss or the data transmission time is too long, so that the real-time monitoring of the object under test cannot be performed.

Contents of the invention

The purpose of the present invention is to provide a vibration sensor with monitoring function and its vibration signal monitoring method, to solve the lack of efficiency in the use of existing vibration sensors and monitoring machines, the inability to perform real-time monitoring of the object to be measured, and the inability to be applied to intelligent machines Issues related to the application fields of intelligent manufacturing.

The invention proposes a vibration sensor with monitoring function, which includes a substrate, a micro-electromechanical vibration sensing chip and a special application integrated circuit chip. The microelectromechanical vibration sensing chip is arranged on the substrate, and is used to detect the vibration suffered by the object under test to generate multiple vibration signals. The application-specific integrated circuit chip is arranged on the substrate and electrically connected to the micro-electromechanical vibration sensing chip, which includes a sampling module, a conversion module and an analysis module. The sampling module includes an analog front-end unit, an analog-to-digital conversion unit and a filtering unit. The analog front-end unit receives the vibration signals. The analog-to-digital conversion unit converts these vibration signals into a plurality of digital signals. The filtering unit filters the digital signals to generate time-domain data. The conversion module includes a conversion unit and a time interval unit. The time interval unit transmits a preset quantity value to the conversion unit. The conversion unit converts the time-domain data into frequency-domain data, and the quantity of the time-domain data is equal to a preset quantity. The analysis module executes a comparison program to compare the frequency domain data with the preset spectrum characteristic table, and sends a notification signal according to the comparison result of the comparison program.

The present invention proposes another vibration signal monitoring method, which includes the following steps: detecting the vibration of the object to be tested to generate multiple vibration signals; receiving these vibration signals, and converting these vibration signals into multiple digital signals ; Filtering the digital signals to generate a plurality of time-domain data; converting the time-domain data into a frequency-domain data, the quantity value of the time-domain data is equal to the preset quantity value; and performing comparison The program compares the frequency domain data with the preset spectrum characteristic table, and sends a notification signal according to the comparison result of the comparison program.

Based on the above, according to the vibration sensor with monitoring function and the vibration signal monitoring method thereof according to the embodiment of the present invention, it can provide the following technical effects:

(1) In an embodiment of the present invention, the ASIC chip of the vibration sensor with monitoring function can analyze the frequency domain data of the vibration signal, so the analysis time can be reduced and the efficiency of real-time monitoring can be improved.

(2) In one embodiment of the present invention, the ASIC chip of the vibration sensor with monitoring function can analyze the frequency domain data of the vibration signal without transmitting the vibration signal to the monitoring machine outside the vibration sensor, Therefore, data loss will not be caused and data transmission time can be shortened.

(3) In one embodiment of the present invention, the conversion module of the special application integrated circuit chip of the vibration sensor with monitoring function has a special circuit structure and operation mechanism, so the sampling module of the special application integrated circuit chip does not need to perform secondary sampling , so that the vibration sensor can achieve improved efficiency.

(4) In one embodiment of the present invention, the conversion module of the special application integrated circuit chip of the vibration sensor with monitoring function has a special circuit structure and operation mechanism, so it can be updated by changing the data of the filter unit of the special application integrated circuit chip The sensing bandwidth of the vibration sensor can be adjusted according to the speed, so as to adapt to objects to be measured with various vibration bandwidths, which expands the use objects of the vibration sensor with monitoring function.

(5) In one embodiment of the present invention, the application-specific integrated circuit chip of the vibration sensor with monitoring function has the function of integrating vibration signal sensing and vibration signal analysis and a special storage space management mechanism, so that the storage space can be more effectively Utilization makes the vibration sensor with monitoring function more miniaturized, so it can meet the requirements of relevant application fields of intelligent machinery and intelligent manufacturing.

Description of drawings

FIG. 1 is a schematic diagram of a vibration sensor with monitoring function according to a first embodiment of the present invention.

Fig. 2 is a flowchart of the first embodiment of the present invention.

FIG. 3 is a circuit diagram of a vibration sensor with a monitoring function according to a second embodiment of the present invention.

FIG. 4 is a circuit diagram of an ASIC chip of a vibration sensor with a monitoring function according to a second embodiment of the present invention.

Fig. 5 is a flowchart of a second embodiment of the present invention.

6A is a first schematic diagram of the storage space management mechanism of the vibration sensor with monitoring function according to the second embodiment of the present invention.

6B is a second schematic diagram of the storage space management mechanism of the vibration sensor with monitoring function according to the second embodiment of the present invention.

6C is a third schematic diagram of the storage space management mechanism of the vibration sensor with monitoring function according to the second embodiment of the present invention.

6D is a fourth schematic diagram of the storage space management mechanism of the vibration sensor with monitoring function according to the second embodiment of the present invention.

Symbol Description

1, 2 vibration sensor

11 Substrate

12, 22 MEMS vibration sensing chip

13, 23 Application-specific integrated circuit chips

231 sampling module

2311 Analog Front End Unit

2312 Analog to Digital Conversion Unit

2313 filter unit

232 conversion module

2321 conversion unit

2322 switching unit

2323 storage unit

2324 time interval unit

2325 conversion factor unit

233 analysis module

14, 24 memory components

TD, TD’ time domain data

FD, TD’ frequency domain data

VS vibration signal

S notification signal

T Preset Spectrum Characteristic Table

N preset number value

C conversion factor

P1, P2 storage space

A ₁ ~A _n , A ₁ '~A _n ' frequency domain points

S21～S25, S51～S58 Step flow

Detailed ways

The following will refer to the accompanying drawings to illustrate the embodiment of the vibration sensor with monitoring function and the vibration signal monitoring method thereof according to the present invention. For the purpose of clarity and convenience for the description of the accompanying drawings, the dimensions and proportions of the components in the accompanying drawings may be Will be rendered exaggerated or reduced. In the following description and/or claims, when an element is referred to as being "connected" or "coupled" to another element, it may be directly connected or coupled to the other element or there may be intervening elements; When "directly connected" or "directly coupled" to another element, there are no intervening elements present. To facilitate understanding, the same elements in the following embodiments are described with the same symbols.

Please refer to FIG. 1 , which is a schematic diagram of a vibration sensor with monitoring function according to a first embodiment of the present invention. As shown in the figure, the vibration sensor 1 includes a substrate 11 , a MEMS vibration sensing chip 12 , an ASIC chip 13 and an optional memory element 14 . In the early stage of development of the vibration sensor with monitoring function, the memory element 14 is disposed outside the ASIC chip 13 . The memory element 14 provides storage spaces of different sizes for storing vibration signals and analyzed data for vibration signals of different objects under test. However, when producing a vibration sensor with a monitoring function in mass production, the storage unit (not shown) in the application-specific integrated circuit chip 13 can be used to replace the memory element 14, so as to reduce the overall volume of the vibration sensor 11 and simplify the design of the vibration sensor 11. Assembly process. The micro-electromechanical vibration sensing chip 12 is disposed on the substrate, and is used to detect the vibration of the object under test to generate a plurality of vibration signals. The object to be tested, for example, can be a machine tool, a motor, a ball screw, a feeding device and other devices that generate vibration during operation.

The memory element 14 can be selectively disposed on the substrate 11 according to different requirements, and is used to store a preset spectrum feature table and various parameters, such as calibration parameters, filter parameters, and conversion parameters. The memory element 14 can be, for example, a one-time programmable memory, a multiple-time programmable memory, a flash memory, or an electronically erasable rewritable read-only memory.

The ASIC chip 13 is disposed on the substrate 11 and is electrically connected to the MEMS vibration sensing chip 12 and the memory element 14 . The ASIC chip 13 receives the vibration signals, converts the vibration signals into multiple digital signals, and filters the digital signals to generate multiple time-domain data. Then, according to a preset quantity value N, a specific amount of time-domain data is converted into a frequency-domain data. When converting a specific amount of time-domain data into a frequency-domain data, the specific amount is equal to the preset amount. Finally, the ASIC chip 13 executes the comparison program and sends a notification signal to indicate the vibration state information of the object under test according to the comparison result. The vibration status information of the DUT can be, for example, abnormal vibration warning, spectrum feature diagnosis, health status or remaining life estimation.

As can be seen from the above, the vibration sensor 1 has a special application integrated circuit chip 13 that integrates the spectrum conversion function and the signal analysis function, so the vibration sensor 1 can analyze the frequency domain data of the vibration signal in real time, so that the analysis time is greatly reduced, so the efficiency can be improved. effectively lift.

Please refer to FIG. 2 , which is a flow chart of the vibration sensor 1 monitoring the vibration signal of the object under test according to the first embodiment of the present invention. As shown in the figure, the vibration signal monitoring method of the vibration sensor 1 of the present embodiment includes the following steps:

Step S21 : Detect the vibration of the object under test to generate a plurality of vibration signals.

Step S22: Receive the vibration signals and convert the vibration signals into a plurality of digital signals.

Step S23: Filter the digital signals to generate a plurality of time-domain data.

Step S24: Convert the time-domain data into frequency-domain data according to a preset quantity value, and the quantity value of the time-domain data is equal to the preset quantity value.

Step S25: Execute the comparison program, compare the frequency domain data with the preset spectrum feature table, and send a notification signal according to the comparison result of the comparison program.

Please refer to FIG. 3 and FIG. 4 , which are the circuit diagrams of the vibration sensor with monitoring function and the circuit diagram of the special application integrated circuit chip according to the second embodiment of the present invention. As shown in FIG. 3 , the vibration sensor 2 includes a micro-electromechanical vibration sensing chip 22 , an application-specific integrated circuit chip 23 and a memory element 24 selectively used according to different usage requirements.

The MEMS vibration sensing chip 22 detects the vibration of the object under test to generate a plurality of vibration signals VS. The object to be tested can be various devices that generate vibration during operation, such as machine tools, motors, ball screws, feeding devices, etc.

The memory element 24 is used to store the preset spectrum characteristic table T and various parameters, such as calibration parameters, filter parameters and transformation parameters. In this embodiment, the memory element is a memory unit built in the ASIC chip 23 .

The MEMS vibration sensing chip 22 is electrically connected to the ASIC chip 23 to transmit the vibration signal to the ASIC chip 23 .

FIG. 4 illustrates the circuit design of ASIC chip 23 . As shown in FIG. 4 , the ASIC chip 23 includes a sampling module 231 , a converting module 232 and an analyzing module 233 .

The sampling module 231 includes an analog front-end unit 2311 , an analog-to-digital conversion unit 2312 and a filter unit 2313 . The analog front-end unit 2311 receives the vibration signals VS. The analog front-end unit 2311 can be, for example, an analog front-end circuit or a signal receiving circuit. The analog-to-digital conversion unit 2312 converts these vibration signals into a plurality of digital signals. The analog-to-digital conversion unit 2312 can be, for example, an analog/digital converter or a discrete signal converter. The filtering unit 2313 filters the digital signals to generate a plurality of time domain data TD. The filtering unit 2313 can be, for example, a digital filter or a noise filter.

The conversion module 232 includes a conversion unit 2321 , a switching unit 2322 , a storage unit 2323 , a time interval unit 2324 and a conversion coefficient unit 2325 . When the filtering unit 2313 generates the time-domain data TD, the switching unit 2322 switches to the filtering unit 2313 to receive the time-domain data TD, and transmits the time-domain data TD to the storage unit 2323 . The switching unit 2322 can be, for example, a multiplexer or a switch.

The storage unit 2323 stores the time domain data TD in a storage unit 2323 , and then transmits the time domain data TD to the conversion unit 2321 . The storage unit 2323 has a special storage space management mechanism; wherein, when the storage unit 2323 transmits the time domain data TD to the conversion unit 2321, the storage unit 2323 can simultaneously release the storage space for storing the time domain data TD, so that other Some time domain data TD can be stored in this storage space. For example, the storage unit 2323 can release the write protection mechanism of the storage space or delete the time domain data TD in the storage space to release the storage space, so that other time domain data TD can be stored in the storage space. The storage unit 2323 can be, for example, a register or a random access memory.

The time interval unit 2324 transmits a preset quantity value N to the conversion unit 2321, and the conversion coefficient unit 2325 transmits the conversion coefficient C to the conversion unit 2321. The above-mentioned preset quantity value N is equal to the quantity value of the time domain data TD . In one embodiment, the preset number N is equal to the sampling number set by the sampling module 231 . In another embodiment, the preset number N is not equal to the sampling number set by the sampling module 231 . The conversion unit 2321 can perform time domain-frequency domain conversion according to the preset quantity value N and conversion coefficient C to convert the time domain data TD into a frequency domain data FD. Therefore, the preset quantity value N can be adjusted according to the actual state. For example, if the preset number N is set to 3, the conversion unit 2321 can convert three pieces of time-domain data TD into one piece of frequency-domain data FD according to the preset number N and conversion coefficient C . When the converting unit 2321 generates the frequency domain data FD, the switching unit 2322 switches to the converting unit 2321 to receive the frequency domain data FD, and then transmits the frequency domain data FD to the storage unit 2323 . The time interval unit 2324 can be, for example, a register or a random access memory. The conversion factor unit 2325 can be, for example, a register or a read-only memory.

It can be known from the above that the conversion module 232 has a special circuit structure and operation mechanism, that is, the time interval unit 2324 can transmit a preset quantity value N to the conversion unit 2321 . In an embodiment, the preset quantity N is equal to the quantity of the time domain data TD and the sampling quantity set by the sampling module 231 . In another embodiment, the preset quantity N is equal to the quantity of the time domain data TD but not equal to the sampling quantity set by the sampling module 231 . Therefore, in the ASIC chip 23 , there is no need to arrange another sampling module between the filtering unit 2313 and the switching unit 2322 . In other words, the conversion module 232 does not need to perform sub-sampling before converting the time-domain data into frequency-domain data. Therefore, when the vibration sensor 2 of this embodiment converts time domain data into frequency domain data, the risk of data loss can be reduced, so as to achieve more accurate analysis results. In addition, because the conversion module 232 has the above-mentioned special circuit structure and operation mechanism, the sensing bandwidth of the vibration sensor 2 can be adjusted by changing the data update rate (Output Data Rate, ODR) of the filter unit 2313, so as to be suitable for different vibration conditions. Bandwidth UUT.

The storage unit 2323 stores the frequency domain data FD in another storage space, and then transmits the frequency domain data FD to the analysis module 233, and also manages the storage space through the aforementioned storage space management mechanism. For example, after the storage unit 2323 transmits the frequency domain data FD to the analysis module 233, the storage unit 2323 can simultaneously release the storage space for storing the frequency domain data FD, so that another frequency domain data FD can be stored in the storage space. In more detail, the storage unit 2323 can be divided into at least two storage spaces, and the capacity of these storage spaces is determined by a preset number N, so that these storage spaces can be used most effectively. For example, the storage unit 2323 can release the write protection mechanism of the storage space or delete the frequency domain data FD in the storage space to release the storage space, so that another frequency domain data FD can be stored in the storage space. As can be seen from the above, the vibration sensor 2 can implement a special storage space management mechanism, so that the storage unit 2323 of the vibration sensor 2 can selectively activate the write protection mechanism or release a part of the storage space, so that the storage space can be used more effectively without requiring Memory elements external to the ASIC chip 23 are used.

The analysis module 233 executes a comparison program to compare the frequency domain data FD with the preset spectrum feature table T. The calculation unit 2331 sends out a notification signal S according to the comparison result of the comparison program. The analysis module 233 can be, for example, a comparator or a logic operation unit. When the analysis module 233 executes the comparison program, it will compare the frequency domain points A _{1 ˜A n of the frequency domain data FD with the frequency domain points A 1 ′ ˜A n ’} of the preset spectrum characteristic table T, and calculate and obtain The total gap value between the frequency domain points A _{1 ˜A n of the frequency domain data FD and the frequency domain points A 1 ′˜A n ’ of} the preset spectrum feature table T. When the analysis module 233 confirms that the comparison result is that the total difference value is greater than a threshold value, the notification signal S is set as a warning signal. When the notification signal S is set as a warning signal, it means that the vibration state of the object under test has exceeded an acceptable range. At this time, the user should find out the reason why the vibration state is beyond the acceptable range, and improve the vibration state of the DUT.

Since the vibration signals pass through complex spectrum conversion and signal analysis, the existing vibration sensors transmit these vibration signals to the monitoring machine outside the vibration sensor. The micro-controller inside the monitoring machine uses signal analysis software to perform spectrum conversion and signal analysis to obtain information about the vibration state of the object under test, so it lacks efficiency and cannot meet the needs of practical applications. However, according to the embodiment of the present invention, the ASIC chip of the vibration sensor with monitoring function can analyze the frequency domain data of the vibration signal, so the analysis time can be reduced, and the efficiency of real-time monitoring can be greatly improved.

In order to meet different monitoring requirements, multiple vibration sensors may need to be installed on the DUT, and a higher sampling frequency and a wider frequency domain monitoring range are required. The existing vibration sensor transmission system needs to transmit a large amount of data, so it is easy to cause data loss or make the data transmission time too long, so that the real-time monitoring of the object under test cannot be performed. However, according to the embodiment of the present invention, the ASIC chip of the vibration sensor with monitoring function can analyze the frequency domain data of the vibration signal without transmitting the vibration signal to an external monitoring machine, so it will not cause Data loss and can drastically reduce data transfer time.

In addition, according to the embodiment of the present invention, the conversion module of the ASIC chip of the vibration sensor with monitoring function has a special circuit structure and operation mechanism, so the ASIC chip does not need another sampling module for secondary sampling, The vibration sensor can achieve higher efficiency.

In addition, according to the embodiment of the present invention, the conversion module of the ASIC chip of the vibration sensor with monitoring function has a special circuit structure and operation mechanism, so only the data update rate of the filter unit of the ASIC chip needs to be changed. The sensing bandwidth of the vibration sensor can be adjusted to adapt to objects to be measured with various vibration bandwidths, thereby expanding the use objects of the vibration sensor with monitoring function.

Furthermore, since the existing monitoring machine for executing signal analysis software is too bulky, it is extremely difficult to integrate with the existing vibration sensor, so it is not easy to apply to the related application fields of intelligent machinery and intelligent manufacturing. According to an embodiment of the present invention, the ASIC chip of the vibration sensor with monitoring function has the function of integrating vibration signal sensing and vibration signal analysis and a special storage space management mechanism, so that the storage space can be used more effectively, and the The vibration sensor with monitoring function can be miniaturized, so it can meet the requirements of the relevant application fields of intelligent machinery and intelligent manufacturing.

Please refer to FIG. 5 , which is a flowchart of the second embodiment of the present invention. As shown in the figure, the vibration signal monitoring method of the vibration sensor 2 of the present embodiment includes the following steps:

Step S51 : Detect the vibration of the object under test to generate a plurality of vibration signals.

Step S52: Receive the vibration signals and convert the vibration signals into a plurality of digital signals.

Step S53: Filter the digital signals to generate a plurality of time-domain data, and store the time-domain data in a storage space.

Step S54: Provide a preset quantity value and conversion coefficient, and convert the time domain data into a frequency domain data according to the preset quantity value and conversion coefficient, and store the frequency domain data in another storage space.

Step S55: Release the storage space for storing the time domain data after converting the time domain data into frequency domain data.

Step S56: Executing a comparison program to compare the frequency domain points of the frequency domain data with the frequency domain points of the preset spectrum feature table to obtain the total difference value.

Step S57: After the comparison procedure is executed, the storage space for storing the frequency domain data is released.

Step S58: When the comparison result is that the total difference value is greater than a threshold value, set the notification signal as a warning signal.

Please refer to FIG. 6A to FIG. 6D , which are the first schematic diagram to the fourth schematic diagram of the storage space management mechanism of the vibration sensor with monitoring function according to the second embodiment of the present invention. As shown in FIG. 6A , the storage unit 2323 includes a storage space P1 and a storage space P2 . Wherein, the capacity of the storage space P1 corresponds to the preset quantity value N and the sampling quantity, and the capacity of the storage space P2 also corresponds to the preset quantity value N and the sampling quantity. The filtering unit 2313 generates the time domain data TD, and transmits the time domain data TD to the storage unit 2323 through the switching unit 2322, and the storage unit 2323 stores the time domain data TD in the storage space P1.

As shown in FIG. 6B , after the storage unit 2323 transmits the time domain data TD to the conversion unit 2321 , the storage unit 2323 can release the storage space P1 storing the time domain data TD at the same time. The converting unit 2321 generates the frequency domain data FD, and transmits the frequency domain data FD to the storage unit 2323 through the switching unit. The storage unit 2323 stores the frequency domain data FD in the storage space P2.

As shown in FIG. 6C , after the storage unit 2323 transmits the frequency domain data FD to the analysis module 233 , the storage unit 2323 can simultaneously release the storage space P2 for storing the frequency domain data FD. Since the storage unit 2323 has released the storage space P1, the next piece of time-domain data TD' generated by the filtering unit 2313 can be stored in the storage space P1.

As shown in FIG. 6D , after the storage unit 2323 transmits the time domain data TD' to the conversion unit 2321, the storage unit 2323 can simultaneously release the storage space P1 storing the time domain data TD'. Since the storage unit 2323 has released the storage space P2, the next piece of frequency domain data FD' generated by the conversion unit 2321 can be stored in the storage space P2.

As can be seen from the above, since the storage unit 2323 of the vibration sensor 2 is divided into a storage space P1 and a storage space P2, and the capacities of the storage space P1 and the storage space P2 all correspond to the preset quantity value N and the number of samples, the storage unit 2323 The capacity of the vibration sensor can be reduced and is sufficient to store all the necessary data. The above-mentioned special storage space design can greatly reduce the storage space of the vibration sensor.

In addition, the vibration sensor 2 has a special storage space management mechanism, so that the storage space can be recycled more effectively, so the storage space of the vibration sensor 2 can be further reduced. Therefore, the combination of the above-mentioned storage space management mechanism and the design of the storage space makes the vibration sensor 2 more miniaturized without setting another memory element outside the ASIC chip, thus meeting the requirements of intelligent machinery and intelligent manufacturing. The needs of the application field.

To sum up, according to the embodiment of the present invention, the ASIC chip of the vibration sensor with monitoring function can analyze the frequency domain data of the vibration signal, so the analysis time can be reduced, and the efficiency of real-time monitoring can be greatly improved .

Moreover, according to the embodiment of the present invention, the ASIC chip of the vibration sensor with monitoring function can analyze the frequency domain data of the vibration signal without transmitting the vibration signal to the monitoring machine outside the vibration sensor, so there is no need to Can result in data loss and can drastically reduce data transfer times.

In addition, according to the embodiment of the present invention, the conversion module of the ASIC chip of the vibration sensor with monitoring function has a special circuit structure and operation mechanism, so the ASIC chip does not need to be equipped with another sampling module, nor does it need to perform Subsampling enables the vibration sensor to achieve higher efficiency.

In addition, according to the embodiment of the present invention, the conversion module of the ASIC chip of the vibration sensor with monitoring function has a special circuit structure and operation mechanism, so it can be changed by changing the data update rate of the filter unit of the ASIC chip. The sensing bandwidth of the vibration sensor can be adjusted, which is more flexible in use, so as to adapt to objects to be measured with various vibration bandwidths, and expand the use objects of the vibration sensor with monitoring function.

Furthermore, according to the embodiment of the present invention, the ASIC chip of the vibration sensor with monitoring function has the function of integrating vibration signal sensing and vibration signal analysis and a special storage space management mechanism, so that the storage space can be used more effectively , so that the vibration sensor with monitoring function can be miniaturized, so it can meet the requirements of the relevant application fields of intelligent machinery and intelligent manufacturing.

The above descriptions are illustrative only, not restrictive. Any other equivalent modifications or changes made without departing from the spirit and scope of the present invention should be included in the appended claims.

Claims (17)

1. A vibration sensor with monitoring function, comprising: a substrate; A micro-electro-mechanical vibration sensing chip is arranged on the substrate, wherein the micro-electro-mechanical vibration sensing chip is used to detect the vibration suffered by an object under test to generate a plurality of vibration signals; and An application-specific integrated circuit chip, set on the substrate and electrically connected to the MEMS vibration sensing chip, comprising: A sampling module, having a sampling quantity value, comprising: an analog front-end unit; an analog-to-digital conversion unit; and a filtering unit; Wherein, the analog front-end unit receives the plurality of vibration signals, the analog-to-digital conversion unit converts the plurality of vibration signals into a plurality of digital signals, and the filtering unit filters the plurality of digital signals to Generate a plurality of time-domain data, the sampling quantity value is equal to a preset quantity value, so that the quantity value of the plurality of time-domain data is equal to the preset quantity value; A conversion module, comprising: a conversion unit that converts the plurality of time domain data into frequency domain data; a time interval unit, the time interval unit transmits the preset quantity value to the conversion unit; a storage unit; and a switching unit, the switching unit is electrically connected to the sampling module, the conversion unit and the storage unit; and An analysis module, used to execute a comparison program, wherein the comparison program compares the frequency domain data with a preset spectrum feature table, and sends a notification signal according to a comparison result of the comparison program ; Wherein, the switching unit switches to the sampling module when the sampling module generates the plurality of time-domain data, so as to convert the plurality of time-domain data whose quantity value is equal to the preset quantity value Stored in the storage unit, after the storage unit transmits the plurality of time-domain data whose quantity value is equal to the preset quantity value to the conversion unit, the storage unit can release the stored data at the same time A storage space for the plurality of time domain data; Wherein the switching unit switches to the conversion unit when the conversion unit generates the frequency domain data, so as to store the frequency domain data in the storage unit, and when the storage unit transmits the frequency domain data to the After the analysis module is installed, the storage unit can simultaneously release the storage space for storing the frequency domain data. 2. The vibration sensor according to claim 1, wherein the conversion module further comprises a conversion coefficient unit, and the conversion coefficient unit transmits a conversion coefficient to the conversion unit, and the conversion unit is based on the preset The magnitude value and the conversion coefficient convert the plurality of time domain data into the frequency domain data. 3. The vibration sensor according to claim 1, further comprising at least one memory element, wherein the at least one memory element is electrically connected to the application-specific integrated circuit chip and stores the preset spectrum characteristic table. 4. The vibration sensor according to claim 1, wherein the comparison program compares the frequency domain points of the frequency domain data with the frequency domain points of the preset spectrum characteristic table and obtains a total difference value, when When the analysis module confirms that the comparison result is that the total difference value is greater than a threshold value, the notification signal is set as a warning signal. 5. The vibration sensor according to claim 1, wherein the capacity of the storage space corresponds to the preset quantity value. 6. The vibration sensor according to claim 1, wherein the storage unit releases the write protection mechanism of the storage space to release the storage space storing the plurality of time-domain data, so that another time-domain data can be overwritten in the storage space. 7. The vibration sensor according to claim 1, wherein the storage unit deletes the plurality of time-domain data in the storage space to release the storage space storing the plurality of time-domain data, so that other A time domain data is stored in the storage space. 8. The vibration sensor according to claim 1, wherein the storage unit releases the write protection mechanism of the storage space to release the storage space storing the frequency domain data, so that another frequency domain data is overwritten on the the storage space. 9. The vibration sensor according to claim 1 , wherein the storage unit deletes the frequency domain data of the storage space to release the storage space storing the frequency domain data, so that another frequency domain data stored in the storage space. 10. A vibration signal monitoring method, comprising: Detect the vibration of an object under test to generate multiple vibration signals; receiving the plurality of vibration signals, and converting the plurality of vibration signals into a plurality of digital signals according to a sampling quantity value; Filtering the plurality of digital signals to generate a plurality of time-domain data, the number of samples is equal to a preset number, so that the number of the plurality of time-domain data is equal to the preset number value; converting the plurality of time-domain data into frequency-domain data according to the preset quantity value; releasing a storage space for storing the time domain data after converting the plurality of time domain data into the frequency domain data; Executing a comparison program to compare the frequency domain data with a preset spectrum characteristic table, and sending a notification signal according to a comparison result of the comparison program; and After the comparison program is executed, the storage space for storing the frequency domain data is released. 11. The vibration signal monitoring method according to claim 10, wherein the step of converting said plurality of time-domain data into said frequency-domain data further comprises: provide a conversion factor; and converting the plurality of time-domain data into the frequency-domain data according to the preset quantity value and the conversion coefficient. 12. The vibration signal monitoring method according to claim 10, wherein performing the comparison program compares the frequency domain data with the preset spectrum feature table, and according to the comparison of the comparison program As a result, the step of sending the notification signal also includes: comparing the frequency domain points of the frequency domain data with the frequency domain points of the preset spectrum feature table to obtain a total difference value; and When the comparison result is that the total difference value is greater than a threshold value, the notification signal is set as a warning signal. 13. The vibration signal monitoring method according to claim 10, further comprising: Make the capacity of the storage space correspond to the preset quantity value. 14. The vibration signal monitoring method according to claim 10, wherein the step of releasing the storage space after converting the plurality of time-domain data into the frequency-domain data further comprises: The write protection mechanism of the storage space is released to release the storage space, so that another time domain data is overwritten in the storage space. 15. The vibration signal monitoring method according to claim 10, wherein the step of releasing the storage space after converting the plurality of time-domain data into the frequency-domain data further comprises: The plurality of time-domain data in the storage space is deleted to release the storage space, so that another time-domain data is stored in the storage space. 16. The vibration signal monitoring method according to claim 10, wherein after executing the comparison program, the step of releasing the storage space further comprises: The write protection mechanism of the storage space is released to release the storage space, so that another frequency domain data is covered in the storage space. 17. The vibration signal monitoring method according to claim 10, wherein after executing the comparison program, the step of releasing the storage space further comprises: The frequency domain data in the storage space is deleted to release the storage space, so that another frequency domain data is stored in the storage space.

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